| Patents for G01Q 60 - Particular types of spm [scanning-probe microscopy] or apparatus therefor; Essential components thereof (7,095) |
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| 03/28/2001 | EP1012862A4 Atomic force microscope for generating a small incident beam spot |
| 03/28/2001 | EP0920625B1 Active substance screening process |
| 03/27/2001 | US6208789 Probe, method of its manufacturing, and probe-type memory |
| 03/27/2001 | US6208154 Method of determining the doping concentration across a surface of a semiconductor material |
| 03/27/2001 | US6207575 Local interconnect etch characterization using AFM |
| 03/21/2001 | EP1084394A1 Optical amplification of molecular interactions using liquid crystals |
| 03/20/2001 | US6203934 Support with magnetic layer of ferromagentic material metal powder and binder |
| 03/20/2001 | US6203660 Device for chemically etching a fiber probe |
| 03/15/2001 | WO2001018846A2 High dynamic range mass spectrometer |
| 03/14/2001 | EP0917713B1 Magneto-optic recording system employing near field optics |
| 03/13/2001 | US6201401 Method for measuring the electrical potential in a semiconductor element |
| 03/13/2001 | US6201227 Scanning probe microscope |
| 03/13/2001 | US6201226 Probe with tip having micro aperture for detecting or irradiating light, near-field optical microscope, recording/reproduction apparatus, and exposure apparatus using the probe, and method of manufacturing the probe |
| 03/08/2001 | WO2000067290A3 Integrated microcolumn and scanning probe microscope arrays |
| 03/07/2001 | EP1080340A1 Force sensing probe for scanning probe microscopy |
| 03/06/2001 | US6198533 High temperature thin film property measurement system and method |
| 03/06/2001 | US6197455 Lithographic mask repair using a scanning tunneling microscope |
| 03/06/2001 | US6196061 AFM with referenced or differential height measurement |
| 03/01/2001 | WO2001015151A1 Near field optical head and method for manufacturing the same |
| 03/01/2001 | DE19935570A1 Mikromanipulator Micromanipulator |
| 02/28/2001 | CN1285915A Electrostatic force detector with cantilever for an electrostatic force microscpoe |
| 02/27/2001 | US6194711 Scanning near-field optical microscope |
| 02/27/2001 | US6194148 Method for detecting a hybridized nucleic acid molecule |
| 02/27/2001 | US6193850 Directly determining concentration of target species such as fries product in a composition comprising aromatic carbonate chain units by irradiating composition with electromagnetic radiation at a wavelength to cause fluorescence, measuring |
| 02/21/2001 | EP1077367A1 Capacitive force gauge |
| 02/21/2001 | EP1076803A1 Apparatus and method for measuring intermolecular interactions by atomic force microscopy |
| 02/20/2001 | US6190062 Cleaning chamber built into SEM for plasma or gaseous phase cleaning |
| 02/20/2001 | US6189374 Active probe for an atomic force microscope and method of use thereof |
| 02/20/2001 | US6189373 Scanning force microscope and method for beam detection and alignment |
| 02/13/2001 | US6188161 Driving apparatus using transducer |
| 02/13/2001 | US6188068 Methods of examining a specimen and of preparing a specimen for transmission microscopic examination |
| 02/13/2001 | US6185992 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 02/08/2001 | WO2001009965A1 Micromanipulator with piezoelectric movement elements |
| 02/08/2001 | WO2001009662A2 Scanning interferometric near-field confocal microscopy |
| 02/08/2001 | WO2001009661A1 Device for determining the characteristics of an object surface |
| 02/08/2001 | WO2000072077A8 Scanning device, especially for detecting fluorescent light |
| 02/06/2001 | US6185323 Method characterizing a feature using measurement imaging tool |
| 02/06/2001 | US6185178 Tracking control method for optical storage apparatus using near field optical effect and optical probes |
| 02/06/2001 | US6184986 Depositing a material of controlled, variable thickness across a surface for planarization of that surface |
| 02/06/2001 | US6184519 Surface analyzing apparatus with anti-vibration table |
| 02/01/2001 | WO2000063736A3 Optical microscopy and its use in the study of cells |
| 01/30/2001 | US6181485 High numerical aperture optical focusing device for use in data storage systems |
| 01/30/2001 | US6181478 Ellipsoidal solid immersion lens |
| 01/25/2001 | WO2001006516A1 Micromachined microprobe tip |
| 01/25/2001 | WO2001006296A1 High q-factor micro tuning fork by thin optical fiber for nsom |
| 01/25/2001 | WO2001006205A1 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 01/25/2001 | WO2001005701A1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 01/25/2001 | CA2380149A1 Near-field scanning optical microscoe with a high q-factor piezoelectric sensing elment |
| 01/24/2001 | EP1070343A1 Depositing a material of controlled, variable thickness across a surface for planarization of that surface |
| 01/24/2001 | EP1025416A4 Method and apparatus for obtaining improved vertical metrology measurements |
| 01/23/2001 | US6178222 Contact macroradiography characterization of doped optical fibers |
| 01/23/2001 | US6176122 Cantilever unit and scanning probe microscope utilizing the cantilever unit |
| 01/18/2001 | WO2001004611A2 Method and apparatus for enhancing yield of secondary ions |
