Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
01/2010
01/12/2010US7646533 Small ultra-high NA catadioptric objective
01/12/2010US7646477 Method and apparatus for inspecting a pattern formed on a substrate
01/12/2010US7646471 Lithographic apparatus, level sensor, method of inspection, device manufacturing method, and device manufactured thereby
01/12/2010US7646442 Liquid crystal display device including polycrystalline silicon thin film transistor and method of fabricating the same
01/12/2010US7645567 On-press development of high speed laser sensitive lithographic printing plates
01/12/2010US7645565 Polyurethane resin from a dihydroxy monomer having alkylene groups and a pendant carboxylic acid group and a photopolymerization or thermal polymerization initiator; polymerization of the alkylene groups; excellent in press life, suitable for scanning exposure with laser beams, enables high-speed writing
01/12/2010US7645563 Water dispersion latexes, photopolymerizable alkyl methacrylate, nonionic surfactant
01/12/2010US7645562 Photosensitive film
01/12/2010US7645561 decreased fish eye defects; improved workability
01/12/2010US7645560 methoxy substitued dithienylethene as photochromic dyes; dispersed in a solvent or polymer; reversible transition between colorless and colored state in response to light;erasable by heat or light, stability; ink jet printers; toner-free; cost efficiency; disposable paper reused; environmentally friendly
01/12/2010US7645559 Reduced line width roughness; sulfonium-containing acid generators; semiconductors; liquid crystal displays
01/12/2010US7645558 Inkless reimageable printing paper and method
01/12/2010US7645557 Positive resist composition for immersion exposure and pattern forming method using the same
01/12/2010US7645556 Composition for forming organic insulating film and method for forming pattern of organic insulating film using the same
01/12/2010US7645545 Colorant-containing curable composition, color filter and production method thereof
01/12/2010US7645133 UV nanoimprint lithography process and apparatus
01/07/2010WO2010002788A1 Solvent assisted method of microcontact printing
01/07/2010WO2010002194A2 Stripping agent and method for manufacturing a display panel using the stripping agent
01/07/2010WO2010002129A2 Photosensitive resin composition containing a plurality of photoinitiators, and transparent thin film layer and liquid crystal display using the same
01/07/2010WO2010002045A1 High aspect ratio microstructure and method of fabricating the same and high aspect ratio microstructure array and method of fabricating the same
01/07/2010WO2010001976A1 Photosensitive composition, partition wall, color filter, and organic el device
01/07/2010WO2010001945A1 Light shielding unit, variable slit apparatus, and exposure apparatus
01/07/2010WO2010001919A1 Photosensitive resin composition for mems and cured product thereof
01/07/2010WO2010001913A1 Acrylate derivative, haloester derivative, polymer compound and photoresist composition
01/07/2010WO2010001782A1 Exposure method and exposure device
01/07/2010WO2010001780A1 Heat-resistant resin precursor and photosensitive resin composition comprising the same
01/07/2010WO2010001779A1 Photosensitive insulating resin composite and pattern forming method using the same
01/07/2010WO2010001691A1 Negative radiation-sensitive resin composition
01/07/2010WO2010001639A1 Process for producing lithographic printing plate and apparatus for developing lithographic printing plate material
01/07/2010WO2010001631A1 Lithographic printing plate material
01/07/2010WO2010001525A1 Pattern forming method
01/07/2010WO2010001172A1 Filters
01/07/2010WO2010001171A1 Polychromic substances and their use
01/07/2010WO2010000757A1 Optical imaging device with image defect determination
01/07/2010WO2010000113A1 Security film and process for preparation thereof
01/07/2010WO2009120410A3 High refractive index sol-gel composition and method of making photo-patterned structures on a substrate
01/07/2010WO2009117103A3 Split field inspection system using small catadioptric objectives
01/07/2010WO2009062995A3 Preparation of epsilon copper phthalocyanine of small primary particle size and narrow particle size distribution by kneading
01/07/2010US20100003623 Method of patterning multiple photosensitive layers
01/07/2010US20100003622 Pattern-forming method, metal oxide film-forming material and method for using the metal oxide film-forming material
01/07/2010US20100003621 Etching method for forming a multi-step surface on a substrate
01/07/2010US20100003620 Exposure method
01/07/2010US20100003619 Systems and methods for fabricating three-dimensional objects
01/07/2010US20100003618 Polymer having polymerizable group, polymerizable composition, planographic printing plate precursor, and planographic printing method using the same
01/07/2010US20100003616 Photosensitive self-assembled monolayer for selective placement of hydrophilic structures
01/07/2010US20100003615 Upper layer-forming composition and photoresist patterning method
01/07/2010US20100003606 Process for producing holograms
01/07/2010US20100003473 Method for producing original master used to produce mold structure, original master and method for producing mold structure
01/07/2010US20100003468 Method of forming microfined resist pattern
