| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 11/18/2014 | US8889336 Radiation-sensitive resin composition and radiation-sensitive acid generating agent |
| 11/18/2014 | US8889335 Radiation-sensitive resin composition |
| 11/18/2014 | US8889334 Spin-on anti-reflective coatings for photolithography |
| 11/18/2014 | US8889333 Salt, photoresist composition, and method for producing photoresist pattern |
| 11/18/2014 | US8889332 Low-K dielectric functional imprinting materials |
| 11/18/2014 | US8889323 Photosensitive resin composition |
| 11/18/2014 | US8889322 Photopolymer formulation having different writing comonomers |
| 11/18/2014 | US8889245 Three-dimensional nanostructures and method for fabricating the same |
| 11/18/2014 | US8889055 Imprint lithography method |
| 11/18/2014 | US8889042 Coatings |
| 11/18/2014 | US8888920 Imprint system, imprint method, and non-transitory computer storage medium |
| 11/18/2014 | US8888086 Apparatus with surface protector to inhibit contamination |
| 11/18/2014 | US8887631 Pattern transcription device and method of fabricating cliche for the same |
| 11/13/2014 | US20140335692 Method for forming a resist under layer film and patterning process |
| 11/13/2014 | US20140335459 Method of forming polymer nanofiber metal-nanoparticle composite pattern |
| 11/13/2014 | US20140335458 Optical air slit and method for manufacturing optical air slits |
| 11/13/2014 | US20140335457 Lithographic apparatus and device manufacturing method |
| 11/13/2014 | US20140335456 Method of Improving Print Performance in Flexographic Printing Plates |
| 11/13/2014 | US20140335455 Underlayer composition and method of imaging underlayer composition |
| 11/13/2014 | US20140335454 Underlayer composition and method of imaging underlayer |
| 11/13/2014 | US20140335453 Method for producing resist composition |
| 11/13/2014 | US20140335452 Positive photosensitive siloxane composition |
| 11/13/2014 | US20140335448 Photosensitive siloxane resin composition |
| 11/13/2014 | US20140335447 Composition for hardmask, method of forming patterns using the same, and semiconductor integrated circuit device including the patterns |
| 11/13/2014 | US20140334027 Oxime ester photoinitiators |
| 11/13/2014 | US20140333922 Inspection Method and Apparatus, Lithographic Apparatus, Lithographic Processing Cell and Device Manufacturing Method |
| 11/13/2014 | US20140333916 Method and apparatus for the formation of conductive films on a substrate |
| 11/13/2014 | US20140333915 Radiation Source |
| 11/13/2014 | US20140333914 Reflective Lithography Masks and Systems and Methods |
| 11/13/2014 | US20140333913 Microlithography projection objective |
| 11/13/2014 | US20140333912 Microlithographic projection exposure apparatus |
| 11/13/2014 | US20140333911 Liti mask and laser irradiation device including the same |
| 11/13/2014 | US20140333910 Immersion photolithography system and method using microchannel nozzles |
| 11/13/2014 | US20140333909 Exposure apparatus, exposure method, method for manufacturing device |
| 11/11/2014 | US8887104 Correction for flare effects in lithography system |
| 11/11/2014 | US8886350 Displacement calculation method, drawing data correction method, substrate manufacturing method, and drawing apparatus |
| 11/11/2014 | US8885949 Pattern shape determining method, pattern shape verifying method, and pattern correcting method |
| 11/11/2014 | US8885172 Interferometric heterodyne optical encoder system |
| 11/11/2014 | US8885150 Inspection method and apparatus, lithographic apparatus, lithographic processing cell and device manufacturing method |
| 11/11/2014 | US8885149 Patterning device support |
| 11/11/2014 | US8885148 System and method for design of linear motor for vacuum environment |
| 11/11/2014 | US8885147 Lithographic apparatus and device manufacturing method |
| 11/11/2014 | US8885146 Multi-photon exposure system |
| 11/11/2014 | US8885145 Image reading and writing using a complex two-dimensional interlace scheme |
| 11/11/2014 | US8885144 Illumination system and lithographic apparatus |
| 11/11/2014 | US8885143 Projection exposure apparatus for microlithography for the production of semiconductor components |
| 11/11/2014 | US8885142 Lithographic apparatus and device manufacturing method |
| 11/11/2014 | US8885141 EUV lithography device and method for processing an optical element |
| 11/11/2014 | US8884253 System for magnetic shielding |
| 11/11/2014 | US8883937 Cyclic compound, manufacturing method therefor, radiation-sensitive composition, and method for forming a resist pattern |
| 11/11/2014 | US8883699 Resist stripping composition and method of stripping resist using the same |
| 11/11/2014 | US8883635 Semiconductor device manufacturing method and semiconductor device manufacturing apparatus |
