| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 09/14/1999 | US5953579 In-line test of contact opening of semiconductor device |
| 09/14/1999 | US5952657 Atomic force microscope with integrated optics for attachment to optical microscope |
| 09/14/1999 | US5952656 Energy filter |
| 09/14/1999 | US5952562 Scanning probe microscope incorporating an optical microscope |
| 09/10/1999 | WO1999045565A1 Electron-beam microcolumn as a general purpose scanning electron microscope |
| 09/10/1999 | CA2286804A1 Electron-beam microcolumn as a general purpose scanning electron microscope |
| 09/07/1999 | US5949070 For examining surface contours of a specimen |
| 08/31/1999 | US5945833 Method for testing semiconductor devices which measures internal potential distribution, internal electric field, and internal doping profile |
| 08/31/1999 | US5945671 Scanning probe microscope and micro-area processing machine both having micro-positioning mechanism |
| 08/31/1999 | CA2076925C Information processing apparatus and scanning tunnel microscope |
| 08/24/1999 | US5943548 Method of analyzing a wafer in a semiconductor device fabrication process |
| 08/19/1999 | WO1999041765A1 Focused particle beam systems and methods using a tilt column |
| 08/19/1999 | WO1999041741A1 Information recording apparatus |
| 08/19/1999 | CA2320149A1 Focused particle beam systems and methods using a tilt column |
| 08/18/1999 | EP0936291A1 Crystal growth observing apparatus |
| 08/17/1999 | US5939719 Scanning probe microscope with scan correction |
| 08/17/1999 | US5939715 For placing a probe tip opposite to a sample |
| 08/17/1999 | US5939623 Atomic force microscope |
| 08/12/1999 | WO1999023684A9 Apparatus and method for secondary electron emission microscope |
| 08/05/1999 | WO1999039215A1 Multi-probe test head |
| 08/05/1999 | CA2281932A1 Multi-probe test head |
| 07/29/1999 | WO1999038188A1 Device for correcting third-order spherical aberration in a lens, especially the objective lens of an electronic microscope |
| 07/29/1999 | DE19802409A1 Lens aperture error correction device for electron microscope objective lens |
| 07/28/1999 | EP0932182A2 Method and an apparatus for testing a substrate |
| 07/28/1999 | CN1044409C Image dissection method by photon tunnel scanning |
| 07/28/1999 | CA2260510A1 Focused ion beam imaging method |
| 07/20/1999 | US5925465 Graphite-based carbon material obtained by bending at least one carbon atom layer of graphite in a selected region along lines; the bending can be accomplished with a probes of an atomic force microscope; nanostructure for microelectronics |
| 07/14/1999 | EP0928950A2 Method for detecting and examining slightly irregular surface states, and its use for fabricating liquid crystal display devices |
| 07/10/1999 | WO1999050651A1 Pattern inspection device |
| 07/06/1999 | US5920068 Analysis of semiconductor surfaces by secondary ion mass spectrometry |
| 06/30/1999 | EP0925599A1 Energy filter, transmission electron microscope and associated method for filtering energy |
| 06/17/1999 | WO1999030343A1 Correction device for correcting the lens defects in particle-optical apparatus |
| 06/17/1999 | WO1999030342A1 Correction device for correcting the spherical aberration in particle-optical apparatus |
| 06/17/1999 | WO1999030171A1 Method of producing probe of tunnel scanning microscope and the probe |
| 06/16/1999 | EP0922929A1 Scanning-probe device with compensation for the disturbing influence of mechanical vibrations on the scanning process |
| 06/15/1999 | US5912468 Charged particle beam exposure system |
| 06/10/1999 | WO1999028961A1 Process for producing insulating film |
| 06/03/1999 | WO1999027559A1 Radiofrequency gaseous detection device (rf-gdd) |
| 06/03/1999 | WO1999027407A1 Temperature control for microscopy |
| 06/03/1999 | WO1999027259A1 Differential pumping via core of annular supersonic jet |
| 06/03/1999 | WO1999015851A9 Method and apparatus for obtaining improved vertical metrology measurements |
| 05/26/1999 | EP0917725A1 Automated adjustment of an energy filtering transmissiion electron microscope |
| 05/25/1999 | CA2114020C Color synthesizing scanning electron microscope |
| 05/14/1999 | WO1999023684A1 Apparatus and method for secondary electron emission microscope |
| 05/11/1999 | US5902928 Controlling engagement of a scanning microscope probe with a segmented piezoelectric actuator |
| 05/06/1999 | WO1999022226A1 Method and apparatus for high spatial resolution spectroscopic microscopy |
| 05/06/1999 | WO1999014706A3 Visual inspection and verification system |
| 05/06/1999 | EP0913685A2 Contactless system for detecting microdefects on electrostatographic members |
| 05/06/1999 | EP0913508A2 Carbon nanotube device, manufacturing method of carbon nanotube device, and electron emitting device |
| 04/28/1999 | EP0911860A2 Particle beam apparatus with energy filter |
