Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
08/2012
08/09/2012US20120202158 Patterning process
08/09/2012US20120202157 Optical unit, illumination optical apparatus, exposure apparatus, and device manufacturing method
08/09/2012US20120202156 Cleaning process for semiconductor device fabrication
08/09/2012US20120202155 Underlayer coating composition and processes thereof
08/09/2012US20120202154 Black curable composition for wafer level lens and wafer level lens
08/09/2012US20120202153 Resist composition and patterning process
08/09/2012US20120202152 Lithographic printing plate precursor and plate making method thereof
08/09/2012US20120202151 Positive resist composition, method of forming resist pattern, and polymeric compound
08/09/2012US20120202150 Radiation-sensitive resin composition
08/09/2012US20120202145 Radiation-sensitive colored composition, color filter and method for producing the same, solid state image device, and liquid crystal display apparatus
08/09/2012US20120202142 Manufacturing method of exposure mask, shipment judgment method and manufacturing method of semiconductor device using exposure mask
08/09/2012US20120202140 Flare prediction method, photomask manufacturing method, semiconductor device manufacturing method, and computer-readable medium
08/09/2012US20120202138 Single Field Zero Mask For Increased Alignment Accuracy in Field Stitching
08/09/2012US20120200837 Exposure apparatus, and device manufacturing method
08/09/2012US20120200836 Exposure apparatus and device manufacturing method
08/09/2012US20120199957 Photoresists and methods for use thereof
08/09/2012US20120199727 Titanium black dispersion, photosensitive resin composition, wafer level lens, light blocking film, method for producing the light blocking film, and solid-state image pickup element
08/09/2012US20120199028 Preparing lithographic printing plates
08/09/2012DE112010003347T5 Stabilisatoren für Vinylether-Resistformulierungen für die Prägelithographie Stabilizers for vinyl ether resist formulations for imprint lithography
08/09/2012DE102011079451A1 Optical arrangement, particularly projection exposure system for extreme ultraviolet lithography, has optical element with reflective coating, which has cover layer, on whose surface oxidic impurities are present
08/09/2012DE102010000033B4 Verfahren zum Herstellen eines Halbleiterbauelements A method of manufacturing a semiconductor device
08/08/2012EP2485247A2 Image processing-based lithography system and target object coating method
08/08/2012EP2485091A1 Positive photosensitive resin composition, cured film obtained using same, and optical device
08/08/2012EP2485090A1 Radiation-sensitive resin composition for forming resist pattern
08/08/2012EP2484751A2 Gradient structures interfacing microfluidics and nanofluidics, methods for fabrication and uses thereof
08/08/2012EP2484536A1 Method for producing planographic printing plate precursor
08/08/2012EP2484535A1 Lithographic printing plate precursor and process for producing same
08/08/2012EP2484522A2 Lithographic printing plate precursor and plate making method thereof
08/08/2012EP2483748A1 Method of improving print performance in flexographic printing plates
08/08/2012EP2483747A1 Optical arrangement in a projection exposure apparatus for euv lithography
08/08/2012EP2483746A1 Reflective optical element and method for operating an euv lithography apparatus
08/08/2012EP2483745A1 Positive-working photoimageable bottom antireflective coating
08/08/2012EP2483744A1 Injection molding tools with micro/nano-meter pattern
08/08/2012EP2483720A1 Illumination optical unit for microlithography
08/08/2012EP2483719A1 Mesh structure for surface plasmon resonance spectroscopy
08/08/2012EP2483718A1 Black curable composition for wafer level lens and wafer level lens
08/08/2012EP2483356A1 Colorant multimer, colored curable composition, color filter and method for producing the same, and solid-state image sensor, image display device, liquid crystal display device and organic el display with the color filter
08/08/2012EP2122418B1 Stripper for coating layer
08/08/2012EP1687829B1 Lithographic systems and methods with extended depth of focus
08/08/2012EP1670040B1 Projection exposure apparatus, projection exposure method, and device manufacturing method
08/08/2012EP1497697B1 Photoresist compositions comprising acetals and ketals as solvents
08/08/2012EP1269259B1 Solventless, resistless direct dielectric patterning
08/08/2012CN202374582U Film exposure structure of oil plugging hole on circuit board
08/08/2012CN202372758U Baking device
08/08/2012CN202372757U Glue and waste water shunting device for automatic plate rinser of thermo-sensitive plate
08/08/2012CN202372756U Printing plate guide device in developing tank
08/08/2012CN202372755U Developing solution addition device for thermo-sensitive version automatic punching machine
08/08/2012CN202372754U Exposure machine and exposure system
08/08/2012CN202372753U Laser control system of photoetching machine
08/08/2012CN202372752U Photomask shielding unit for stepped lithography machine
08/08/2012CN102630335A Method for manufacturing semiconductor device and apparatus for manufacturing semiconductor device
08/08/2012CN102630246A Antireflective coating composition and process thereof