| 11/11/2014 | US8883523 Method for detecting pattern offset amount of exposed regions and detecting mark |
| 11/11/2014 | US8883407 Coating compositions suitable for use with an overcoated photoresist |
| 11/11/2014 | US8883406 Method for using a purge ring with split baffles in photonic thermal processing systems |
| 11/11/2014 | US8883405 Method for forming pattern |
| 11/11/2014 | US8883403 Method of semiconductor integrated circuit fabrication |
| 11/11/2014 | US8883402 Photocurable compositions |
| 11/11/2014 | US8883401 Lithographic printing original plate |
| 11/11/2014 | US8883400 Compositions and processes for photolithography |
| 11/11/2014 | US8883399 Ablation layer, photosensitive resin structure, and method for producing relief printing plate using the photosensitive resin structure |
| 11/11/2014 | US8883398 Photoactive compound and light-sensitive resin composition comprising same |
| 11/11/2014 | US8883397 Positive photosensitive siloxane composition |
| 11/11/2014 | US8883396 Resist composition and method of forming resist pattern |
| 11/11/2014 | US8883395 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same |
| 11/11/2014 | US8883393 Printing form precursor for use as a recording element |
| 11/11/2014 | US8883392 Compositions and methods for use in three dimensional model printing |
| 11/11/2014 | US8883391 Positive type photosensitive resin composition |
| 11/11/2014 | US8883380 Film exposure method |
| 11/11/2014 | US8883379 Resist-protective film-forming composition and patterning process |
| 11/11/2014 | US8883378 Colored curable composition, color filter and method of producing color filter, solid-state image sensor and liquid crystal display device |
| 11/11/2014 | US8883377 Photoresist composition for forming a color filter and method of manufacturing a substrate for a display device |
| 11/11/2014 | US8883376 Photosensitive transparent resin composition, production method of color filter, and color filter |
| 11/11/2014 | US8883375 Method and system for forming a pattern using charged particle beam lithography with multiple exposure passes |
| 11/11/2014 | US8883065 Curable composition for imprints, patterning method and pattern |
| 11/11/2014 | US8883050 Curable colored compositions, color filters and processes for preparing them, liquid crystal display devices, solid-state image sensors, and dye compounds |
| 11/11/2014 | US8883023 Method for forming pattern |
| 11/11/2014 | US8883022 Mask blank and method of manufacturing an imprinting mold |
| 11/11/2014 | US8883018 Low-loss, wide-band grating coupler and method of making same |
| 11/11/2014 | US8881650 Stamp for micro contact printing and method for the production thereof |
| 11/06/2014 | US20140330031 Resist for electron beam and optical lithography |
| 11/06/2014 | US20140329183 Chemically amplified negative resist composition and patterning process |
| 11/06/2014 | US20140329182 Method for producing layered materials using long-lived photo-induced active centers |
| 11/06/2014 | US20140329181 Method of manufucturing liquid ejection head |
| 11/06/2014 | US20140329180 Method Of Fabricating Substrate For Organic Light-Emitting Device |
| 11/06/2014 | US20140329179 Methods of forming semiconductor device structures, and related semiconductor device structures |
| 11/06/2014 | US20140329178 Cyclic compound, method for producing the same, radiation-sensitive composition, and resist pattern formation method |
| 11/06/2014 | US20140329177 Cyclic compound, method for producing same, radiation-sensitive composition, and resist pattern formation method |
| 11/06/2014 | US20140329175 Photosensitive negative resin composition, fine structure, production process of fine structure and liquid ejection head |
| 11/06/2014 | US20140327899 Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method |
| 11/06/2014 | US20140327898 Microlithography projection optical system and method for manufacturing a device |
| 11/06/2014 | US20140327897 Exposure device and method for producing structure |
| 11/06/2014 | US20140327896 Optical component |
| 11/06/2014 | US20140327895 Optical component |
| 11/06/2014 | US20140327894 Lithography apparatus having effective thermal electron enhancement unit and method of forming pattern using the same |
| 11/06/2014 | US20140327893 Lithographic apparatus and device manufacturing method |
| 11/06/2014 | US20140327892 Method of operating a microlithographic projection exposure apparatus and projection objective of such an apparatus |
| 11/06/2014 | US20140327891 Lithography projection objective, and a method for correcting image defects of the same |
| 11/06/2014 | US20140327890 Coating and developing apparatus and method, and storage medium |
| 11/06/2014 | US20140327889 Conductive pattern formation method, conductive pattern-bearing substrate, and touch panel sensor |