Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
10/2014
10/23/2014US20140315133 Method for fabricating a circuit
10/23/2014US20140315132 Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing form from the photosensitive element
10/23/2014US20140315131 Developer and patterning process
10/23/2014US20140315130 Photoacid Generators And Lithographic Resists Comprising The Same
10/23/2014US20140315129 Mask forming imageable material and use
10/23/2014US20140315093 Use and fabrication of microscaffolds and nanoscaffolds
10/23/2014US20140314898 Heat-reactive resist material, mold manufacturing method, mold, development method and pattern formation material
10/23/2014US20140314897 Nano imprinting with reusable polymer template with metallic or oxide coating
10/23/2014US20140313501 Controller for optical device, exposure method and apparatus, and method for manufacturing device
10/23/2014US20140313500 Lithographic apparatus, device manufacturing method, and method of applying a pattern to a substrate
10/23/2014US20140313499 Exposure apparatus, method of obtaining amount of regulation of object to be regulated, program, and method of manufacturing article
10/23/2014US20140313498 Polarization-influencing optical arrangement, in particular in a microlithographic projection exposure apparatus
10/23/2014US20140313497 Exposure apparatus and a method for controlling radiation from a lamp for exposing a photosensitive element
10/23/2014US20140313496 Lithographic Apparatus and Method
10/23/2014US20140313495 Optical element and projection exposure apparatus based on use of the optical element
10/23/2014US20140313494 Lithographic apparatus and device manufacturing method
10/23/2014US20140313493 Exposure apparatus and a method for exposing a photosensitive element and a method for preparing a printing form from the photosensitive element
10/23/2014US20140312606 Security devices
10/21/2014US8869076 Global landmark method for critical dimension uniformity reconstruction
10/21/2014US8868387 Method of optimizing a model, a method of measuring a property, a device manufacturing method, a spectrometer and a lithographic apparatus
10/21/2014US8868229 Buffer station for stocker system
10/21/2014US8867885 Optical waveguide forming epoxy resin composition, optical waveguide forming curable film, light transmission flexible printed board, and production method for the flexible printed board
10/21/2014US8867135 Non-attenuating light collimating articles for graphic arts
10/21/2014US8867101 Photoengraving consumable material remote administration method
10/21/2014US8867041 Optical vacuum ultra-violet wavelength nanoimprint metrology
10/21/2014US8867024 Reflective film interface to restore transverse magnetic wave contrast in lithographic processing
10/21/2014US8867023 Method for determining exposure condition and computer-readable storage media storing program for determining exposure condition
10/21/2014US8867022 Movable body drive method and movable body drive system, pattern formation method and apparatus, and device manufacturing method
10/21/2014US8867021 Illumination system, lithographic apparatus and method of adjusting an illumination mode
10/21/2014US8867020 Metrology method and apparatus, and device manufacturing method
10/21/2014US8867019 Projection optical system, exposure apparatus, exposure method, display manufacturing method, mask, and mask manufacturing method
10/21/2014US8867018 Method and system for improved overlay correction
10/21/2014US8867017 Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method
10/21/2014US8867000 Transflective type liquid crystal display device substrate, color filter substrate, and liquid crystal display device
10/21/2014US8865919 Sulfonium compound, photo-acid generator, and method for manufacturing the same
10/21/2014US8865845 Silsequioxane-titania hybrid polymers
10/21/2014US8865396 Developing method and developing apparatus
10/21/2014US8865395 Method of forming resist pattern
10/21/2014US8865394 Self-aligned coverage of opaque conductive areas
10/21/2014US8865393 Printed circuit board and method of manufacturing the same
10/21/2014US8865392 Photosensitive resin composition and cured product thereof
10/21/2014US8865391 Chemically amplified negative resist composition, photo-curable dry film, making method, pattern forming process, and electric/electronic part protecting film
10/21/2014US8865390 Patterning process and resist composition
10/21/2014US8865389 Actinic-ray- or radiation-sensitive resin composition, actinic-ray- or radiation-sensitive film therefrom and method of forming pattern
10/21/2014US8865377 Method and system for forming a diagonal pattern using charged particle beam lithography
10/21/2014US8865046 Imprinting of partial fields at the edge of the wafer
10/21/2014US8865010 Pattern forming method and imprint mold manufacturing method
