| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 01/28/2015 | EP2829916A1 Colored radiation-sensitive composition, colored cured film, color filter, method for forming colored pattern, method for manufacturing color filter, solid state image sensor, and image display device |
| 01/28/2015 | EP2829915A1 Colored radiation-sensitive composition, colored cured film, color filter, pattern forming method, method for producing color filter, solid-state imaging element, and image display device |
| 01/28/2015 | EP2829567A1 Process for controlling the period characterizing the morphology obtained from a blend of block copolymers and of (co) polymers of one of the blocks |
| 01/28/2015 | EP2829534A1 Novel compound and photosensitive resin composition |
| 01/28/2015 | EP2828709A1 Liquid deposition photolithography |
| 01/28/2015 | EP2828708A2 Arrangement and method for transporting radicals |
| 01/28/2015 | EP2828707A2 Manufacturing method of an apparatus for the processing of single molecules |
| 01/28/2015 | EP2828431A1 Kits and methods of treating a substrate prior to formation of an image thereon |
| 01/28/2015 | CN204131837U 一种pcb防焊曝光夹具 One kind of exposure pcb solder fixtures |
| 01/28/2015 | CN204129435U 高均匀度的紫外led曝光头 High uniformity ultraviolet led exposure head |
| 01/28/2015 | CN204129434U 光刻胶供应装置及系统 Photoresist supply device and system |
| 01/28/2015 | CN204129433U 用于纳米压印复合模板的复制装置 Reproducing apparatus nanoimprint templates for complex |
| 01/28/2015 | CN204123818U 镭射母版的光刻机 Master laser lithography machine |
| 01/28/2015 | CN104321702A 传感器、光刻设备以及器件制造方法 Sensor, lithographic apparatus and device manufacturing method |
| 01/28/2015 | CN104321701A 用于运输自由基的装置和方法 Apparatus and method for transport of radicals |
| 01/28/2015 | CN104321700A 使用化学气相沉积膜控制嵌段共聚物薄膜中的域取向 Film using a chemical vapor deposition film of the block copolymer control domain alignment |
| 01/28/2015 | CN104321354A 用于制造含涂层产品以及复合物的方法和配方 Method for manufacturing a product containing coatings and composites and recipes |
| 01/28/2015 | CN104321195A 转印膜、静电电容型输入装置的制造方法及静电电容型输入装置、以及具备其的图像显示装置 Transfer film, method of manufacturing the capacitance type input device and an electrostatic capacitance type input device, and an image display apparatus which includes |
| 01/28/2015 | CN104317560A 一种两层架构的曝光机专用控制器控制程序开发方法 A two-layer structure of an exposure machine dedicated controller program development method |
| 01/28/2015 | CN104317173A 一种提高剥离工艺成品率的方法 Method for improving lift-off process yield method |
| 01/28/2015 | CN104317172A 一种用于光刻胶剥离的剥离液 A liquid photoresist stripping stripping |
| 01/28/2015 | CN104317171A 一种声表面波器件在光刻过程中的前烘方法 A surface acoustic wave device before baking method in photolithography process |
| 01/28/2015 | CN104317170A 测量套刻精度的方法及装置、光刻方法 Overlay accuracy measurement method and apparatus, lithographic method |
| 01/28/2015 | CN104317169A 一种极紫外光刻波纹板照明系统 An extreme ultraviolet lithography corrugated board lighting system |
| 01/28/2015 | CN104317168A 极紫外光刻系统中与杂散光有关的镜面加工误差分析方法 Mirror processing error analysis methods and stray light related EUVL system |
| 01/28/2015 | CN104317167A 一种光刻投影物镜内部腔室气体环境采集控制系统 A lithographic projection lens inside the chamber atmosphere acquisition and control system |
| 01/28/2015 | CN104317166A 实现稳定的GaAs深紫外图形光刻工艺的方法 GaAs DUV lithography process graphical method to realize a stable |
| 01/28/2015 | CN104317165A 丝网印刷用印版的补强剂及其应用方法和补强后的印版 Screen printing plate with a reinforcing plate and reinforcing agents and their application methods after |
| 01/28/2015 | CN104317164A 黑色可固化组合物 Black curable composition |
| 01/28/2015 | CN104317163A 一种二氧化硅模板表面抗粘连的修饰方法 One silica template anti-adhesion surface modification method |
| 01/28/2015 | CN104317162A 一种石墨烯的化学图形化方法 One kind of patterned graphene chemical method |
