Patents for G01Q 60 - Particular types of spm [scanning-probe microscopy] or apparatus therefor; Essential components thereof (7,095) |
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05/06/2003 | US6559924 Alignment method, alignment apparatus, profiler, exposure apparatus, exposure apparatus maintenance method, semiconductor device manufacturing method, and semiconductor manufacturing factory |
05/06/2003 | US6559459 Convergent charged particle beam apparatus and inspection method using same |
05/06/2003 | US6559458 Measuring instrument and method for measuring features on a substrate |
05/02/2003 | EP1306449A2 Method and sensor for detecting the binding of biomolecules by shear stress measurement |
05/01/2003 | WO2003036767A2 Parallel, individually addressable probes for nanolithography |
04/30/2003 | CN1107219C Method of measuring exchange force and method of evaluating magnetism using exchange force |
04/29/2003 | US6555362 Dna bound to carbon nanotubes |
04/24/2003 | WO2003033127A2 Methods of patterning a monolayer |
04/24/2003 | US20030077649 Method and sensor for detecting the binding of biomolecules by shear stress measurement |
04/24/2003 | US20030075772 Voltage controlled nonlinear spin filter based on paramagnetic ion doped nanocrystal |
04/24/2003 | US20030075683 Near field optical probe and manufacturing method thereof |
04/23/2003 | EP1303780A2 Multiple-source arrays for confocal and near-field microscopy |
04/23/2003 | EP1303779A2 Scanning interferometric near-field confocal microscopy with background amplitude reduction and compensation |
04/23/2003 | EP1303778A2 Differential interferometric scanning near-field confocal microscopy |
04/23/2003 | EP1303777A2 Control of position and orientation of sub-wavelength aperture array in near-field microscopy |
04/23/2003 | CN1412007A Lithographic printing carrier, original edition and lithographic printing mfg. method |
04/22/2003 | US6552805 Control of position and orientation of sub-wavelength aperture array in near-field microscopy |
04/22/2003 | US6552556 Prober for electrical measurement of potentials in the interior of ultra-fine semiconductor devices, and method of measuring electrical characteristics with said prober |
04/22/2003 | US6552339 Micro goniometer for scanning probe microscopy |
04/22/2003 | US6552338 Ion photon emission microscope |
04/22/2003 | US6552337 Methods and systems for measuring microroughness of a substrate combining particle counter and atomic force microscope measurements |
04/22/2003 | US6552331 Device and method for combining scanning and imaging methods in checking photomasks |
04/17/2003 | WO2003031991A1 Tunnel mechanical vibration nanotransducer and method for producing said nanotransducer |
04/17/2003 | US20030073250 Method and apparatus for solid state molecular analysis |
04/17/2003 | US20030073228 Peelable and resealable devices for arraying materials |
04/17/2003 | US20030070475 Ultra micro indentation testing apparatus |
04/16/2003 | CN2545598Y Wolfram needle-point DC preparing control circuit for scan tunnel microscope |
04/10/2003 | WO2003029921A2 Methods and systems for three-dimensional motion control and tracking of a mechanically unattached magnetic probe |
04/10/2003 | US20030068637 Processing biological material; obtain sample, insert into resealable container, process sample, analyze sample |
04/10/2003 | US20030068446 Nanoarray substrate, dots on the substrate, the dots comprising a patterning compound with proteins on the substrate |
04/10/2003 | US20030068432 Carbon nanotube devices |
04/10/2003 | US20030067496 Graphical automated machine control and metrology |
04/10/2003 | US20030067308 Spatially resolved electromagnetic property measurement |
04/10/2003 | US20030066962 Scanning atom probe |
04/10/2003 | US20030066944 Optical near field generator |
04/09/2003 | EP1300257A2 Support for lithographic printing plate and presensitized plate and method of producing lithographic printing plate |
04/08/2003 | US6545495 Method and apparatus for self-calibration of capacitive sensors |
04/08/2003 | US6545470 Scanning probe microscope |
04/08/2003 | US6545276 Near field optical microscope |
04/08/2003 | US6545263 Scanning probe microscope with probe integrated in an optical system |
04/08/2003 | US6544893 Method of manufacturing a glass substrate for an information recording medium, and method of manufacturing an information recording medium |
04/03/2003 | WO2003028038A2 Method and device for analysing a sample by means of a raster scanning probe microscope |
04/03/2003 | WO2003028037A2 Device and method for scanning probe microscope |
04/03/2003 | US20030062463 Near-field spectrometer |
04/02/2003 | EP1196803B1 Near field optical examination device |
04/02/2003 | EP0868648B1 Integrated silicon profilometer and afm head |
04/01/2003 | US6542455 Optical probe array head device |
04/01/2003 | US6541784 Electron beam exposure system and exposing method using an electron beam |
04/01/2003 | US6541755 Near field optical probe and manufacturing method thereof |
