| Patents for G01Q 60 - Particular types of spm [scanning-probe microscopy] or apparatus therefor; Essential components thereof (7,095) |
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| 10/01/2002 | US6458605 Method and apparatus for controlling photolithography overlay registration |
| 09/26/2002 | WO2002074988A2 Arrays and methods of use |
| 09/26/2002 | US20020135755 Scanning probe microscope assembly |
| 09/26/2002 | US20020134949 Through-the-lens neutralization for charged particle beam system |
| 09/25/2002 | EP1244113A2 Specimen observation method for atomic force microscopy and atomic force microscope |
| 09/25/2002 | EP1243915A1 Apparatus for evaluating electrical characteristics |
| 09/25/2002 | CN1370985A Attaching method of superthin slice for microscope obsservation onto mica surface based on interatomic force |
| 09/24/2002 | US6456736 Automatic field sampling for CD measurement |
| 09/24/2002 | US6456439 Collimator employing an ellipsoidal solid immersion lens |
| 09/24/2002 | US6455847 Carbon nanotube probes in atomic force microscope to detect partially open/closed contacts |
| 09/24/2002 | US6455838 High sensitivity deflection sensing device |
| 09/24/2002 | US6455334 Probe grid for integrated circuit analysis |
| 09/19/2002 | WO2002073624A2 Memory element, method for structuring a surface, and storage device |
| 09/19/2002 | WO2002073126A1 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 09/19/2002 | WO2002073125A1 Apparatus and method for isolating and measuring movement in a metrology apparatus |
| 09/19/2002 | US20020132500 Electrical connection structure, production method thereof, and electric wiring method |
| 09/19/2002 | US20020131297 Memory element, method for structuring a surface, and storage device |
| 09/19/2002 | DE10200264A1 Lichtsondenmikroskop Light probe microscope |
| 09/18/2002 | EP0788615B1 Method and device for determining substance-specific parameters of one or a plurality of molecules by correlation-spectroscopy |
| 09/18/2002 | CN1369881A Conducting current method between scanning contact and storage medium |
| 09/17/2002 | US6453263 Surface analysis using ellipsometry |
| 09/17/2002 | US6452892 Magnetic tunnel device, method of manufacture thereof, and magnetic head |
| 09/17/2002 | US6452726 Collimators and collimator arrays employing ellipsoidal solid immersion lenses |
| 09/17/2002 | US6452677 Method and apparatus for detecting defects in the manufacture of an electronic device |
| 09/17/2002 | US6452244 Film-like composite structure and method of manufacture thereof |
| 09/17/2002 | US6452174 Charged particle beam apparatus and method of controlling same |
| 09/17/2002 | US6452173 Charged particle apparatus |
| 09/17/2002 | US6452172 Composite charged particle beam apparatus |
| 09/17/2002 | US6452170 Scanning force microscope to determine interaction forces with high-frequency cantilever |
| 09/12/2002 | WO2002071412A1 Enhanced scanning probe microscope |
| 09/12/2002 | WO2001027581A9 Force sensing devices with multiple filled and/or empty channels and other attributes |
| 09/12/2002 | US20020126937 Fiber, probe and optical head of multiple optical path array type and methods for manufacturing the same |
| 09/12/2002 | US20020125427 Method and apparatus for manipulating a sample |
| 09/12/2002 | US20020125415 Apparatus and method for isolating and measuring movement in a metrology apparatus |
| 09/12/2002 | US20020124636 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 09/12/2002 | US20020124427 Microscopic geometry measuring device |
| 09/11/2002 | EP1239294A2 Scanning magnetism detector and probe for the same |
| 09/10/2002 | US6448766 Method of imaging a magnetic field emanating from a surface using a conventional scanning force microscope |
| 09/10/2002 | US6448765 Microscopic tips having stable magnetic moments and disposed on cantilevers for sensing magnetic characteristics of adjacent structures |
| 09/10/2002 | US6448554 Ion scattering spectrometer |
| 09/10/2002 | US6448553 Signal detector to be used with scanning probe and atomic force microscope |
| 09/10/2002 | US6448543 Near field optical head and reproduction method |
| 09/10/2002 | US6448096 Atomic force microscopy and signal acquisition via buried insulator |
| 09/06/2002 | WO2002068919A1 Apertureless near-field scanning raman microscopy using reflection scattering geometry |
| 09/05/2002 | US20020123161 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device |
| 09/05/2002 | US20020122873 Providing tip comprising internal cavity having external opening; loading cavity with a deposition compound; subjecting tip to driving force to deliver compound through external opening to be deposited on substrate |
| 09/05/2002 | US20020121897 Probe for measuring leakage magnetic field |
