Patents
Patents for G01Q 60 - Particular types of spm [scanning-probe microscopy] or apparatus therefor; Essential components thereof (7,095)
01/1991
01/29/1991US4988872 Electron probe microanalyzer having wavelength-dispersive x-ray spectrometer and energy-dispersive x-ray spectrometer
01/22/1991US4987303 Micro-displacement detector device, piezo-actuator provided with the micro-displacement detector device and scanning probe microscope provided with the piezo-actuator
01/16/1991EP0408009A2 Scanning tunneling spectroscope and a spectroscopic information detection method
01/16/1991EP0407460A1 An integrated mass storage device.
01/15/1991US4985627 Spin-polarized scanning tunneling microscope
01/09/1991EP0406413A1 Scanning type tunnel microscope
01/08/1991US4983540 Ultrafine ion beam, semiconductors, optoelectronic integrated circuits
01/02/1991EP0405973A1 Scanning tunnelling microscope in combination with an optical microscope
01/02/1991EP0404799A1 Integrated scanning tunneling microscope.
12/1990
12/27/1990WO1990015986A1 Microfabricated microscope assembly
12/27/1990EP0404742A2 Method of making and using a high resolution lithographic mask
12/12/1990EP0401852A2 Surface microscope
12/12/1990EP0401658A1 Scanning tunneling microscope with arrangements for detecting electrons coming from the sample
12/05/1990EP0400541A1 Atomic probe type microscope apparatus
11/1990
11/29/1990DE3844659A1 Micromanipulator
11/22/1990EP0398085A1 High sensitivity position-sensing method
11/22/1990EP0397799A1 A piezoelectric motion transducer and an integrated scanning tunneling microscope using the same.
11/22/1990DE3916047A1 Multiple-shell points for contactless scanning microscopy - has metal cores, dielectric and metal coatings coaxial cable-like structure, with differently shaped ends
11/15/1990WO1990013907A1 Scanning tunnel microscope
11/14/1990EP0397416A1 Imaging apparatus and method
11/14/1990EP0397116A2 Information detecting apparatus
11/14/1990EP0397073A2 Circuit pattern forming apparatus using mu-STM
11/13/1990US4969978 Electrolytic cells
11/08/1990CA2016002A1 Imaging apparatus and method
11/06/1990US4968585 Microfabricated cantilever stylus with integrated conical tip
11/06/1990US4968390 Electrodeposition using scanning electrochemical microscope
10/1990
10/31/1990EP0394962A2 Atomic force microscope
10/31/1990EP0394914A1 Mechanical stage support especially for a tunneling microscope
10/31/1990EP0394668A1 Apertureless near field optical microscopy
10/18/1990WO1990012415A1 Process and device for monitoring assisted ion machining processes on wafers
10/16/1990USRE33387 Atomic force microscope and method for imaging surfaces with atomic resolution
10/16/1990US4963823 For examination of a specimen
10/10/1990EP0391429A2 Micro-displacement detector device, piezo-actuator provided with the micro-displacement detector device and scanning probe microscope provided with the piezo-actuator
10/10/1990EP0391040A2 Absorption microcopy and/or spectroscopy with scanning microscopy control
09/1990
09/26/1990EP0389397A2 Apparatus for opens/shorts testing of capacitively coupled networks in substrates using electron beams
09/26/1990EP0388640A2 High speed waveform sampling with a tunneling microscope
09/19/1990EP0388213A2 Recording-reproducing apparatus and recording-reproducing method
09/19/1990EP0388023A2 Atomic force microscope with optional replaceable fluid cell
09/07/1990WO1990010304A1 Method and apparatus for specific spectroscopic atomic imaging using complementary wavelength specific photon biasing with electronic and temperature biasing on a scanning tunneling microscope
08/1990
08/22/1990EP0383323A1 Tunneling acoustic microscope
08/22/1990EP0383182A2 Probe unit
08/16/1990EP0382062A2 Electronic circuits including atomic probe
08/08/1990EP0381337A2 Apparatus and method for simultaneously effecting electro-chemical measurement and measurement of tunnelling current and tunnel probe therefor
08/08/1990EP0381113A2 Tunnel current data storage apparatus having separate lever bodies
08/07/1990US4947042 Tunnel unit and scanning head for scanning tunneling microscope
08/07/1990US4947034 Apertureless near field optical microscope
07/1990
07/31/1990US4945235 Fine adjustment mechanism for a scanning tunneling microscope
