Patents
Patents for G03F 7 - Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printed surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor (127,176)
01/1999
01/05/1999US5856058 Halation inhibitor which is an esterification product between a specified phenolic compound and a naphthoquinone-1,2-diazide sulfonic acid.
01/05/1999US5856054 Method of alignment in exposure step through array error and shot error determinations
01/05/1999US5856053 Method for estimating optimum position of a wafer for forming image patterns thereon
01/05/1999US5856052 Used to calibrate the photostepper's focus and exposure time settings.
01/05/1999US5856050 For color liquid crystal display device.
01/05/1999US5855802 Method and apparatus for forming a tubular article having a perforated annular wall
01/05/1999US5855755 Photopolymerization
01/05/1999US5855173 Zirconia alloy cylinders and sleeves for imaging and lithographic printing methods
12/1998
12/30/1998WO1998059364A1 Projection aligner, method of manufacturing the aligner, method of exposure using the aligner, and method of manufacturing circuit devices by using the aligner
12/30/1998WO1998059363A1 Detergent for lithography
12/30/1998WO1998058980A1 Use of oxime-protected isocyanate groups in the uv curing of resins at low temperature, and uv-curable resins that contain such oxime-protected isocyanate groups, and the use thereof in uv-curable coating compositions
12/30/1998WO1998058967A1 Self-assembling peptide surfaces for cell patterning and interactions
12/30/1998EP0887710A2 Resist development process
12/30/1998EP0887709A2 Method and appartus for manufacturing a device using a photolithograpic mask
12/30/1998EP0887708A2 An exposure system
12/30/1998EP0887707A1 Positive photoresist composition
12/30/1998EP0887706A1 Resist composition containing specific cross-linking agent
12/30/1998EP0887705A1 Resist compositions
12/30/1998EP0887704A1 A method for producing a positive or negative colour-proof using the same materials
12/30/1998EP0887204A2 Method for cleaning printing forms
12/30/1998EP0887203A1 Manufacturing method of planographic printing plate support and presensitized planographic printing plate
12/30/1998EP0887182A1 Heat-sensitive composition and method of making a lithographic printing form with it
12/30/1998EP0887181A2 Imaging system with high efficiency media loading
12/30/1998EP0886807A1 Color filter
12/30/1998EP0886806A1 2-substituted malondialdehyde compounds as co-developers for black-and-white photothermographic and thermographic elements
12/30/1998EP0886667A1 Initiators for the cationic crosslinking of polymers containing organofunctional groups
12/30/1998EP0610256B1 Polyamide materials
12/30/1998CN1203607A Isolation of novolak resin without high temp distillation and photoresist composition therefrom
12/30/1998CN1203511A Circuit substrate, circuit-formed suspension substrate, and production method thereof
12/30/1998CN1203381A Photosensitive compounds, photosensitive resin compositions, and pattern formation method making use of compounds or compositions
12/30/1998CN1203148A Micro structure and its manufacture method
12/29/1998US5854953 Method for developing treatment
12/29/1998US5854819 Mask supporting device and correction method therefor, and exposure apparatus and device producing method utilizing the same
12/29/1998US5854748 Boolean layer comparison slice
12/29/1998US5854672 In an exposure frame useful in lithography and the printing arts
12/29/1998US5854671 Scanning exposure method and apparatus therefor and a projection exposure apparatus and method which selectively chooses between static exposure and scanning exposure
12/29/1998US5854357 Process for the production of polyhydroxstyrene
12/29/1998US5854325 Photosensitive adhesive composition for additive plating
12/29/1998US5854302 Partially polymerized divinylsiloxane linked bisbenzocyclobutene resins and methods for making said resins
12/29/1998US5854132 Method for exposing photoresist
12/29/1998US5853963 Life extension of photoresist developer solutions
12/29/1998US5853962 Photoresist and redeposition removal using carbon dioxide jet spray
12/29/1998US5853961 Method of processing substrate and apparatus for processing substrate
12/29/1998US5853958 Lithographic plate with disperse particulate rubber additive
12/29/1998US5853957 Photosensitive resin compositions, cured films thereof, and circuit boards
12/29/1998US5853954 Fractionated novolak resin and photoresist composition therefrom
12/29/1998US5853953 Polymers and photoresist compositions comprising same
12/29/1998US5853952 Color developing organic material, color developing resin composition and colored thin film pattern
