| Patents for G01Q 60 - Particular types of spm [scanning-probe microscopy] or apparatus therefor; Essential components thereof (7,095) |
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| 02/03/1998 | US5715059 Dark field, photon tunneling imaging systems and methods |
| 02/03/1998 | US5714756 Scanning probe microscope having a single viewing device for on-axis and oblique angle views |
| 02/03/1998 | US5714682 Scanning stylus atomic force microscope with cantilever tracking and optical access |
| 02/03/1998 | CA2195838A1 Method and device for optical near-field scanning microscopy of test specimens in liquids |
| 02/03/1998 | CA2070948C Information reproduction by high density scanning |
| 02/03/1998 | CA2069452C Information recording/reproduction apparatus and method for recording and/or reproducing information onto and/or from recording medium using probe electrodes |
| 02/03/1998 | CA2040702C Apparatus for recording and/or reproducing information to or from a recording medium |
| 01/28/1998 | EP0699341B1 Particle-optical instrument comprising a deflection unit for secondary electrons |
| 01/20/1998 | US5710051 Method for manufacturing a single electron transistor by using a scanning tunneling microscopy |
| 01/20/1998 | US5709803 Cylindrical fiber probes and methods of making them |
| 01/14/1998 | EP0818699A1 Optical near field probe and its method of fabrication |
| 01/14/1998 | EP0818052A1 Combined scanning probe and scanning energy microscope |
| 01/08/1998 | WO1998000744A1 Dark field, photon tunneling imaging systems and methods |
| 01/06/1998 | US5705814 Scanning probe microscope having automatic probe exchange and alignment |
| 12/30/1997 | US5703979 Cylindrical fiber probe devices |
| 12/30/1997 | US5702849 Mask for transferring a pattern for use in a semiconductor device and method of manufacturing the same |
| 12/29/1997 | EP0814494A2 Ion beam machining method and device thereof |
| 12/29/1997 | EP0813675A1 Magnetic modulation of force sensor for ac detection in an atomic force microscope |
| 12/18/1997 | DE19646120A1 Micromechanical sensor for atomic force or scanning tunnelling microscope |
| 12/18/1997 | DE19622701A1 Cantilever chip for atomic force microscopy |
| 12/11/1997 | DE19720708A1 High-speed monitor for study of pattern defect on semiconductor wafer |
| 12/09/1997 | US5696372 High efficiency near-field electromagnetic probe having a bowtie antenna structure |
| 12/09/1997 | CA2066478C Cantilever type probe, and scanning tunnel microscope and information processing apparatus employing the same |
| 12/03/1997 | EP0809858A1 Scanning probe microscope for use in fluids |
| 12/02/1997 | US5693938 Optical probe microscope having a fiber optic tip that receives both a dither motion and a scanning motion, for nondestructive metrology of large sample surfaces |
| 12/02/1997 | CA2068587C Information reading and recording using a scanning tunnel microscope |
| 11/27/1997 | DE19721313A1 Test specimen critical dimension measurement system for e.g. semiconductor manufacture |
| 11/27/1997 | DE19620192A1 Scanning equipment, in particular scanning probe microscope |
| 11/25/1997 | CA2059990C Moving apparatus, a moving method and an information detection and/or input apparatus using the same |
| 11/18/1997 | US5689494 Surface atom fabrication method and apparatus |
| 11/18/1997 | US5689480 Magneto-optic recording system employing near field optics |
| 11/18/1997 | US5689063 Atomic force microscope using cantilever attached to optical microscope |
| 11/12/1997 | EP0805946A1 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system |
| 11/12/1997 | EP0708976B1 Process for operating a time-of-flight secondary ion mass spectrometer |
| 10/30/1997 | WO1997040369A1 Method and apparatus for performing localized thermal analysis and sub-surface imaging by scanning thermal microscopy |
| 10/28/1997 | US5681987 Resonance contact scanning force microscope |
| 10/22/1997 | EP0786099A4 Fiber optic probe for near field optical microscopy |
| 10/21/1997 | US5679952 Scanning probe microscope |
| 10/21/1997 | US5679888 Dynamic quantity sensor and method for producing the same, distortion resistance element and method for producing the same, and angular velocity sensor |
| 10/15/1997 | EP0801318A2 Probe, manufacturing method therefore and scanning probe microscope |
| 10/15/1997 | EP0801310A1 Elementary analysis method by scanning probe microscope and ultra-short pulse high-voltage application method used for said method |
| 10/14/1997 | US5677978 Bent probe microscopy |
| 10/14/1997 | US5677635 Voltage and displacement measuring apparatus and probe |
| 10/14/1997 | US5677525 Ancillary module for making a spatially-resolved measurement of a focus volume |
| 10/14/1997 | US5676852 Cylindrical fiber probes and methods of making them |
| 10/14/1997 | CA2069708C Probe-driving mechanism, production thereof, and apparatus and piezoelectric actuator employing the same |
| 10/09/1997 | CA2200992A1 Probe, manufacturing method therefor and scanning probe microscope |
| 10/08/1997 | EP0800081A1 Method of performing fine working |
| 10/07/1997 | US5675433 Method for external excitation of subwavelength light sources that is integrated into feedback methodologies |
