Patents
Patents for G01Q 60 - Particular types of spm [scanning-probe microscopy] or apparatus therefor; Essential components thereof (7,095)
05/2003
05/06/2003US6559924 Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory
05/06/2003US6559459 Convergent charged particle beam apparatus and inspection method using same
05/06/2003US6559458 Measuring instrument and method for measuring features on a substrate
05/02/2003EP1306449A2 Method and sensor for detecting the binding of biomolecules by shear stress measurement
05/01/2003WO2003036767A2 Parallel, individually addressable probes for nanolithography
04/2003
04/30/2003CN1107219C Method of measuring exchange force and method of evaluating magnetism using exchange force
04/29/2003US6555362 Dna bound to carbon nanotubes
04/24/2003WO2003033127A2 Methods of patterning a monolayer
04/24/2003US20030077649 Method and sensor for detecting the binding of biomolecules by shear stress measurement
04/24/2003US20030075772 Voltage controlled nonlinear spin filter based on paramagnetic ion doped nanocrystal
04/24/2003US20030075683 Near field optical probe and manufacturing method thereof
04/23/2003EP1303780A2 Multiple-source arrays for confocal and near-field microscopy
04/23/2003EP1303779A2 Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation
04/23/2003EP1303778A2 Differential interferometric scanning near-field confocal microscopy
04/23/2003EP1303777A2 Control of position and orientation of sub-wavelength aperture array in near-field microscopy
04/23/2003CN1412007A Lithographic printing carrier, original edition and lithographic printing mfg. method
04/22/2003US6552805 Control of position and orientation of sub-wavelength aperture array in near-field microscopy
04/22/2003US6552556 Prober for electrical measurement of potentials in the interior of ultra-fine semiconductor devices, and method of measuring electrical characteristics with said prober
04/22/2003US6552339 Micro goniometer for scanning probe microscopy
04/22/2003US6552338 Ion photon emission microscope
04/22/2003US6552337 Methods and systems for measuring microroughness of a substrate combining particle counter and atomic force microscope measurements
04/22/2003US6552331 Device and method for combining scanning and imaging methods in checking photomasks
04/17/2003WO2003031991A1 Tunnel mechanical vibration nanotransducer and method for producing said nanotransducer
04/17/2003US20030073250 Method and apparatus for solid state molecular analysis
04/17/2003US20030073228 Peelable and resealable devices for arraying materials
04/17/2003US20030070475 Ultra micro indentation testing apparatus
04/16/2003CN2545598Y Wolfram needle-point DC preparing control circuit for scan tunnel microscope
04/10/2003WO2003029921A2 Methods and systems for three-dimensional motion control and tracking of a mechanically unattached magnetic probe
04/10/2003US20030068637 Processing biological material; obtain sample, insert into resealable container, process sample, analyze sample
04/10/2003US20030068446 Nanoarray substrate, dots on the substrate, the dots comprising a patterning compound with proteins on the substrate
04/10/2003US20030068432 Carbon nanotube devices
04/10/2003US20030067496 Graphical automated machine control and metrology
04/10/2003US20030067308 Spatially resolved electromagnetic property measurement
04/10/2003US20030066962 Scanning atom probe
04/10/2003US20030066944 Optical near field generator
04/09/2003EP1300257A2 Support for lithographic printing plate and presensitized plate and method of producing lithographic printing plate
04/08/2003US6545495 Method and apparatus for self-calibration of capacitive sensors
04/08/2003US6545470 Scanning probe microscope
04/08/2003US6545276 Near field optical microscope
04/08/2003US6545263 Scanning probe microscope with probe integrated in an optical system
04/08/2003US6544893 Method of manufacturing a glass substrate for an information recording medium, and method of manufacturing an information recording medium
04/03/2003WO2003028038A2 Method and device for analysing a sample by means of a raster scanning probe microscope
04/03/2003WO2003028037A2 Device and method for scanning probe microscope
04/03/2003US20030062463 Near-field spectrometer
04/02/2003EP1196803B1 Near field optical examination device
04/02/2003EP0868648B1 Integrated silicon profilometer and afm head
04/01/2003US6542455 Optical probe array head device
04/01/2003US6541784 Electron beam exposure system and exposing method using an electron beam
04/01/2003US6541755 Near field optical probe and manufacturing method thereof