08/08/2012CN102629082A Design method of extreme ultra-violet lithography compound eye lighting system
08/08/2012CN102629081A FPGA-based control system for workpiece stage of DMD digital maskless photoetching machine
08/08/2012CN102629080A Production method for film-like product, production apparatus for film-like product, and mask
08/08/2012CN102629079A Illumination system, lithographic apparatus and method
08/08/2012CN102629078A Exposure technology and device
08/08/2012CN102629077A Preparation methods of resin dielectric layer and its material, liquid crystal panel and display member
08/08/2012CN102629076A Colored photosensitive resin composition
08/08/2012CN102629075A Yellow photosensitive resin composition, color filter and display device
08/08/2012CN102629074A Photoacid generator, method for producing the same, and resist composition comprising the same
08/08/2012CN102629073A Nano grating mask preparation method for surface plasma photoetching
08/08/2012CN102629032A Method for manufacturing spacer on substrate, substrate and liquid crystal panel
08/08/2012CN102629018A Color film substrate, thin film transistor (TFT) array substrate, manufacturing method thereof and liquid crystal display panel
08/08/2012CN102629016A Color film structure, manufacturing method of color film structure and liquid crystal display applying color film structure
08/08/2012CN102628973A Method for manufacturing color film substrate and color film substrate
08/08/2012CN102628971A Color filter and method and apparatus for manufacturing the same
08/08/2012CN102627770A Organosiloxane polymer, preparation method of the organosiloxane polymer, color photoresist for color filter, color filter and preparation method of the color filter
08/08/2012CN102627586A Photoacid generator, method for producing the same, and resist composition comprising the same
08/08/2012CN102627018A Lithographic printing plate precursor and plate making method thereof
08/08/2012CN102279518B Method for manufacturing metal doped full space or quasi-full space photonic crystal
08/08/2012CN102171614B Microlithography projection exposure apparatus having at least two operating states
08/08/2012CN102114738B Double-coating laser digital printing plate and plate making method
08/08/2012CN102103322B Flexographic plate for direct plate making of computer and preparation method thereof
08/08/2012CN102096334B Super-diffraction imaging device for improving resolution based on phase shifting principle and manufacturing method thereof
08/08/2012CN102033429B Photosensitive resin for plasma display screen electrode
08/08/2012CN102023472B Method for detecting photomask and method for reducing rework rate of semiconductor products by using photomask
08/08/2012CN101950128B Photosensitive resin for plasma display screen
08/08/2012CN101855598B Positive photosensitive composition, positive permanent resist, and method for producing positive permanent resist
08/08/2012CN101851411B Curable resin composition
08/08/2012CN101840151B Coating and developing apparatus, coating and developing method
08/08/2012CN101819388B Lithographic apparatus and device manufacturing method
08/08/2012CN101794070B Device for reducing projection super-resolution imaging and photoetching method
08/08/2012CN101738760B Pixel structure, optical element, liquid crystal display device and manufacturing method thereof
08/08/2012CN101720449B Image sensor for lithography
08/08/2012CN101713919B A multilevel greyscale photo mask and method for producing the same
08/08/2012CN101681127B A gum solution for developing and gumming a photopolymer printing plate.
08/08/2012CN101680984B Curable composition for color filter, method for producing curable composition for color filter, colored curable resin composition, method for forming colored pattern, colored pattern, method for prod
08/08/2012CN101634807B Photosensitive resin composition for black matrix and liquid crystal display element
08/08/2012CN101611350B Positive-type photosensitive resin composition
08/08/2012CN101528682B Oxime ester compound and photopolymerization initiator comprising the compound
08/08/2012CN101523294B Catadioptric projection objective with pupil mirror. projection exposure apparatus and method
08/08/2012CN101517487B Radiation-sensitive composition, method of forming silica-based coating film, silica-based coating film, apparatus and member having silica-based coating film and photosensitizing agent for insulating
08/08/2012CN101510052B Movable support, position control system, lithographic apparatus and method of controlling a position of an exchangeable object
08/08/2012CN101406033B Internal-drum imagesetter
08/08/2012CN101403854B Nano-patterning method and method of manufacturing master plate and discrete track magnetic recording media
08/08/2012CN101384672B Blue colour filters with enhanced contrast
08/08/2012CN101349862B Method for calibrating optical approach correcting model based on multi-photoresist active diffusion length
08/08/2012CN101228478B Method for generating photo mask graphic data, photo mask generated by the data and manufacturing method of semiconductor device using the photo mask
08/08/2012CN101196685B Colored curable composition for color filter, color filter and process for producing the same
1 ... 149 150 151 152 153 154 155 156 157 158 159 160 161 162 163 164 165 166 167 168 169 ... 1272