Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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02/16/2011 | CN101441418B Pattern formation method and semiconductor device manufacturing method |
02/16/2011 | CN101438385B Exposure apparatus and device manufacturing method |
02/16/2011 | CN101398562B Colorful film substrate and method for manufacturing same |
02/16/2011 | CN101393391B Nanometer stamping device |
02/16/2011 | CN101373334B Method for manually shivering materials of grating net semi-etching connection point |
02/16/2011 | CN101329517B Lithographic apparatus having parts with a coated film adhered thereto |
02/16/2011 | CN101320225B Deionized water nozzle device and its spraying and brushing method |
02/16/2011 | CN101320211B Mold with micro-structure mould core and manufacturing method thereof |
02/16/2011 | CN101266412B Lithographic apparatus and method |
02/16/2011 | CN101266410B Method for confirming front feeding transfer function, lithographic apparatus and device manufacturing method |
02/16/2011 | CN101226332B Method for manufacturing barrier wall slurry |
02/16/2011 | CN101205291B Hard mask composition, process for forming material layer, and semiconductor integrated circuit device |
02/16/2011 | CN101135850B Image forming member having bluish purple laser photosensitive resist material layer and method for forming resist image |
02/16/2011 | CN101109908B Lithographic apparatus, radiation sensor and method of manufacturing a radiation sensor |
02/15/2011 | US7890203 Wiring forming system and wiring forming method for forming wiring on wiring board |
02/15/2011 | US7889473 Combination current sensor and relay |
02/15/2011 | US7889411 System and method for calculating aerial image of a spatial light modulator |
02/15/2011 | US7889407 Method for producing a duplicate hologram recording medium, apparatus for producing a duplication master, apparatus for producing a duplicate hologram recording medium, and duplication master |
02/15/2011 | US7889320 Variable slit apparatus, illumination apparatus, exposure apparatus, exposure method, and device fabrication method |
02/15/2011 | US7888528 Photosensitive self-assembled monolayer for selective placement of hydrophilic structures |
02/15/2011 | US7888415 Vinyl addition polycyclic olefin polymers prepared with non-olefinic chain transfer agents and uses thereof |
02/15/2011 | US7888301 Resist, barc and gap fill material stripping chemical and method |
02/15/2011 | US7887999 a plurality of pillar shaped devices are formed arranged in a hexagonal or rectangular pattern |
02/15/2011 | US7887997 contacting first photoresist layer having photosensitive and discolored emulsion on first conducting coat on first surface of transparent substrate, contacting second photoresist on second coat on second surface, exposing first photoresist , employing circuit pattern as aligning benchmark for second |
02/15/2011 | US7887996 Patterned hard masking layer with circuit patterns; multilayer; removal of segment exposure to first patterned mask |
02/15/2011 | US7887995 Electroforming mold and method for manufacturing the same, and method for manufacturing electroformed component |
02/15/2011 | US7887992 Photosensitive paste and process for production of pattern using the same |
02/15/2011 | US7887991 Positive resist composition and patterning process using the same |
02/15/2011 | US7887990 Fluorine-containing compound, fluorine-containing polymer, postive-type resist composition, and patterning process using same |
02/15/2011 | US7887989 Compositions and processes for preparing color filter elements |
02/15/2011 | US7887988 Positive resist composition and pattern forming method using the same |
02/15/2011 | US7887980 Sub-resolutional grayscale reticle |
02/15/2011 | US7887885 Nanolithography methods and products therefor and produced thereby |
02/15/2011 | US7887875 Method to reduce photoresist poisoning |
02/15/2011 | US7887739 Methods and apparatus of pressure imprint lithography |
02/15/2011 | CA2449040C Directed assembly of functional heterostructures |
02/15/2011 | CA2434752C Compact device for imaging a printing form |
02/15/2011 | CA2406006C Particle deposition apparatus and method for forming nanostructures |
02/10/2011 | WO2011016849A2 Adjacent field alignment |
02/10/2011 | WO2011016839A1 Nanostructured organic solar cells |
02/10/2011 | WO2011016655A2 Super-hydrophobic photosensitive resin composition and black matrix thereof |
02/10/2011 | WO2011016425A1 Photoacid generator, photocurable composition and cured product of same |
02/10/2011 | WO2011016255A1 Exposure apparatus, exposure method, and device manufacturing method |
02/10/2011 | US20110034362 Semi-Aqueous Stripping and Cleaning Formulation for Metal Substrate and Methods for Using Same |
02/10/2011 | US20110033932 Substrate for cell adhesion or culture and method for producing the same |
02/10/2011 | US20110033887 Three-Dimensional Microfabricated Bioreactors with Embedded Capillary Network |
02/10/2011 | US20110033804 Photoresist composition |
02/10/2011 | US20110033803 Patterning process and resist composition |
02/10/2011 | US20110033802 Method for preparing a photo-crosslinkable composition |
02/10/2011 | US20110033801 Coating compositions for use with an overcoated photoresist |
02/10/2011 | US20110033800 Coating compositions for use with an overcoated photoresist |