| 01/28/2015 | CN104317161A 用于衬底双面图案形成的方法和系统 Method and system for double-sided patterning of the substrate |
| 01/28/2015 | CN104317031A 一种用于光刻投影物镜热效应矫正的非轴对称镜组结构 Non-axisymmetric mirror group structure a lithographic projection lens for the correction of thermal effects |
| 01/28/2015 | CN104316172A 用于光刻机的能量探测装置 Energy detecting means for lithography |
| 01/28/2015 | CN104316104A 一种光刻投影物镜内部腔室高精度气体测量装置 A lithographic projection objective internal chamber gas with high accuracy measuring device |
| 01/28/2015 | CN104311793A 一种感光变色油墨预聚物、其制备方法及感光变色油墨 One kind Dreaming ink prepolymer preparation method and Dreaming ink |
| 01/28/2015 | CN104309345A 一种丝网印刷方法 One kind of a screen printing method |
| 01/28/2015 | CN103357346B 颜料分散剂、颜料分散液、彩色光刻胶及其制备和应用 Pigment dispersants, pigment dispersions, color photoresist and its preparation and application |
| 01/28/2015 | CN103246176B 一种用于隔离激光等离子体极紫外光源碎屑隔离腔 A method for the isolation of laser plasma EUV source debris isolation chamber |
| 01/28/2015 | CN103186041B 抗蚀剂添加剂及包含该添加剂的抗蚀剂组合物 Resist additives and resist compositions comprising the additive |
| 01/28/2015 | CN103094204B 制造液晶显示装置的阵列基板的方法 The method of manufacturing the array substrate of the liquid crystal display device |
| 01/28/2015 | CN103091980B 一种多孔纳米压印模板及其制备方法 A porous nano-imprint template and its preparation method |
| 01/28/2015 | CN103091978B 通过负性显影形成光刻图形的方法 The method of forming a photolithographic pattern by negative development |
| 01/28/2015 | CN103048888B 一种以金属玻璃为光刻胶的光刻方法及系统 Kind of metallic glass photoresist lithography method and system |
| 01/28/2015 | CN102981249B 一种投影光学系统 A projection optical system |
| 01/28/2015 | CN102848667B 一种具有多重防伪效果的防伪薄膜及其制备方法 Security film and preparation method has the effect of multiple security |
| 01/28/2015 | CN102736445B 掩模与工件的对齐方法 Methods of alignment of the mask and the workpiece |
| 01/28/2015 | CN102736414B 着色组合物以及使用了该着色组合物的滤色器 The coloring composition and the use of the coloring composition color filter |
| 01/28/2015 | CN102730629B 一种微透镜的制备方法及其产品 Method for preparing a microlens and its products |
| 01/28/2015 | CN102681341B 光致抗蚀剂组合物和形成光刻图案的方法 Photoresist composition and formation of photolithographic patterning methods |
| 01/28/2015 | CN102668025B 曝光装置 Exposure device |
| 01/28/2015 | CN102650757B 彩膜基板、其制备方法及液晶显示面板 Color filter substrate, its preparation method and LCD panel |
| 01/28/2015 | CN102629032B 一种基板上隔垫物的制作方法、基板以及液晶面板 Spacer material on a substrate fabrication method, substrate and liquid crystal panel |
| 01/28/2015 | CN102623423B 集成电路图案及多重图案化方法 IC design and multiple patterning method |
| 01/28/2015 | CN102566320B 曝光装置、曝光方法以及器件制造方法 Exposure apparatus, exposure method and device manufacturing method |
| 01/28/2015 | CN102549042B 氟化涂料和用其制作的底片 Fluoride coatings and with its production of the film |
| 01/28/2015 | CN102419516B 光照射装置和光照射方法 The light irradiation device and light irradiation method |
| 01/28/2015 | CN102221783B 化学放大正性抗蚀剂组合物和图案形成方法 Chemically amplified positive resist composition and pattern forming method |
| 01/28/2015 | CN101832831B 一种压阻传感器芯片及其制作方法 One kind of piezoresistive sensor chip and its manufacturing method |
| 01/27/2015 | US8942463 Harmonic resist model for use in a lithographic apparatus and a device manufacturing method |
| 01/27/2015 | US8941842 Double pass interferometric encoder system |
| 01/27/2015 | US8941832 Lateral shift measurement using an optical technique |
| 01/27/2015 | US8941815 Substrate table for a lithographic apparatus, lithographic apparatus, method of using a substrate table and device manufacturing method |
| 01/27/2015 | US8941813 Evaluation method, adjustment method, exposure apparatus, and memory medium |
