| Patents for G01Q 60 - Particular types of spm [scanning-probe microscopy] or apparatus therefor; Essential components thereof (7,095) |
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| 05/08/2002 | EP1203749A1 Nanometer-order mechanical vibrator, production method thereof and measuring device using it |
| 05/08/2002 | EP1203257A2 Scanning interferometric near-field confocal microscopy |
| 05/07/2002 | US6383823 Probe for scanning probe microscope (SPM) and SPM device |
| 05/07/2002 | US6383286 Method of making semiconductor super-atom and aggregate thereof |
| 05/02/2002 | US20020051567 Method of adjusting a lithographic tool |
| 05/02/2002 | EP1202052A2 SQUID microscope |
| 04/25/2002 | WO2002033727A1 Focused ion beam system |
| 04/25/2002 | WO2002032404A2 Nanoparticles |
| 04/25/2002 | US20020047091 Probe tip and method of manufacturing tips and probes for detecting microcurrent or microforce |
| 04/24/2002 | CN2488061Y Adjustable multi-probe seat for stomic force microscope |
| 04/23/2002 | US6376833 Projection having a micro-aperture, probe or multi-probe having such a projection and surface scanner, aligner or information processor comprising such a probe |
| 04/23/2002 | US6376827 Near field optical memory head |
| 04/18/2002 | WO2002031464A2 Evaluating binding affinities by force stratification and force planning |
| 04/18/2002 | WO2001057975A3 Near-field laser and detector apparatus and method |
| 04/18/2002 | US20020044235 Optical device, optical system, method of production of same, and mold for production of same |
| 04/18/2002 | US20020043101 Scanning probe microscope with probe formed by single conductive material |
| 04/18/2002 | CA2425410A1 Evaluating binding affinities by force stratification and force panning |
| 04/17/2002 | EP1197726A1 Multipurpose Sensor and cantilever for it |
| 04/17/2002 | EP1196803A1 Near field optical examination device |
| 04/17/2002 | CN1083105C Chemically differentiated imaging by screening atomic force microscopey |
| 04/16/2002 | US6373566 Integrated circuit defect review and classification process |
| 04/16/2002 | US6373246 Cantilever magnetic force sensor for magnetic force microscopy and method of manufacturing magnetic force sensor |
| 04/16/2002 | US6373054 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 04/16/2002 | US6373049 Knock mode scanning near-field optical microscope |
| 04/11/2002 | WO2001081857A3 Resonant probe driving arrangement and scanning probe microscope |
| 04/11/2002 | US20020042081 Evaluating binding affinities by force stratification and force panning |
| 04/09/2002 | US6370487 Remote semiconductor microscopy |
| 04/09/2002 | US6370306 Optical waveguide probe and its manufacturing method |
| 04/09/2002 | US6369385 Integrated microcolumn and scanning probe microscope arrays |
| 04/09/2002 | US6369379 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 04/09/2002 | US6369253 Formation of amine and oxygen silane bonds to form metallocenes |
| 04/03/2002 | EP1193274A1 Hydrogenated polymers, resin composition, and process for producing substrate for information-recording medium |
| 04/03/2002 | EP1192442A1 Atomic force microscope and driving method therefor |
| 04/03/2002 | EP0873574B1 Method to determine depth profiles in an area of thin coating |
| 04/02/2002 | US6366340 Electron exposure apparatus |
| 04/02/2002 | US6365895 Apparatus for measuring a micro surface configuration and a method for manufacturing a probe incorporated in this measuring apparatus |
| 04/02/2002 | US6365415 Method for characterization and quality control of porous media |
| 03/28/2002 | WO2002025375A2 Pinhole defect repair by resist flow |
| 03/28/2002 | WO2002025247A2 A non-intrusive method and apparatus for characterizing particles based on scattering of elliptically polarized radiation |
| 03/28/2002 | WO2002025246A1 Scanning type probe microscope probe and method of producing the same, and a scanning type probe microscope having this probe and polymer processing method using the same |
| 03/28/2002 | US20020036775 Method for increasing the spectral and spatial resolution of detectors |
| 03/28/2002 | US20020036753 Process of producing near-field light generating element |
| 03/21/2002 | WO2002023159A1 Scanning probe microscope, method for measuring band structure of substance by using the microscope, and microscopic spectroscopy |
| 03/21/2002 | WO2002022889A2 Direct haplotyping using carbon nanotube probes |
| 03/21/2002 | WO2002022499A1 Fabrication of nanotube microscopy tips |
| 03/21/2002 | US20020035461 Visual analysis and verification system using advanced tools |
| 03/21/2002 | US20020034827 Separation of preferential particles from sample; provide probes, incubate with sample, separate probes from sample, classify extraction probes |
| 03/21/2002 | US20020034338 Method for measurement of pitch in metrology and imaging systems |
| 03/21/2002 | US20020033953 Differential interferometric scanning near-field confocal microscopy |
| 03/21/2002 | US20020033952 Control of position and orientation of sub-wavelength aperture array in near-field microscopy |
| 03/21/2002 | US20020033708 Difference frequency imaging and spectroscopy to measure dopants using an alternating current scanning tunneling microscope |