02/10/2011 | US20110033799 Pattern forming process, chemically amplified positive resist composition, and resist-modifying composition |
02/10/2011 | US20110033790 Detection apparatus, exposure apparatus, and device fabrication method |
02/10/2011 | US20110033789 Exposure method using charged particle beam |
02/10/2011 | US20110033788 Charged particle beam drawing apparatus and method |
02/10/2011 | US20110033787 Frame cell for shot layout flexibility |
02/10/2011 | US20110033785 Method of fabricating integrated circuit using alternating phase-shift mask and phase-shift trim mask |
02/10/2011 | US20110032587 System and Method for Autostereoscopic Imaging |
02/10/2011 | US20110032498 Exposure apparatus, exposure method, and method for producing device |
02/10/2011 | US20110032464 Liquid crystal display and manufacturing method for the same |
02/10/2011 | US20110031651 Desirable wetting and release between an imprint lithography mold and a polymerizable composition |
02/10/2011 | US20110031416 Liquid jet and recovery system for immersion lithography |
02/10/2011 | US20110030998 Photosensitive resin composition, flexible circuit board employing the same, and circuit board production method |
02/10/2011 | US20110030722 Cleaning water for electronic material, method for cleaning electronic material and system for supplying water containing dissolved gas |
02/10/2011 | DE102010003169A1 Field facet mirror for use in illumination lens in illumination system of projection exposure system, during extreme UV-projection-lithography to manufacture semiconductor chip, has reference bodies arranged in reference levels with vectors |
02/10/2011 | DE102006022361B4 Verfahren zum mehrfachen Bestrahlen eines Resists Method for multiple irradiation of a resist |
02/10/2011 | DE10128813B4 Bebilderung einer Druckplatte mit ultrakurzen Laserpulsen Imaging a printing plate with ultrashort laser pulses |
02/09/2011 | EP2282233A1 Lithographic apparatus |
02/09/2011 | EP2282188A1 Inspection device and inspecting method for spatial light modulator, illuminating optical system, method for adjusting the illuminating optical system, exposure device, and device manufacturing method |
02/09/2011 | EP2281867A1 Semi-Aqueous Stripping and Cleaning Formulation for Metal Substrate and Methods for Using Same |
02/09/2011 | EP2281866A1 Aqueous stripping and cleaning compositon |
02/09/2011 | EP2280737A2 Magnetic microstructures for magnetic resonance imaging |
02/09/2011 | CN201740971U Photoresist removing device of electron beam photoresist light mask plate |
02/09/2011 | CN1971395B A manufacturing method of optical limiter of photon crystal |
02/09/2011 | CN1924640B Method for manufacturing spectacles leg used spring mandrel body |
02/09/2011 | CN1869798B Liquid crystal display and method of manufacturing of a tft array panel of the same |
02/09/2011 | CN1800970B Forming method of mask pattern |
02/09/2011 | CN1771465B Photosensitive resin composition, photosensitive layer therefrom and photosensitive resin printing original plate |
02/09/2011 | CN1670628B Resist composition |
02/09/2011 | CN101971336A Three-dimensional hexagonal matrix memory array and method of manufacturing the same |
02/09/2011 | CN101971102A On-track process for patterning hardmask by multiple dark field exposures |
02/09/2011 | CN101971101A Actuator system, lithographic apparatus, and device manufacturing method |
02/09/2011 | CN101971100A Lithographic apparatus, plasma source, and reflecting method |
02/09/2011 | CN101971099A Laser processing a multi-device panel |
02/09/2011 | CN101971098A Lithography apparatus using extreme uv radiation and having a volatile organic compounds sorbing member comprising a getter material |
02/09/2011 | CN101971097A Photosensitive resin composition, photosensitive element, resist pattern forming method and method for manufacturing printed circuit board |
02/09/2011 | CN101971096A Radiation-sensitive resin composition |
02/09/2011 | CN101971095A Negative-working imageable elements with improved abrasion resistance |
02/09/2011 | CN101971094A Coloring curable composition, color filter and method for producing color filter |
02/09/2011 | CN101971093A Method to produce nanometer-sized features with directed assembly of block copolymers |
02/09/2011 | CN101971092A 3d mold for manufacture of sub-micron 3d structures using 2-d photon lithography and nanoimprinting and process thereof |
02/09/2011 | CN101971090A Low chlorine epoxy resin formulations |
02/09/2011 | CN101971061A Optical sheets |
02/09/2011 | CN101970532A Photosensitive resin and photosensitive resin composition comprising the same |
02/09/2011 | CN101970400A Novel salt having fluorine-containing carbanion structure, derivative thereof, photoacid generator, resist material using the photoacid generator, and pattern forming method |
02/09/2011 | CN101970242A Method for making lithographic printing original plate |
02/09/2011 | CN101969042A Ink jet printing and laser interference exposure based circuit interconnecting method |
02/09/2011 | CN101969026A Electrode preparation method based on ink jet printing and laser interference exposure |
02/09/2011 | CN101969025A Method for forming self-aligned silicide area block film pattern |
02/09/2011 | CN101968941A Process for preparing anti-counterfeiting marks by using exposure method |