| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 01/14/2015 | CN104281014A 掩模板、曝光设备及紫外掩模基板的制备方法 Preparation mask, exposure apparatus and the mask substrate UV |
| 01/14/2015 | CN104281013A 一种直写式光刻系统倾斜扫描拼接方法 A direct-write lithography system tilt scan stitching method |
| 01/14/2015 | CN104281012A 一种气体保护镜头 A gas to protect the lens |
| 01/14/2015 | CN104281011A 一种高数值孔径成像系统偏振像差的检测方法 A method for detecting a high numerical aperture imaging system polarization aberration |
| 01/14/2015 | CN104281010A 形成方法和基板 Formation method and substrate |
| 01/14/2015 | CN104281009A 光刻重叠采样 Lithography overlapping sampling |
| 01/14/2015 | CN104281008A 曝光图像补偿方法 Exposure image compensation method |
| 01/14/2015 | CN104281007A 光刻胶供给装置及涂布机 Supply device and the photoresist coating machine |
| 01/14/2015 | CN104281006A 放射线敏感性组合物 The radiation-sensitive composition |
| 01/14/2015 | CN104281005A 固化性树脂组合物、其固化物、具有其的印刷电路板、以及固化物的制造方法 Curable resin composition, cured product thereof, a printed circuit board having thereof, and a method of manufacturing the cured product |
| 01/14/2015 | CN104281004A 一种热压法制备pdms印章的方法 One method of hot stamp prepared pdms |
| 01/14/2015 | CN104281003A 压印装置以及物品的制造方法 Marking device and method of manufacturing goods |
| 01/14/2015 | CN104281002A 图案形成方法、光刻装置、光刻系统及物品制造方法 Patterning method, lithographic apparatus, a lithography system and method for manufacturing articles |
| 01/14/2015 | CN104280851A 一种调焦调平自身零平面调整装置和方法 One kind of leveling itself focusing plane zero adjustment apparatus and method |
| 01/14/2015 | CN104277530A 一种新型光线涂料 A new light coating |
| 01/14/2015 | CN104276995A 高感光度肟酯光聚合引发剂及包含该化合物的光聚合组成物 High sensitivity oxime ester photopolymerization initiator and a photopolymerizable composition containing the compound |
| 01/14/2015 | CN103076645B 贴片式云纹光栅的制作方法 SMD production methods moire grating |
| 01/14/2015 | CN103045014B 自干感光抗酸蚀抗电镀油墨及其制备方法 Since dry sensitive anti-anti-plating etching ink and its preparation method |
| 01/14/2015 | CN102998914B 一种直写式光刻加工系统及光刻方法 A direct-write lithography and photolithography processing system |
| 01/14/2015 | CN102681365B 一种投影物镜波像差检测装置及方法 A projection lens aberration detection device and method |
| 01/14/2015 | CN102653157B 平版印刷版原版及其制版方法 Lithographic printing plate precursor and plate method |
| 01/14/2015 | CN102645840B 导电图形的形成方法以及导电膜基板 The method of forming a conductive pattern and a conductive film substrate |
| 01/14/2015 | CN102576195B 源收集器设备、光刻设备以及器件制造方法 Source collector device, lithographic apparatus and device manufacturing method |
| 01/14/2015 | CN102402129B 光刻设备、器件制造方法和施加图案到衬底上的方法 Lithographic apparatus, device manufacturing method and the method of applying a pattern onto a substrate |
| 01/14/2015 | CN102256429B 一种修复euv光源集光器的方法及装置 A prosthetic euv light collector method and apparatus |
| 01/14/2015 | CN102193315B 着色感光性树脂组合物 The colored photosensitive resin composition |
| 01/14/2015 | CN102004272B 光学器件及其制造方法和母板的制造方法 The method of manufacturing an optical device and manufacturing method and a motherboard |
| 01/14/2015 | CN101805274B 具有可光化固化基团的特殊反应活性和低粘度脲基甲酸酯的制备方法和它用于特殊耐划性涂层的制备的用途 Preparation having a specific reactive group and actinic curing allophanate low viscosity and its use for special scratch resistant coating prepared |
| 01/14/2015 | CN101685267B 光束变换元件、光学照明装置、曝光装置以及曝光方法 Beam transforming element, illumination optical apparatus, exposure apparatus and exposure method |
| 01/13/2015 | US8934086 Illumination optical system, exposure apparatus and device manufacturing method |
| 01/13/2015 | US8934085 Bundle-guiding optical collector for collecting the emission of a radiation source |
| 01/13/2015 | US8934084 System and method for printing interference patterns having a pitch in a lithography system |
| 01/13/2015 | US8934083 Lithographic apparatus and detector apparatus |
