Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176) |
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05/06/1999 | EP0913730A1 Process for making a printing form |
05/06/1999 | EP0913715A2 Method for producing light control sheet |
05/06/1999 | EP0912223A1 Microfabricated filter and shell constructed with a permeable membrane |
05/06/1999 | DE19747890A1 Verwendung von (Meth)acrylsäureestern von Dimerdiolalkoxylaten als Bausteine für strahlenhärtbare Beschichtungen Use of (meth) acrylic acid esters of Dimerdiolalkoxylaten as building blocks for radiation-curable coatings |
05/05/1999 | CN1215850A Corrosion inhibitor stripping liquid control device |
05/04/1999 | US5901163 Narrow band laser with etalon based output coupler |
05/04/1999 | US5900974 For absorbing incident light generated by a patterned light generator |
05/04/1999 | US5900926 Projection exposure apparatus |
05/04/1999 | US5900707 Stage-drive control apparatus and method, and scan-projection type exposure apparatus |
05/04/1999 | US5900637 Maskless lithography using a multiplexed array of fresnel zone plates |
05/04/1999 | US5900354 Method for optical inspection and lithography |
05/04/1999 | US5900352 Carboxymethylated b-aminopropionic acids and salts |
05/04/1999 | US5900351 Method for stripping photoresist |
05/04/1999 | US5900346 Negative-acting photoresist composition; photoactivator that is an organic carbonyl containing compound; crosslinker. |
05/04/1999 | US5900345 Surfactant in precoat for lithographic plates |
05/04/1999 | US5900340 One dimensional lithographic proximity correction using DRC shape functions |
05/04/1999 | US5900339 Depositing and patterning photoresist on substrate to form openings, positioning substrate having heat transferable colorant layer spaced from first substrate, heating to transfer colorant, removing patterned photoresist |
05/04/1999 | US5900338 Performing optical proximity correction with the aid of design rule checkers |
05/04/1999 | US5900160 Methods of etching articles via microcontact printing |
05/04/1999 | US5899746 Method of forming pattern |
05/04/1999 | US5899728 Method of forming a lithographic mask |
05/04/1999 | US5899390 Orifice plate, in particular for injection valves |
05/04/1999 | CA2008987C Production of photopolymerized relief printing plates having a non-tacky surface |
05/03/1999 | CA2252277A1 New quinolinium dyes and borates in photopolymerizable compositions |
04/30/1999 | CA2252186A1 Method for producing light control sheet |
04/29/1999 | WO1999021060A1 Lens array photolithography |
04/29/1999 | WO1999021059A1 Method and apparatus for imaging a continuous web |
04/29/1999 | WO1999021058A1 Thermosetting polyester anti-reflective coatings for multilayer photoresist processes |
04/29/1999 | WO1999020700A1 Resin reinforced cross-linkable printing inks and coatings |
04/29/1999 | WO1999020408A1 Improvement in aqueous stripping and cleaning compositions |
04/29/1999 | WO1999008134A3 Ultra-broadband uv microscope imaging system with wide range zoom capability |
04/29/1999 | DE19818840A1 Electron beam exposure method in LSI manufacture |
04/29/1999 | DE19745324A1 Mixture and distribution process and device |
04/29/1999 | CA2306954A1 Improvement in aqueous stripping and cleaning compositions |
04/29/1999 | CA2306899A1 Lens array photolithography |
04/29/1999 | CA2305461A1 Thermosetting polyester anti-reflective coatings for multilayer photoresist processes |
04/28/1999 | EP0912079A1 Thick-film conductor circuit and production method therefor |
04/28/1999 | EP0911698A1 Photosensitive composition and method of pattern formation |
04/28/1999 | EP0911697A2 A fluorinated hard mask for micropatterning of polymers |
04/28/1999 | EP0911117A2 Hand tool for manipulating recticle plate |
04/28/1999 | EP0910816A1 Composite relief image printing plates and methods for preparing same |
04/28/1999 | EP0910612A1 Curing process for cationically photocurable formulations |
04/28/1999 | EP0910480A1 Device for wet coating, in particular printed circuit boards with lacquer |
04/28/1999 | EP0648348B1 Variable annular illuminator for photolithographic projection imager. |
04/27/1999 | US5898725 Excimer laser with greater spectral bandwidth and beam stability |
04/27/1999 | US5898594 Method and apparatus for enabling a selection of catalog items |
04/27/1999 | US5898501 Apparatus and methods for measuring wavefront aberrations of a microlithography projection lens |
04/27/1999 | US5898480 Exposure method |
04/27/1999 | US5898479 System for monitoring optical properties of photolithography equipment |
04/27/1999 | US5898478 Method of using a test reticle to optimize alignment of integrated circuit process layers |
04/27/1999 | US5898477 Exposure apparatus and method of manufacturing a device using the same |
04/27/1999 | US5898453 Method and apparatus for exposing recording material having a temperature compensated optical isolator |