| 10/07/1997 | US5675145 Scanning probe microscope having an optical system for enabling identification of the scanning region and sample observation during a scanning operation |
| 10/01/1997 | EP0798561A1 Analytical method and device for precise analysis with a simple sensor |
| 09/30/1997 | US5672876 Sample density related to intensity of ionizing radiation |
| 09/30/1997 | CA2048968C Cantilever type probe, scanning tunneling microscopy and information processing device equipped with said probe |
| 09/24/1997 | EP0797117A1 Optical waveguide probe and optical system |
| 09/18/1997 | WO1997034122A1 Cantilever structures |
| 09/17/1997 | EP0795770A1 Scanning near field optical microscope |
| 09/10/1997 | EP0794406A1 Probe for atomic force microscope, method of fabricating same, and atomic force microscope |
| 09/09/1997 | US5665905 Calibration standard for 2-D and 3-D profilometry in the sub-nanometer range and method of producing it |
| 09/09/1997 | US5665253 Method of manufacturing single-wafer tunneling sensor |
| 09/08/1997 | CA2199528A1 Probe for atomic force microscope, method of fabricating same, and atomic force microscope |
| 09/04/1997 | WO1997025644A3 Near-field light source |
| 09/02/1997 | US5664036 High resolution fiber optic probe for near field optical microscopy and method of making same |
| 09/02/1997 | US5663798 Far-field characterization of sub-wavelength sized apertures |
| 08/27/1997 | EP0791803A2 Cantilever unit and atomic force microscope, magnetic force microscope, reproducing apparatus and information processing apparatus using the cantilever unit |
| 08/27/1997 | EP0791802A1 Scanning type near field interatomic force microscope |
| 08/26/1997 | US5661301 Spectroscopy and mapping of atoms, molecules and surface features via difference frequency generation with a scanning tunneling microscope or related instruments |
| 08/26/1997 | CA2047801C Information recording and/or reproducing apparatus |
| 08/21/1997 | WO1997030366A1 All-fiber, high-sensitivity, near-field optical microscopy instrument |
| 08/20/1997 | EP0790482A1 A dual stage instrument for scanning a specimen |
| 08/19/1997 | CA2057619C Cantilever probe and apparatus using the same |
| 08/19/1997 | CA2045878C Method for forming probe and apparatus therefor |
| 08/13/1997 | EP0788615A1 Method and device for determining substance-specific parameters of one or a plurality of molecules by correlation-spectroscopy |
| 08/12/1997 | US5656811 Method for making specimen and apparatus thereof |
| 08/12/1997 | US5656809 Atomic force microscope and measuring head thereof with linearly polarized reflected light |
| 08/05/1997 | US5654547 Method for particle wave reconstruction in a particle-optical apparatus |
| 08/05/1997 | US5654131 High density recording |
| 08/05/1997 | CA2052882C Cantilever type probe, scanning tunnel microscope and information processing apparatus using the same |
| 07/30/1997 | EP0786642A1 Method of manufacturing micro-tip for detecting tunneling current or micro-force or magnetic force, female mold substrate for manufacture thereof, method of manufacturing probe with micro-tip, probe unit, scanning probe microscope and information recording/reproduction apparatus having said probe |
| 07/30/1997 | EP0786099A1 Fiber optic probe for near field optical microscopy |
| 07/29/1997 | US5652428 Method of using scanning probe microscope allowing cleaning of probe tip in ambient atmosphere |
| 07/29/1997 | US5652377 Scanning method with scanning probe microscope |
| 07/23/1997 | EP0785410A2 Probe, method of manifacturing the probe, probe unit, and information recording/reproducing apparatus using the probe unit |
| 07/22/1997 | US5650614 Optical scanning system utilizing an atomic force microscope and an optical microscope |
| 07/17/1997 | WO1997025644A2 Near-field light source |
| 07/17/1997 | DE19601109A1 Zweidimensionale optische Nahfeldlichtquelle Two-dimensional optical Nahfeldlichtquelle |
| 07/16/1997 | EP0783670A1 Electromechanical transducer |
| 07/15/1997 | US5648300 Method of manufacturing cantilever drive mechanism and probe drive mechanism |
| 07/08/1997 | US5646731 Interferometric detecting/imaging method based on multi-pole sensing |
| 07/08/1997 | US5646339 Force microscope and method for measuring atomic forces in multiple directions |
| 07/02/1997 | EP0781976A2 Method for measuring critical dimension of pattern on sample |
| 07/01/1997 | US5644588 Microfine light source |
| 06/24/1997 | US5641896 Coupled oscillator scanning imager |
| 06/19/1997 | WO1997021977A1 Integrated silicon profilometer and afm head |
| 06/19/1997 | DE19546879A1 Scanning tunnel microscope measurement of surface characteristics |
| 06/10/1997 | US5638111 Optical probe element, and a recording and reproduction device using the optical probe element |
| 06/05/1997 | DE19544295A1 Production of structures within a submicron range e.g. grating |
| 06/03/1997 | US5635977 Optical probe element and a recording and reproduction device using the optical probe element |
| 06/03/1997 | US5635836 Mechanical apparatus with rod, pivot, and translation means for positioning a sample for use with a scanning microscope |
| 05/27/1997 | US5633972 Superresolution imaging fiber for subwavelength light energy generation and near-field optical microscopy |
| 05/27/1997 | US5633595 IC analysis system and electron beam probe system and fault isolation method therefor |