Patents
Sitemap › G03 - Photography; Cinematography; Analogous techniques using waves other than optical waves; Electrography; Holography › G03F - Photomechanical production of textured or patterned surfaces, e.g. for printing, for processing of semiconductor devices; Materials therefor; Originals therefor; Apparatus specially adapted therefor › G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
12/1998
12/08/1998US5848382 Method for automated energy dose measurement and adjustment for a photoaligner
12/08/1998US5848315 Development monitoring apparatus and method adopting the same
12/08/1998US5848119 Illumination system and exposure apparatus having the same
12/08/1998US5848089 Excimer laser with magnetic bearings supporting fan
12/08/1998US5847974 Measuring method and apparatus for measuring system having measurement error changeable with time
12/08/1998US5847818 CD vernier apparatus for SEM CD measurement
12/08/1998US5847813 Mask holder for microlithography exposure
12/08/1998US5847812 Projection exposure system and method
12/08/1998US5847746 Projection exposure apparatus including a condenser optical system for imaging a secondary light source at positions different in an optical axis direction with respect to two crossing planes
12/08/1998US5847402 Charged particle beam pattern transfer apparatus and method
12/08/1998US5847218 Sulfonium salts and chemically amplified positive resist compositions
12/08/1998US5847133 Ionic halomethyl-1,3,5-triazine photoinitiators
12/08/1998US5847071 Photosensitive resin composition
12/08/1998US5847063 Resins for use in chemically amplified resists and manufacturing methods thereof
12/08/1998US5847022 Radiation curable resin composition and method therefor
12/08/1998US5847021 Solvent-free, radiation-curable, optical glass fiber coating composition and solvent-free method for making a solvent-free, radiation-curable, optical glass fiber coating composition
12/08/1998US5847015 Pigment-dispersed radiation-sensitive composition for color filters
12/08/1998US5846695 Removing agent composition for a photoresist and process for producing a semiconductor integrated circuit
12/08/1998US5846693 Resist pattern forming method using anti-reflective layer with variable extinction coefficient
12/08/1998US5846692 Pattern formation method
12/08/1998US5846691 Composite relief image printing plates and methods for preparing same
12/08/1998US5846690 Radiation-sensitive composition containing plasticizer
12/08/1998US5846689 Positive-working radiation-sensitive mixture and production of relief structures
12/08/1998US5846688 Photoresist composition
12/08/1998US5846687 Kit for preparing a processing liquid to be used for making a lithographic printing plate according to the silver salt diffusion transfer process
12/08/1998US5846686 Agent for forming a fine pattern of ferroelectric film, and method of forming a fine pattern of ferroelectric film
12/08/1998US5846685 Radiation sensitive diazo sulfo-acrylic adducts and method for producing a printing plate
12/08/1998US5846678 Exposure apparatus and device manufacturing method
12/08/1998US5846451 Crosslinking type liquid crystal polymer and oriented crosslinking film thereof
12/08/1998US5846442 Controlled diffusion partial etching
12/08/1998US5846327 Substrate spin treating apparatus
12/08/1998US5845575 Varnishing film and method of adjusting the surface gloss of prepress color proof using the same
12/08/1998CA2166177C Polymers and use in photoimageable compositions
12/08/1998CA2006074C Photopolymerizable mixture and photopolymerizable copying material containing same
12/03/1998WO1998054750A1 Electron sources having shielded cathodes
12/03/1998WO1998054622A1 Alkaline developing composition and method of use to process lithographic printing plates
12/03/1998WO1998054621A1 Methods of imaging and printing with a positive-working infrared radiation sensitive printing plate
12/03/1998WO1998054620A1 Lithography system
12/03/1998WO1998054619A1 Composition for antireflection or light absorption film and compounds for use in the same
12/03/1998WO1998054135A1 Nitrogenous heterocyclic compounds and hyperlipemia remedy containing the same
12/03/1998WO1998054134A1 Aromatic maleimides and their use as photoinitiators
12/03/1998WO1998053923A1 Method and apparatus for spin-coating chemicals
12/03/1998DE19754867A1 Projection illuminator for semiconductor component manufacture
12/03/1998DE19748503A1 Projection illumination arrangement for Large Scale Integrated Circuit manufacture
