| Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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| 06/19/2013 | CN103163737A Monitoring method for developing effect of PCB solder mask layer |
| 06/19/2013 | CN103163736A Composition including polyamide acid for forming lower layer reflection preventing film |
| 06/19/2013 | CN103163735A Positive type photosensitive resin composition for electron member, cured film and forming method thereof, and display device |
| 06/19/2013 | CN103163734A Photosensitive resin composition for color filter and color filter formed thereby |
| 06/19/2013 | CN103163733A Curable resin composition and its use |
| 06/19/2013 | CN103163732A Resin composition for laser engraving, flexographic printing plate precursor and process for producing same, and flexographic printing plate and process for making same |
| 06/19/2013 | CN103163731A Resin composition for laser engraving, flexographic printing plate precursor for laser engraving and process for producing same, and flexographic printing plate and process for making same |
| 06/19/2013 | CN103163730A Methods for small trench patterning using chemical amplified photoresist compositions |
| 06/19/2013 | CN103163581A Production method of color filter and display device with color filter |
| 06/19/2013 | CN103163575A Color microlens array and preparation method for same |
| 06/19/2013 | CN103163569A Intelligent antifog resin lenses and preparing method thereof |
| 06/19/2013 | CN103162848A System for detecting plasma state of capillary discharge extreme ultraviolet lithography light source by using YAG-Ce fluorescent screen |
| 06/19/2013 | CN103160378A Plant oil-based acrylic ester capable of photopolymerization and preparation method thereof |
| 06/19/2013 | CN103159164A Electric-field-induced impressing method for high-depth-to-width-ratio microcolumn array |
| 06/19/2013 | CN102566262B Device and method suitable for carrying out wafer-level nano imprinting on uneven substrate |
| 06/19/2013 | CN102436153B Photosensitive rubber stripping agent for printing screen and stripping method |
| 06/19/2013 | CN102436152B Deep-ultraviolet lithography illumination system |
| 06/19/2013 | CN102239446B 凸版印刷板 Letterpress printing plates |
| 06/19/2013 | CN102224459B Fast freeform source and mask co-optimization method |
| 06/19/2013 | CN102216849B Optical imaging writer system |
| 06/19/2013 | CN102103325B Photomask for forming fine pattern and method for forming fine pattern with the photomask |
| 06/19/2013 | CN102099747B Radiation source, lithographic apparatus, and device manufacturing method |
| 06/19/2013 | CN102081307B Method for controlling exposure dose of photoetching machine |
| 06/19/2013 | CN102023487B Clamping mechanism with vacuum edge |
| 06/19/2013 | CN102023477B Photoetching method |
| 06/19/2013 | CN101946190B Facet mirror for use in a projection exposure apparatus for microlithography |
| 06/19/2013 | CN101907733B Incidence surfaces and optical windows that are solvophobic to immersion liquids |
| 06/19/2013 | CN101887219B Lithography apparatus, immersion projection apparatus, and method of manufacturing device |
| 06/19/2013 | CN101876793B Method of forming a pattern of an array of shapes including a blocked region |
| 06/19/2013 | CN101815733B Polymers for use in photoresist compositions |
| 06/19/2013 | CN101811963B Method for synthesizing photoresist-monomer carbon-rigid-skeleton acrylic ester compounds by transesterification |
| 06/19/2013 | CN101799632B 光照射装置 Light irradiation device |
| 06/19/2013 | CN101784961B Processing of lithographic printing plates with a developer solution containing a hydrophilic polymer |
| 06/19/2013 | CN101689028B Method for processing pattern data and method for manufacturing electronic device |
| 06/19/2013 | CN101630124B Radiation-sensitive linear composition for forming coloured layer, colour filter and colour liquid crystal display device |
| 06/19/2013 | CN101614956B Red colored composition and color filter using the same, and manufacturing method thereof |
| 06/19/2013 | CN101589343B Irradiation strength distribution measuring apparatus and method of measuring |
| 06/19/2013 | CN101581883B Positive photoresist, insulation layer and organic light emitting diode |
| 06/19/2013 | CN101419411B System and method for lithography simulation |
| 06/19/2013 | CN101403859B Photosensitive resin composition and curing article thereof |
| 06/19/2013 | CN101395534B Heat curable composition for protective film, cured product and liquid crystal display device |
| 06/18/2013 | US8467033 Method for operating an illumination system of a microlithographic projection exposure apparatus |
| 06/18/2013 | US8466945 Methods and device for laser processing |
| 06/18/2013 | US8466440 Charged particle beam drawing apparatus and control method thereof |
| 06/18/2013 | US8465910 Hybrid lithographic method for fabricating complex multidimensional structures |
| 06/18/2013 | US8465909 Self-aligned masking for solar cell manufacture |
| 06/18/2013 | US8465908 Method for forming fine patterns of semiconductor device |
| 06/18/2013 | US8465907 Manufacturing method for exposure mask, generating method for mask substrate information, mask substrate, exposure mask, manufacturing method for semiconductor device and server |
