| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 11/24/2011 | WO2011145743A1 Determination of a commutation offset and a compensation map for a stage |
| 11/24/2011 | WO2011145742A1 Polymerizable composition |
| 11/24/2011 | WO2011145703A1 Radiation-sensitive resin composition, method for forming resist pattern, polymer and compound |
| 11/24/2011 | WO2011145702A1 Radiation-sensitive resin composition, method for forming resist pattern, polymer and compound |
| 11/24/2011 | WO2011145663A1 Composition for formation of overlay film for immersion exposure and method for formation of photo-resist pattern |
| 11/24/2011 | WO2011145111A1 Micro/nano photoconductor |
| 11/24/2011 | WO2011144553A1 Device and method for producing flexographic printing sleeves |
| 11/24/2011 | WO2011144389A1 Illumination optics for a metrology system for examining an object using euv illumination light and metrology system comprising an illumination optics of this type |
| 11/24/2011 | WO2011144387A1 Lithographic apparatus and device manufacturing method |
| 11/24/2011 | WO2011110467A3 System for removing contaminant particles, lithographic apparatus, method for removing contaminant particles and method for manufacturing a device |
| 11/24/2011 | US20110287995 Resist remover composition and method for removing resist using same |
| 11/24/2011 | US20110287371 Component of an immersion system, an immersion lithographic apparatus and a device manufacturing method |
| 11/24/2011 | US20110287370 Method for making micron or submicron cavities |
| 11/24/2011 | US20110287368 Method of manufacturing electronic device |
| 11/24/2011 | US20110287367 Method and apparatus for verifying stitching accuracy of stitched chips on a wafer |
| 11/24/2011 | US20110287366 Photoresist composition comprising photoinitiators, and transparent thin film and liquid crystal display device using the composition |
| 11/24/2011 | US20110287365 Lithographic printing plate precursors |
| 11/24/2011 | US20110287364 Lithographic printing plate precursor |
| 11/24/2011 | US20110287363 High-resolution photolithographic method for forming nanostructures, in particular in the manufacture of integrated electronic devices |
| 11/24/2011 | US20110287362 Resist composition, method of forming resist pattern, novel compound, and acid generator |
| 11/24/2011 | US20110287361 Photoacid generators and photoresists comprising same |
| 11/24/2011 | US20110287360 Photoresist composition and method of forming pattern by using the same |
| 11/24/2011 | US20110287349 Multi-chip reticle photomasks |
| 11/24/2011 | US20110287347 Thin film evaluation method, mask blank, and transfer mask |
| 11/24/2011 | US20110287346 Mask blank manufacturing method, transfer mask manufacturing method, mask blank, and transfer mask |
| 11/24/2011 | US20110287345 Electron beam drawing apparatus, electron beam drawing method, semiconductor device manufacturing mask manufacturing method, and semiconductor device manufacturing template manufacturing method |
| 11/24/2011 | US20110287344 Reflective photomask, manufacturing method of the photomask, and pattern formation method |
| 11/24/2011 | US20110287343 Hologram recording material and hologram recording medium |
| 11/24/2011 | US20110287234 Negative resist pattern forming method, developer and negative chemical-amplification resist composition used therefor, and resist pattern |
| 11/24/2011 | US20110286713 Photosensitive resin composition, optical waveguide film, film for forming optical waveguide, optical interconnect, opto-electric hybrid circuit board, electronic device, and a method of manufacturing an optical waveguide film |
| 11/24/2011 | US20110286319 Charged particle beam writing apparatus, write data creation method and charged particle beam writing method |
| 11/24/2011 | US20110285978 Illumination system for a microlithographic projection exposure apparatus |
| 11/24/2011 | US20110285977 Lithographic apparatus and device manufacturing method |
| 11/24/2011 | US20110285956 Phase-type diffraction device, manufacturing method thereof and image pick-up apparatus |
| 11/24/2011 | US20110284855 Resin composition and display device using the same |
| 11/24/2011 | DE112004000774T5 Reagenz zur Ausbildung einer Feinstruktur und ein Verfahren zur Herstellung desselben Reagent to form a fine structure and a method of manufacturing the same |
| 11/24/2011 | DE102010029049A1 Beleuchtungsoptik für ein Metrologiesystem für die Untersuchung eines Objekts mit EUV-Beleuchtungslicht sowie Metrologiesystem mit einer derartigen Beleuchtungsoptik Illumination optics for a metrology system for scanning an object with EUV illumination light and metrology system with an illumination optics |
| 11/24/2011 | DE102010021539A1 Projektionsobjektiv mit Blenden Projection lens with an aperture |
| 11/24/2011 | DE102006054820B4 Verfahren zur Korrektur von Platzierungsfehlern A method of correcting placement errors |
| 11/23/2011 | EP2388800A1 Active Spectral Control of DUV Light Source |
| 11/23/2011 | EP2388650A1 Illumination system for illuminating a mask in a microlithographic exposure apparatus |
| 11/23/2011 | EP2388649A1 Illumination system for illuminating a mask in a microlithographic exposure apparatus |
| 11/23/2011 | EP2388142A1 Screen material and structure of a screen printing form |
| 11/23/2011 | EP2388119A1 An imprint lithography process |
| 11/23/2011 | EP2387735A1 Nonpolymeric binders for semiconductor substrate coatings |