04/01/2003US6540972 Patterning a surface atomic layer of a graphite sheet by forming circular holes at the growth points of a pattern in the surface layer, and radially enlarging them by heating
03/2003
03/27/2003WO2003025603A1 Scanning squid microscope with improved spatial resolution
03/27/2003WO2003025540A2 Differential tagging of polymers for high resolution linear analysis
03/27/2003WO2002048678A9 High capacity and scanning speed system for sample handling and analysis
03/27/2003US20030059822 Differential tagging of polymers for high resolution linear analysis
03/27/2003US20030057988 Semiconductor device inspecting method using conducting AFM
03/27/2003US20030057451 Aggregate of Semicnductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same
03/27/2003US20030057382 Charged particle beam irradiation equipment and control method thereof
03/27/2003US20030057352 Apparatus for measuring aperture size of near-field optical probe and method thereof
03/26/2003EP1295119A2 Scanning kelvin microprobe system and process for analyzing a surface
03/26/2003CN1405784A Apparatus and method for measuring near-field optical probe needle aperture size
03/26/2003CN1405548A Near-field scanning optical microscope poisitioned scanning-imaging method
03/26/2003CN1405546A Scanning probe-needle microscope
03/20/2003WO2003023423A2 Dielectric constant measuring apparatus and dielectric constant measuring method
03/20/2003WO2002022499A9 Fabrication of nanotube microscopy tips
03/20/2003US20030055588 Method of determination of true nonlinearity of scan along a selected direction X or Y in scan microscope
03/20/2003US20030053048 Electron microscope and spectroscopy system
03/19/2003EP1293990A2 Apparatus for measuring aperture size of near-field optical probe and method thereof
03/19/2003EP1292361A1 Methods utilizing scanning probe microscope tips and products therefor or produced thereby
03/18/2003US6535474 Near field optical recording/reproducing device
03/18/2003US6532806 Scanning evanescent electro-magnetic microscope
03/18/2003US6532805 For superfine materials and ultra thin film materials used for semiconductor devices; atomic force microscope
03/13/2003WO2003021297A2 Optically amplifying near-field optical signals
03/13/2003US20030049444 Carbon nanotube structure having a catalyst island
03/13/2003US20030049381 Methods utilizing scanning probe microscope tips and products therefor or produced thereby
03/13/2003US20030047675 Diffractive optical position detector
03/12/2003EP1290404A1 Sample for simultaneously conducting electro-chemical and topographic near-field microscopy
03/12/2003EP1289627A1 Nanodosimeter based on single ion detection
03/12/2003CN1402260A Method for mfg. nanotip of optic fiber
03/11/2003US6531379 High resolution dopant/impurity incorporation in semiconductors via a scanned atomic force probe
03/11/2003US6530268 Apparatus and method for isolating and measuring movement in a metrology apparatus
03/11/2003US6530267 Scanning system having a deflectable probe tip
03/11/2003US6530266 Active probe for an atomic force microscope and method of use thereof
03/06/2003WO2003019523A1 Graphical automated machine control and metrology
03/06/2003WO2003019241A2 Diffractive optical position detector
03/06/2003WO2003019238A2 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes
03/06/2003WO2003019108A1 Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
03/06/2003WO2003019107A1 Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
03/06/2003WO2003018884A1 Method for producing optically transparent and electroconductive fibres and the sensor of scanning probe microscope made of this fibre
03/06/2003WO2003018465A1 Substituted donor atoms in silicon crystal for quantum computer
03/06/2003US20030043472 Collimators and collimator arrays employing ellipsoidal solid immersion lenses
03/06/2003US20030042409 Intermittent contact imaging under force-feedback control
03/06/2003US20030041669 Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
03/06/2003US20030041657 Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument
03/05/2003EP1288920A2 Optical alignment in magnetic tape system
03/04/2003US6529277 Optical devices based on resonant configurational effects
03/04/2003US6528786 Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods
03/04/2003US6528785 Microscope probe needle
03/04/2003US6528780 Optical probe for proximity field
03/04/2003US6528359 Laser annealing method and laser annealing device
03/04/2003US6528020 Nanotube devices that can be employed in a variety of applications. In particular, the nanotube devices of the present invention provide a new class of versatile chemical and biological provide a new class of versatile chemical and
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