| Patents for G01Q 60 - Particular types of spm [scanning-probe microscopy] or apparatus therefor; Essential components thereof (7,095) |
|---|
| 07/24/2001 | US6265718 Scanning probe microscope with scan correction |
| 07/24/2001 | US6265711 Scanning probe microscope assembly and method for making spectrophotometric near-field optical and scanning measurements |
| 07/19/2001 | US20010008272 Measuring instrument and method for measuring features on a substrate |
| 07/19/2001 | DE19961906A1 Digital scanning measurement unit, e.g. scanning tunnel microscope; has differential element, analogue to digital converter and computer to form absolute image signal values from difference signals |
| 07/18/2001 | EP1116932A2 Measuring apparatus and method for measuring structures on a substrat |
| 07/18/2001 | CN1068677C 原子力显微镜 AFM |
| 07/17/2001 | US6262962 Method of and apparatus for recording/reproducing information signal, recording/reproducing head device, memory medium, and head element and manufacture thereof |
| 07/17/2001 | US6262426 Technique and process for the imaging and formation of various devices and surfaces |
| 07/17/2001 | US6260997 Method and apparatus for high spatial resolution spectroscopic microscopy |
| 07/12/2001 | WO2001049897A2 Method for characterization and quality control of porous media |
| 07/12/2001 | WO2000058759A3 Active probe for an atomic force microscope and method of use thereof |
| 07/12/2001 | US20010007347 Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe |
| 07/12/2001 | DE19960476A1 Verfahren zur Herstellung einer Sonde für die optische Rasternahfeldmikroskopie und mit diesem Verfahren hergestellte Sonde A process for producing a probe for the optical Rasternahfeldmikroskopie and with this method produced probe |
| 07/12/2001 | CA2394221A1 Method for characterization and quality control of porous media |
| 07/11/2001 | EP1115113A1 Information recording medium, information reproducing device, and information recording/reproducing device |
| 07/11/2001 | EP1113980A1 Aperture in a semiconductor material, and the production and use thereof |
| 07/11/2001 | EP0764261B1 Instrument for determining the topography of a surface |
| 07/10/2001 | US6259960 Part-inspecting system |
| 07/10/2001 | US6259520 Integrated circuit defect review and classification process |
| 07/10/2001 | US6259093 Surface analyzing apparatus |
| 07/10/2001 | US6259092 Thickness determination of carbonaceous overlayers on substrates of differing material |
| 07/10/2001 | US6257053 Scanning probe microscope having piezoelectric member for controlling movement of probe |
| 07/03/2001 | US6255127 Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same |
| 06/28/2001 | WO2001046674A1 Apparatus for evaluating electrical characteristics |
| 06/27/2001 | EP1111426A2 Near-field optical probe and manufacturing method for same, and near-fied optical apparatus using the near-field probe |
| 06/27/2001 | EP1111331A1 Stylus for nanotechnology and its manufacture |
| 06/26/2001 | US6252238 Micro-processing method using a probe |
| 06/26/2001 | US6252226 Nanometer scale data storage device and associated positioning system |
| 06/26/2001 | US6251755 High resolution dopant/impurity incorporation in semiconductors via a scanned atomic force probe |
| 06/21/2001 | WO2001044853A2 Method for producing a probe for the scanning near-field optical microscopy and a probe produced according to said method |
| 06/19/2001 | US6249747 Investigation and/or manipulation device |
| 06/19/2001 | US6249503 Method of and apparatus for recording/reproducing an information signal, recording/reproducing head device, memory medium, and head element |
| 06/19/2001 | US6249000 Scanning probe microscope |
| 06/14/2001 | WO2001042156A1 Low-reflection film and solar cell panel |
| 06/14/2001 | WO2001042155A1 Low-reflection glass article |
| 06/12/2001 | US6246054 Scanning probe microscope suitable for observing the sidewalls of steps in a specimen and measuring the tilt angle of the sidewalls |
| 06/12/2001 | US6245311 Method for heat treatment of silicon wafer and silicon wafer |
| 06/12/2001 | US6245204 Vibrating tip conducting probe microscope |
| 06/12/2001 | US6244103 Interpolated height determination in an atomic force microscope |
| 06/07/2001 | US20010002697 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 06/07/2001 | DE19939238C1 Sensor for scanning tunnel microscope has converter for converting tunnel current obtained at sensor point into corresponding magnetic signal |
| 06/05/2001 | USRE37203 Feedback control for scanning tunnel microscopes |
| 06/05/2001 | US6242737 Microscopic system equipt with an electron microscope and a scanning probe microscope |
| 06/05/2001 | US6242734 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 06/05/2001 | US6242291 Laser annealing method and laser annealing device |
| 06/05/2001 | US6240771 Device for noncontact intermittent contact scanning of a surface and a process therefore |
| 05/30/2001 | CN1297464A Gas-barrier films |
| 05/29/2001 | US6239430 Particle beam apparatus with energy filter |
| 05/29/2001 | US6239426 Scanning probe and scanning probe microscope |
| 05/29/2001 | US6238830 Active control of temperature in scanning probe lithography and maskless lithograpy |
