Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
11/2014
11/06/2014US20140327866 Photosensitive resin composition, method of forming pattern, and liquid crystal display using the same
11/06/2014US20140327597 Polymer-based resonator antennas
11/06/2014US20140326633 Compositions and methods for the selective removal of silicon nitride
11/04/2014US8881067 Method and apparatus for monitoring cross-sectional shape of a pattern formed on a semiconductor device
11/04/2014US8879159 Lithography projection objective, and a method for correcting image defects of the same
11/04/2014US8879047 Apparatus and method for maintaining immersion fluid in the gap under the projection lens using a pad member or second stage during wafer exchange in an immersion lithography machine
11/04/2014US8879046 Method for moving an optical element of a projection exposure apparatus for microlithography
11/04/2014US8879045 Method utilizing an electrooptic modulator
11/04/2014US8879044 Lithographic apparatus, and motor cooling device
11/04/2014US8879043 Exposure apparatus and method for manufacturing device
11/04/2014US8878162 Method of depositing organic layers onto a substrate
11/04/2014US8877969 Photosensitive composition, compound for use in the photosensitive composition and pattern forming method using the photosensitive composition
11/04/2014US8877960 Fluoroalkanesulfonic acid ammonium salts and method for producing same
11/04/2014US8877828 Method for producing curable composition for imprints
11/04/2014US8877432 Method of forming resist pattern and resist composition
11/04/2014US8877431 Process for producing liquid ejection head
11/04/2014US8877430 Methods of producing structures using a developer-soluble layer with multilayer technology
11/04/2014US8877429 Resin composition for making resist pattern insoluble, and method for formation of resist pattern by using the same
11/04/2014US8877428 High resolution, solvent resistant, thin elastomeric printing plates
11/04/2014US8877427 Photosensitive resin composition and circuit board with metal support using the same
11/04/2014US8877426 Lithographic printing plate comprising a porous non-anodic layer
11/04/2014US8877425 Silicon-containing resist underlayer film forming composition having fluorine-based additive
11/04/2014US8877424 Monomer, polymer, resist composition, and patterning process
11/04/2014US8877423 Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same
11/04/2014US8877422 Resist underlayer film composition and patterning process using the same
11/04/2014US8877421 Positive resist composition and pattern-forming method
11/04/2014US8877408 Urethanes used as additives in a photopolymer formulation
11/04/2014US8877298 Printing using a structure coated with ultraviolet radiation responsive material
11/04/2014US8877073 Imprint lithography template
11/04/2014US8876346 Illumination source for use in inspection methods and/or lithography; inspection and lithographic apparatus and inspection method
10/2014
10/30/2014US20140322656 Method of patterning a device
10/30/2014US20140322654 Lithography apparatus, and method for manufacturing article
10/30/2014US20140322652 Resist composition and method of forming resist pattern
10/30/2014US20140322651 Photosensitive polysiloxane composition, protecting film and element having the protecting film
10/30/2014US20140322650 Patterning process and resist composition
10/30/2014US20140322649 Method of Improving Surface Cure in Digital Flexographic Printing Plates
10/30/2014US20140322648 Compositions and processes for immersion lithography
10/30/2014US20140322647 Photosensitive compositions and applications thereof
10/30/2014US20140322646 Ablation imageable lithographic printing plate
10/30/2014US20140322635 Photosensitive resin composition, method for manufacturing patterned cured film, and electronic component
10/30/2014US20140322489 Microfabricated elastomeric valve and pump systems
10/30/2014US20140321807 Optical waveguide with mirror, optical fiber connector, and manufacturing method thereof
10/30/2014US20140320842 Imprint method, imprint apparatus, and method of manufacturing article
10/30/2014US20140320841 Holding apparatus, processing apparatus, and method of manufacturing article
10/30/2014US20140320840 Exposure Apparatus and Exposure Method
10/30/2014US20140320839 Position detector, position detection method, exposure apparatus, and method of manufacturing device
10/30/2014US20140320838 Imaging optical system
10/30/2014US20140320837 Monitoring apparatus and method particularly useful in photolithographically processing substrates
10/30/2014US20140320836 Lithography apparatus, lithography method, and method for manufacturing device
10/30/2014US20140320835 Method and device for inspecting spatial light modulator, and exposure method and device
