| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 07/04/2000 | US6084239 Electron microscope |
| 06/29/2000 | DE19859877A1 Nanotomographie Nanotomography |
| 06/28/2000 | EP1012866A1 Method for eliminating first, second and third-order axial image deformations during correction of the third-order spherical aberration in electron optical systems |
| 06/28/2000 | EP1012584A2 Object inspection and/or modification system and method |
| 06/27/2000 | US6081115 Method of measuring exchange force and method of evaluating magnetism using the exchange force |
| 06/27/2000 | US6080991 Method for milling a transmission electron microscope test slice |
| 06/27/2000 | US6079256 Overlay alignment measurement of wafers |
| 06/13/2000 | US6074485 Crystal growth observing apparatus using a scanning tunneling microscope |
| 06/13/2000 | US6073485 Scanning microscope for image topography and surface potential |
| 06/06/2000 | US6072574 Integrated circuit defect review and classification process |
| 05/24/2000 | EP1003026A2 Scanning depletion microscopy for carrier profiling |
| 05/24/2000 | EP1002228A1 Method for applying or removing material |
| 05/24/2000 | EP1002216A1 Microscope for compliance measurement |
| 05/23/2000 | US6067164 Method and apparatus for automatic adjustment of electron optics system and astigmatism correction in electron optics device |
| 05/23/2000 | US6067153 Pattern defect inspecting apparatus |
| 05/16/2000 | US6064060 Near-field scanning optical microscope |
| 05/10/2000 | EP0998689A1 Optical near-field microscope |
| 05/09/2000 | US6061085 Camera system for a transmission electron microscope |
| 05/02/2000 | US6057547 Scanning probe microscope with scan correction |
| 05/02/2000 | US6057546 Kinematically mounted probe holder for scanning probe microscope |
| 04/25/2000 | US6054710 Method and apparatus for obtaining two- or three-dimensional information from scanning electron microscopy |
| 04/18/2000 | US6052238 Near-field scanning optical microscope having a sub-wavelength aperture array for enhanced light transmission |
| 04/18/2000 | US6051839 Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes |
| 04/18/2000 | US6051825 Conducting scanning probe microscope with environmental control |
| 04/18/2000 | US6050722 Non-contact passive temperature measuring system and method of operation using micro-mechanical sensors |
| 04/11/2000 | US6048992 Metallocene compounds from amino alcohol-derived ligands |
| 04/06/2000 | DE19940124A1 Platform with displacement amplification mechanism for scanning-microscope has two parallel arms attached via elastic connecting sections to base |
| 04/05/2000 | EP0990910A1 Method of producing probe of tunnel scanning microscope and the probe |
| 04/04/2000 | US6046972 Method and producing probe with minute aperture, scanning near-field optical microscope using the probe and recording and/or reproducing apparatus using the probe |
| 04/04/2000 | US6046457 Charged particle beam apparatus having anticontamination means |
| 03/23/2000 | WO2000016372A1 High energy electron diffraction apparatus |
| 03/21/2000 | US6040576 Energy filter, particularly for an electron microscope |
| 03/21/2000 | US6039000 Focused particle beam systems and methods using a tilt column |
| 03/16/2000 | WO1999062097A9 Dissolution stage for an environmental scanning electron microscope |
| 03/09/2000 | WO2000013200A1 Electron microscope |
| 03/07/2000 | US6032518 Scanning stylus atomic force microscope with cantilever tracking and optical access |
| 03/02/2000 | WO2000011702A1 Automated set up of an energy filtering transmission electron microscope |
| 03/01/2000 | EP0847590A4 A scanning probe microscope having automatic probe exchange and alignment |
| 02/24/2000 | WO2000010191A1 Double tilt and rotate specimen holder for a transmission electron microscope |
| 02/23/2000 | EP0980584A1 Electron-beam microcolumn as a general purpose scanning electron microscope |
| 02/23/2000 | CN1245540A Method for preparation of metal intercalated fullerene-like metal chalcogenides |
| 02/22/2000 | US6028662 Adjustment of particle beam landing angle |
| 02/22/2000 | US6028305 Dual cantilever scanning probe microscope |
| 02/16/2000 | EP0979414A1 Multi-probe test head |
| 02/15/2000 | CA2098040C Automatic tip approach method and apparatus for scanning probe microscope |
| 02/08/2000 | US6023338 Overlay alignment measurement of wafers |
| 02/08/2000 | US6023060 T-shaped electron-beam microcolumn as a general purpose scanning electron microscope |
| 02/03/2000 | WO1999062097A8 Dissolution stage for an environmental scanning electron microscope |
| 01/18/2000 | CA2075855C Scanning microscope comprising force-sensing means |
| 01/13/2000 | WO1999047910A3 Method for enhancing the contrast for a transmission electron microscope |