12/29/1998US5853950 Process for making lithographic printing plate
12/29/1998US5853949 Method of synthesizing polyphenol compound and positive working photoresist composition comprising polyphenol compound
12/29/1998US5853948 Positive photoresist compositions and multilayer resist materials using the same
12/29/1998US5853947 Quinonediazide positive photoresist utilizing mixed solvent consisting essentially of 3-methyl-3-methoxy butanol and propylene glycol alkyl ether acetate
12/29/1998US5853927 Method of aligning a mask in photolithographic process
12/29/1998US5853925 Lateral diffusion confirming pattern and a method of measuring a lateral diffusion
12/29/1998US5853922 Phase shifting mask, manufacturing method thereof, and exposure method using such a phase shifting mask
12/29/1998US5853812 Method and apparatus for processing substrates
12/29/1998US5853803 Resist processing method and apparatus
12/29/1998US5853555 Synthesis of onium hydroxides from onium salts
12/29/1998US5853471 Composition for anti-reflection coating
12/29/1998CA2057736C Printing screen and method and apparatus for its manufacture
12/24/1998DE19726634A1 Verfahren und Vorrichtung zur Immobilisierung von Makromolekülen Method and device for the immobilization of macromolecules
12/23/1998WO1998058296A1 Photosensitive polymer composition and element containing photosensitive polyamide and mixture of acrylates
12/23/1998WO1998058295A1 A PHOTORESIST DEVELOPABLE IN AQUEOUS BASE MADE FROM AN ACID FUNCTIONAL β-HYDROXY THIOL RESIN AND AN UNSATURATED RESIN
12/23/1998WO1998058294A1 Photocurable composition based on acid functional, primary resinous mercaptans
12/23/1998WO1998058293A2 Method and device for immobilizing macromolecules
12/23/1998WO1998058030A1 Matting paste for cationic systems
12/23/1998WO1998058000A1 A curable, water-borne one-component coating system using thermally labile hydrophilic groups
12/23/1998WO1998057943A1 Chromene compounds
12/23/1998WO1998057757A1 High efficiency photoresist coating
12/23/1998EP0886185A2 Process for manufacturing an embossing cylinder
12/23/1998EP0886184A2 Vacuum assisted debris removal system
12/23/1998EP0886183A1 Positive-working photoresist composition
12/23/1998EP0886182A1 Positive photoresist composition
12/23/1998EP0886181A2 Micro structure and its manufacture method
12/23/1998EP0886152A1 Delocalisation of stitch errors in the writing of gratings
12/23/1998EP0885410A1 Thermal treatment process of positive photoresist composition
12/23/1998EP0885409A2 Thermal treatment process of positive photoresist composition
12/23/1998EP0885408A1 A screen printing stencil
12/23/1998EP0885407A1 Bottom antireflective coatings through refractive index modification by anomalous dispersion
12/23/1998EP0885406A1 Light-absorbing antireflective layers with improved performance due to refractive index optimization
12/23/1998EP0885405A1 Photoresist compositions comprising polycyclic polymers with acid labile pendant groups
12/23/1998EP0779891B1 Novel acylphosphine oxides
12/23/1998EP0686274B1 Novel matrix resin for high-temperature stable photoimageable compositions
12/23/1998EP0607236B1 Processing waste washout liquid containing photopolymer from printing plate manufacture
12/23/1998EP0557079B1 Discretionary lithography for integrated circuits
12/23/1998CN1202913A Metal ion reduction in photoresist compositions by chelating ion exchange resin
12/23/1998CN1202638A Production of photosensitive recording material
12/23/1998CA2293290A1 Matting paste for cationic systems
12/23/1998CA2290661A1 A curable, water-borne one-component coating system using thermally labile hydrophilic groups
12/22/1998US5852693 Low-loss light redirection apparatus
12/22/1998US5852627 Laser with line narrowing output coupler
12/22/1998US5852518 Projection optical unit and projection exposure apparatus comprising the same
12/22/1998US5852490 Projection exposure method and apparatus
12/22/1998US5852293 Raster data drawing apparatus for correcting image starting position
12/22/1998US5851739 Quinonediazide/novolak positive electron beam resist developer
12/22/1998US5851738 Method comprising substrates coated with an antihalation layer that contains a resin binder comprising anthracene units
12/22/1998US5851737 Spatially varied interfaces for composite materials
12/22/1998US5851736 Heat-resistant photoresist composition, photosensitive substrate, and process for forming heat-resistant positive or negative pattern
12/22/1998US5851735 Alkaline developing composition and method of use to process lithographic printing plates
12/22/1998US5851734 Process for defining resist patterns