Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
05/2012
05/10/2012WO2012018181A3 Negative photosensitive resin composition
05/10/2012US20120115091 Developer, process for treating developing solution, process for producing printing plate, and filter apparatus
05/10/2012US20120115090 Substrate treatment method, computer storage medium and substrate treatment apparatus
05/10/2012US20120115089 Process for forming a hydrophilic coating and hydrophilic coating, and process for forming an ink jet recording head and ink jet recording head
05/10/2012US20120115088 Development of printing members having post-anodically treated substrates
05/10/2012US20120115087 Method for improving electron-beam
05/10/2012US20120115086 Method for producing polymer, polymer for lithography, resist composition, and method for producing substrate
05/10/2012US20120115085 Positive resist composition and method of pattern formation with the same
05/10/2012US20120115084 Crosslinking agent, negative resist composition, and pattern forming method using the negative resist composition
05/10/2012US20120115083 Biodegradable Film for Flexographic Printing Plate Manufacture and Method of Using the Same
05/10/2012US20120115082 Resin and photoresist composition comprising the same
05/10/2012US20120115075 Mask blank, transfer mask, method of manufacturing a transfer mask, and method of manufacturing a semiconductor device
05/10/2012US20120114910 Flexible gas barrier film, method for preparing the same, and flexible display device using the same
05/10/2012US20120114903 Method for forming a microstructure
05/10/2012US20120114294 Resin composition for optical waveguide, and optical waveguide produced by using the resin composition
05/10/2012US20120113429 Device and method for the optical measurement of an optical system by using an immersion fluid
05/10/2012US20120113402 Lithographic apparatus and device manufacturing method
05/10/2012US20120113063 Touch panel and a manufacturing method the same
05/10/2012US20120112142 Curable coloring composition, color filter and method for producing same, and quinophthalone dye
05/10/2012US20120112140 Photosensitive Resin Composition for Color Filter and Color Filter Using Same
05/10/2012DE102011076658A1 Illumination lens for use in projection illumination system for extreme UV-projection lithography for manufacturing e.g. semiconductor chip, has first selection facet comprising larger surface than surfaces of second and third facets
05/09/2012EP2450944A1 Exposure condition setting method and surface inspection apparatus
05/09/2012EP2450746A1 Positive resist composition and pattern forming method using the composition
05/09/2012EP2450724A1 Method for producing article having fine recessed and projected structure on surface, and method for producing wire grid polarizer
05/09/2012EP2450387A1 Photopolymer formulation for producing holographic media
05/09/2012EP2450175A2 Device for uniformly structuring substrates
05/09/2012EP2449576A1 Substrate processing system
05/09/2012EP2449560A1 Method for producing a refractive optical element and refractive optical element
05/09/2012EP2449431A1 Projection optical system, exposure apparatus, and assembly method thereof
05/09/2012EP2449430A1 Spectral purity filter, lithographic apparatus, and method for manufacturing a spectral purity filter
05/09/2012EP2449429A1 Actinic ray-sensitive or radiation-sensitive resin composition and pattern forming method using the same
05/09/2012EP2449428A2 Chucking system with recessed support feature
05/09/2012EP2449418A1 Mountings for rotation of array of reflective elements and lithographic apparatus incorporating same
05/09/2012EP2449076A1 Aqueous alkaline cleaning compositions and methods of their use
05/09/2012EP2448991A2 A self-imageable film forming polymer, compositions thereof and devices and structures made therefrom
05/09/2012EP2448764A1 Method for printing a material onto a substrate
05/09/2012EP2316056B1 Process for fabricating multi-level metal parts by the uv-liga technique
05/09/2012EP2285571B1 Method of imaging and developing positive-working imageable elements
05/09/2012EP2255249B1 Plate pallet alignment system
05/09/2012EP1463096B1 Exposure device, exposure method, and method of producing semiconductor device
05/09/2012EP1373980B1 High performance, photoimageable resin compositions and printing plates prepared therefrom
05/09/2012EP0992556B1 Coating liquid for forming silica-based film having low dielectric constant and substrate having film of low dielectric constant coated thereon
05/09/2012CN202217126U Exposure equipment
05/09/2012CN202217125U Device for applying protective film to circuit board film
05/09/2012CN102449769A Apparatus and method to fabricate an electronic device
05/09/2012CN102449554A Compositions and methods for removing organic substances
05/09/2012CN102449553A Exposure apparatus
05/09/2012CN102449552A Optical projection device for exposure apparatus, exposure apparatus, method for exposure, method for fabricating substrate, mask, and exposed substrate
