Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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07/15/2010 | US20100177546 Semiconductor device |
07/15/2010 | US20100177488 Vinyl Addition Polycyclic Olefin Polymers Prepared With Non-Olefinic Chain Transfer Agents And Uses Thereof |
07/15/2010 | US20100177295 Exposure method and exposure apparatus, stage unit, and device manufacturing method having two substrate stages with one stage temporarily positioned below other stage |
07/15/2010 | US20100177293 Polarization-modulating optical element |
07/15/2010 | US20100177289 Immersion Fluid for Immersion Lithography, and Method of Performing Immersion Lithography |
07/15/2010 | US20100176492 Method for Forming a Pattern on a Semiconductor Using an Organic Hard Mask |
07/15/2010 | US20100176313 Extreme ultraviolet light source |
07/15/2010 | US20100175767 Microfabricated Elastomeric Valve and Pump Systems |
07/15/2010 | DE102008054844A1 Beleuchtungseinrichtung einer mikrolithographischen Projektionsbelichtungsanlage, sowie mikrolithographisches Projektionsbelichtungsverfahren Illumination device of a microlithography projection exposure apparatus and microlithographic projection exposure method |
07/14/2010 | EP2207197A2 Photoresist residue removal composition |
07/14/2010 | EP2207064A1 Method of selecting a set of illumination conditions of a lithographic apparatus for optimizing an integrated circuit physical layout |
07/14/2010 | EP2207063A1 Wavefront-aberration-measuring device and exposure apparatus |
07/14/2010 | EP2207062A2 Photosensitive compositions, curable compositions, novel compounds, photopolymerizable compositions, color filters, and planographic printing plate precursors |
07/14/2010 | EP2207061A2 A system to vary dimensions of a template |
07/14/2010 | EP2207060A1 High quality and ultra large screen liquid crystal display device and production method thereof |
07/14/2010 | EP2206019A2 Method of producing a relief image arrangement usable in particular in the field of flexography and arrangement produced according to this method. |
07/14/2010 | EP2206018A1 Optical unit, illumination optical apparatus, exposure apparatus, exposure method, and device manufacturing method |
07/14/2010 | EP2206017A1 Fabrication of silk fibroin photonic structures by nanocontact imprinting |
07/14/2010 | EP2206016A1 Pad microprinting device and methods, and pad for this device |
07/14/2010 | EP2206015A2 Polar polydimethylsiloxane molds, methods of making the molds, and methods of using the molds for pattern transfer |
07/14/2010 | EP2205682A2 Diketopyrrolopyrrole pigment composition for use in color filters |
07/14/2010 | EP2205521A1 Tool for making microstructured articles |
07/14/2010 | CN201527542U Self-adjusting pinch device used in making PS edition |
07/14/2010 | CN201527541U Multi-mask aligner silicon wafer platform system |
07/14/2010 | CN201527540U Coating drying box used in making PS edition |
07/14/2010 | CN1955841B Laser induced thermal imaging mask and fabrication method for organic electroluminescent device |
07/14/2010 | CN1879046B Apparatus for manipulation of an optical element |
07/14/2010 | CN1800917B Array substrate and display panel having the same |
07/14/2010 | CN1749851B Mask plate supply system, method for producing mask plate and mask plate transparent substrate |
07/14/2010 | CN101779166A Hydrocarbon getter for lithographic exposure tools |
07/14/2010 | CN101779165A Photosensitive resin composition and laminate thereof |
07/14/2010 | CN101779164A Production of stamps, masks or templates for semiconductor device manufacturing |
07/14/2010 | CN101778876A Antireflective coating composition |
07/14/2010 | CN101778818A Aromatic sulfonium salt compound |
07/14/2010 | CN101776853A Composition for removing residue of photosensitive resistive etching film |
07/14/2010 | CN101776852A Developing solution for e-beam resist PMMA and preparation method thereof |
07/14/2010 | CN101776851A Three DOF micro-positioning workbench for nano-imprint lithography system |
07/14/2010 | CN101776850A Exposure system and device production method |
07/14/2010 | CN101776849A Light intensity distribution analogy method of heavy-rubber ultraviolet light oblique incidence back etching process |
07/14/2010 | CN101776848A Liquid immersion lithography system |
07/14/2010 | CN101776847A Water soluble light-sensitive polyimide polymer, method for preparing same and photoresistive composition containing same |
07/14/2010 | CN101776846A Light-cured component for laser stereo lithography |
07/14/2010 | CN101776845A Light-sensitive resin composition and manufacturing method of etched basal body |
07/14/2010 | CN101776844A Photocuring component used for three-dimensional imaging |
07/14/2010 | CN101776780A Two-dimensional fiber bragg grating and preparing method thereof |
07/14/2010 | CN101775207A Optical direct writing patterned organic thin film transistor insulating layer material |
07/14/2010 | CN101775197A Viscosity reducible radiation curable resin composition |
07/14/2010 | CN101775171A Method for processing surface superfine texture of ultrahigh molecular weight polyethylene material for artificial joint |
07/14/2010 | CN101487907B Transfer error compensation method for continuous relief structure micro-optical element dry etching figure |
07/14/2010 | CN101464531B Production process of cam lens |
07/14/2010 | CN101464527B Printing process of mobile phone lens sheet |
07/14/2010 | CN101290420B Liquid crystal display panel and method for fabricating the same |
07/13/2010 | US7756597 Method of operating a lithographic processing machine, control system, lithographic apparatus, lithographic processing cell, and computer program |
