Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
10/2012
10/03/2012CN202472238U Light energy monitoring system for lithography system
10/03/2012CN202472009U Glasses formed by intelligent antifog resin eyeglasses
10/03/2012CN1988956B Process for the photoactivation and use of a catalyst by an inverted two-stage procedure
10/03/2012CN1784487B Non-aqueous, non-corrosive microelectronic cleaning compositions
10/03/2012CN1442752B Anticorrosion image improved material
10/03/2012CN102714707A Image projection apparatus and method
10/03/2012CN102714157A Spin-on formulation and method for stripping an ion implanted photoresist
10/03/2012CN102714141A Liquid-immersion member, exposing device, exposing method, and device manufacturing method
10/03/2012CN102713761A Arrangement for and method of characterising the polarisation properties of an optical system
10/03/2012CN102713760A Light irradiation device, light irradiation method and liquid crystal panel manufacturing method
10/03/2012CN102713759A Pattern generation system
10/03/2012CN102713758A Composition for the bottom layer of a resist, and method using same to manufacture a semiconductor integrated circuit device
10/03/2012CN102713757A Composition for bottom layer of resist, and method using same to manufacture semiconductor integrated circuit device
10/03/2012CN102713756A Light-sensitive polymer composition, method for producing pattern, and electronic component
10/03/2012CN102713755A Hydrogel patterning and cell culture product
10/03/2012CN102713754A 感光树脂组合物 A photosensitive resin composition
10/03/2012CN102713753A Positive photosensitive resin composition, method for producing patterned cured film and electronic component
10/03/2012CN102713752A Method and process for metallic stamp replication for large area nanopatterns
10/03/2012CN102713751A Injection molding tools with micro/nano-meter pattern
10/03/2012CN102713695A Method for exposing color filter base
10/03/2012CN102713694A Method for exposing color filter base
10/03/2012CN102713690A Mirror for the EUV wavelength range, substrate for such a mirror, projection objective for microlithography comprising such a mirror or such a substrate, and projection exposure apparatus for microlithography comprising such a projection objective
10/03/2012CN102712664A Compound
10/03/2012CN102712599A Novel sulfonic acid derivative compound and novel naphthalic acid derivative compound
10/03/2012CN102712561A Bicyclohexane derivative and production method for same
10/03/2012CN102707588A Positioning alignment apparatus of double-side driving workpiece platform without being connected by cross beam
10/03/2012CN102707587A Technology for stripping metal of touch screen
10/03/2012CN102707586A Prebaking device and exhaust method of prebaking device
10/03/2012CN102707585A Photoresist recovery system
10/03/2012CN102707584A Double-light-beam exposure system and method for manufacturing photonic crystal mask layer
10/03/2012CN102707583A Multi-light-beam exposure system and method for manufacturing photonic crystal mask layer
10/03/2012CN102707582A Light source-mask synchronous optimization based on Abbe vector imaging model
10/03/2012CN102707581A Distortion compensation method of lithography objective
10/03/2012CN102707580A Hermetic sealing and gas-liquid separation and recovery device for immersed photoetching machine
10/03/2012CN102707579A Driver switching device used in position exchange of double workpiece benches
10/03/2012CN102707578A Laser ruler measurement signal switching device and method used in exchange process of double benches
10/03/2012CN102707577A Servo-controlling system of macro-micro mechanism and control method thereof
10/03/2012CN102707576A Work structure for providing scanning path of immersion photoetching machine
10/03/2012CN102707575A Mask plate and method for manufacturing array substrate
10/03/2012CN102707574A Lithographic apparatus and device manufacturing method
10/03/2012CN102707573A Lithographic apparatus and stage system
10/03/2012CN102707572A Device and method for scanning and spraying photoresist on convex spherical surface
10/03/2012CN102707571A Photosensitive element
10/03/2012CN102707570A Photosensitive resin composition, interval body and liquid display component comprising the same
10/03/2012CN102707569A Solder resist composition and printed circuit board
10/03/2012CN102707568A Photo-etching method of bottom surface of multi-step apparatus structure
10/03/2012CN102707567A Flexible-substrate-based nano-imprint template replication method
10/03/2012CN102707566A Photo-etching method
10/03/2012CN102707565A Manufacturing method of black matrix, color filter and display device
