Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
10/2012
10/11/2012WO2012111927A3 Compound and organic electrical element using same, and electronic device and heat-resistance measuring method therewith
10/11/2012WO2011031047A3 Method for manufacturing stamper for injection molding
10/11/2012US20120258408 Electroplating apparatus for tailored uniformity profile
10/11/2012US20120258407 Multifield incoherent Lithography, Nomarski Lithography and multifield incoherent Imaging
10/11/2012US20120258406 Apparatus and method for preparing relief printing form
10/11/2012US20120258405 Resist composition and method for producing resist pattern
10/11/2012US20120258404 Resist composition and method for producing resist pattern
10/11/2012US20120258403 Salt and photoresist composition comprising the same
10/11/2012US20120258402 Photoresist composition, resist-pattern forming method, polymer, and compound
10/11/2012US20120258401 Resist composition and method for producing resist pattern
10/11/2012US20120258400 Novel tarc material for immersion watermark reduction
10/11/2012US20120258399 Radiation-sensitive resin composition, compound and producing method of compound
10/11/2012US20120258391 Measurement apparatus, exposure apparatus, and device fabrication method
10/11/2012US20120258390 Exposure method and exposure device
10/11/2012US20120258387 Method and mask for enhancing the resolution of patterning 2-row holes
10/11/2012US20120258309 Diagnostic gel composition, method for making a diagnostic gel composition
10/11/2012US20120258289 Method of fabricating nanostructure array and device including nanostructure array
10/11/2012US20120257343 Conductive metal micro-pillars for enhanced electrical interconnection
10/11/2012US20120257283 Dispersion composition, photosensitive resin composition, and solid-state image pick-up element
10/11/2012US20120257178 Lithographic apparatus and device manufacturing method
10/11/2012US20120255863 Microfabrication of Tunnels
10/11/2012US20120255765 Electrode and method for manufacturing the same
10/11/2012US20120255764 Printed circuit board and manufacturing method thereof
10/11/2012US20120255454 Method for printing a pattern on a substrate
10/11/2012CA2831741A1 Microfabrication of tunnels
10/10/2012EP2509102A1 Optical member for euv lithography, and process for production of reflective-layer-attached substrate for euv lithography
10/10/2012EP2509099A2 Electron beam exposure apparatus and electron beam exposure method
10/10/2012EP2508948A2 UV curing creating flattop and roundtop structures on a single printing plate
10/10/2012EP2508947A1 Photosensitive resin composition, laminate utilizing same, and solid-state imaging device
10/10/2012EP2508492A1 Method for producing silica-based glass substrate for imprint mold, and method for producing imprint mold
10/10/2012EP2507817A2 Method and apparatus for surface treatment using a mixture of acid and oxidizing gas
10/10/2012EP2507669A1 Actinic ray-sensitive or radiation-sensitive resin composition, film formed using the composition and pattern forming method using the same
10/10/2012EP2507668A2 Block copolymer-assisted nanolithography
10/10/2012CN202486499U Spraying device for developing solution
10/10/2012CN202486498U Signal amplification apparatus for laser drawing machine
10/10/2012CN202486497U Multi-wavelength mask-free exposure device
10/10/2012CN202486496U Novel aperture diaphragm with high energy utilization ratio
10/10/2012CN202486436U Polarization beam combined device used for maskless lithographic projection exposure system
10/10/2012CN1987657B Lithographic apparatus and method for manufacturing a device
10/10/2012CN1977216B Energy harvesting molecules and photoresist technology
10/10/2012CN1963678B Method for limiting pattern
10/10/2012CN102725697A Spectral purity filter
10/10/2012CN102725696A Magnification control for lithographic imaging system
10/10/2012CN102725695A Isocyanurate compound for forming organic anti-reflective layer and composition including same
10/10/2012CN102725694A Light-sensitive polymer composition, method for producing pattern, and electronic component
10/10/2012CN102725693A Photosensitive resin composition, cured film, method for forming cured film, organic EL display device, and liquid crystal display device
10/10/2012CN102725692A Photosensitive resin composition, method for forming cured film, cured film, organic EL display device, and liquid crystal display device
10/10/2012CN102725691A Positive-type resist composition and method for producing microlens
10/10/2012CN102725690A Photosensitive resin composition, cured product thereof, and printed wiring board
10/10/2012CN102725689A Liquid radiation curable resins capable of curing into layers with selective visual effects and methods for the use thereof