| 11/23/2011 | EP2387598A1 Black matrix for colour filters |
| 11/23/2011 | EP1796143B1 Substrate holder, stage apparatus, and exposure apparatus |
| 11/23/2011 | EP1508157B1 High efficiency solid-state light source and methods of use and manufacture |
| 11/23/2011 | EP0999474B1 Photoresist resin composition and method for forming a pattern |
| 11/23/2011 | CN202049331U 散射曝光系统 Scattering exposure system |
| 11/23/2011 | CN1940724B Photosensitive resin composition, protective film and separator of LCD panel, forming method thereof and lcd panel |
| 11/23/2011 | CN1918514B Photosensitive resin composition and cured product thereof |
| 11/23/2011 | CN1916762B Photosensitive resin composition, cushion for display panel and display panel |
| 11/23/2011 | CN1755523B Chemically amplified resist composition |
| 11/23/2011 | CN1690861B Optical illumination system, exposure apparatus and device fabrication method |
| 11/23/2011 | CN102257437A Pre-alignment apparatus and pre-alignment method |
| 11/23/2011 | CN102257436A Wafer chuck for EUV lithography |
| 11/23/2011 | CN102257435A Silicon-containing resist underlayer film formation composition having anion group |
| 11/23/2011 | CN102257434A Ablation layer, photosensitive resin structure, and method for producing relief printing plate using the photosensitive resin structure |
| 11/23/2011 | CN102257433A Stack of negative-working imageable elements |
| 11/23/2011 | CN102257432A Cationic radiation curable compositions |
| 11/23/2011 | CN102257431A Positive-type photosensitive resin composition, method for producing resist pattern, semiconductor device, and electronic device |
| 11/23/2011 | CN102257430A Carrier solvent compositions, coatings compositions, and methods to produce thick polymer coatings |
| 11/23/2011 | CN102257421A Optical module for guiding a radiation beam |
| 11/23/2011 | CN102256929A Polymerizable photoinitiators and radiation curable compositions |
| 11/23/2011 | CN102256928A Cyclohexane oxidation process byproduct stream derivatives and methods for using the same |
| 11/23/2011 | CN102256927A Cyclohexane oxidation process byproduct derivatives and methods for using the same |
| 11/23/2011 | CN102256429A Collector for EUV light source |
| 11/23/2011 | CN102253612A Aligning method for dry films |
| 11/23/2011 | CN102253611A Method of detecting alignment mark and method of manufacturing printed circuit board |
| 11/23/2011 | CN102253608A Method for removing photoresist on photomask |
| 11/23/2011 | CN102253607A Method for optimizing coherent factor of photoetching machine lighting system |
| 11/23/2011 | CN102253606A System and method for carrying out in-situ detection on odd aberration of projection objective for photoetching machines |
| 11/23/2011 | CN102253605A Multiple parallel laser beam grating direct writing device and grating direct writing method |
| 11/23/2011 | CN102253604A Method for detecting quality of space image |
| 11/23/2011 | CN102253603A Alignment detection device for photoetching equipment |
| 11/23/2011 | CN102253602A Lighting dose real-time controlling apparatus in photolithography system |
| 11/23/2011 | CN102253601A Method for improving thermostability of 7350 photoresist |
| 11/23/2011 | CN102253600A Chemically amplified negative resist composition and patterning process |
| 11/23/2011 | CN102253599A Red-colored composition for color filter, and color filter |
| 11/23/2011 | CN102253598A Resin composition for production of optical waveguide, and optical waveguide produced by using the resin composition |
| 11/23/2011 | CN102253597A Compression type gas pressure method-based nano-scale pressure printing device |
| 11/23/2011 | CN102253596A Compositions and processes for immersion lithography |
| 11/23/2011 | CN102253524A Manufacturing method of colorful filtering substrate |
| 11/23/2011 | CN102253522A Liquid crystal display and manufacturing method thereof |
| 11/23/2011 | CN102253521A Liquid crystal display device and manufacturing method thereof |
| 11/23/2011 | CN102253477A Reflective, refractive and projecting optical system |
| 11/23/2011 | CN102253464A Projection objective and projection exposure machine |
| 11/23/2011 | CN102253436A Method for manufacturing micro lens array based on digital mask lithography technology |
| 11/23/2011 | CN102253435A Micromachining method for manufacturing polymer cylindrical microlens by electric field induction |
| 11/23/2011 | CN102250044A Piperazino photoinitiation sensitiser |
| 11/23/2011 | CN102249182A Method for preparing magnetic/polymer composite material three-dimensional micro/nano device capable of being remotely magnetically driven |
| 11/23/2011 | CN101907827B Positive-type photosensitive resin composition and protrusion for liquid crystal orientation control prepared from same |
| 11/23/2011 | CN101825848B Developing solution of thermosensitive positive-type photosensitive plate for printing and preparation method thereof |
| 11/23/2011 | CN101799625B Hyperbranched polyester micro-optical photoresist |
| 11/23/2011 | CN101740359B Nickel stripping method in method for manufacturing low-temperature polysilicon |
| 11/23/2011 | CN101535849B Color filter, and liquid crystal display device and ccd device each using the color filter |
| 11/23/2011 | CN101417747B Conveyer table mechanism |
| 11/23/2011 | CN101398632B Lithographic apparatus and method of cleaning a lithographic apparatus |
| 11/23/2011 | CN101398612B Photomask, manufacturing method thereof and pattern transfer printing method |