| 01/13/2015 | US8934080 Apparatus and methods for recovering fluid in immersion lithography |
| 01/13/2015 | US8934079 Optical imaging with reduced immersion liquid evaporation effects |
| 01/13/2015 | US8933144 Curable composition for imprint, pattern-forming method and pattern |
| 01/13/2015 | US8932945 Wafer alignment system and method |
| 01/13/2015 | US8932804 Method for patterning flexible substrate |
| 01/13/2015 | US8932803 Pattern forming process |
| 01/13/2015 | US8932802 Atomic layer deposition lithography |
| 01/13/2015 | US8932801 Photosensitive polyimides |
| 01/13/2015 | US8932800 Positive photosensitive resin composition and method for forming cured film using the same |
| 01/13/2015 | US8932799 Photoresist system and method |
| 01/13/2015 | US8932798 Alkali-developable photosensitive resin composition |
| 01/13/2015 | US8932797 Photoacid generators |
| 01/13/2015 | US8932796 Hybrid photoresist composition and pattern forming method using thereof |
| 01/13/2015 | US8932795 Resist composition, method of forming resist pattern, novel compound, and acid generator |
| 01/13/2015 | US8932794 Positive photosensitive composition and pattern forming method using the same |
| 01/13/2015 | US8932793 Phenolic polymers and photoresists comprising same |
| 01/13/2015 | US8932786 Metal azo pigments and pigment preparations produced therefrom |
| 01/13/2015 | US8932672 Substrate processing apparatus |
| 01/13/2015 | US8932475 Methods of patterning a conductor on a substrate |
| 01/13/2015 | US8932398 Gallotannic compounds for lithographic printing plate coating compositions |
| 01/13/2015 | US8932097 Insulating pattern, method of forming the insulating pattern, light-emitting device, method of manufacturing the light-emitting device, and lighting device |
| 01/13/2015 | US8932042 Lithographic apparatus and device manufacturing method |
| 01/08/2015 | WO2015002381A1 Blue dye compound, blue resin composition for color filter comprising same and color filter using same |
| 01/08/2015 | WO2015002250A1 Pattern forming method, electronic device production method, and electronic device |
| 01/08/2015 | WO2015002216A1 Pigment multimer, coloring composition, cured film, color filter, method for manufacturing color filter, solid-state imaging element, and image display device |
| 01/08/2015 | WO2015002207A1 Photosensitive resin laminate for flexographic printing plates having improved infrared ablation layer |
| 01/08/2015 | WO2015002183A1 Positive photosensitive resin composition, cured film formed by curing same, and optical device equipped with same |
| 01/08/2015 | WO2015002071A1 Photosensitive resin composition |
| 01/08/2015 | WO2015001936A1 Method for forming coating film and computer storage medium |
| 01/08/2015 | WO2015001873A1 Colored curable composition, cured film using same, color filter, production method for color filter, solid state imaging element, liquid crystal display device, and organic el display device |
| 01/08/2015 | WO2015001805A1 Multilayer film reflector, multilayer film reflector manufacturing method, projection optical system, exposure apparatus, device manufacturing method |
| 01/08/2015 | WO2015001804A1 Photoacid generator, and resin composition for photolithography |
| 01/08/2015 | WO2015001736A1 Exposure device and lighting unit |
| 01/08/2015 | WO2015001689A1 Table device and carrier device |
| 01/08/2015 | WO2015000777A1 Lithographic apparatus, positioning system for use in a lithographic apparatus and method |
| 01/08/2015 | WO2015000761A1 Transparent composite composition |
| 01/08/2015 | WO2015000673A1 Inspection apparatus and method, lithographic apparatus, lithographic processing cell and device manufacturing method |
| 01/08/2015 | WO2015000263A1 Exposure device and exposure method thereof |
| 01/08/2015 | WO2015000214A1 Positive photoresist composition and positive photoresist developing process |
