Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
12/2014
12/09/2014US8906597 Layered radiation-sensitive materials with varying sensitivity
12/09/2014US8906596 Method of marking a metal component surface with modifying sequences in which the segments of the markings are formed
12/09/2014US8906595 Method for improving resist pattern peeling
12/09/2014US8906594 Negative-working thick film photoresist
12/09/2014US8906592 Antireflective coating composition and process thereof
12/09/2014US8906591 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same
12/09/2014US8906590 Antireflective coating composition and process thereof
12/09/2014US8906589 Salt and photoresist composition comprising the same
12/09/2014US8906585 Method of manufacturing semiconductor device and exposure device
12/09/2014US8906491 Multi-layer body and method for producing the same
12/09/2014US8906490 Multicolor mask
12/09/2014US8906281 Imprint method, imprinting equipment, and method for manufacturing semiconductor device
12/09/2014US8906244 Method for forming a device having nanopillar and cap structures
12/09/2014US8905369 Vibration isolation module and substrate processing system
12/04/2014US20140356792 Composition for forming tungsten oxide film and method for producing tungsten oxide film using same
12/04/2014US20140356791 Method of making nanostructure
12/04/2014US20140356790 Method for manufacturing micro-structure and optically patternable sacrificial film-forming composition
12/04/2014US20140356789 Fluorinated photopolymer with integrated anthracene sensitizer
12/04/2014US20140356788 Fluorinated photoresist with integrated sensitizer
12/04/2014US20140356787 Resist composition, compound, polymeric compound and method of forming resist pattern
12/04/2014US20140356786 Photosensitive resin composition and uses thereof
12/04/2014US20140356785 Photoresists comprising carbamate component
12/04/2014US20140356771 Actinic ray-sensitive or radiation-sensitive resin composition, resist film using the same, pattern forming method, manufacturing method of electronic device and electronic device
12/04/2014US20140356638 Method and apparatus for fabricating a colored component for a watch
12/04/2014US20140356637 Method of manufacturing a ceramic electronic component
12/04/2014US20140354996 Tunable electro-optic filter stack
12/04/2014US20140354972 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method
12/04/2014US20140354971 Exposure method, exposure apparatus, and device manufacturing method
12/04/2014US20140354970 Lithographic apparatus and device manufacturing method
12/04/2014US20140354968 Focusing method, focusing apparatus, exposure method, and device manufacturing method
12/04/2014US20140354967 Environmental system including a transport region for an immersion lithography apparatus
12/04/2014US20140354966 Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method
12/04/2014US20140354965 Immersion liquid replenishing apparatus, replenishing method, and wafer scribing lines inspection machine with immersion liquid replenishing apparatus
12/04/2014US20140353527 Using Wafer Geometry to Improve Scanner Correction Effectiveness for Overlay Control
12/02/2014US8904337 Semiconductor device design method, system and computer-readable medium
12/02/2014US8904316 Method and apparatus for printing high-resolution two-dimensional periodic patterns
12/02/2014US8903156 Method of updating calibration data and a device manufacturing method
12/02/2014US8902522 Colored photosensitive resin composition for preparation of color filter of solid-state image sensing device using 300 nm or less ultrashort wave exposure equipment, color filter using same, and solid-state image sensing device containing same
12/02/2014US8902519 Replacement apparatus for an optical element
12/02/2014US8902414 Method of measuring uniformity of exposing light and exposure system for performing the same
12/02/2014US8902407 Projection objective for a microlithographic projection exposure apparatus
12/02/2014US8902406 Projection objective
12/02/2014US8902405 Stage apparatus, exposure apparatus and device fabrication method
12/02/2014US8902404 Lithographic apparatus and device manufacturing method
12/02/2014US8902403 Lithographic apparatus and device manufacturing method
12/02/2014US8902402 Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method
12/02/2014US8902401 Optical imaging device with thermal attenuation
12/02/2014US8902399 Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus
12/02/2014US8901737 Integrated circuit arrangement with an auxiliary indentation, particularly with aligning marks
12/02/2014US8901522 Chamber apparatus and extreme ultraviolet light generation system
12/02/2014US8901521 Module and method for producing extreme ultraviolet radiation
12/02/2014US8901225 Photosensitive resin composition, laminate utilizing same and solid-state imaging device