| 01/27/2015 | US8941812 Exposure method, exposure apparatus, and device manufacturing method |
| 01/27/2015 | US8941811 Lithographic apparatus and device manufacturing method |
| 01/27/2015 | US8941810 Lithographic apparatus and device manufacturing method |
| 01/27/2015 | US8941808 Immersion lithographic apparatus rinsing outer contour of substrate with immersion space |
| 01/27/2015 | US8941166 Multiple patterning method |
| 01/27/2015 | US8941151 Patterning method, method of manufacturing organic field effect transistor, and method of manufacturing flexible printed circuit board |
| 01/27/2015 | US8941085 Electron beam lithography systems and methods including time division multiplex loading |
| 01/27/2015 | US8940804 Acrylate-based UV-curable ink, method and an ink base for producing same |
| 01/27/2015 | US8940476 Pattern forming method, actinic-ray-sensitive or radiation-sensitive resin composition, and resist film |
| 01/27/2015 | US8940475 Double patterning with inline critical dimension slimming |
| 01/27/2015 | US8940474 Method of providing lithographic printing plates |
| 01/27/2015 | US8940473 Resist composition and method for producing resist pattern |
| 01/27/2015 | US8940472 Coating compositions suitable for use with an overcoated photoresist |
| 01/27/2015 | US8940471 Actinic-ray- or radiation-sensitive resin composition and method of forming pattern using the composition |
| 01/27/2015 | US8940470 Photosensitive resin and process for producing microlens |
| 01/27/2015 | US8940464 Oxime ester photoinitiators |
| 01/27/2015 | US8940373 Liquid composition, ink jet recording method, ink jet recording apparatus and recorded image |
| 01/27/2015 | US8940210 Methods for manufacturing three-dimensional devices and devices created thereby |
| 01/27/2015 | US8940117 Methods and systems for forming flexible multilayer structures |
| 01/27/2015 | US8940087 Coloring matter compound, ink, resist composition for color filter, and heat-sensitive transfer recording sheet |
| 01/27/2015 | US8939587 Lens module comprising at least one exchangeable optical element |
| 01/27/2015 | US8939080 Methods of processing using silicate-free developer compositions |
| 01/22/2015 | WO2015009270A1 Organic light emitting diodes |
| 01/22/2015 | WO2015008737A1 Pigment dispersion for color filter |
| 01/22/2015 | WO2015008734A1 Coloring composition for color filter |
| 01/22/2015 | WO2015008726A1 Method for producing dye multimer, and method for producing coloring composition |
| 01/22/2015 | WO2015008604A1 Lithographic printing original plate and method for producing same |
| 01/22/2015 | WO2015008594A1 Resist composition for semiconductor manufacturing process; resist film, resist-coated mask blanks, photomask, and resist patterning method using said resist composition; electronic-device manufacturing method; and electronic device |
| 01/22/2015 | WO2015008578A1 Lithographic printing plate precursor, and method for producing same |
| 01/22/2015 | WO2015008560A1 Compound containing phenolic hydroxy group, photosensitive composition, composition for resists, resist coating film, curable composition, composition for resist underlayer films, and resist underlayer film |
| 01/22/2015 | WO2015008330A1 Photosensitive resin composition, film adhesive, adhesive sheet, adhesive pattern, semiconductor wafer with adhesive layer, and semiconductor device |
| 01/22/2015 | WO2015008021A1 Integrated circuit manufacture using direct write lithography |
| 01/22/2015 | WO2015007832A1 Optical assembly |
| 01/22/2015 | WO2015007792A1 Metering device for metering a light-curing material in a manually controlled manner |
| 01/22/2015 | WO2015007667A1 Process of manufacturing flexographic printing forms |
| 01/22/2015 | WO2015007557A1 Optical component |