| 01/08/2015 | WO2015000213A1 Negative chemically-amplified photoresist and imaging method thereof |
| 01/08/2015 | WO2015000211A1 Novel photoresist stripper and application process thereof |
| 01/08/2015 | WO2015000196A1 Photomask, glass substrate and manufacturing method thereof |
| 01/08/2015 | WO2015000097A1 Lighting system of step-and-scan projection mask aligner |
| 01/08/2015 | US20150012897 Methods for fabricating integrated circuits including generating photomasks for directed self-assembly |
| 01/08/2015 | US20150012896 Methods for fabricating integrated circuits including generating photomasks for directed self-assembly |
| 01/08/2015 | US20150011092 Resist underlayer film-forming composition containing copolymer resin having heterocyclic ring |
| 01/08/2015 | US20150010869 Methods of providing patterned chemical epitaxy templates for self-assemblable block copolymers for use in device lithography |
| 01/08/2015 | US20150010868 Manufacturing method of liquid ejection head |
| 01/08/2015 | US20150010867 Method for manufacturing electrophoresis gel and apparatus for manufacturing electrophoresis gel |
| 01/08/2015 | US20150010866 Resist pattern-forming method and photoresist composition |
| 01/08/2015 | US20150010865 Pigment dispersion and yellow resist composition for color filter and ink composition containing the pigment dispersion |
| 01/08/2015 | US20150010864 Meta-Photoresist for Lithography |
| 01/08/2015 | US20150010858 Pattern forming method, actinic ray-sensitive or radiation-sensitive composition used therein, resist film, manufacturing method of electronic device using the same, and electronic device |
| 01/08/2015 | US20150010857 Actinic ray-sensitive or radiation-sensitive composition, resist film using the same, pattern forming method, method for manufacturing electronic device, and electronic device |
| 01/08/2015 | US20150010856 Colored radiation-sensitive composition, colored cured film, color filter, colored pattern forming method, color filter production method, solid-state image sensor, and image display device |
| 01/08/2015 | US20150010855 Actinic ray-sensitive or radiation-sensitive composition, and resist film, resist-coated mask blanks, resist pattern forming method and photomask each using the composition |
| 01/08/2015 | US20150010735 Curable resin composition, cured product thereof, printed circuit board comprising the same, and method for producing the cured product |
| 01/08/2015 | US20150009488 Mask distortion measuring apparatus and method of measuring mask distortion |
| 01/08/2015 | US20150009483 Mask clamping apparatus and method of manufacturing mask |
| 01/08/2015 | US20150009482 Extreme ultraviolet lithography mask |
| 01/08/2015 | US20150009481 Lithography Apparatus and System, a Method of Calibrating a Lithography Apparatus, and Device Manufacturing Methods |
| 01/08/2015 | US20150009480 Reflective optical element for grazing incidence in the euv wavelength range |
| 01/08/2015 | US20150009479 Lithographic apparatus |
| 01/08/2015 | US20150009478 Exposure head and exposure device |
| 01/08/2015 | US20150008211 Method for developing resist, method for forming a resist pattern, method for producing a mold, and developing fluid utilized in these methods |
| 01/08/2015 | DE112013001217T5 Pigmentdispersion und gelbe Resist-Zusammensetzung für Farbfilter und Tintenzusammensetzung, die die Pigmentdispersion enthält And yellow pigment dispersion resist composition for color filters and ink composition containing the pigment dispersion |
| 01/08/2015 | DE102014211066A1 Vorrichtung und Verfahren zur Reinigung eines Spiegels einer mikrolithographischen Projektionsbelichtungsanlage Apparatus and method for cleaning a mirror of a microlithography projection exposure apparatus |