| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 02/07/2013 | US20130034811 Method for providing an ordered layer of self-assemblable polymer for use in lithography |
| 02/07/2013 | US20130034805 Hologram recording material and hologram recording medium |
| 02/07/2013 | US20130034706 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, production method of electronic device, and electronic device |
| 02/07/2013 | US20130033636 Optical assembly including plenoptic microlens array |
| 02/07/2013 | US20130032956 Semiconductor device and method for manufacturing the same |
| 02/07/2013 | DE102012200658A1 Mirror assembly e.g. pupil facet mirror, for optical system of micro-lithographic projection exposure system, has carrier for individual mirrors, and vibration excitation unit designed such that mirrors displace vibration oscillation |
| 02/07/2013 | DE102011080408A1 Support for mirror of extreme UV-projection exposure system used in microlithography process to produce small structure in e.g. nanometer range, has actuators associated to bipod holder, mirror connection and support elements as compensator |
| 02/07/2013 | DE102011080318A1 Dämpfungsanordnung zur Dissipation von Schwingungsenergie eines Elementes in einem System, insbesondere in einer mikrolithographischen Projektionsbelichtungsanlage Damping arrangement for dissipating vibrational energy of an element in a system, in particular in a microlithographic projection exposure apparatus |
| 02/07/2013 | DE102004041619B4 Vorrichtung und Verfahren zum Entfernen eines Beschichtungsfilmes Apparatus and method for removing a coating film |
| 02/07/2013 | CA2843415A1 Polymer-based resonator antennas |
| 02/06/2013 | EP2555054A1 Developer for processing planographic printing plate precursor, method for preparing planographic printing plate using the developer, and method for printing |
| 02/06/2013 | EP2555053A1 Positive-type photosensitive resin composition |
| 02/06/2013 | EP2554555A1 Adamantyl (meth)acrylate monomer and (meth)acrylic polymer that contains repeating units derived from the monomer |
| 02/06/2013 | EP2554395A1 Master planographic printing plate and manufacturing method therefor |
| 02/06/2013 | EP2554394A1 Planographic printing master plate and production method therefor |
| 02/06/2013 | EP2554381A1 Method for producing lithographic printing plate |
| 02/06/2013 | EP2553712A1 Nanoimprinting method, method for producing a droplet arrangement pattern, and method for fabricating substrates |
| 02/06/2013 | EP2553529A1 Multibeam exposure scanning method and apparatus, and method of manufacturing printing plate |
| 02/06/2013 | EP2553528A1 Plastics colouration |
| 02/06/2013 | EP2553025A1 Colored composition, inkjet ink, color filter and method of producing the same, solid-state image sensor and display device |
| 02/06/2013 | EP2552694A1 Lithographic processing solutions and methods of use |
| 02/06/2013 | EP2552693A1 Multibeam exposure scanning method and apparatus, and method of manufacturing printing plate |
| 02/06/2013 | CN102918630A Cleaning method, device manufacturing method, exposure apparatus, and device manufacturing system |
| 02/06/2013 | CN102918464A Measurement of a structure on a substrate |
| 02/06/2013 | CN102918463A Multilayer mirror |
| 02/06/2013 | CN102918462A Liquid immersion member and immersion exposure apparatus |
| 02/06/2013 | CN102918461A System for removing contaminant particles, lithographic apparatus, method for removing contaminant particles and method for manufacturing a device |
| 02/06/2013 | CN102918460A Photosensitive siloxane composition, cured film formed form same, and element having cured film |
| 02/06/2013 | CN102918459A Light-sensitive paste, method for forming pattern, and method for producing flat display panel member |
| 02/06/2013 | CN102917885A Lithographic printing plate precursor, plate making method thereof and novel polymer compound |
| 02/06/2013 | CN102915932A Method for manufacturing semiconductor device and semiconductor device |
| 02/06/2013 | CN102915908A Pretreatment method for silanization and silanization method comprising the method |
| 02/06/2013 | CN102914952A Position adjusting device of reference grating of aligning system and adjusting method thereof |
| 02/06/2013 | CN102914951A Pre-aligning device for photoetching device |
| 02/06/2013 | CN102914950A Dry re-stripping method for metal layer photoetching |
| 02/06/2013 | CN102914949A Data processing method of oblique SLM (Spatial Light Modulator) exposure for scanning type maskless lithography machine |
| 02/06/2013 | CN102914948A Fluid handling structure, a lithographic apparatus and a device manufacturing method |
| 02/06/2013 | CN102914947A Electrostatic clamp, lithographic apparatus and method of manufacturing an electrostatic clamp |
| 02/06/2013 | CN102914946A Energy sensor of photomask processor |
| 02/06/2013 | CN102914945A Distributed exposure dose control system and method |
| 02/06/2013 | CN102914944A Colored resin composition |
| 02/06/2013 | CN102914943A Colored curable resin composition |
| 02/06/2013 | CN102914942A Colored curable resin composition |
| 02/06/2013 | CN102914810A Holographic motherboard manufacturing method and hologram based on moire fringe technology |
| 02/06/2013 | CN102914503A Spectrum analyzer and preparation method of G-T resonant cavity array of spectrum analyzer |
| 02/06/2013 | CN102911094A Sulfonium compound, photoacid generator, and resist composition |
| 02/06/2013 | CN102910579A Nanoimprinting method capable of improving depth-to-width ratio of graph and product thereof |
| 02/06/2013 | CN102909983A Method of fabricating cliche |
