| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 03/27/2013 | CN202837812U Lens group for stepping-type exposure machine |
| 03/27/2013 | CN202837811U Gluing fixture used for wedge-shaped plate set of photoetching machine |
| 03/27/2013 | CN202837810U Exposure alignment system |
| 03/27/2013 | CN202837809U Device for alignment of inner layer of laser direct writing exposure machine |
| 03/27/2013 | CN202837808U Concave-convex transparent adhesive film for printed circuit board (PCB) exposure |
| 03/27/2013 | CN202837807U Coating liquid drying device in light-sensitive plate production |
| 03/27/2013 | CN202837747U Light leak detection base plate and light leak detection device |
| 03/27/2013 | CN202835238U Bulb part installation device |
| 03/27/2013 | CN202823952U On-line sulfuric-acid peroxide mixture (SPM) preparation system |
| 03/27/2013 | CN1842745B Thin film transistor, manufacturing method and method of manufacturing display |
| 03/27/2013 | CN1700417B Semiconductor device and method for manufacturing the same, liquid crystal television, and EL television |
| 03/27/2013 | CN103003918A Pattern formation method and polymer alloy base material |
| 03/27/2013 | CN103003914A Method and system for modifying substrate patterned features using ion implantation |
| 03/27/2013 | CN103003754A Method and apparatus for determining an overlay error |
| 03/27/2013 | CN103003753A Method for producing a component and component produced by the method |
| 03/27/2013 | CN103003752A Photosensitive resin composition, and method for producing photosensitive resin composition |
| 03/27/2013 | CN103003055A Roller mold manufacturing device and manufacturing method |
| 03/27/2013 | CN103000585A Manufacturing method of mask ROM (read only memory) |
| 03/27/2013 | CN102998915A Positive photoresist and stripping agent composition |
| 03/27/2013 | CN102998914A Write-through lithography processing system and lithography method |
| 03/27/2013 | CN102998913A Simultaneous localization photoetching exposure device and method |
| 03/27/2013 | CN102998912A Developing apparatus and developing method |
| 03/27/2013 | CN102998911A Novel manufacturing method of photosensitive CTP (Computer-To-Plate) printing plate |
| 03/27/2013 | CN102998910A Exposure apparatus, exposure method and device manufacturing method |
| 03/27/2013 | CN102998909A Exposure apparatus |
| 03/27/2013 | CN102998908A Drawing apparatus and drawing method |
| 03/27/2013 | CN102998907A Aligning signal acquisition system and aligning method used in mask aligning |
| 03/27/2013 | CN102998906A Support structure of lithography machine and manufacture method |
| 03/27/2013 | CN102998905A Screen cloth for printing and making method thereof |
| 03/27/2013 | CN102998904A Photoresist comprising multi-amide component |
| 03/27/2013 | CN102998903A Photosensitive composition containing acridine bifunctional photoinitiator |
| 03/27/2013 | CN102998902A Colored photosensitive resin composition |
| 03/27/2013 | CN102998901A Preparation method of SU-8 nanofluid channel of integrated scale |
| 03/27/2013 | CN102998900A Manufacturing method of photosensitive plate with ultrathin photosensitive layer |
| 03/27/2013 | CN102998899A Two-degree-of-freedom nanometer positioning platform |
| 03/27/2013 | CN102998893A Reflective mask plate, exposure device and exposure method |
| 03/27/2013 | CN102998852A Cushion isolating material, liquid crystal panel, liquid crystal display device and preparation method of cushion isolating material |
| 03/27/2013 | CN102998779A Varifocal photoetching objective lens system |
| 03/27/2013 | CN102998740A Device and method for simultaneously inscribing multi-wavelength array gratings in ribbon fiber |
| 03/27/2013 | CN102995118A Method for preparing D type optical fiber colloidal crystal micro-nano structure |
| 03/27/2013 | CN102994015A Primer used for waterless offset printing plate-making, and preparation method and application thereof |
| 03/27/2013 | CN102993890A Coating composition and image-forming material, lithographic printing plate precursor and oxygen-blocking film including the coating composition |
| 03/27/2013 | CN102591142B Nano imprinting device and method for imaging sapphire substrate |
| 03/27/2013 | CN102486606B Photoetching method |
| 03/27/2013 | CN102419518B Developing machine, developing solution feeding system and method thereof |
| 03/27/2013 | CN102354086B Real-time calibration method for orthogonality of precision mobile platform |
| 03/27/2013 | CN102323720B Flexible micro-positioning platform based on driving of piezoelectric ceramics |
| 03/27/2013 | CN102285290B Positive thermo-sensitive lithographic plate precursor |
| 03/27/2013 | CN102272680B Developing apparatus, method for processing developer liquid, method for producing printing plate, and filtration device |
| 03/27/2013 | CN102253524B Manufacturing method of colorful filtering substrate |
| 03/27/2013 | CN102213917B Black-colored photosensitive resin composition, black matrix prepared by using thereof and color filter comprising the black matrix |
| 03/27/2013 | CN102183876B Substrate processing apparatus |
| 03/27/2013 | CN102169994B Negative electrode base member |