| 03/20/2002 | EP1189240A1 Multi-probe measuring device and method of use |
| 03/19/2002 | US6358426 Method of fabricating probe force atomic force microscope |
| 03/14/2002 | WO2001073830A3 Electrochemical nanostructuring method and device |
| 03/14/2002 | US20020031299 Optical probe and optical pick-up apparatus |
| 03/14/2002 | US20020030504 Method for measuring surface leakage current of sample |
| 03/13/2002 | EP1185857A2 Method and apparatus for enhancing yield of secondary ions |
| 03/13/2002 | EP1135691A4 Electrostatic force detector with cantilever and shield |
| 03/12/2002 | US6356524 Method of recording/reproducing an information signal |
| 03/12/2002 | US6355495 Method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereof |
| 03/12/2002 | US6354133 Use of carbon nanotubes to calibrate conventional tips used in AFM |
| 03/07/2002 | WO2002018266A1 Single molecule array on silicon substrate for quantum computer |
| 03/07/2002 | US20020027819 Nanocapsules containing charged particles, their uses and methods of forming same |
| 03/06/2002 | EP1184725A1 Method for adjusting a lithographic tool |
| 03/05/2002 | US6353221 Method and apparatus for cleaning a tip of a probe of a probe-based measuring instrument |
| 03/05/2002 | US6353219 Object inspection and/or modification system and method |
| 02/28/2002 | WO2002017383A2 Flexure based translation stage |
| 02/28/2002 | WO2001090749A3 Scanning kelvin microprobe system and process for biomolecule microassay |
| 02/28/2002 | WO2001090730A3 Scanning kelvin microprobe system and process for analyzing a surface |
| 02/28/2002 | WO2001049897A3 Method for characterization and quality control of porous media |
| 02/28/2002 | US20020024661 Integrated circuit defect review and classification process |
| 02/28/2002 | US20020024644 Alignment system and alignment method in exposure apparatus |
| 02/28/2002 | US20020024004 Probe with hollow waveguide and method for producing the same |
| 02/28/2002 | DE10039337A1 Kombination von abtastenden und abbildenden Methoden bei der Überprüfung von Photomasken Combination of scanning and imaging methods in the review of photomasks |
| 02/28/2002 | DE10038526A1 Verfahren und Anordnung zur Erfassung des wellenlängenabhängigen Verhaltens einer beleuchteten Probe Method and apparatus for detecting the wavelength-dependent behavior of an illuminated sample |
| 02/27/2002 | EP1181611A1 Scanning device, especially for detecting fluorescent light |
| 02/26/2002 | USRE37560 Scan control for scanning probe microscopes |
| 02/26/2002 | US6349594 Method of measuring film thickness distribution |
| 02/21/2002 | WO2002014862A2 Method and device for characterising and/or for detecting a bonding complex |
| 02/21/2002 | US20020021868 Collimators and collimator arrays employing ellipsoidal solid immersion lenses |
| 02/21/2002 | US20020021451 Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation |
| 02/21/2002 | US20020021139 Molecular probe station |
| 02/21/2002 | US20020020819 Method and apparatus for rapid change of fluorescence bands in the detection of dyes in fluorescence microscopy |
| 02/21/2002 | US20020020805 Microprobe and scanning type probe apparatus using thereof |
| 02/21/2002 | DE10038528A1 Optical detection of characteristic parameters of illuminated specimen involves computing intermediate values from signals for different displacements to increase spatial resolution |
| 02/21/2002 | CA2418861A1 Method and device for characterising and/or for detecting a bonding complex |
| 02/20/2002 | EP0818052A4 Combined scanning probe and scanning energy microscope |
| 02/19/2002 | US6348689 Focused ion beam apparatus |
| 02/14/2002 | WO2002012864A1 Method and assembly for increasing the spectral and spatial resolution of a detector |
| 02/14/2002 | WO2002012863A1 Method and assembly for detecting the wavelength-dependent behavior of an illuminated specimen |
| 02/14/2002 | WO2001044853A3 Method for producing a probe for the scanning near-field optical microscopy and a probe produced according to said method |
| 02/14/2002 | US20020019729 Visual inspection and verification system |
| 02/14/2002 | US20020018207 Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory |
| 02/14/2002 | US20020017621 Device and method for combining scanning and imaging methods in checking photomasks |
| 02/14/2002 | DE10035134A1 Optical near-field microscopic inspection of e.g. semiconductor material, involves demodulating output of detector to which reference beam and stray light from probe having specific frequency are input |
| 02/14/2002 | DE10026911A1 Verfahren zur Herstellung einer halbleitenden Nanostruktur und Aggregat davon A process for producing a semiconducting nanostructure and aggregate thereof |
| 02/13/2002 | EP1179748A2 Combination of imaging and scanning methods for checking reticles |
| 02/12/2002 | US6346189 Apparatus comprising substrate with top surface, catalyst island disposed on top surface of substrate, carbon nanotube extending from catalyst island |
| 02/07/2002 | WO2002010832A2 Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation |
| 02/07/2002 | WO2002010831A2 Differential interferometric scanning near-field confocal microscopy |