| 05/29/2001 | US6237399 Cantilever having sensor system for independent measurement of force and torque |
| 05/29/2001 | CA2090556C Method for controlling movement of neutral atom and apparatus for carrying out the same |
| 05/23/2001 | EP1102031A2 A pattern dimension measuring method and apparatus |
| 05/22/2001 | US6236783 Optical fiber probe and manufacturing method therefor |
| 05/22/2001 | US6236589 Ultra high density storage media and method thereof |
| 05/22/2001 | US6236542 Substrate independent superpolishing process and slurry |
| 05/22/2001 | US6236513 Integrated objective/solid immersion lens for near field recording |
| 05/22/2001 | US6236033 Enhanced optical transmission apparatus utilizing metal films having apertures and periodic surface topography |
| 05/22/2001 | US6234009 Controlling motion of a scanning force microscope probe tip moving into engagement with a sample surface |
| 05/16/2001 | EP1100111A1 Deflection arrangement for separating two particle beams |
| 05/15/2001 | US6233206 High density magnetic thermal recording and reproducing assembly |
| 05/15/2001 | US6232787 Microstructure defect detection |
| 05/15/2001 | US6232600 Analysis of semiconductor surfaces by secondary ion mass spectrometry |
| 05/15/2001 | US6232597 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/15/2001 | US6232588 Near field scanning apparatus having an intensity distribution pattern detection |
| 05/09/2001 | EP1098210A2 Enhanced optical transmission apparatus utilizing metal films having apertures with or without periodic surface topography |
| 05/09/2001 | EP1097464A2 Integrated microcolumn and scanning probe microscope arrays |
| 05/09/2001 | EP1032828A4 Electrostatic force detector with cantilever for an electrostatic force microscope |
| 05/08/2001 | US6229610 System and method for measuring thin film properties and analyzing two-dimensional histograms using substraction operation |
| 05/08/2001 | US6229609 Scanning near-field optic/atomic force microscope |
| 05/08/2001 | US6229138 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/08/2001 | US6227519 Female mold substrate having a heat flowable layer, method to make the same, and method to make a microprobe tip using the female substrate |
| 05/03/2001 | WO2001031656A1 Technique and process for the imaging and formation of various devices and surfaces |
| 05/03/2001 | WO2001031287A1 Method and apparatus for molecular analysis of buried layers |
| 05/03/2001 | DE10054142A1 Roughness measuring method of wafer surface, by measuring selected area containing majority of points on wafer surface using atomic force microscope to measure microroughness |
| 05/01/2001 | US6225627 Focused ion beam system |
| 05/01/2001 | US6225626 Through-the-substrate investigation of flip chip IC's |
| 05/01/2001 | US6223591 Probe needle arrangement and movement method for use in an atomic force microscope |
| 04/25/2001 | CN1292496A Nanometer near-field optical clamping method |
| 04/24/2001 | US6220084 Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope |
| 04/19/2001 | WO2001027588A1 Scanning tunneling microscope light emitting/condensing device |
| 04/19/2001 | WO2001027581A2 Force sensing devices with multiple filled and/or empty channels and other attributes |
| 04/19/2001 | US20010000279 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 04/17/2001 | US6218264 Method of producing a calibration standard for 2-D and 3-D profilometry in the sub-nanometer range |
| 04/10/2001 | US6215137 Micromechanical sensor for scanning thermal imaging microscope and method of making the same |
| 04/10/2001 | US6215121 Three-dimensional scanning probe microscope |
| 04/10/2001 | US6215114 Optical probe for detecting or irradiating light and near-field optical microscope having such probe and manufacturing method of such probe |
| 04/05/2001 | WO2001024591A1 Apparatus for charged-particle beam irradiation, and method of control thereof |
| 04/05/2001 | WO2001023939A2 Device for scanning near field optical microscopy |
| 04/05/2001 | DE19947287A1 Vorrichtung zur optischen Nahfeldmikroskopie Device for optical near-field microscopy |
| 04/05/2001 | DE19939239A1 Sensor for atomic force microscope, has at least one source magnetic field and at least one magnetic field detector used to measure movement on-and-off of opposite sides of bending element |
| 04/04/2001 | EP1089066A1 Optical micro cantilever, method of manufacture thereof, and micro cantilever holder |
| 04/03/2001 | US6212292 Creating an image of an object with an optical microscope |
| 04/03/2001 | US6211686 Evaluation apparatus and fabrication system for semiconductor |
| 04/03/2001 | US6211540 Semiconductor strain sensor and scanning probe microscope using the semiconductor strain sensor |
| 04/03/2001 | US6211532 Microprobe chip for detecting evanescent waves probe provided with the microprobe chip and evanescent wave detector, nearfield scanning optical microscope, and information regenerator provided with the microprobe chip |
| 04/03/2001 | US6210982 Method for improving spatial resolution and accuracy in scanning probe microscopy |
| 03/29/2001 | WO2001022468A1 High bandwidth recoiless microactuator |
| 03/29/2001 | WO2001022065A1 Method for direct measurement of polycarbonate compositions by fluorescence |
| 03/28/2001 | EP1086981A1 Gas-barrier films |