| 04/27/1999 | US5898176 Element analyzing method with a scanning type probe microscope and super short high voltage pulse applying method using the element analyzing method |
| 04/27/1999 | US5898106 Method and apparatus for obtaining improved vertical metrology measurements |
| 04/14/1999 | EP0908719A1 Stage unit used for sample positioning and scanning probe microscope with such a stage unit |
| 04/01/1999 | WO1999015851A1 Method and apparatus for obtaining improved vertical metrology measurements |
| 03/30/1999 | US5889282 Analytical method of auger electron spectroscopy for insulating sample |
| 03/30/1999 | CA2111769C Image signal processing apparatus |
| 03/25/1999 | WO1999014706A2 Visual inspection and verification system |
| 03/18/1999 | WO1999013490A1 Method for eliminating first, second and third-order axial image deformations during correction of the third-order spherical aberration in electron optical systems |
| 03/17/1999 | EP0901686A2 Particle-optical apparatus including a low-temperature specimen holder |
| 03/11/1999 | DE19838600A1 Energy filter for electron microscope |
| 03/11/1999 | DE19739290A1 Verfahren zur Beseitigung axialer Bildfehler erster, zweiter und dritter Ordnung bei Korrektur des Öffnungsfehlers dritter Ordnung in elektronen-optischen Systemen Method for eliminating axial aberrations first, second and third order correction of the spherical aberration of the third order in the electron-optical systems |
| 03/09/1999 | US5880360 Method for imaging liquid and dielectric materials with scanning polarization force microscopy |
| 03/04/1999 | WO1999010705A2 A scanning probe microscope system removably attached to an optical microscope objective |
| 03/03/1999 | EP0899771A2 Energy filter, particularly for electron microscope |
| 03/03/1999 | EP0899561A1 Microscope system equipped with an electron microscope and a scanning probe microscope |
| 03/02/1999 | US5877891 Scanning probe microscope having a single viewing device for on-axis and oblique optical views |
| 03/02/1999 | US5877497 Data acquisition and control apparatus for scanning probe systems |
| 03/02/1999 | US5877035 Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same |
| 02/18/1999 | WO1999008099A1 Method for applying or removing material |
| 02/18/1999 | CA2299374A1 Process for applying or removing materials |
| 02/11/1999 | WO1999006793A1 Microscope for compliance measurement |
| 02/02/1999 | US5866904 Scanning electron microscope and method for dimension measuring by using the same |
| 02/02/1999 | US5866807 Method of forming an indentation in a surface of a sample |
| 02/02/1999 | US5866806 System for locating a feature of a surface |
| 02/02/1999 | US5866805 Cantilevers for a magnetically driven atomic force microscope |
| 02/02/1999 | US5866321 Accuracy |
| 02/02/1999 | US5865839 Artificial retina |
| 01/27/1999 | EP0893816A2 Corpuscular beam apparatus |
| 01/27/1999 | CN1206428A Aromatic polyamide resin moulding, process for preparing the same, and magnetic recording media prepared using the same |
| 01/26/1999 | US5864138 Electron Microscope |
| 01/26/1999 | CA2066477C Apparatus for recording and/or reproducing information |
| 01/26/1999 | CA2040701C Information recording/reproducing apparatus |
| 01/20/1999 | EP0892275A2 Method and apparatus for testing semiconductor and integrated circuit structures |
| 01/19/1999 | CA2069702C Micro-displacement element, and scanning tunneling microscope and information processing apparatus using same |
| 01/13/1999 | EP0890821A1 Scanning probe microscope |
| 01/12/1999 | US5859364 Scanning probe microscope |
| 01/12/1999 | US5857341 For use in a microscope having a scanning probe |
| 01/05/1999 | US5856672 Single-crystal silicon cantilever with integral in-plane tip for use in atomic force microscope system |
| 12/29/1998 | US5854488 Ion beam machining method and device thereof |
| 12/29/1998 | US5854487 Scanning probe microscope providing unobstructed top down and bottom up views |
| 12/22/1998 | US5852232 Instrument for sensing a sample |
| 12/15/1998 | US5850038 Scanning probe microscope incorporating an optical microscope |
| 12/09/1998 | EP0882759A1 Aromatic polyamide resin molding, process for preparing the same, and magnetic recording media prepared using the same |
| 12/08/1998 | US5847488 Apparatus having drive device using electromechanical transducer |
| 12/08/1998 | US5847387 Support device and stage assembly for a scanned-probe microscope |
| 12/08/1998 | US5846200 Ultrasonic diagnostic imaging system for analysis of left ventricular function |
| 12/01/1998 | US5844803 Method of sorting a group of integrated circuit devices for those devices requiring special testing |
| 11/24/1998 | CA2102880C System using induced current for contactless testing of wiring networks |
| 11/17/1998 | US5838005 In a method for forming a sensor |
| 11/17/1998 | US5838000 Method device and system for optical near-field scanning microscopy of test specimens in liquids |