05/09/2012CN102449551A Transporting method, transporting apparatus, exposure method, and exposure apparatus
05/09/2012CN102449526A Imaging optics and projection exposure installation for microlithography with an imaging optics of this type
05/09/2012CN102449131A Compositions and methods for removing organic substances
05/09/2012CN102449000A Fluorine-containing compound, fluorine-containing polymer compound, resist composition, top coat composition and pattern formation method
05/09/2012CN102446902A Graphic structure integrating dimensional measurement and overlay accuracy detection and method thereof
05/09/2012CN102446749A Method for achieving accurate graphic positioning during observation using scanning electron microscope
05/09/2012CN102446732A Grid reworking process capable of improving stability of multi-time exposure
05/09/2012CN102446712A Method for increasing double patterning process windows
05/09/2012CN102445865A Photo-etching graphic alignment marking method capable of reducing alignment bias of photo-etching machine
05/09/2012CN102445862A Improved wafer developing method
05/09/2012CN102445861A Photoetching machine system with position triggered scanning mode and method thereof
05/09/2012CN102445860A Method for matching different photoetching machines in same photoetching technology
05/09/2012CN102445859A Method for testing shading baffle of photo-etching machine
05/09/2012CN102445858A Technical matching method for photo-etching machines
05/09/2012CN102445857A Temperature control silicon wafer stage of photo-etching machine
05/09/2012CN102445856A Silicon wafer object table temperature control system of lithography machine and control method thereof
05/09/2012CN102445855A Double-layer exposure compensation method
05/09/2012CN102445854A Workpiece stage vertical position measuring system
05/09/2012CN102445853A Photosensitive resin composition and color filter as well as preparation method thereof
05/09/2012CN102445852A Positive-type photosensitive resin composition and pattern forming method thereof
05/09/2012CN102445851A Colored photosensitive composition
05/09/2012CN102445850A Alkali development-type solder resist, cured product thereof, and printed wiring board prepared by using the same
05/09/2012CN102445849A Light sensitive resin composition
05/09/2012CN102445848A Photoresist compositions and methods of forming photolithographic patterns
05/09/2012CN102445847A Colored photosensitive resin composition, color filter and liquid crystal display
05/09/2012CN102445846A Photosensitive conductive paste
05/09/2012CN102445845A Colored composition for color filter, color filter and method of producing the same, liquid crystal display device, organic electro-luminescence display device, and solid-state imaging element
05/09/2012CN102445844A Colored photosensitive resin composition
05/09/2012CN102445843A Photosensitive composition, photosensitive film, photosensitive laminate, method of forming a permanent pattern, and printed board
05/09/2012CN102445842A Photosensitive resin composition and black matrix using the same
05/09/2012CN102445841A Photosensitive resin composition and light blocking layer using the same
05/09/2012CN102445840A Coating and developing device
05/09/2012CN102445839A Method for self-aligned photo-etching
05/09/2012CN102445838A Method for reforming photo-resist pattern
05/09/2012CN102445837A Laser pattern mask and method for fabricating the same
05/09/2012CN102445836A Photomask and exposure method thereof
05/09/2012CN102445785A Colour liquid crystal display device
05/09/2012CN102445783A Multicolor liquid crystal display device
05/09/2012CN102445158A Method for manufacturing high-temperature speckles
05/09/2012CN102445149A Workpiece table position measuring device and measuring method
05/09/2012CN102443281A Method for transferring photochemical relief miniature image onto pigment surface
05/09/2012CN102443136A Photosensitive resin, curable resin composition containing the same, dry film thereof, and printed circuit board using them
05/09/2012CN102442945A Compounds and colored photosensitive resin compositions containing the same
05/09/2012CN102442049A Lithographic printing plate precursor and plate making method thereof
05/09/2012CN101989045B Method for avoiding graphics damage of photoresist layer
05/09/2012CN101930172B Thermosensitive CTP thermal-induction imaging liquid taking active etherate of pyrogallol and divinylbenzene polycondensate resin as dissolution inhibitor
05/09/2012CN101907825B Photoetching encrypted anti-counterfeiting method
05/09/2012CN101846889B Exposure apparatus
05/09/2012CN101840882B Shallow slot isolation method
05/09/2012CN101823989B Polymer for resist, resist composition, pattern forming method and material compound for resist polymer
05/09/2012CN101813887B Method for enhancing thermal stability of diazo photosensitive emulsion
05/09/2012CN101806998B Manufacture method of substrate below silica-based electrowetting microdisplay device