10/30/2014US20140320834 Exposure device and image forming apparatus
10/30/2014US20140320833 Optical arrangement of autofocus elements for use with immersion lithography
10/30/2014US20140320832 Position-measurement systems
10/30/2014US20140320831 Environmental system including vacuum scavenge for an immersion lithography apparatus
10/30/2014US20140319815 Anti-counterfeiting marker sheet and manufacturing method therefor, anti-counterfeiting function-imparting member, and article provided with anti-counterfeiting function
10/30/2014US20140319659 Resist underlayer composition, method of forming patterns and semiconductor integrated circuit device including the patterns
10/30/2014US20140319097 Phenol monomer, polymer for forming a resist underlayer film including same, and composition for a resist underlayer film including same
10/30/2014US20140318398 Photopolymeric Craft Stamp Indexing Images and Method of Making
10/28/2014US8875078 Reference library generation method for methods of inspection, inspection apparatus and lithographic apparatus
10/28/2014US8874423 Model-based scanner tuning systems and methods
10/28/2014US8874249 Discrete sampling based nonlinear control system
10/28/2014US8873151 Illumination system for a microlithgraphic exposure apparatus
10/28/2014US8873137 Catadioptric projection objective
10/28/2014US8873122 Microlithographic imaging optical system including multiple mirrors
10/28/2014US8873054 Metrology systems and methods
10/28/2014US8873025 EUV collector system with enhanced EUV radiation collection
10/28/2014US8873024 Illumination system for use in a stereolithography apparatus
10/28/2014US8873023 Illumination system for microlithography
10/28/2014US8873021 Debris mitigation system with improved gas distribution
10/28/2014US8872142 Extreme ultraviolet light generation apparatus
10/28/2014US8872135 Electroactive polymers for lithography
10/28/2014US8872099 Solid-state image sensor including a light-shielding color filter formed from a photosensitive resin composition, photosensitive resin composition and method of producing a light-shielding color filter
10/28/2014US8872063 Method for producing blank printing sleeve for laser engraving
10/28/2014US8871894 Production method of polyhydroxyimide
10/28/2014US8871642 Method of forming pattern and developer for use in the method
10/28/2014US8871545 Method for forming a multicolor OLED device
10/28/2014US8871433 Method for producing microstructure
10/28/2014US8871432 Pattern-forming method, resist underlayer film, and composition for forming resist underlayer film
10/28/2014US8871431 Laminated flexographic printing sleeves and methods of making the same
10/28/2014US8871430 Photoactive compound and photosensitive resin composition comprising the same
10/28/2014US8871429 Fluorine-free fused ring heteroaromatic photoacid generators and resist compositions containing the same
10/28/2014US8871428 Compositions and processes for immersion lithography
10/28/2014US8871427 Positive resist composition and patterning process
10/28/2014US8871426 Photoresist composition for color filter and method for forming color filter
10/28/2014US8871425 Low dielectric photoimageable compositions and electronic devices made therefrom
10/28/2014US8871424 Laser imageable polyolefin film
10/28/2014US8871423 Photoresist composition for fabricating probe array, method of fabricating probe array using the photoresist composition, composition for photosensitive type developed bottom anti-reflective coating, fabricating method of patterns using the same and fabricating method of semiconductor device using the same
10/28/2014US8871422 Negative-type photosensitive resin composition, pattern forming method and electronic parts
10/28/2014US8871421 Positive resist composition and method of pattern formation with the same
10/28/2014US8871411 Method for manufacturing waveguide lens
10/28/2014US8871409 Lithographic targets for uniformity control
10/28/2014US8871407 Patterning mask and method of formation of mask using step double patterning
10/28/2014US8871301 Coating treatment apparatus, coating treatment method, and non-transitory computer storage medium
10/28/2014US8871133 Method and composition for reducing waste in photo-imaging applications
10/28/2014US8871048 Flexible nanoimprint mold, method for fabricating the same, and mold usage on planar and curved substrate
10/28/2014US8870396 Substrates for mirrors for EUV lithography and their production
10/28/2014US8869401 Method for manufacturing microstructure, and method for manufacturing liquid jetting head
10/23/2014US20140315330 Measurement device, measurement method, and method for manufacturing semiconductor device
10/23/2014US20140315135 Euv resist sensitivity reduction
10/23/2014US20140315134 Method and apparatus for manufacturing donor substrate
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