| 03/27/2013 | CN102163721B Negative electrode base member |
| 03/27/2013 | CN102163009B Developing apparatus and developing method |
| 03/27/2013 | CN102122115B Method of generating photomask data, method of fabricating photomask, solid-state image sensor having microlens array and method of manufacturing same |
| 03/27/2013 | CN102084300B Fine pattern mask, method for producing the same, and method for forming fine pattern using the mask |
| 03/27/2013 | CN102034754B Method for fabricating an integrated circuit device and photoresist stripping composition |
| 03/27/2013 | CN102016722B Robot for in-vacuum use |
| 03/27/2013 | CN101980087B Immersion exposure appratus and method |
| 03/27/2013 | CN101965542B Photosensitive polyorganosiloxane composition |
| 03/27/2013 | CN101937174B Substrate table, lithographic apparatus, method of using a substrate table and device manufacturing method |
| 03/27/2013 | CN101868762B Photopatternable deposition inhibitor containing siloxane |
| 03/27/2013 | CN101828149B Displacement device with precision measurement |
| 03/27/2013 | CN101802709B Pigment dispersion composition, resist composition for color filter including the same, and color filter using the same |
| 03/27/2013 | CN101794084B Lithographic apparatus and device manufacturing method |
| 03/27/2013 | CN101784958B Photosensitive composition, cured film formed therefrom, and device having cured film |
| 03/27/2013 | CN101738876B Developing method and developing apparatus |
| 03/27/2013 | CN101625526B Coloring light-sensitive resin composition for ultraviolet ray laser, method for forming patterns, optical filter and production method thereof and display device |
| 03/27/2013 | CN101576717B Exposure apparatus, and device fabricating method |
| 03/27/2013 | CN101533229B Reticle for projection exposure apparatus and exposure method using the same |
| 03/27/2013 | CN101477302B Phase shift mask and method for forming pattern |
| 03/27/2013 | CN101460897B Exposure method and exposure apparatus |
| 03/27/2013 | CN101458464B Alignment method, alignment system and product with alignment mark |
| 03/27/2013 | CN101458461B Method of fine patterning semiconductor device |
| 03/27/2013 | CN101410945B Mobile body drive method and mobile body drive system, pattern formation method and apparatus, exposure method and apparatus, and device manufacturing method |
| 03/27/2013 | CN101359176B Curing composition, method for producing photospace material and liquid crystal display device |
| 03/27/2013 | CN101321727B 肟酯光敏引发剂 Oxime ester photoinitiator |
| 03/27/2013 | CN101303528B Photocuring resin composition, dry film, and print circuit board |
| 03/27/2013 | CN101256355B Compositions and processes for immersion lithography |
| 03/27/2013 | CN101248391B Lithographic coated-type underlayer film forming composition containing vinylnaphthalene resin derivative |
| 03/27/2013 | CN101226334B Mirror plane erosion carving gravure technique |
| 03/27/2013 | CN101052921B A system and a method for generating periodic and/or quasi-periodic pattern on a sample |
| 03/26/2013 | US8405051 Method for removing a deposition on an uncapped multilayer mirror of a lithographic apparatus, lithographic apparatus and device manufacturing method |
| 03/26/2013 | US8404433 Method for forming resist pattern and method for manufacturing semiconductor device |
| 03/26/2013 | US8404432 Lithography process |
| 03/26/2013 | US8404430 Multi-chip reticle photomasks |
| 03/26/2013 | US8404428 Positive resist composition, method of forming resist pattern using the same, and fluorine-containing polymeric compound |
| 03/26/2013 | US8404427 Photosensitive composition, and pattern-forming method and resist film using the photosensitive composition |
| 03/26/2013 | US8404426 Negative resist composition, method of forming resist pattern and polymeric compound |
| 03/26/2013 | US8402786 Synthetic silica glass optical component and process for its production |
| 03/22/2013 | CA2790266A1 Transducer structure for a transducer probe and methods of fabricating same |
| 03/21/2013 | WO2013039389A2 Target positioning device, method for driving a target positioning device, and a lithography system comprising such a target positioning device |
| 03/21/2013 | WO2013039387A1 Guidance for target processing tool |
| 03/21/2013 | WO2013039386A1 Assembly and a method for lifting a module of a lithography system in vertical direction and a lithography system comprising such assembly |
| 03/21/2013 | WO2013039243A1 Pattern-forming method, electron beam-sensitive or extreme ultraviolet radiation-sensitive resin composition, resist film, manufacturing method of electronic device using them and electronic device |
| 03/21/2013 | WO2013039235A1 Method for recycling wastewater produced by plate-making process |
| 03/21/2013 | WO2013039100A1 Film exposure device |
| 03/21/2013 | WO2013039075A1 Colored photosensitive composition, color filter, production method for color filter, and display device |
| 03/21/2013 | WO2013038974A1 Colored radiation-sensitive composition for color filter, pattern forming method, color filter and method of producing the same, and solid-state image sensor |