04/01/2003 | US6540972 Patterning a surface atomic layer of a graphite sheet by forming circular holes at the growth points of a pattern in the surface layer, and radially enlarging them by heating |
03/27/2003 | WO2003025603A1 Scanning squid microscope with improved spatial resolution |
03/27/2003 | WO2003025540A2 Differential tagging of polymers for high resolution linear analysis |
03/27/2003 | WO2002048678A9 High capacity and scanning speed system for sample handling and analysis |
03/27/2003 | US20030059822 Differential tagging of polymers for high resolution linear analysis |
03/27/2003 | US20030057988 Semiconductor device inspecting method using conducting AFM |
03/27/2003 | US20030057451 Aggregate of Semicnductor micro-needles and method of manufacturing the same, and semiconductor apparatus and method of manufacturing the same |
03/27/2003 | US20030057382 Charged particle beam irradiation equipment and control method thereof |
03/27/2003 | US20030057352 Apparatus for measuring aperture size of near-field optical probe and method thereof |
03/26/2003 | EP1295119A2 Scanning kelvin microprobe system and process for analyzing a surface |
03/26/2003 | CN1405784A Apparatus and method for measuring near-field optical probe needle aperture size |
03/26/2003 | CN1405548A Near-field scanning optical microscope poisitioned scanning-imaging method |
03/26/2003 | CN1405546A Scanning probe-needle microscope |
03/20/2003 | WO2003023423A2 Dielectric constant measuring apparatus and dielectric constant measuring method |
03/20/2003 | WO2002022499A9 Fabrication of nanotube microscopy tips |
03/20/2003 | US20030055588 Method of determination of true nonlinearity of scan along a selected direction X or Y in scan microscope |
03/20/2003 | US20030053048 Electron microscope and spectroscopy system |
03/19/2003 | EP1293990A2 Apparatus for measuring aperture size of near-field optical probe and method thereof |
03/19/2003 | EP1292361A1 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
03/18/2003 | US6535474 Near field optical recording/reproducing device |
03/18/2003 | US6532806 Scanning evanescent electro-magnetic microscope |
03/18/2003 | US6532805 For superfine materials and ultra thin film materials used for semiconductor devices; atomic force microscope |
03/13/2003 | WO2003021297A2 Optically amplifying near-field optical signals |
03/13/2003 | US20030049444 Carbon nanotube structure having a catalyst island |
03/13/2003 | US20030049381 Methods utilizing scanning probe microscope tips and products therefor or produced thereby |
03/13/2003 | US20030047675 Diffractive optical position detector |
03/12/2003 | EP1290404A1 Sample for simultaneously conducting electro-chemical and topographic near-field microscopy |
03/12/2003 | EP1289627A1 Nanodosimeter based on single ion detection |
03/12/2003 | CN1402260A Method for mfg. nanotip of optic fiber |
03/11/2003 | US6531379 High resolution dopant/impurity incorporation in semiconductors via a scanned atomic force probe |
03/11/2003 | US6530268 Apparatus and method for isolating and measuring movement in a metrology apparatus |
03/11/2003 | US6530267 Scanning system having a deflectable probe tip |
03/11/2003 | US6530266 Active probe for an atomic force microscope and method of use thereof |
03/06/2003 | WO2003019523A1 Graphical automated machine control and metrology |
03/06/2003 | WO2003019241A2 Diffractive optical position detector |
03/06/2003 | WO2003019238A2 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
03/06/2003 | WO2003019108A1 Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument |
03/06/2003 | WO2003019107A1 Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument |
03/06/2003 | WO2003018884A1 Method for producing optically transparent and electroconductive fibres and the sensor of scanning probe microscope made of this fibre |
03/06/2003 | WO2003018465A1 Substituted donor atoms in silicon crystal for quantum computer |
03/06/2003 | US20030043472 Collimators and collimator arrays employing ellipsoidal solid immersion lenses |
03/06/2003 | US20030042409 Intermittent contact imaging under force-feedback control |
03/06/2003 | US20030041669 Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument |
03/06/2003 | US20030041657 Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument |
03/05/2003 | EP1288920A2 Optical alignment in magnetic tape system |
03/04/2003 | US6529277 Optical devices based on resonant configurational effects |
03/04/2003 | US6528786 Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods |
03/04/2003 | US6528785 Microscope probe needle |
03/04/2003 | US6528780 Optical probe for proximity field |
03/04/2003 | US6528359 Laser annealing method and laser annealing device |
03/04/2003 | US6528020 Nanotube devices that can be employed in a variety of applications. In particular, the nanotube devices of the present invention provide a new class of versatile chemical and biological provide a new class of versatile chemical and |