10/03/2012CN102707564A Color filter and manufacturing method thereof
10/03/2012CN102707415A Photoetching projection objective
10/03/2012CN102707414A Photoetching projection objective
10/03/2012CN102707404A Optical element X, Y and theta Z three-freedom-degree jogging regulation device
10/03/2012CN102707378A Method for manufacturing silicone micro-nano optical structure by using imprinting technology
10/03/2012CN102707357A Color filter and manufacturing method thereof
10/03/2012CN102707355A Transreflective color filter and manufacturing method thereof
10/03/2012CN102707353A Color filter and method for producing same
10/03/2012CN102707352A Color filter and method for manufacturing same
10/03/2012CN102707351A The producing of diffraction optical element with structured glass coating
10/03/2012CN102706785A Method for testing blocking ability of photoresist layer for ion implantation
10/03/2012CN102702431A Cyclohexyl copolymer resin and preparation method thereof as well as color photoresist and preparation method thereof
10/03/2012CN102702406A Photosensitive resin and preparation method and application thereof
10/03/2012CN102702073A Oxime ester photoinitiators
10/03/2012CN102701142A Wafer-integrated micro-lens optical system manufacturing method and apparatus structure
10/03/2012CN102393606B Heat-sensitive positive image CTP (Computer To Plate) photosensitive resist liquid and preparation method thereof
10/03/2012CN102200688B Photosensitive resin composition, black matrix prepared from the photosensitive resin composition, and application of the black matrix
10/03/2012CN102183875B Roller-type ultraviolet ray soft stamping method
10/03/2012CN102169219B Radial adjustment device for optical system
10/03/2012CN102157629B Method for manufacturing graphical sapphire substrate
10/03/2012CN102147567B Cell-based hierarchical optical proximity correction (OPC) method
10/03/2012CN102129178B Photoetching mark structure for SiGeC device
10/03/2012CN102109769B Joint adjusting device and joint adjusting method of workpiece stage interferometer and mask stage interferometer
10/03/2012CN102087482B Synchronized motion error correction and control system of photoetching machine worktable
10/03/2012CN102073225B Precision rotating, positioning and focusing system of nano-photon straight write head
10/03/2012CN102043341B Alignment signal acquisition system for photo-etching equipment and alignment method
10/03/2012CN102043340B Method for uniformly spraying photoresist
10/03/2012CN101995709B Fringing field switching (FFS) type thin film transistor liquid crystal display (TFT-LCD) array substrate and manufacturing method thereof
10/03/2012CN101989083B Photoresist management system of glue spreader
10/03/2012CN101974119B Nano silicon containing deep ultraviolet positive photoresist and forming resin thereof
10/03/2012CN101943865B Alignment marks for photoetching equipment and alignment method
10/03/2012CN101937879B Preparation technique of SiGe Bi-CMOS appliance
10/03/2012CN101937838B Methods of forming electronic devices
10/03/2012CN101930169B Separator of stamping die
10/03/2012CN101924013B Method for increasing photo-etching alignment precision after extension
10/03/2012CN101872130B Lithographic projection apparatus
10/03/2012CN101866115B Lithographic apparatus, positioning system, and positioning method
10/03/2012CN101840153B Metal artware relief color-painting method
10/03/2012CN101788763B Compositions and processes for immersion lithography
10/03/2012CN101782723B Pulse modifier with adjustable etendue
10/03/2012CN101750902B Atomization effect compensation method of exposure conditions of diverse electron beams and exposure method thereof
10/03/2012CN101740334B Photoetching pretreating method and photoetching method
10/03/2012CN101581884B Intaglio printing plate, production method for intaglio printing plate, production method for electronic substrate, and production method for display device
10/03/2012CN101482893B Semiconductor-device manufacturing method
10/03/2012CN101454721B Alkali developable black photosensitive resin composition for formation of light-tight partition
10/03/2012CN101414534B 电子束曝光系统 Electron beam exposure system
10/03/2012CN101387830B Radiation-sensitive resin composition for forming a colored layer and color filter
10/03/2012CN101349865B Photosensitive compositions, curable compositions, color filters, and method for manufacturing the same
10/03/2012CN101324755B Radiation sensitive resin composition, interlayer dielectric and microlens, and method for producing thereof
10/03/2012CN101320220B Exposure ploting device
10/03/2012CN101313246B Radiation-sensitive resin composition
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