07/26/1990WO1990008397A1 Microminiature cantilever stylus
07/24/1990US4943769 Apparatus and method for opens/shorts testing of capacitively coupled networks in substrates using electron beams
07/24/1990US4943720 Electronic probe
07/24/1990US4943719 Microminiature cantilever stylus
07/24/1990CA1271997A1 Electron beam test probe for integrated circuit testing
07/18/1990EP0378444A2 Reproducing apparatus
07/17/1990US4942299 Method and apparatus for differential spectroscopic atomic-imaging using scanning tunneling microscopy
07/17/1990US4941753 Absorption microscopy and/or spectroscopy with scanning tunneling microscopy control
07/04/1990EP0376045A2 Method and apparatus for processing a fine pattern
07/03/1990US4939363 Scanning tunneling microscope
06/1990
06/26/1990US4937766 Acquiring dimensions of a large object
06/20/1990EP0373742A2 Tunnel unit and scanning head for scanning tunneling microscope
06/19/1990US4935634 Atomic force microscope with optional replaceable fluid cell
06/12/1990CA1270132A1 Method and atomic force microscope for imaging surfaces with atomic resolution
05/1990
05/16/1990EP0368579A2 Probe unit, driving method thereof, and scanning device for detecting tunnel current having said probe unit
05/16/1990EP0368510A1 Current amplifier
05/15/1990US4925139 Mechanical stage support for a scanning tunneling microscope
05/10/1990DE3929735A1 Finely controlling point of scanning tunnelling microscope - exerting electrostatic forces on metallised oxide diaphragm deflected vertically by tensions in two directions
05/09/1990EP0366746A1 A variable temperature scanning tunneling microscope
05/08/1990US4924091 Scanning ion conductance microscope
05/03/1990WO1990004753A1 Photon scanning tunneling microscopy
05/02/1990EP0366096A2 Surface analysis method and a device therefor
04/1990
04/18/1990CN1041468A Method and device for sub-micron processing surface
04/17/1990US4918309 Method for investigating surfaces at nanometer and picosecond resolution and laser-sampled scanning tunneling microscope for performing said method
04/17/1990US4917462 Near field scanning optical microscopy
04/10/1990US4916688 Data storage method using state transformable materials
04/10/1990US4916002 Forming aperture in dielectric on silicon substrate; anisotropic etching
04/04/1990EP0361932A2 Scanning tunnel-current-detecting device and method
04/03/1990US4914293 Microscope apparatus
04/03/1990US4912822 Method of making an integrated scanning tunneling microscope
03/1990
03/28/1990EP0360337A2 Method of and device for sub-micron processing a surface
03/13/1990US4908519 Loading mechanism and support structure having improved vibration damping useful in scanning tunneling microscopy
03/06/1990US4906840 Integrated scanning tunneling microscope
02/1990
02/28/1990EP0355241A1 Spin-polarized scanning tunneling microscope
02/20/1990US4902892 Method of measurement by scanning tunneling microscope
02/07/1990EP0354020A2 Electronic probe
01/1990
01/23/1990US4896044 Scanning tunneling microscope nanoetching method
01/16/1990US4894541 Apparatus utilizing charged-particle beam
01/16/1990US4894538 Scanning device for scanning tunneling microscope
01/16/1990US4894537 High stability bimorph scanning tunneling microscope
01/10/1990EP0349911A2 Micromanipulator
01/03/1990EP0348785A2 Electron beam-measuring apparatus
12/1989
12/27/1989EP0348239A1 Scanning tunneling microscope
12/27/1989EP0347739A2 Scanning tunneling microscope and surface topographic observation method
12/26/1989US4889988 Feedback control for scanning tunnel microscopes
11/1989
11/28/1989US4883959 Scanning surface microscope using a micro-balance device for holding a probe-tip
11/14/1989US4880975 Fine adjustment mechanism for a scanning tunneling microscope
11/02/1989DE3812684A1 Method for fast scanning of uneven surfaces with the scanning tunnel microscope
10/1989
10/31/1989US4877957 Scanning type tunnel microscope
10/25/1989EP0338083A1 Scanning tunneling microscope with means for correcting surface data
10/17/1989US4874945 Electron microscope equipped with scanning tunneling microscope
10/05/1989WO1989009483A1 A variable temperature scanning tunneling microscope
10/04/1989EP0335487A2 Data storage using state transformable materials
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