01/07/2010US20100002219 Illuminant distribution evaluation method, optical member manufacturing method, illumination optical device, exposure apparatus, and exposure method
01/06/2010EP2141544A1 Photosensitive composition and pattern forming method using same
01/06/2010EP2141543A1 Packaging assembly for printing plates
01/06/2010EP2141534A1 Liquid crystal display device manufacturing method, and liquid crystal display device
01/06/2010EP2141183A1 Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using same
01/06/2010EP2141025A1 Method for production of photosensitive resin plate having concave-convex shape or letterpress printing plate, and printing surface treatment solution for use in the method
01/06/2010EP2140306A1 Positive resist composition and pattern forming method
01/06/2010EP1700166B1 Method of forming a depression in a surface of a layer of photoresist
01/06/2010EP1234358B1 High power gas discharge laser with helium purged line narrowing unit
01/06/2010CN101622581A Process, apparatus and device
01/06/2010CN101622580A Resist lower layer film forming composition for electron lithography
01/06/2010CN101622579A Processed substrates having water-repellent areas in patterns, process for production thereof, and process for production of members having patterms made of functional material films
01/06/2010CN101622578A Solder resist, dry film thereof, cured product and printed wiring board
01/06/2010CN101622577A Radiation-sensitive resin composition, spacer for liquid crystal display element, protective film, and method for producing spacer for liquid crystal display element or protective film
01/06/2010CN101620384A Photoresist tool cleaning device configured to receive fluid form top part and bottom part
01/06/2010CN101620383A Oven and baking method
01/06/2010CN101620382A Substrate treatment apparatus and treatment method
01/06/2010CN101620381A Technology for manufacturing optical curing plate
01/06/2010CN101620380A Resin convex mould for relief printing and method for producing organic EL elements using the same
01/06/2010CN101620379A Coloring light-sensitive resin composition
01/06/2010CN101620378A Black photosensitive adhesive, method for forming barrier of plasma display screen and plasma display screen obtained thereby
01/06/2010CN101620377A Curing combination for nanometer stamping, condensate and method for producing the same, and members for liquid crystal display device
01/06/2010CN101620376A Curing combination for stamping, condensate using the combination and method for producing the same, and members for liquid crystal display device
01/06/2010CN101620374A Exposure mask using gray-tone pattern, manufacturing method of tft substrate using the same and liquid crystal display device having the tft substrate
01/06/2010CN100578876C Ultraviolet laser apparatus, and exposure apparatus and mehtod using ultraviolet laser apparatus
01/06/2010CN100578729C Method of removing ion implanted photoresist
01/06/2010CN100578370C Method for producing aligning mark
01/06/2010CN100578369C Automatic position aligning device and method for projection exposure device
01/06/2010CN100578368C Photorresist stripping liquid composite
01/06/2010CN100578367C Thinner composition for removing photosensitive resin
01/06/2010CN100578366C Development method of photoresist layer
01/06/2010CN100578365C Calibration device for aligning system of stepper and its calibration method
01/06/2010CN100578364C Method and apparatus for immersion lithography
01/06/2010CN100578363C Base plate exposure device and base plate exposure method
01/06/2010CN100578362C Vertically delicate adjusting and gravity force compensating mechanism and photo-etching machine
01/06/2010CN100578361C Dedicated metrology stage for lithography applications
01/06/2010CN100578360C Coating drier with regulating air flow path function
01/06/2010CN100578359C Photosensitive resin composition and curing product thereof
01/06/2010CN100578358C Resist polymer, resist composition and patterning manufacturing process
01/06/2010CN100578357C High sensitivity resist composition for electron based lithography
01/06/2010CN100578356C Production method for printing matter
01/06/2010CN100578354C Method and apparatus for correction of defects in lithography masks
01/06/2010CN100578327C Method for manufacturing liquid crystal display panel and liquid crystal display panel
01/06/2010CN100578303C Common electrode panel, manufacturing method thereof, and liquid crystal display including the panel
01/06/2010CN100578267C Color filter substrate and making method of substrate for liquid crystal display
01/06/2010CN100578265C Mirror and lithographic apparatus with mirror
01/06/2010CN100577415C Lighographic printing plate precursor
01/05/2010US7643961 Position detecting device and position detecting method
01/05/2010US7643188 Method of recording an exposure pattern in a recording layer of a holographic mask, method of forming an exposure pattern in a photosensitive material film, method of manufacturing a semiconductor device and method of manufacturing an electro-optic device
01/05/2010US7643129 Exposure apparatus, exposure method, method for manufacturing device
01/05/2010US7643128 Large field of view projection optical system with aberration correctability