Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
10/2014
10/14/2014US8859182 Resist composition and method for producing resist pattern
10/14/2014US8859181 Chemically amplified negative resist composition and patterning process
10/14/2014US8859180 Copolymer and composition for semiconductor lithography and process for producing the copolymer
10/14/2014US8859170 Photosensitive modified polyimide resin composition and use thereof
10/14/2014US8859167 Pattern forming method, positional deviation measuring method and photomask
10/14/2014US8859071 Curable composition for imprint, patterning method and pattern
10/14/2014US8859055 Method for patterning flexible substrate
10/14/2014US8858859 Apparatus and method of fabricating flat panel display device
10/14/2014US8858814 Photomask blank, processing method, and etching method
10/14/2014US8858813 Patterning process
10/14/2014US8857449 Substrate processing apparatus and substrate processing method
10/09/2014WO2014163332A1 Coating composition for forming micropattern, and method for forming micropattern using same
10/09/2014WO2014162983A1 Pattern forming method, electronic device and method for manufacturing same
10/09/2014WO2014162912A1 Method for manufacturing organic processing fluid for patterning of chemical amplification type resist film, organic processing fluid for patterning of chemical amplification type resist film, pattern forming method, method for manufacturing electronic device, and electronic device
10/09/2014WO2014161698A1 Source collector apparatus, lithographic apparatus and method
10/09/2014WO2014161251A1 Alkali-soluble resin, preparation method therefor, and photoresist compound containing said resin
10/09/2014US20140302442 Methods and fabrication tools for fabricating optical devices
10/09/2014US20140302441 Method for manufacturing a magnetoresistive sensor using simultaneously formed hard bias and electrical lapping guide
10/09/2014US20140302440 Narrow frame touch input sheet with good anticorrosion property and manufacturing method thereof
10/09/2014US20140302439 Method of manufacturing graphene, carbon nanotubes, fullerene, graphite or a combination thereof having a position specifically regulated resistance
10/09/2014US20140302438 Resist composition, resist pattern-forming method, and resist solvent
10/09/2014US20140302430 Epoxy formulations and processes for fabrication of relief patterns on low surface energy substrates
10/09/2014US20140300883 Lithographic apparatus and device manufacturing method
10/09/2014US20140300882 Arrangement for actuating an element in a microlithographic projection exposure apparatus
10/09/2014US20140300880 Flow Through MEMS Package
10/09/2014US20140300879 Fluid extraction system, lithographic apparatus and device manufacturing method
10/09/2014US20140300878 Exposure apparatus and device manufacturing method
10/09/2014US20140300877 Programmable photolithography
10/09/2014US20140300876 Optical arrangement, euv lithography apparatus and method for configuring an optical arrangement
10/09/2014US20140300875 Liquid immersion member, exposure apparatus, exposing method, method of manufacturing device, program, and recording medium
10/09/2014US20140299575 Self-assemblable polymer and method for use in lithography
10/09/2014DE112013000700T5 Metall-Peroxo-Verbindungen mit organischen Koliganden für Elektronenstrahl-, Tief-UV- und Extrem-UV-Fotolackanwendungen Metal-peroxo compounds with organic co-ligands for Electron Beam, deep-UV and extreme UV photoresist applications
10/09/2014DE102013225006A1 Vorrichtung und Verfahren zur Reduzierung von Kontaminationen eines Retikels und/oder eines Wafers in einem optischen System An apparatus and method for reducing contamination of a reticle and / or wafer in an optical system
10/09/2014DE102010021539B4 Projektionsobjektiv mit Blenden Projection lens with an aperture
10/08/2014EP2786984A1 Photosensitive azobenzene derivative
10/08/2014EP2786207A1 Method for making flexographic printing forms by welding edges of photosensitive elements with microwave energy
10/08/2014EP2785754A1 Photoactive resins, radiation curable compositions and radiation curable inks
10/07/2014US8856694 Computational process control
10/07/2014US8856693 Method for designing optical lithography masks for directed self-assembly
10/07/2014US8854607 Controller, lithographic apparatus, method of controlling the position of an object and device manufacturing method
10/07/2014US8854606 Projection exposure system, method for manufacturing a micro-structured structural member by the aid of such a projection exposure system and polarization-optical element adapted for use in such a system
10/07/2014US8854605 Illumination optical system, exposure apparatus, and device fabrication method
10/07/2014US8854604 Microlithographic projection exposure apparatus
10/07/2014US8854603 Gravitation compensation for optical elements in projection exposure apparatuses
10/07/2014US8854602 Holding device for an optical element in an objective
10/07/2014US8854601 Projection optical system, exposure apparatus, and exposure method
10/07/2014US8854600 Exposure apparatus and photomask