| 01/12/2000 | EP0971254A2 System using a polar coordinate stage and continuous image rotation to compensate for stage rotation |
| 01/05/2000 | EP0969495A2 Particle beam apparatus with secondary electron detector |
| 01/05/2000 | EP0969493A1 Apparatus and method for examining specimen with a charged particle beam |
| 01/05/2000 | EP0969484A1 Sample holder apparatus |
| 12/30/1999 | DE19828476A1 Teilchenstrahlgerät Particle beam |
| 12/29/1999 | EP0966752A1 Correction device for correcting the lens defects in particle-optical apparatus |
| 12/28/1999 | US6008653 Contactless system for detecting microdefects on electrostatographic members |
| 12/28/1999 | US6006593 Method using cantilever to measure physical properties |
| 12/15/1999 | EP0964443A2 Method for heat treatment of silicon wafer and silicon wafer |
| 12/14/1999 | US6002136 Microscope specimen holder and grid arrangement for in-situ and ex-situ repeated analysis |
| 12/14/1999 | US6002131 Scanning probe potentiometer |
| 12/14/1999 | US6001519 High molecular weight layer is heated to its glass transition temperature by applying alternating current to a scanning electron microscopic probe tip to cause magnetic coupling pole to vibrate and heat the material, polarizing heated area |
| 12/08/1999 | EP0962785A1 Method for examining objects with ultrasound |
| 12/07/1999 | US5999005 Voltage and displacement measuring apparatus and probe |
| 12/02/1999 | WO1999062097A1 Dissolution stage for an environmental scanning electron microscope |
| 12/02/1999 | WO1999061949A1 Optical near-field microscope |
| 12/01/1999 | EP0960429A1 Correction device for correcting the spherical aberration in particle-optical apparatus |
| 11/30/1999 | US5995647 Method of producing clear potential contrast image through scanning with electron beam for diagnosis of semiconductor device and electron beam testing system used therein |
| 11/30/1999 | US5994691 Near-field scanning optical microscope |
| 11/30/1999 | US5992226 Apparatus and method for measuring intermolecular interactions by atomic force microscopy |
| 11/25/1999 | DE19822869A1 Optical near-field microscope |
| 11/23/1999 | US5990477 Apparatus for machining, recording, and reproducing, using scanning probe microscope |
| 11/18/1999 | WO1999058926A1 Scanning force microscope with high-frequency cantilever |
| 11/18/1999 | WO1999058922A1 Apparatus and method for measuring intermolecular interactions by atomic force microscopy |
| 11/17/1999 | EP0957333A1 Correlation sample for scanning probe microscope and method of processing the correlation sample |
| 11/16/1999 | US5986270 Particle-optical apparatus including a low-temperature specimen holder |
| 11/16/1999 | US5986263 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 11/16/1999 | US5986256 Scanning probe microscope using fluorescent light |
| 11/16/1999 | US5983713 Scanning probe microscope |
| 11/16/1999 | US5983712 Microscope for compliance measurement |
| 11/11/1999 | WO1999010705A3 A scanning probe microscope system removably attached to an optical microscope objective |
| 11/09/1999 | US5981039 For magnetic latent images with high resolution and high magnetic attracting force to magnetic toner |
| 10/26/1999 | US5973323 Apparatus and method for secondary electron emission microscope |
| 10/26/1999 | US5973316 Sub-wavelength aperture arrays with enhanced light transmission |
| 10/21/1999 | WO1999052973A1 Gas-barrier films |
| 10/19/1999 | US5969821 Optical waveguide probe and optical system and atomic force microscope using the optical waveguide probe |
| 10/19/1999 | US5969357 Scanning electron microscope and method for dimension measuring by using the same |
| 10/19/1999 | CA2073919C Multiple probe electrode arrangement for scanning tunnelling microscope recording and reading |
| 10/13/1999 | EP0949653A2 Electron beam apparatus |
| 10/13/1999 | EP0948741A1 Method and apparatus for high spatial resolution spectroscopic microscopy |
| 10/13/1999 | EP0948671A1 Method for preparation of metal intercalated fullerene-like metal chalcogenides |
| 10/12/1999 | US5965881 Scanning probe microscope and processing apparatus |
| 09/28/1999 | US5958701 Measurement intramolecular forces on supports |
| 09/23/1999 | WO1999047910A2 Method for enhancing the contrast for a transmission electron microscope |
| 09/23/1999 | DE19911944A1 Irradiating arrangement for charged particles for scanning electron microscope, X-ray microanalysis device, etc. |
| 09/23/1999 | DE19811395A1 Method of detecting element in sample |
| 09/21/1999 | US5955661 Optical profilometer combined with stylus probe measurement device |
| 09/21/1999 | CA2070359C Scanning probe microscope |
| 09/16/1999 | WO1999046798A1 Scanning electron microscope |
| 09/16/1999 | WO1999046797A1 Scanning electron microscope |