10/21/2014US8864894 Resist underlayer film forming composition containing silicone having onium group
10/21/2014US8864489 Thermal nanoimprint lithography mould, process for producing it, and thermal nanoimprint process employing it
10/16/2014US20140308618 Organic Solution for Surface Treatment of Induim Zinc Oxide Substrate and Method of Preparing Display Substrate Using the Same
10/16/2014US20140308617 Method for Improving Print Performance in Flexographic Printing Plates
10/16/2014US20140308615 Cyclic compound, method for producing same, composition, and method for forming resist pattern
10/16/2014US20140308614 Patterning process, resist composition, polymer, and monomer
10/16/2014US20140308613 Carboxyl-containing resin, resin composition for solder mask, and method of preparing carboxyl-containing resin
10/16/2014US20140308605 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device, and electronic device
10/16/2014US20140307246 Determining position and curvature information directly from a surface of a patterning device
10/16/2014US20140307245 Illumination optical assembly, exposure apparatus, and device manufacturing method
10/16/2014US20140307244 Method for adjusting spectrum width of narrow-band laser
10/16/2014US20140307243 Mirror unit and exposure apparatus
10/16/2014US20140307242 Method and apparatus for printing periodic patterns using multiple lasers
10/16/2014US20140307241 Exposure apparatus and device manufacturing method
10/16/2014US20140307239 Illumination system of a microlithographic projection exposure apparatus having a temperature control device
10/16/2014US20140307238 Exposure apparatus and method for producing device
10/16/2014US20140307237 Pellicle frame and pellicle with this
10/16/2014US20140307236 Printer
10/16/2014US20140307235 Exposure apparatus, exposing method, device manufacturing method, program, and recording medium
10/16/2014US20140307022 Photosensitive negative resin composition
10/16/2014US20140306441 Security devices and methods of manufacture thereof
10/16/2014US20140306124 Yellow Room System
10/16/2014US20140305904 Large-area nanopatterning apparatus and method
10/14/2014US8862441 Processing support device, method and computer readable storage medium, and semiconductor fabrication support device and method
10/14/2014US8862260 Process for the production of a three-dimensional object with resolution improvement by “pixel shift”
10/14/2014US8861102 Lithographic apparatus and thermal optical manipulator control method
10/14/2014US8861084 Polarization-modulating optical element
10/14/2014US8861083 Birefringence pattern builder
10/14/2014US8861080 Wire grid polarizers, methods of fabricating a wire grid polarizer, and display panels including a wire grid polarizer
10/14/2014US8860953 Method and apparatus for measuring overlay
10/14/2014US8860927 Dual-stage exchange system for lithographic apparatus
10/14/2014US8860926 Lithographic apparatus and device manufacturing method
10/14/2014US8860925 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
10/14/2014US8860924 Lithographic apparatus and device manufacturing method
10/14/2014US8860923 Lithographic apparatus and device manufacturing method
10/14/2014US8860922 Lithographic apparatus and device manufacturing method
10/14/2014US8859947 Display device comprising at least dual transistor electrically connected to dual parallel wiring
10/14/2014US8859436 Uniform large-grained and grain boundary location manipulated polycrystalline thin film semiconductors formed using sequential lateral solidification and devices formed thereon
10/14/2014US8859435 Process for removing material from substrates
10/14/2014US8859432 Bare aluminum baffles for resist stripping chambers
10/14/2014US8859312 Distortion tolerant processing
10/14/2014US8859196 Antireflective coatings for high-resolution photolithographic synthesis of DNA arrays
10/14/2014US8859195 Methods of lithographically patterning a substrate
10/14/2014US8859194 Polymer compound, and resist-protecting film composition including same for a liquid immersion exposure process
10/14/2014US8859193 Method of applying patterned metallization to block filter resonators
10/14/2014US8859192 Negative pattern forming method and resist pattern
10/14/2014US8859191 Pattern-forming method, and composition for forming resist underlayer film
10/14/2014US8859190 Method to create gradient index in a polymer
10/14/2014US8859189 Patterning process
10/14/2014US8859187 Method of forming resist pattern and negative resist composition
10/14/2014US8859186 Polyimide precursor, resin composition comprising the polyimide precursor, pattern forming method using the resin composition, and articles produced by using the resin composition
10/14/2014US8859185 Resist underlayer film-forming composition
10/14/2014US8859183 N-acyl-β-lactam derivative, macromolecular compound, and photoresist composition
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