Patents
Patents for G01Q 60 - Particular types of spm [scanning-probe microscopy] or apparatus therefor; Essential components thereof (7,095)
10/1996
10/17/1996WO1996032622A1 Instrument for determining the topography of a surface
10/17/1996DE19513529A1 Anordnung zur Erfassung der Topographie einer Oberfläche Arrangement for determining the topography of a surface
10/09/1996EP0736746A1 Method of using scanning probe microscope permitting cleaning of probe microscope or of probe tip in ambient atmosphere
10/03/1996WO1996030927A1 Combined scanning probe and scanning energy microscope
10/03/1996WO1996030797A1 Micro-optical probe for a scanning microscope
10/03/1996WO1996030717A1 Micromechanical probe for a scanning microscope
10/03/1996CA2213970A1 Combined scanning probe and scanning energy microscope
10/02/1996EP0584233A4 Methods of fabricating integrated, aligned tunneling tip pairs
10/02/1996EP0478666B1 Microfabricated microscope assembly
10/02/1996DE19531466A1 Mikromechanische Sonde für Rastermikroskope Micromechanical probe for scanning microscopes
10/02/1996DE19531465A1 Mikrooptische Sonde für Rastermikroskope Micro-optical probe for scanning microscopes
10/01/1996US5560244 Scanning stylus atomic force microscope with cantilever tracking and optical access
09/1996
09/24/1996US5559907 Method of controlling polarization properties of a photo-induced device in an optical waveguide and method of investigating structure of an optical waveguide
09/24/1996US5559330 Scanning tunneling microscope
09/24/1996US5559328 Apparatus for analyzing samples
09/19/1996WO1996028751A1 Method for particle wave reconstruction in a particle-optical apparatus
09/19/1996WO1996028706A1 Magnetic modulation of force sensor for ac detection in an atomic force microscope
09/19/1996DE19509903A1 Prodn. of tip used in optical electron beam scanning microscope
09/18/1996EP0732584A2 An assembly and a method suitable for identifying a code sequence of a biomolecule
09/17/1996US5557156 Scan control for scanning probe microscopes
09/12/1996WO1996027895A1 Electrochemical identification of molecules in a scanning probe microscope
09/11/1996EP0712533A4 Probe microscopy
09/10/1996US5554851 Parallel plane holding mechanism and apparatus using such a mechanism
09/10/1996US5553487 Methods of operating atomic force microscopes to measure friction
09/10/1996US5553486 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
08/1996
08/29/1996DE19604363A1 Auxiliary fibre optic focussing module for microscopy
08/28/1996EP0729006A2 Information processing apparatus with probe undergoing circular motion
08/28/1996EP0728322A1 Microscopic electromagnetic radiation transmitter or detector
08/27/1996USRE35317 Potentiostatic preparation of molecular adsorbates for scanning probe microscopy
08/27/1996US5550948 Method of determining changes in the refractive index of an optical waveguide
08/27/1996US5549954 Magnetic disc
08/21/1996EP0727814A1 Scanning probe for investigating electronic, magnetic and topographic structures of the order of sub-micron resolution and method of fabricating the same
08/21/1996EP0727660A2 Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same
08/21/1996EP0727659A2 Method and apparatus for analyzing minute foreign substances, and process for manufacturing semiconductor or LCD elements
08/21/1996EP0727639A1 Method of chemically differentiated imaging by means of atomic force microscopy
08/20/1996US5548117 Probe for a scanning tunneling microscope and method of manufacturing a probe
08/20/1996US5548113 For examining a sample
08/16/1996CA2169522A1 Chemically differentiated imaging by scanning atomic force microscopy
08/15/1996WO1996024946A1 Scanning probe microscope for use in fluids
08/15/1996WO1996024819A1 Cantilever deflection sensor and use thereof
08/15/1996WO1996024689A1 Method and apparatus for determining the sequence of polynucleotides
08/14/1996EP0726567A2 Semiconductor layer structure as a recording medium
08/14/1996EP0726480A2 Probe for an optical near-field microscope
08/14/1996EP0726444A1 Magnetic resonance method and apparatus for detecting an atomic structure of a sample along a surface thereof
08/14/1996EP0465515B1 Process and device for monitoring ion assisted machining processes on wafers
08/13/1996US5546375 Method of manufacturing a tip for scanning tunneling microscope using peeling layer
08/13/1996US5546374 Information recording and/or reproducing apparatus using probe
08/13/1996US5546223 Method for external excitation of subwavelength light sources that is integrated into feedback methodologies
08/08/1996WO1996024026A1 Tapping atomic force microscope with phase or frequency detection
08/06/1996US5543614 Scanning probe microscope capable of suppressing probe vibration caused by feedback control
08/01/1996DE19502822A1 Distance dependent signal extraction to regulate distance between probe point and probed surface for raster probe microscopy