04/27/1999 | US5898269 Electron sources having shielded cathodes |
04/27/1999 | US5898227 Alignment targets having enhanced contrast |
04/27/1999 | US5897986 Projection patterning of large substrates using limited-travel x-y stage |
04/27/1999 | US5897985 Alkaline developer comprising potassium hydroxide, and optionally, a surfactant, an anti-foaming agent, a chelating agent, a biocide; single developer solution used for either positive-working or negative-working printing plates |
04/27/1999 | US5897983 Simplified process including single formation of silicon film, single anisotropic dry etching, single wet etching |
04/27/1999 | US5897982 Resist develop process having a post develop dispense step |
04/27/1999 | US5897981 Color filter for liquid crystal displays |
04/27/1999 | US5897980 Method of imparting contrast enhancement properties to diffusing, depixelating or projection screens |
04/27/1999 | US5897978 Mask data generating method and mask for an electron beam exposure system |
04/27/1999 | US5896874 Apparatus for controlling resist stripping solution |
04/27/1999 | US5896663 Process for making jewelry utilizing a soft photopolymer |
04/22/1999 | WO1999019952A1 Narrow band excimer laser with gas additive |
04/22/1999 | WO1999019951A1 Narrow band excimer laser |
04/22/1999 | WO1999019950A1 Pulse energy control for excimer laser |
04/22/1999 | WO1999019772A1 Apparatus for a laser writer for complex microlithographic patterns with a delay circuit |
04/22/1999 | WO1999019771A1 Positive photosensitive polyimide composition |
04/22/1999 | WO1999019754A1 Process and device for the wavelength-selective mixture and/or distribution of polychromatic light |
04/22/1999 | WO1999019447A1 Ammonium borate containing compositions for stripping residues from semiconductor substrates |
04/22/1999 | WO1999002938A3 Two piece mirror arrangement for interferometrically controlled stage |
04/22/1999 | DE19756486C1 Carrier table for a photo mask in a microchip manufacturing arrangement |
04/22/1999 | CA2302300A1 Process and device for the wavelength-selective mixing and/or distribution of polychromatic light |
04/21/1999 | EP0910128A2 Fabrication process for organic electroluminescent devices |
04/21/1999 | EP0910118A1 Ashing method |
04/21/1999 | EP0909992A1 Water-soluble photoresist composition |
04/21/1999 | EP0909991A1 A screen printing stencil |
04/21/1999 | EP0909990A2 Photopolymerizable compositions having improved sidewall geometry and development latitude |
04/21/1999 | EP0909989A1 Photolithographic processing method and apparatus |
04/21/1999 | EP0909988A1 Photolithographic processing method |
04/21/1999 | EP0909987A1 Photolithographic processing method and apparatus |
04/21/1999 | EP0909986A1 Photolithographic processing method and apparatus |
04/21/1999 | EP0909985A1 Photolithographic processing method and apparatus |
04/21/1999 | EP0909793A1 Stereolithographic resin composition |
04/21/1999 | EP0909773A2 Stabilized cationically-curable compositions |
04/21/1999 | EP0909657A2 A positive type photosensitive image-forming material for an infrared laser and a positive type photosensitive composition for an infrared laser |
04/21/1999 | EP0909408A1 Process for producing a screen printing form and screen printing fabric of a coated screen web |
04/21/1999 | EP0909407A1 Photopolymerizable thermosetting resin composition |
04/21/1999 | EP0909311A1 Post clean treatment |
04/21/1999 | EP0637393B1 Resolution-enhancing optical phase structure for a projection illumination system |
04/21/1999 | CN1214497A Circuit substrate, circuit-formed suspension substrate, and prodution methods therefor |
04/21/1999 | CN1214469A Alkaline development-less gas-phase photoetching glue and its use process to photoetch silicon nitride |
04/21/1999 | CN1214468A Acid development-less gas-phase photoetching glue and its use process to photoetch silicon nitride |
04/20/1999 | US5896438 X-ray optical apparatus and device fabrication method |
04/20/1999 | US5896188 Reduction of pattern noise in scanning lithographic system illuminators |
04/20/1999 | US5895925 Mask used in charged particle beam projecting apparatus and method for dividing pattern |
04/20/1999 | US5895800 A heat resistance, solvent resistance polynorbornene graft copolymer and a curing agent to form a dielectric protective coatings for semiconductor, printed circuits, electronics |
04/20/1999 | US5895741 Using photomask with specific areas where semitransparent film is formed on transparent substrate allowing phase angle of light beam to be inverted in areas, and with auxillary patterns at certain distance; increases production yield |
04/20/1999 | US5895740 Method of forming contact holes of reduced dimensions by using in-situ formed polymeric sidewall spacers |
04/20/1999 | US5895737 Method for adjusting an illumination field based on selected reticle feature |