| 02/06/2013 | CN102393602B Preparation method of corrosive pattern on stainless steel vacuum cup |
| 02/06/2013 | CN102243330B Production method for micro-retarder without alignment layer |
| 02/06/2013 | CN102184515B Method for filling ladder diagram in FPGA (Field Programmable Gate Array) |
| 02/06/2013 | CN102176425B Cartesian robot cluster tool architecture |
| 02/06/2013 | CN102096344B Developing solution as well as preparation method and application thereof |
| 02/06/2013 | CN101981506B Process for producing lithographic printing plate |
| 02/06/2013 | CN101960386B Debris mitigation device with rotating foil trap and drive assembly |
| 02/06/2013 | CN101859068B Color composition for color filter and color filter |
| 02/06/2013 | CN101712746B Photopolymer compositions for optical elements and visual displays |
| 02/06/2013 | CN101541837B Curable composition containing hydroxyl group-containing thiol compound and cured product thereof |
| 02/06/2013 | CN101533219B Imprint method and mold |
| 02/06/2013 | CN101405655B Negative-type photosensitive fluorinated aromatic resin composition |
| 02/05/2013 | US8368870 Exposure apparatus and device manufacturing method |
| 02/05/2013 | US8367743 Adhesion promoting photoinitiators for UV cured coatings over metal surfaces |
| 02/05/2013 | US8367311 Method for producing hollow structure |
| 02/05/2013 | US8367310 Pattern forming process and resist-modifying composition |
| 02/05/2013 | US8367309 Pattern formation method using levenson-type mask and method of manufacturing levenson-type mask |
| 02/05/2013 | US8367308 Substrate processing method |
| 02/05/2013 | US8367307 Solution to optical constraint on microtruss processing |
| 02/05/2013 | US8367305 Method for fabricating a microelectromechanical resonator |
| 02/05/2013 | US8367304 Techniques for marking product housings |
| 02/05/2013 | US8367303 Semiconductor device fabrication and dry develop process suitable for critical dimension tunability and profile control |
| 02/05/2013 | US8367302 Method and apparatus for manufacturing semiconductor device |
| 02/05/2013 | US8367301 Mask for crystallizing silicon, apparatus having the mask and method of crystallizing with the mask |
| 02/05/2013 | US8367300 Resin composition for laser engraving, image forming material, relief printing plate precursor for laser engraving, relief printing plate, and method of producing relief printing plate |
| 02/05/2013 | US8367299 Resist composition, method of forming resist pattern, compound and acid generator |
| 02/05/2013 | US8367298 Salt and photoresist composition containing the same |
| 02/05/2013 | US8367297 Resist composition, method of forming resist pattern, novel compound and acid generator |
| 02/05/2013 | US8367296 Positive resist composition, method of forming resist pattern, and polymeric compound |
| 02/05/2013 | US8367295 Stabilization; photoresist mixture containing binder, acid generator, organonitrogen base and solvent; controlling peroxy impurities concentration of solvent; mixing |
| 02/05/2013 | US8367283 Positive photosensitive resin composition, cured film, protecting film, insulating film and semiconductor and display devices using the same |
| 02/05/2013 | US8367282 Compound or its tautomer, metal complex compound, colored photosensitive curing composition, color filter, and production |
| 02/05/2013 | US8367281 Method of exposing substrate, apparatus for performing the same, and method of manufacturing display substrate using the same |
| 02/05/2013 | US8367276 Mask blank and method of manufacturing mask |
| 01/31/2013 | WO2013016060A1 Laser engraveable compositions and flexographic printing precursors |
| 01/31/2013 | WO2013016044A1 Laser-engraveable compositions and flexographic printing precursors |
| 01/31/2013 | WO2013015444A1 Pattern forming method, actinic ray-sensitive or radiation-sensitive resin composition, resist film, manufacturing method of electronic device and electronic device |
| 01/31/2013 | WO2013015434A1 Pigment dispersion, and resist composition for color filter and ink composition each using the pigment dispersion |
| 01/31/2013 | WO2013015433A1 Liquid composition, and color-filter resist composition, thermal-transfer recording sheet and ink which make use of the liquid composition |
| 01/31/2013 | WO2013015121A1 Photosensitive composition, master plate for planographic printing plate, polyurethane, and method for producing polyurethane |
| 01/31/2013 | WO2013014182A1 Mirror, optical system comprising mirror and method for producing a mirror |
| 01/31/2013 | WO2013013947A2 Optical system of a microlithographic projection exposure apparatus, and microlithographic exposure method |
| 01/31/2013 | WO2013013894A1 Microlithographic exposure method |
| 01/31/2013 | WO2013013849A1 Lithographic apparatus and device manufacturing method |
| 01/31/2013 | WO2013013831A1 A substrate surface structured with thermally stable metal alloy nanoparticles, a method for preparing the same and uses thereof, in particular as a catalyst |
| 01/31/2013 | WO2013013584A1 Nano graphics and ultra-wideband electromagnetic characteristic measurement system |
| 01/31/2013 | WO2013013566A1 Photocurable adhesive composition and use of the same |
| 01/31/2013 | US20130029272 Process for producing fine pattern |
| 01/31/2013 | US20130029271 Photosensitive composition and compound for use in the photosenesitive composition |
| 01/31/2013 | US20130029270 Resist composition and patterning process |
| 01/31/2013 | US20130029269 Positive resist composition and pattterning process |
| 01/31/2013 | US20130029268 Photosensitive planographic printing plate precursor and method of producing a planographic printing plate |