12/02/2014US8901196 Liquid resin composition for production of optical waveguide, optical waveguide produced by using the liquid resin composition, and production method of the optical waveguide
12/02/2014US8901191 Dual curable ethylene propylene diene polymer rubber coating using a photoinitiator and a peroxide
12/02/2014US8900802 Positive tone organic solvent developed chemically amplified resist
12/02/2014US8900801 Method for producing a LED device
12/02/2014US8900800 Method for producing a GaNLED device
12/02/2014US8900799 Thin film patterning method and method of manufacturing semiconductor device using the thin film patterning method
12/02/2014US8900798 On-press developable lithographic printing plate precursors
12/02/2014US8900797 Developable bottom anti-reflective coating
12/02/2014US8900796 Acid generator, chemically amplified resist composition, and patterning process
12/02/2014US8900795 Resist composition, method of forming resist pattern and novel compound
12/02/2014US8900794 Photoacid generator and photoresist comprising same
12/02/2014US8900793 Polymer, chemically amplified resist composition, and patterning process using said chemically amplified resist composition
12/02/2014US8900792 Polymerizable photoacid generators
12/02/2014US8900791 Actinic ray-sensitive or radiation-sensitive resin composition and method of forming pattern with the composition
12/02/2014US8900790 Photoresist composition
12/02/2014US8900789 Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition
12/02/2014US8900788 Resist composition for immersion exposure and method of forming resist pattern
12/02/2014US8900780 Photosensitive resin composition for color filter and color filter using the same
12/02/2014US8900779 Color filter composition
12/02/2014US8900778 Method for forming circular patterns on a surface
12/02/2014US8900775 Hologram recording material and hologram recording medium
12/02/2014US8900468 Methods of forming a pattern
12/02/2014US8899564 Colored ceramic vacuum chuck and manufacturing method thereof
12/02/2014US8899148 Method for printing a material onto a substrate
11/2014
11/27/2014US20140351771 Scatterometry overlay metrology targets and methods
11/27/2014US20140349237 Exposure photolithography methods
11/27/2014US20140349236 Method for Forming Semiconductor Structure Having Opening
11/27/2014US20140349234 Positive working lithographic printing plate precursor and process for preparing lithographic printing plate
11/27/2014US20140349233 Water soluble norbornene-type polymers and photoimageable compositions thereof
11/27/2014US20140349225 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device, and electronic device
11/27/2014US20140349224 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device using the same and electronic device
11/27/2014US20140349223 Actinic-ray- or radiation-sensitive resin composition, actinic-ray-or radiation-sensitive film therefrom, method of forming pattern, process for manufacturing semiconductor device, semiconductor device and compound
11/27/2014US20140349222 Photosensitive resin composition, method for producing hardened relief pattern, semiconductor device and display device
11/27/2014US20140349221 Actinic ray-sensitive or radiation-sensitive resin composition, pattern forming method and resist film using the composition, and electronic device manufacturing method and electronic device using these
11/27/2014US20140349220 Photosensitive Resin Composition for Color Filter and Color Filter Using the Same
11/27/2014US20140349219 Exposure method, reflection type mask, and semiconductor device manufacturing method
11/27/2014US20140349101 Colored radiation-sensitive composition, colored cured film, color filter, pattern forming method, color filter production method, solid-state image sensor, and image display device
11/27/2014US20140349036 Water-insoluble coloring compound, ink, thermal transfer recording sheet, and color filter resist composition
11/27/2014US20140348200 Middle-infrared volumetric bragg grating based on alkali halide color center crystals
11/27/2014US20140347654 System for measuring the image quality of an optical imaging system
11/27/2014US20140347647 Method for adjusting a projection objective
11/27/2014US20140347646 Method and apparatus for compensating at least one defect of an optical system
11/27/2014US20140347645 Illumination optical system, exposure apparatus, optical element and manufacturing method thereof, and device manufacturing method
11/27/2014US20140347644 System and method for performing lithography process in semiconductor device fabrication
11/27/2014US20140347643 Lithography apparatus, lithography method, lithography system, and method of manufacturing article
11/27/2014US20140347642 Lithographic apparatus and device manufacturing method
11/27/2014US20140347641 Device, lithographic apparatus, method for guiding radiation and device manufacturing method
11/27/2014US20140347640 Substrate processing apparatus
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