| 06/18/2013 | US8465906 Method and mask for enhancing the resolution of patterning 2-row holes |
| 06/18/2013 | US8465905 Printing conductive lines |
| 06/18/2013 | US8465904 Method for preparing a printing form from a photopolymerizable element |
| 06/18/2013 | US8465903 Radiation patternable CVD film |
| 06/18/2013 | US8465902 Underlayer coating composition and processes thereof |
| 06/18/2013 | US8465901 Methods of adjusting dimensions of resist patterns |
| 06/18/2013 | US8465887 Lower cost reusable polymer binder |
| 06/18/2013 | US8465803 Templated monolayer polymerization and replication |
| 06/18/2013 | US8464637 Method and apparatus for thermal development having a textured support surface |
| 06/18/2013 | CA2740695C Composition, process of preparation and method of application and exposure for light imaging paper |
| 06/18/2013 | CA2443317C Materials, methods, and uses for photochemical generation of acids and/or radical species |
| 06/13/2013 | WO2013086264A1 Composition comprising fluoroalkyl perfluoroalkene ethers and uses thereof |
| 06/13/2013 | WO2013085223A1 Polyimide photosensitive composition for laser-induced thermal imaging |
| 06/13/2013 | WO2013085004A1 Photosensitive resin composition, method for producing hardened relief pattern, semiconductor device and display device |
| 06/13/2013 | WO2013084932A1 Colorant, colored composition, color filter, and display element |
| 06/13/2013 | WO2013084927A1 Single-motor-driven gravure cylinder chuck mechanism |
| 06/13/2013 | WO2013084906A1 Exposure device, and production method for structure |
| 06/13/2013 | WO2013084898A1 Exposure device and exposure method |
| 06/13/2013 | WO2013084882A1 Printing surface protective liquid composition for lithographic printing plate, and method for treating lithographic printing plate using same |
| 06/13/2013 | WO2013084714A1 Black photosensitive resin composition and use of same |
| 06/13/2013 | WO2013084664A1 Composition for forming antistatic film and oligomer compound |
| 06/13/2013 | WO2013084574A1 Spin development method and device |
| 06/13/2013 | WO2013084470A1 Method for forming micro-relief structure, method for manufacturing structure using same forming method, and structure |
| 06/13/2013 | WO2013084247A1 Resist for electron beam and optical lithography |
| 06/13/2013 | WO2013083505A1 Oxime ester photoinitiators |
| 06/13/2013 | WO2013083383A1 A lithography apparatus, an apparatus for providing setpoint data, a device manufacturing method, a method of calculating setpoint data and a computer program |
| 06/13/2013 | WO2013083371A1 Lithographic apparatus and device manufacturing method |
| 06/13/2013 | WO2013083335A2 Radiation source |
| 06/13/2013 | WO2013083332A1 Method for a patterning device support |
| 06/13/2013 | WO2013083184A1 Nanostructured stamp, embossing roller, and device and method for the continuous embossing of nanostructures |
| 06/13/2013 | WO2013082851A1 Design method of extreme ultraviolet lithography projection objective |
| 06/13/2013 | WO2013082782A1 Exposure device and exposure method |
| 06/13/2013 | WO2013051805A3 Photosensitive resin composition |
| 06/13/2013 | WO2013049409A3 Substrates having nanostructures having biological species immobilized thereon and methods of forming the same and methods of forming nanostructures on surfaces |
| 06/13/2013 | WO2013028650A4 Methods for fabricating three-dimensional nano-scale structures and devices |
| 06/13/2013 | WO2013012230A3 Light curable resin composition |
| 06/13/2013 | US20130149649 Lithographic apparatus and a device manufacturing method |
| 06/13/2013 | US20130149648 Method of making nozzle chip |
| 06/13/2013 | US20130149645 Chemically amplified negative resist composition, photo-curable dry film, making method, pattern forming process, and electric/electronic part protecting film |
| 06/13/2013 | US20130149494 TiO2-CONTAINING QUARTZ-GLASS SUBSTRATE FOR AN IMPRINT MOLD AND MANUFACTURING METHOD THEREFOR |
| 06/13/2013 | US20130149493 Chemically amplified negative resist composition, photo-curable dry film, making method, pattern forming process, and electric/electronic part protecting film |
| 06/13/2013 | US20130149196 Method for Functionalising Fluid Lines Contained in a Micromechanical Device, Micromechanical Device Including Functionalised Lines, and Method for Manufacturing Same |
| 06/13/2013 | US20130148181 Photorefractive composite, spatial light modulator, and hologram display device using the same |
| 06/13/2013 | US20130148180 Photorefractive composite, spatial light modulator, and hologram display device using the same |
| 06/13/2013 | US20130148122 Method of manufacturing device, and substrate |
| 06/13/2013 | US20130148094 Stage unit, exposure apparatus, and exposure method |
| 06/13/2013 | US20130148092 Illumination system for a microlithographic projection exposure apparatus |
| 06/13/2013 | US20130148091 Lithography apparatus and method, and method of manufacturing article |
| 06/13/2013 | US20130148090 Exposure apparatus |
| 06/13/2013 | US20130148089 Apparatus and method for preparing relief printing form |
| 06/13/2013 | US20130146785 Support, lithographic apparatus and device manufacturing method |
| 06/13/2013 | US20130146776 Flat panel imagers with pixel separation and method of manufacturing the same |