07/13/2010 | US7755877 Conveying method, conveyance apparatus, exposure apparatus, and device manufacturing method |
07/13/2010 | US7755839 Microlithography projection objective with crystal lens |
07/13/2010 | US7755833 Correcting device to compensate for polarization distribution perturbations |
07/13/2010 | US7755748 Device and method for range-resolved determination of scattered light, and an illumination mask |
07/13/2010 | US7755657 Method for high precision printing of patterns |
07/13/2010 | US7755070 Arrangement for the suppression of unwanted spectral components in a plasma-based EUV radiation source |
07/13/2010 | US7755063 Superresolution in microlithography and fluorescence microscopy |
07/13/2010 | US7754820 photoresist; lithography; low refractive index; ethylene-maleic acid half ester of 3,3,4,4,5,5,6,6,6-nanofluoro-1-hexanol as antireflective layer |
07/13/2010 | US7754780 Resist for forming pattern and method for forming pattern using the same |
07/13/2010 | US7754417 Printed circuits and method for making same |
07/13/2010 | US7754416 laminating support having upper surface on which copper exists, inorganic substance layer, and photoresist layer consisting of chemically amplified type positive photoresist composition to obtain photoresist laminate, selectively irradiating active light or radioactive rays to photoresist to form pattern |
07/13/2010 | US7754415 forming photosensitive resin composition layer on cylindrical support or sheeted support and applying light to form a cured photosensitive resin layer, and then adjusting thickness of cured layer and shaping surface; high-performance printing substrate suitable for laser engraving; liquid crystal display |
07/13/2010 | US7754413 radiation image-able coating, comprising first phase including a radiation curable polymer matrix and an activator disposed in matrix, second phase insolubly distributed in first phase including a color-former and sensitizing agent; thermochromic coating that exhibits enhanced image stability |
07/13/2010 | US7754412 Process for preparing a flexographic printing plate from a photopolymerizable element |
07/13/2010 | US7754411 protects planographic printing plate by having pulp fibers as a main constituent and a surface that contacts an image-forming surface of planographic printing plate and is physically separable from the planographic printing plate |
07/13/2010 | US7754274 Forming a film which adjusts a shape of the substrate above at least one of the front side and the back side of the substrate; anddrilling through-holes in the substrate |
07/13/2010 | US7754131 Device for transferring a pattern to an object |
07/13/2010 | US7752966 Method of developing laser sensitive lithographic printing plate |
07/08/2010 | WO2010077273A1 Stack of negative-working imageable elements |
07/08/2010 | WO2010077269A1 Carrier solvent compositions, coatings compositions, and methods to produce thick polymer coatings |
07/08/2010 | WO2010076894A1 Exposure apparatus, exposure method, and device manufacturing method |
07/08/2010 | WO2010076254A1 Method of determining a characteristic |
07/08/2010 | WO2010076232A2 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
07/08/2010 | WO2009147031A3 Oxime ester photoinitiators |
07/08/2010 | WO2009130010A9 Method and apparatus for measuring line end shortening, substrate and patterning device |
07/08/2010 | US20100173251 Photoresist residue removal composition |
07/08/2010 | US20100173250 Method for a multiple exposure, microlithography projection exposure installation and a projection system |
07/08/2010 | US20100173249 Method for Manufacturing a Semiconductor Device |
07/08/2010 | US20100173248 Plate surface treatment agent for lithographic printing plate and method for treating lithographic printing plate |
07/08/2010 | US20100173247 Substrate planarization with imprint materials and processes |
07/08/2010 | US20100173246 Positive photosensitive resin composition and method for forming cured film using the same |
07/08/2010 | US20100173245 Compositions comprising carboxy component and processes for photolithography |
07/08/2010 | US20100173238 Gas contamination sensor, lithographic apparatus, method of determining a level of contaminant gas and device manufacturing method |
07/08/2010 | US20100173237 Plate-making apparatus and printing plate manufacturing method |
07/08/2010 | US20100173236 Exposure apparatus, and method of manufacturing device using same |
07/08/2010 | US20100173235 Method and apparatus for writing |
07/08/2010 | US20100173232 Mask blank providing system, mask blank providing method, mask blank transparent substrate manufacturing method, mask blank manufacturing method, and mask manufacturing method |
07/08/2010 | US20100173229 Shrinkable label having a hologram layer and container with the label |
07/08/2010 | US20100173135 Method of Controlling Surface Roughness of a Flexographic Printing Plate |
07/08/2010 | US20100173034 Conforming Template for Patterning Liquids Disposed on Substrates |
07/08/2010 | US20100173033 Device for Holding a Template for Use in Imprint Lithography |
07/08/2010 | US20100172000 Holographic security device |
07/08/2010 | US20100171940 Projection exposure apparatus, projection exposure method, and method for producing device |
07/08/2010 | US20100170710 Conductive film and manufacturing method thereof, and transparent electromagnetic shielding film |
07/07/2010 | EP2204698A1 Plate surface treatment agent for lithographic princting plate and method for treating lithographic printing plate |
07/07/2010 | EP2204697A2 Marker structure, lithographic projection apparatus, method for substrate alignment using such a structure, and substrate comprising such marker structure |
07/07/2010 | EP2204696A2 Lithographic apparatus and method for calibrating the same |