| 01/18/2001 | DE19929972A1 Arrangement for simultaneous force microscopy during optical near field microscopy has coupling element consisting at least partly of set material and can additionally contain bearer parts |
| 01/17/2001 | EP1069609A2 Method for automatically identifying and classifying defects, in particular on a semiconductor wafer |
| 01/16/2001 | US6175417 Method and apparatus for detecting defects in the manufacture of an electronic device |
| 01/16/2001 | US6175126 Asymmetrically split charged coupled device |
| 01/16/2001 | US6173604 Scanning evanescent electro-magnetic microscope |
| 01/09/2001 | US6172506 Capacitance atomic force microscopes and methods of operating such microscopes |
| 01/09/2001 | US6172365 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 01/09/2001 | US6171437 Semiconductor manufacturing device |
| 01/04/2001 | WO2001001183A1 Near field optical examination device |
| 01/04/2001 | WO2001001161A1 Ferroelectric film property measuring device, measuring method therefor and measuring method for semiconductor memory units |
| 01/04/2001 | DE19929875A1 Verfahren und Vorrichtung zur schnellen nahfeldoptischen Untersuchung von biologischen Objekten mittels Partikelstrahlen-angeregten Lichtquelle Method and apparatus for fast near-field optical study of biological objects using particle beams excited light source |
| 01/03/2001 | EP0746857A4 Scanning probe microscope |
| 01/03/2001 | CN1278917A Nanoelectrode arrays |
| 01/02/2001 | US6169281 Apparatus and method for determining side wall profiles using a scanning probe microscope having a probe dithered in lateral directions |
| 01/02/2001 | US6167753 Detecting fields with a single-pass, dual-amplitude-mode scanning force microscope |
| 12/27/2000 | EP1063641A1 Information recording apparatus |
| 12/21/2000 | WO2000046568A3 Method of information collection and processing of sample's surface |
| 12/21/2000 | DE19927836A1 Topography-free test sample manufacture for optical near-field microscopy consists of test structure embedded in carrier material, inverted and placed on carrier substrate |
| 12/20/2000 | EP1061510A1 Near-field optical head and production method thereof |
| 12/20/2000 | EP1018138A4 Scanning evanescent electro-magnetic microscope |
| 12/19/2000 | US6163519 Scanning near-field optical microscope using the probe and recording and/or reproducing apparatus using the probe |
| 12/14/2000 | WO2000075627A1 Atomic force microscope and driving method therefor |
| 12/14/2000 | DE19925431A1 Optical impulse mode near field scanning microscope with feedback control achieved using a piezo-electric oscillator to change the amplitude and phase of an optical fiber test head to yield improved control and sensitivity |
| 12/13/2000 | CN1276625A Charging measuring device |
| 12/12/2000 | US6159742 Carbon-based tip for scanning probe microscopy; composed of a carbon-based nanotube with one end linked to a molecular probe and the other end adapted for attachment to a cantilever |
| 12/07/2000 | DE19923295A1 Transducer zur Erzeugung optischer Kontraste Transducer for generating optical contrasts |
| 12/06/2000 | EP1058247A1 Information recording medium and information recording device |
| 12/05/2000 | US6157451 Sample CD measurement system |
| 12/05/2000 | US6156404 Method of making high performance, low noise isotropic magnetic media including a chromium underlayer |
| 12/05/2000 | US6156215 Method of forming a projection having a micro-aperture, projection formed thereby, probe having such a projection and information processor comprising such a probe |
| 11/30/2000 | WO2000072077A1 Scanning device, especially for detecting fluorescent light |
| 11/30/2000 | WO2000072076A1 Probe tip that is transparent to light and method for producing the same |
| 11/30/2000 | WO2000023840A9 Near field optical scanning system employing microfabricated solid immersion lens |
| 11/30/2000 | DE19923444A1 Lichttransparente Sondenspitze sowie Verfahren zur Herstellung einer solchen Transparent light probe tip and method of making such a |
| 11/29/2000 | EP1055901A2 Scanning Probe Microscope |
| 11/28/2000 | US6153884 Radioisotope proximity sensor |
| 11/23/2000 | WO2000070325A1 Scanning tunneling microscope, its probe, processing method for the probe and production method for fine structure |
| 11/23/2000 | WO2000070296A1 System for sensing a sample |
| 11/23/2000 | DE19923822A1 Optical scanning configuration for detecting fluorescent light and for suppressing stray light arising from an illuminated test detected through a lens creates a shaded area for stray light in a focal plane. |
| 11/22/2000 | EP1054283A2 Near field optical microscope and probe for near field optical microscope |
| 11/22/2000 | EP1054282A2 Transducer for producing optical contrasts |
| 11/22/2000 | EP1054249A1 Electronic device surface signal control probe and method of manufacturing the probe |
| 11/22/2000 | EP1053562A1 Focused particle beam systems and methods using a tilt column |
| 11/22/2000 | CN1274475A Magnetic tunnel device, method of mfg. thereof and magnetic head |
| 11/16/2000 | WO2000041457A3 Method and device for the optical detection of a particle |
| 11/14/2000 | US6147959 Method and apparatus for recording/reproducing information utilizing near field light |
| 11/14/2000 | US6147507 System and method of mapping leakage current and a defect profile of a semiconductor dielectric layer |