10/07/2014US8854599 Liquid recovery apparatus, exposure apparatus, exposure method, and device manufacturing method
10/07/2014US8854598 Lithographic apparatus and device manufacturing method
10/07/2014US8853988 Control systems and methods for compensating for effects of a stage motor
10/07/2014US8853642 Beam regulating apparatus for an EUV illumination beam
10/07/2014US8853441 Sulfonium compound, photoacid generator, and resist composition
10/07/2014US8853345 Polymer, method for producing the same, and resist composition containing the same
10/07/2014US8853290 Photosensitive composition
10/07/2014US8853093 Method for forming double patterned structure
10/07/2014US8853087 Method of manufacturing semiconductor device and system for manufacturing semiconductor device
10/07/2014US8853031 Resist underlayer film composition and patterning process using the same
10/07/2014US8853030 Method for production of selective growth masks using underfill dispensing and sintering
10/07/2014US8852857 Substrate treatment method
10/07/2014US8852855 Upper surface antireflective film forming composition and pattern forming method using same
10/07/2014US8852854 Method for forming a photoresist pattern on a semiconductor wafer using oxidation-based catalysis
10/07/2014US8852853 Photo-mask and method for manufacturing liquid crystal display device using the same
10/07/2014US8852852 Narrow frame touch input sheet, manufacturing method of same, and conductive sheet used in narrow frame touch input sheet
10/07/2014US8852850 Method of photolithography using a fluid and a system thereof
10/07/2014US8852849 Electron beam lithography system and method for improving throughput
10/07/2014US8852848 Composition for coating over a photoresist pattern
10/07/2014US8852847 Method of forming patterns
10/07/2014US8852846 Salt and photoresist composition comprising the same
10/07/2014US8852845 Actinic ray-sensitive or radiation-sensitive resin composition, resist film, pattern forming method using the same, and resin
10/07/2014US8852844 Composition for forming silicon-containing film, silicon-containing film-formed substrate and patterning process
10/07/2014US8852832 Radiation-sensitive colored composition, color filter and method for producing the same, solid state image device, and liquid crystal display apparatus
10/07/2014US8852831 Device for manufacturing a surface using character projection lithography with variable magnification
10/07/2014US8852830 Photomask and semiconductor apparatus manufacturing method
10/07/2014US8852829 Prepolymer-based polyurethane formulations for producing holographic media
10/07/2014US8852828 Volume hologram photosensitive composition
10/07/2014US8852726 Photosensitive polymer composition, method of producing pattern and electronic parts
10/07/2014US8852673 Defect monitoring for resist layer
10/07/2014US8852491 Method manufacturing electroforming mold
10/07/2014US8851769 Substrate processing method
10/07/2014US8851636 Liquid application device, liquid application method, and nanoimprint system
10/07/2014US8851624 Maintenance liquid
10/07/2014US8851463 Pedestal covers
10/07/2014US8851152 Method and apparatus for production of a cast component
10/07/2014US8851151 Method and apparatus for production of a cast component
10/07/2014US8851092 Cleaning apparatus and cleaning method, coater/developer and coating and developing method, and computer readable storing medium
10/07/2014US8851011 Coating treatment method, coating treatment apparatus, and computer-readable storage medium
10/07/2014US8850980 Tessellated patterns in imprint lithography
10/07/2014US8850978 Photosensitive letterpress printing original plate
10/02/2014WO2014158441A1 Methods for controlling across wafer directed self-assembly
10/02/2014WO2014158440A2 Chemi-epitaxy in directed self-assembly applications using photo-decomposable agents
10/02/2014WO2014157881A1 Resist underlayer composition and method for forming pattern using same
10/02/2014WO2014157856A1 Photosensitive coating composition, coating conductive film using photosensitive coating composition, and method for forming coating conductive film
10/02/2014WO2014157676A1 Vinyl-group-containing fluorene compound
10/02/2014WO2014157675A1 Composition containing vinyl-group-containing compound
10/02/2014WO2014157573A1 Pattern forming method, active light-sensitive or radiation-sensitive resin composition, resist film, method for manufacturing electronic device using pattern forming method, and electronic device
10/02/2014WO2014157516A1 Method for producing color filter, color filter and solid-state imaging element
10/02/2014WO2014157427A1 Curable composition, cured film, color filter, protective film, display device and solid-state imaging element
10/02/2014WO2014157387A1 Colored composition, photosensitive colored composition, color filter and method for producing same, solid-state image sensor, and image display device
10/02/2014WO2014157296A1 Photosensitive resin composition, cured film, image forming method, solid-state imaging element, color filter and ultraviolet absorbent
10/02/2014WO2014157262A1 Mark forming method, mark detecting method, and device manufacturing method
1 ... 12 13 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 ... 1272