Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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01/12/2010 | US7646533 Small ultra-high NA catadioptric objective |
01/12/2010 | US7646477 Method and apparatus for inspecting a pattern formed on a substrate |
01/12/2010 | US7646471 Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby |
01/12/2010 | US7646442 Liquid crystal display device including polycrystalline silicon thin film transistor and method of fabricating the same |
01/12/2010 | US7645567 On-press development of high speed laser sensitive lithographic printing plates |
01/12/2010 | US7645565 Polyurethane resin from a dihydroxy monomer having alkylene groups and a pendant carboxylic acid group and a photopolymerization or thermal polymerization initiator; polymerization of the alkylene groups; excellent in press life, suitable for scanning exposure with laser beams, enables high-speed writing |
01/12/2010 | US7645563 Water dispersion latexes, photopolymerizable alkyl methacrylate, nonionic surfactant |
01/12/2010 | US7645562 Photosensitive film |
01/12/2010 | US7645561 decreased fish eye defects; improved workability |
01/12/2010 | US7645560 methoxy substitued dithienylethene as photochromic dyes; dispersed in a solvent or polymer; reversible transition between colorless and colored state in response to light;erasable by heat or light, stability; ink jet printers; toner-free; cost efficiency; disposable paper reused; environmentally friendly |
01/12/2010 | US7645559 Reduced line width roughness; sulfonium-containing acid generators; semiconductors; liquid crystal displays |
01/12/2010 | US7645558 Inkless reimageable printing paper and method |
01/12/2010 | US7645557 Positive resist composition for immersion exposure and pattern forming method using the same |
01/12/2010 | US7645556 Composition for forming organic insulating film and method for forming pattern of organic insulating film using the same |
01/12/2010 | US7645545 Colorant-containing curable composition, color filter and production method thereof |
01/12/2010 | US7645133 UV nanoimprint lithography process and apparatus |
01/07/2010 | WO2010002788A1 Solvent assisted method of microcontact printing |
01/07/2010 | WO2010002194A2 Stripping agent and method for manufacturing a display panel using the stripping agent |
01/07/2010 | WO2010002129A2 Photosensitive resin composition containing a plurality of photoinitiators, and transparent thin film layer and liquid crystal display using the same |
01/07/2010 | WO2010002045A1 High aspect ratio microstructure and method of fabricating the same and high aspect ratio microstructure array and method of fabricating the same |
01/07/2010 | WO2010001976A1 Photosensitive composition, partition wall, color filter, and organic el device |
01/07/2010 | WO2010001945A1 Light shielding unit, variable slit apparatus, and exposure apparatus |
01/07/2010 | WO2010001919A1 Photosensitive resin composition for mems and cured product thereof |
01/07/2010 | WO2010001913A1 Acrylate derivative, haloester derivative, polymer compound and photoresist composition |
01/07/2010 | WO2010001782A1 Exposure method and exposure device |
01/07/2010 | WO2010001780A1 Heat-resistant resin precursor and photosensitive resin composition comprising the same |
01/07/2010 | WO2010001779A1 Photosensitive insulating resin composite and pattern forming method using the same |
01/07/2010 | WO2010001691A1 Negative radiation-sensitive resin composition |
01/07/2010 | WO2010001639A1 Process for producing lithographic printing plate and apparatus for developing lithographic printing plate material |
01/07/2010 | WO2010001631A1 Lithographic printing plate material |
01/07/2010 | WO2010001525A1 Pattern forming method |
01/07/2010 | WO2010001172A1 Filters |
01/07/2010 | WO2010001171A1 Polychromic substances and their use |
01/07/2010 | WO2010000757A1 Optical imaging device with image defect determination |
01/07/2010 | WO2010000113A1 Security film and process for preparation thereof |
01/07/2010 | WO2009120410A3 High refractive index sol-gel composition and method of making photo-patterned structures on a substrate |
01/07/2010 | WO2009117103A3 Split field inspection system using small catadioptric objectives |
01/07/2010 | WO2009062995A3 Preparation of epsilon copper phthalocyanine of small primary particle size and narrow particle size distribution by kneading |
01/07/2010 | US20100003623 Method of patterning multiple photosensitive layers |
01/07/2010 | US20100003622 Pattern-forming method, metal oxide film-forming material and method for using the metal oxide film-forming material |
01/07/2010 | US20100003621 Etching method for forming a multi-step surface on a substrate |
01/07/2010 | US20100003620 Exposure method |
01/07/2010 | US20100003619 Systems and methods for fabricating three-dimensional objects |
01/07/2010 | US20100003618 Polymer having polymerizable group, polymerizable composition, planographic printing plate precursor, and planographic printing method using the same |
01/07/2010 | US20100003616 Photosensitive self-assembled monolayer for selective placement of hydrophilic structures |
01/07/2010 | US20100003615 Upper layer-forming composition and photoresist patterning method |
01/07/2010 | US20100003606 Process for producing holograms |
01/07/2010 | US20100003473 Method for producing original master used to produce mold structure, original master and method for producing mold structure |
