| Patents for G01Q 60 - Particular types of spm [scanning-probe microscopy] or apparatus therefor; Essential components thereof (7,095) |
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| 09/08/1993 | EP0559202A1 Secondary ion mass spectrometer for analyzing positive and negative ions |
| 09/07/1993 | US5242541 Method of producing ultrafine silicon tips for the afm/stm profilometry |
| 09/01/1993 | EP0557743A1 Feedback controlled differential fiber interferometer |
| 08/31/1993 | US5241527 Recording and reproducing apparatus and method using a recording layer having a positioning region |
| 08/31/1993 | US5239863 Cantilever stylus for use in an atomic force microscope and method of making same |
| 08/24/1993 | US5237859 Atomic force microscope |
| 08/17/1993 | US5237529 Microstructure array and activation system therefor |
| 08/10/1993 | US5235187 Methods of fabricating integrated, aligned tunneling tip pairs |
| 08/03/1993 | USRE34331 Feedback control for scanning tunnel microscopes |
| 08/03/1993 | US5233191 Method and apparatus of inspecting foreign matters during mass production start-up and mass production line in semiconductor production process |
| 07/28/1993 | EP0478666A4 Microfabricated microscope assembly |
| 07/22/1993 | WO1993014377A1 Method of manufacturing reference samples for calibrating amount of measured displacement and reference sample, and measuring instrument and calibration method |
| 07/22/1993 | DE3844821C2 Micromanipulator for raster tunnel microscope |
| 07/21/1993 | EP0551856A1 Probe for a scanning tunneling microscope and method of manufacturing a probe |
| 07/21/1993 | EP0551814A1 Surface observing apparatus and method |
| 07/20/1993 | US5229607 Combination apparatus having a scanning electron microscope therein |
| 07/20/1993 | US5229606 Jumping probe microscope |
| 07/13/1993 | US5227626 Lithography apparatus using scanning tunneling microscopy |
| 07/06/1993 | US5224376 Atomic force microscope |
| 06/29/1993 | US5223713 Scanner for scanning tunneling microscope |
| 06/29/1993 | US5222396 Tunnelling acoustic microscope |
| 06/15/1993 | US5220555 Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof |
| 06/15/1993 | US5218757 Tapered carbon microelectrode and process for production thereof |
| 06/09/1993 | EP0545538A1 Scanning microscope comprising force-sensing means |
| 06/08/1993 | US5218262 Apparatus for retaining an electrode by a magnetically shielded magnet |
| 06/08/1993 | CA1318980C Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof |
| 06/01/1993 | US5216661 Writing, editing and erasing data bits in an information storage device |
| 06/01/1993 | US5216254 Circuit pattern forming apparatus using mu-stm |
| 05/26/1993 | CN1020976C Method and device for sub-micron processing surface |
| 05/25/1993 | US5214282 Method and apparatus for processing a minute portion of a specimen |
| 05/13/1993 | WO1993009396A1 Method for creating a three-dimensional corporeal model from a very small original |
| 05/12/1993 | EP0540839A1 Probe for atomic force microscope usable for scanning tunneling microscope |
| 05/12/1993 | EP0439534A4 Photon scanning tunneling microscopy |
| 05/11/1993 | US5210714 Distance-controlled tunneling transducer and direct access storage unit employing the transducer |
| 05/11/1993 | US5210425 Ablation of atoms, atomic force microscope |
| 04/29/1993 | DE4231426A1 Polyhedron tip near field optical sensor and opto-electronic transducer - has polyhedron tip with uncoated sharp edges and tip between side faces coated with films, e.g. of aluminium@, silver@ or gold@ |
| 04/27/1993 | US5206702 Technique for canceling the effect of external vibration on an atomic force microscope |
| 04/14/1993 | EP0536827A1 Combined scanning force microscope and optical metrology tool |
| 04/13/1993 | US5202004 Determining contour of surface |
| 04/07/1993 | EP0535934A1 Method of manufacturing cantilever drive mechanism, method of manufacturing probe drive mechanism, cantilever drive mechanism, probe drive mechanism and electronic device which uses the same |
| 04/07/1993 | EP0535611A1 High resolution observation apparatus with photon scanning tunneling microscope |
| 04/06/1993 | US5200616 Environment controllable scanning probe microscope |
| 04/06/1993 | CA1315898C Scanning tunneling microscope and surface topographic observation method |
| 04/04/1993 | CA2079752A1 High resolution observation apparatus with photon scanning microscope |
| 03/31/1993 | EP0534406A1 Parallel plane holding mechanism and apparatus using such a mechanism |
| 03/30/1993 | US5199090 Flying magnetooptical read/write head employing an optical integrated circuit waveguide |
| 03/30/1993 | US5198715 Scanner for scanning probe microscopes having reduced Z-axis non-linearity |
| 03/30/1993 | US5198667 Method and apparatus for performing scanning tunneling optical absorption spectroscopy |
| 03/23/1993 | US5196701 High-resolution detection of material property variations |
| 03/17/1993 | EP0531779A1 X-ray mask containing a cantilevered tip for gap control and alignment |