07/1996
07/30/1996US5540958 Coating a substrates, patterning a material and coating with a second material
07/24/1996EP0723039A2 Compound semiconductor substrate and process of producing same
07/24/1996EP0722574A1 Near-field optical microscope
07/23/1996US5539203 Single ion implantation system
07/23/1996US5539197 Scanning near-field optical microscope having a medium denser than air in the gap between the probe chip and the sample being measured
07/23/1996US5538898 Method suitable for identifying a code sequence of a biomolecule
07/23/1996US5537863 Scanning probe microscope having a cantilever used therein
07/17/1996EP0722077A2 Information processing apparatus effecting probe position control with electrostatic force
07/10/1996EP0721101A2 Method and apparatus for identifying and characterizing a material
07/09/1996US5535185 Information recording/reproduction apparatus using probe
07/09/1996US5534359 Silicon wafer with ridges and grooves, electron microscopes
07/09/1996US5533387 Method of evaluating silicon wafers
07/04/1996WO1996020406A1 Elementary analysis method by scanning probe microscope and ultra-short pulse high-voltage application method used for said method
07/02/1996US5531343 Cylindrical fiber probe devices and methods of making them
06/1996
06/25/1996US5530253 Sample stage for scanning probe microscope head
06/18/1996US5528716 Method of determining and investigating the physical structure of a light guiding body
06/18/1996US5528156 IC analysis system and electron beam probe system and fault isolation method therefor
06/18/1996US5528034 Method of ultra high sensitivity hydrogen detection with slow multiply-charged ions
06/18/1996US5528033 To measure critical dimensions of a submicron device
06/12/1996EP0716417A2 Information processing apparatus provided with mechanism for controlling position of probe
06/12/1996EP0715714A1 A measuring device for measuring the intensity and/or polarization of electromagnetic radiation, for determining physical properties of a preparation, and for reading information from a storage medium
06/11/1996US5526334 Information processing apparatus with multiple probes and method therefor
06/05/1996EP0715147A2 Microscope with aligning function
06/05/1996DE4435635A1 Microfabrication of cantilever stylus for atomic force microscopy
05/1996
05/28/1996US5520769 Quantitative analysis of dopes in semiconductors, etching an oxide, measurement of topography
05/22/1996EP0712533A1 Probe microscopy
05/21/1996US5519686 Encoder for controlling measurements in the range of a few angstroms
05/21/1996US5519212 Tapping atomic force microscope with phase or frequency detection
05/15/1996EP0712047A2 Method of forming a resist pattern
05/14/1996US5517482 Information recording/reproducing apparatus having fuzzy operating unit
05/14/1996US5517027 Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these
05/14/1996US5515719 Controlled force microscope for operation in liquids
05/09/1996WO1996013744A1 Method and device for determining substance-specific parameters of one or a plurality of molecules by correlation-spectroscopy
05/08/1996EP0711029A2 Microstructure and method of forming the same
05/08/1996EP0710370A1 Intelligent sensor for near field optical device
05/07/1996US5513518 For generating a signal corresponding to a scanned sample
05/02/1996WO1996012930A1 Apparatus for microindentation hardness testing and surface imaging incorporating a multi-plate capacitor system
05/02/1996DE4438391A1 Verfahren und Vorrichtung zur Bestimmung stoffspezifischer Parameter eines oder weniger Moleküle mittels Korrelations-Spektroskopie Method and apparatus for determining material-specific parameters of one or less molecules using correlation spectroscopy
05/01/1996EP0709704A1 Optical probe microscope for nondestructive metrology of large sample surfaces
05/01/1996EP0708976A1 Process for operating a time-of-flight secondary ion mass spectrometer
04/1996
04/30/1996US5513168 Optical information read/write apparatus
04/30/1996US5512746 Micro-pattern measuring apparatus
04/30/1996US5511931 Micromotion stage
04/25/1996WO1996012206A1 Fiber optic probe for near field optical microscopy
04/23/1996US5510858 Television receiver having an STM memory
04/23/1996US5510617 Particle-optical instrument comprising a deflection unit for secondary electrons
04/23/1996US5510614 Solid surface observation method and apparatus therefor, and electronic apparatus formed of the solid surface observation apparatus and method of forming the electronic apparatus
04/16/1996US5508805 Interferometer, optical scanning type tunneling microscope and optical probe
04/16/1996US5508527 Method of detecting positional displacement between mask and wafer, and exposure apparatus adopting the method
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