12/03/1998DE19722342A1 Method for absolute test of spherical surfaces
12/03/1998CA2291630A1 Nitrogen-containing heterocyclic compounds and therapeutic agents for hyperlipidemia comprising the same
12/03/1998CA2290737A1 Aromatic maleimides and methods of using the same
12/02/1998EP0881542A1 Lithography system
12/02/1998EP0881541A1 Radiation sensitive composition and color filter
12/02/1998EP0881540A1 Photoresist composition
12/02/1998EP0881539A1 Photoresist composition
12/02/1998EP0881538A2 Means for supporting a mask
12/02/1998EP0881094A1 A heat sensitive imaging element and a method for producing lithographic plates therewith
12/02/1998EP0880818A1 Low voltage electrostatic clamp for substrates such as dielectric substrates
12/02/1998EP0757628B1 Process for fixing an image
12/02/1998EP0561765B1 Novel method of making, testing and test device for integrated circuits
12/01/1998US5845170 Developing method
12/01/1998US5844728 Catadioptric reduction projection optical system
12/01/1998US5844727 Illumination design for scanning microlithography systems
12/01/1998US5844672 Method for comparing lens distortion between two steppers
12/01/1998US5844666 Positioning device with a vibration-free object table, and lithographic device provided with such a positioning device
12/01/1998US5844664 Positioning device with a force actuator system for compensating center-of-gravity displacements, and lithographic device provided with such a positioning device
12/01/1998US5844662 Resist processing apparatus and a resist processing method
12/01/1998US5844247 Position measuring method
12/01/1998US5843627 Method for forming fine patterns of semiconductor device
12/01/1998US5843624 Energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material
12/01/1998US5843622 Liquid photosensitive resin composition for use in forming a relief structure
12/01/1998US5843621 Process and apparatus for coating printed circuit boards
12/01/1998US5843619 Silver halide light-sensitive material comprising support, hardening layer and light-sensitive layer
12/01/1998US5843616 Positive resist composition
12/01/1998US5843603 Method of evaluating shaped beam of charged beam writer and method of forming pattern
12/01/1998US5843602 Method of adjusting concentration of developer through load cell utilization and wet nitrogen gas atmosphere
12/01/1998US5843600 Use of sub divided pattern for alignment mark recovery after inter-level dielectric planarization
12/01/1998US5843537 Insulator cure process for giant magnetoresistive heads
12/01/1998US5843530 Method for minimizing waste when coating a fluid with a slide coater
12/01/1998US5843527 Coating solution applying method and apparatus
12/01/1998US5843319 Positive-working radiation-sensitive mixture
12/01/1998US5843196 Ultra-clean transport carrier
12/01/1998US5842824 Substrate transport apparatus
12/01/1998US5842413 Method for providing the mesh of a silk screen at an angle for minimizing moire
12/01/1998CA2059345C Method and apparatus for fabrication of micro-structures using non-planar, exposure beam lithography
11/1998
11/26/1998WO1998053480A1 Microdischarge lamp
11/26/1998WO1998053451A1 Archival imaging and method therefor
11/26/1998WO1998053371A1 Releasable photopolymer printing plate and method of forming same
11/26/1998WO1998053370A1 Printing plate and method of making using digital imaging photopolymerization
11/26/1998WO1998053369A1 Ionic halomethyl-1,3,5-triazine photoinitiators
11/26/1998WO1998053008A1 Curable sealant composition
11/26/1998WO1998052952A1 Polyborate coinitiators for photopolymerization
11/26/1998WO1998052770A1 Planographic printing
11/26/1998CA2291088A1 Archival imaging and method therefor
11/26/1998CA2290425A1 Curable sealant composition
11/26/1998CA2238246A1 Photoresist composition
11/26/1998CA2238244A1 Photoresist composition
11/25/1998EP0880166A2 Method and apparatus for depositing an etch stop layer
11/25/1998EP0880078A2 Position detection device, apparatus using the same, exposure apparatus, and device manufacturing method using the same
11/25/1998EP0880076A1 Process for the production of photosensitive resin printing plates and treating fluid
11/25/1998EP0880075A1 Radiation sensitive resin composition
11/25/1998EP0880074A1 An energy-sensitive resist material and a process for device fabrication using an energy-sensitive resist material
11/25/1998EP0879997A2 Impurity removing apparatus
11/25/1998EP0879829A2 Photocurable composition and color reversion preventing method
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