01/07/2010 | US20100003468 Method of forming microfined resist pattern |
01/07/2010 | US20100002219 Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method |
01/06/2010 | EP2141544A1 Photosensitive composition and pattern forming method using same |
01/06/2010 | EP2141543A1 Packaging assembly for printing plates |
01/06/2010 | EP2141534A1 Liquid crystal display device manufacturing method, and liquid crystal display device |
01/06/2010 | EP2141183A1 Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using same |
01/06/2010 | EP2141025A1 Method for production of photosensitive resin plate having concave-convex shape or letterpress printing plate, and printing surface treatment solution for use in the method |
01/06/2010 | EP2140306A1 Positive resist composition and pattern forming method |
01/06/2010 | EP1700166B1 Method of forming a depression in a surface of a layer of photoresist |
01/06/2010 | EP1234358B1 High power gas discharge laser with helium purged line narrowing unit |
01/06/2010 | CN101622581A Process, apparatus and device |
01/06/2010 | CN101622580A Resist lower layer film forming composition for electron lithography |
01/06/2010 | CN101622579A Processed substrates having water-repellent areas in patterns, process for production thereof, and process for production of members having patterms made of functional material films |
01/06/2010 | CN101622578A Solder resist, dry film thereof, cured product and printed wiring board |
01/06/2010 | CN101622577A Radiation-sensitive resin composition, spacer for liquid crystal display element, protective film, and method for producing spacer for liquid crystal display element or protective film |
01/06/2010 | CN101620384A Photoresist tool cleaning device configured to receive fluid form top part and bottom part |
01/06/2010 | CN101620383A Oven and baking method |
01/06/2010 | CN101620382A Substrate treatment apparatus and treatment method |
01/06/2010 | CN101620381A Technology for manufacturing optical curing plate |
01/06/2010 | CN101620380A Resin convex mould for relief printing and method for producing organic EL elements using the same |
01/06/2010 | CN101620379A Coloring light-sensitive resin composition |
01/06/2010 | CN101620378A Black photosensitive adhesive, method for forming barrier of plasma display screen and plasma display screen obtained thereby |
01/06/2010 | CN101620377A Curing combination for nanometer stamping, condensate and method for producing the same, and members for liquid crystal display device |
01/06/2010 | CN101620376A Curing combination for stamping, condensate using the combination and method for producing the same, and members for liquid crystal display device |
01/06/2010 | CN101620374A Exposure mask using gray-tone pattern, manufacturing method of tft substrate using the same and liquid crystal display device having the tft substrate |
01/06/2010 | CN100578876C Ultraviolet laser apparatus, and exposure apparatus and mehtod using ultraviolet laser apparatus |
01/06/2010 | CN100578729C Method of removing ion implanted photoresist |
01/06/2010 | CN100578370C Method for producing aligning mark |
01/06/2010 | CN100578369C Automatic position aligning device and method for projection exposure device |
01/06/2010 | CN100578368C Photorresist stripping liquid composite |
01/06/2010 | CN100578367C Thinner composition for removing photosensitive resin |
01/06/2010 | CN100578366C Development method of photoresist layer |
01/06/2010 | CN100578365C Calibration device for aligning system of stepper and its calibration method |
01/06/2010 | CN100578364C Method and apparatus for immersion lithography |
01/06/2010 | CN100578363C Base plate exposure device and base plate exposure method |
01/06/2010 | CN100578362C Vertically delicate adjusting and gravity force compensating mechanism and photo-etching machine |
01/06/2010 | CN100578361C Dedicated metrology stage for lithography applications |
01/06/2010 | CN100578360C Coating drier with regulating air flow path function |
01/06/2010 | CN100578359C Photosensitive resin composition and curing product thereof |
01/06/2010 | CN100578358C Resist polymer, resist composition and patterning manufacturing process |
01/06/2010 | CN100578357C High sensitivity resist composition for electron based lithography |
01/06/2010 | CN100578356C Production method for printing matter |
01/06/2010 | CN100578354C Method and apparatus for correction of defects in lithography masks |
01/06/2010 | CN100578327C Method for manufacturing liquid crystal display panel and liquid crystal display panel |
01/06/2010 | CN100578303C Common electrode panel, manufacturing method thereof, and liquid crystal display including the panel |
01/06/2010 | CN100578267C Color filter substrate and making method of substrate for liquid crystal display |
01/06/2010 | CN100578265C Mirror and lithographic apparatus with mirror |
01/06/2010 | CN100577415C Lighographic printing plate precursor |
01/05/2010 | US7643961 Position detecting device and position detecting method |
01/05/2010 | US7643188 Method of recording an exposure pattern in a recording layer of a holographic mask, method of forming an exposure pattern in a photosensitive material film, method of manufacturing a semiconductor device and method of manufacturing an electro-optic device |
01/05/2010 | US7643129 Exposure apparatus, exposure method, method for manufacturing device |
01/05/2010 | US7643128 Large field of view projection optical system with aberration correctability |