| 09/05/2002 | US20020121131 System and method of multi-dimensional force sensing for scanning probe microscopy |
| 09/04/2002 | EP1237161A2 Method and apparatus for performing atomic force microscopy measurements |
| 09/04/2002 | CN1367534A Data storage medium based on diode, cathodic conductivity and cathodic luminescence |
| 09/03/2002 | US6445453 Scanning interferometric near-field confocal microscopy |
| 08/29/2002 | US20020118369 Assembling arrays of small particles using an atomic force microscope to define ferroelectric domains |
| 08/29/2002 | US20020117611 Object inspection and/or modification system and method |
| 08/27/2002 | US6441897 Integrated circuit defect review and classification process |
| 08/27/2002 | US6441371 Scanning probe microscope |
| 08/27/2002 | US6441359 Near field optical scanning system employing microfabricated solid immersion lens |
| 08/22/2002 | WO2002032404A3 Nanoparticles |
| 08/22/2002 | WO2002025375A3 Pinhole defect repair by resist flow |
| 08/22/2002 | WO2000019166A9 Multidimensional sensing system for atomic force miscroscopy |
| 08/22/2002 | US20020114987 Method of arraying nanoparticles and macromolecules on surfaces |
| 08/22/2002 | US20020114567 System and method for high resolution optical imaging, data storage, lithography, and inspection |
| 08/22/2002 | US20020113214 Methods and devices for evaluating beam blur in a charged-particle-beam microlithography apparatus |
| 08/22/2002 | US20020112814 Fabrication of nanotube microscopy tips |
| 08/21/2002 | EP1233412A2 Data storage device |
| 08/21/2002 | EP1233259A1 Scanning type probe microscope probe and method of producing the same, and a scanning type probe microscope having this probe and polymer processing method using the same |
| 08/20/2002 | US6438092 Near-field optical recording/reading apparatus |
| 08/20/2002 | US6437943 Silicon carbide substrate for forming magnetic head |
| 08/20/2002 | US6437562 Magnetic field characteristics evaluation apparatus and magnetic field characteristics measuring method |
| 08/20/2002 | US6437328 Hyperbaric hydrothermal atomic force microscope |
| 08/20/2002 | US6435015 Scanning probe microscope |
| 08/15/2002 | WO2002063613A2 A system and method for high resolution optical imaging, data storage, lithography, and inspection |
| 08/15/2002 | WO2002063368A1 Scanning near-field optical microscope |
| 08/15/2002 | US20020111775 Remote semiconductor microscopy |
| 08/15/2002 | US20020110177 Heat emitting probe and heat emitting probe apparatus |
| 08/15/2002 | US20020110074 Methods for conducting current between a scanned-probe and storage medium |
| 08/15/2002 | US20020109840 Method for the detection of dyes in fluorescence microscopy |
| 08/15/2002 | US20020109494 Multiple mechanical resonator parametric device |
| 08/15/2002 | US20020109082 Light receiving and emitting probe and light receiving and emitting probe apparatus |
| 08/13/2002 | US6433327 Near-field optical microscope |
| 08/13/2002 | US6433102 Catalytic hydrogenation |
| 08/08/2002 | US20020105987 Semiconductor laser, method of producing the same and evanescent optical head using the same |
| 08/08/2002 | US20020105641 Locally enhanced raman spectroscopy with an atomic force microscope |
| 08/07/2002 | CN1363036A Superfine indentation tester |
| 08/06/2002 | US6430324 Optical probe and method for manufacturing same and scanning proximity field optical microscope |
| 08/06/2002 | US6429425 Method for forming a calibation standard to adjust a micro-bar of an electron microscope |
| 08/06/2002 | US6429419 Near-field optical head |
| 08/06/2002 | US6427345 Method and apparatus for a line based, two-dimensional characterization of a three-dimensional surface |
| 08/01/2002 | WO2002059677A1 Optisches system und verfahren zum anregen und messen von fluoreszenz an oder in mit fluoreszensfarbstoffen behandelten proben |
| 08/01/2002 | WO2002025247A3 A non-intrusive method and apparatus for characterizing particles based on scattering of elliptically polarized radiation |
| 08/01/2002 | US20020101795 Method for writing and/or erasing high density data on a media |
| 08/01/2002 | US20020101673 Assembly for writing and / or erasing high density data on a media |
| 08/01/2002 | US20020101573 Electron exposure apparatus |
| 08/01/2002 | US20020100872 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 07/30/2002 | US6426499 Multi-probe test head and process using same |
| 07/30/2002 | US6426491 Micro-aperture probe evaluating apparatus having a display and a collimating optical system |
| 07/25/2002 | WO2002057749A1 Balanced momentum probe holder |
| 07/25/2002 | US20020100005 Integrated verification and manufacturability tool |
| 07/25/2002 | US20020097046 Magnetic force microscope |
| 07/25/2002 | US20020096642 Balanced momentum probe holder |
| 07/25/2002 | US20020096635 Mask defect repair method |