10/10/2012CN102725673A Method for producing a mirror having at least two mirror surfaces, mirror of a projection exposure apparatus for microlithography, and projection exposure apparatus
10/10/2012CN102722304A Method for preparing touch screen in joint way
10/10/2012CN102722093A Plane position detecting apparatus, exposure apparatus and device manufacturing method
10/10/2012CN102722092A Developing solution applicable to photo-polymerization type lithographic printing plate
10/10/2012CN102722091A Two-beam interference photoetching method and system
10/10/2012CN102722090A Illumination uniformity compensating device
10/10/2012CN102722089A Non-contact coarse-motion and fine-motion cascading SDOF (six-degree of freedom) positioning device
10/10/2012CN102722088A Non-contact coarse-fine motion layer positioning system and motion control method thereof
10/10/2012CN102722087A Novel vision system for photoetching equipment
10/10/2012CN102722086A Non-contact single-degree-of-freedom positioning device and synchronous movement control method thereof
10/10/2012CN102722085A Method for splicing maskless digital projection lithography pattern
10/10/2012CN102722084A Lithography method and device
10/10/2012CN102722083A Solder resist composition and printed wiring board
10/10/2012CN102722082A Mask and overlay measuring method
10/10/2012CN102722016A Adjusting device for micro-motion with Z, tip and tilt degrees of freedom of optical element
10/10/2012CN102722015A Micro adjusting device for three degrees of freedom Z, tip and tilt of optical element
10/10/2012CN102721369A Device for measuring multi-degree-of-freedom displacement of wafer stage by laser interferometer
10/10/2012CN102719148A Pigment dispersion, coloring composition for color filter, color filter, liquid crystal display and organic el display
10/10/2012CN102718932A Photosensitive copolymer and photoresist composition
10/10/2012CN102718902A Poly p-hydroxystyrene based chemically amplified one-component photoresist material, and synthetic method and application thereof
10/10/2012CN102253607B Method for optimizing coherent factor of photoetching machine lighting system
10/10/2012CN102236268B Photoetching projection objective wave aberration detection method based on space image frequency spectrum
10/10/2012CN102156385B Chemical amplification type i-linear positive photoresist composition containing 2,1,4-diazo naphthoquinone sulphonic acid phenolic ester
10/10/2012CN102147569B Processing method of micro-component in multi-layer structure and solidified SU-8 photoresist sheet
10/10/2012CN102097296B Preparation method of semiconductor nano circular ring
10/10/2012CN102087474B Method and device for conveying photomask
10/10/2012CN102016717B Reflective mask blank for EUV lithography, and reflective mask for EUV lithography
10/10/2012CN101990652B Shear-layer chuck for lithographic apparatus
10/10/2012CN101970242B Method for making lithographic printing original plate
10/10/2012CN101943866B Exposure device
10/10/2012CN101935431B Improved hot melt compositions
10/10/2012CN101835721B Glass frit for photosensitive conductive paste
10/10/2012CN101821299B Photosensitive graft polymer, and photosensitive resin composition comprising the same
10/10/2012CN101802714B Lithographic apparatus with rotation filter device
10/10/2012CN101798432B Curable resin composition and printed circuit board and reflection board using same
10/10/2012CN101794080B Device for imagery photoetching by utilizing micro lens array
10/10/2012CN101788764B Coating and developing apparatus
10/10/2012CN101770179B Device for regulating temperature of laser module in printing plate exposer
10/10/2012CN101762990B Lithographic apparatus
10/10/2012CN101738871B Pattern selection for lithographic model calibration
10/10/2012CN101675387B Photosensitive resin composition, dry film, and processed product using the dry film
10/10/2012CN101594974B Hollow structure forming substrate, method of producing the same, and method of producing hollow structure using the same
10/10/2012CN101576713B Manufacture method for non-spherical insert
10/10/2012CN101561642B Positioning system, lithographic apparatus and device manufacturing method
10/10/2012CN101533005B Microflow distribution device, manufacturing method and application thereof
10/10/2012CN101526733B Multicolor photo mask and pattern transfer printing method using same
10/10/2012CN101477305B Mold core production method used for imprinting process
10/10/2012CN101396898B Manufacture device and method of photosensitive lamination body
10/10/2012CN101384966B Illumination system for a microlithographic projection exposure apparatus
10/10/2012CN101354533B 感光性糊剂组合物和图案形成方法 The photosensitive paste composition and a pattern forming method
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