| 03/16/1993 | US5193385 Cantilever for use in atomic force microscope and manufacturing method therefor |
| 03/11/1993 | DE4229275A1 Sample position control in focussed ion beam system e.g. for faulty bit analysis of semiconductor memory - allows automatic movement of sample w.r.t. reference point calculated by detection of secondary electrons released by irradiation by ion beam |
| 03/10/1993 | EP0530427A1 Multiple STM-tip unit, method for manufacturing and application thereof in a direct access storage unit |
| 03/03/1993 | EP0529846A1 Scanning probe microscope |
| 03/03/1993 | EP0529616A2 Information processing apparatus and scanning tunnel microscope |
| 03/03/1993 | EP0529125A1 Method and apparatus for generating high resolution optical images |
| 03/02/1993 | US5189906 Compact atomic force microscope |
| 02/17/1993 | EP0527601A1 Composite scanning tunnelling microscope and optical microscope |
| 02/17/1993 | EP0527448A2 Scanning tunnelling/atomic force microscope combined with optical microscope |
| 02/17/1993 | EP0527379A1 Method for targeted modification of surfaces of solid state body in the nanometer range through local laminar separation as well as use of the method for storing information units |
| 02/17/1993 | EP0527370A1 Procedure for implementing localised catalytic reactions with or on solid state surfaces on a nanometric or subnanometric scale |
| 02/16/1993 | US5187367 Cantilever type probe, scanning tunneling microscope and information processing device equipped with said probe |
| 02/16/1993 | US5186789 Method of making a cantilever stylus for use in an atomic force microscope |
| 02/11/1993 | CA2074438A1 Specific modification of the surfaces of solids in the nanometer range by local delamination, and the storage of information units |
| 02/10/1993 | CA2074437A1 Performance of location-selective catalytic reactions with or on the surfaces of solids in the namometer or subnanometer range |
| 02/09/1993 | US5185572 Scanning tunneling potentio-spectroscopic microscope and a data detecting method |
| 02/03/1993 | EP0526228A1 Apparatus for detecting electrostatic force in solution |
| 01/26/1993 | US5182453 Ion scattering spectrometer |
| 01/26/1993 | US5182452 Method for determining the presence of thin insulating films |
| 01/20/1993 | EP0523699A1 Charged particle beam apparatus |
| 01/19/1993 | CA1312952C Microprobe, preparation thereof and electronic device by use of said microprobe |
| 01/13/1993 | EP0522168A1 Surface atom machining method and apparatus |
| 01/13/1993 | EP0407460A4 An integrated mass storage device |
| 01/12/1993 | US5179499 Multi-dimensional precision micro-actuator |
| 12/23/1992 | EP0519745A2 Recording medium, information processing apparatus using same, and information-erasing method |
| 12/23/1992 | EP0519622A2 Evanescent wave sensor shell and apparatus |
| 12/23/1992 | EP0519269A1 Method for targeted modification of isolated nanometer structures of a solid state body surface |
| 12/21/1992 | CA2070210A1 Selective modification of individual nanometer and subnanometer structures in the surface of a solid |
| 12/16/1992 | EP0518618A2 Scanning tunneling microscope with cantilever type displacement element |
| 12/16/1992 | EP0518240A2 Information reproducing method and information reproducing apparatus which uses the method |
| 12/15/1992 | US5171993 Method of correcting error arising in current-imaging tunneling spectroscopy |
| 12/15/1992 | US5171992 Rigid needle-like structure; formed by decomposition of organic compounds by electron beams |
| 12/09/1992 | EP0517270A1 Scanning probe microscope |
| 12/09/1992 | EP0517074A2 Information recording/reproduction apparatus and method for recording and/or reproducing information onto and/or from recording medium using probe electrodes |
| 12/08/1992 | CA2069538A1 Evanescent wave sensor shell and apparatus |
| 12/02/1992 | EP0516418A1 Probe-driving mechanism, production thereof, and apparatus and piezoelectric actuator employing the same |
| 12/02/1992 | EP0516380A2 Micro-displacement element for a scanning tunneling microscope |
| 12/01/1992 | US5168538 Optical probe employing an impedance matched sub-lambda transmission line |
| 12/01/1992 | US5168159 Barrier height measuring apparatus including a conductive cantilever functioning as a tunnelling probe |
| 11/29/1992 | CA2064958A1 Method for selectively scaling a field emission electron gun and device formed thereby |
| 11/26/1992 | WO1992020842A1 Methods of fabricating integrated, aligned tunneling tip pairs |
| 11/24/1992 | US5166919 Atomic scale electronic switch |
| 11/24/1992 | US5166751 For measuring distance changes |
| 11/24/1992 | US5166521 Ion-scattering spectrometer |
| 11/24/1992 | US5166516 Scanning probe microscope with slant detection and compensation |
| 11/19/1992 | EP0513790A2 Information processing apparatus |
| 11/19/1992 | EP0513776A2 Instrument and method for 3-dimensional atomic arrangement observation |
| 11/17/1992 | US5164791 Minute displacement detector using optical interferometry |
| 11/17/1992 | US5164596 Focused ion beam irradiating apparatus |
| 11/17/1992 | US5164595 Scanning tunneling microscope tips |