Patents
Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691)
03/1989
03/01/1989EP0304525A1 Pulsed microfocused ion beams
02/1989
02/28/1989US4808829 Mark position detection system for use in charged particle beam apparatus
02/28/1989US4808821 Spectrometer objective for electron beam mensuration techniques
02/23/1989WO1989001603A1 Scanning type tunnel microscope
02/21/1989US4806766 Magnetic lens system
02/09/1989WO1989000883A1 High mass ion detection system and method
01/1989
01/24/1989US4800512 Method and apparatus for determining and detecting data indicative of the condition of machines through a unique data probe including a test data probe portion and an identifying data sensing probe portion
01/17/1989US4798989 Scanning tunneling microscope installed in electron microscope
12/1988
12/28/1988EP0296871A2 Tunnelling scanning microscope
12/27/1988US4794259 Charged particle collection
12/07/1988EP0293924A2 Direct imaging monochromatic electron microscope
12/06/1988US4789780 Apparatus for energy-selective visualization
11/1988
11/29/1988US4788431 Specimen distance measuring system
11/29/1988US4788426 Electronic read/write system
11/22/1988US4786865 Method and apparatus for testing integrated circuit susceptibility to cosmic rays
11/22/1988US4786806 Retarding field spectrometer
11/15/1988US4785176 Electrostatic-magnetic lens for particle beam apparatus
11/15/1988US4785173 Element analyzing apparatus
11/15/1988US4785172 Secondary ion mass spectrometry system and method for focused ion beam with parallel ion detection
11/09/1988EP0290066A1 Test method for LCD elements
11/09/1988CN88102316A Test method for lcd elements
11/08/1988US4783751 Analysis of pore complexes
11/02/1988EP0289277A2 An electron beam head
10/1988
10/25/1988US4780669 Method and arrangement for evaluating a test voltage by means of a bandwidth-limited evaluation circuit
10/18/1988US4779113 Film handling apparatus
10/18/1988US4779046 Electron beam integrated circuit tester
10/11/1988US4777523 Electron microscope with television observation apparatus
10/05/1988EP0284683A2 Apparatus for surface analysis
10/04/1988CA1242817A1 Low-abberation spectrometer objective with high secondary electron acceptance
09/1988
09/28/1988EP0284136A1 Confocal laser scanning microscope
09/20/1988US4772847 Stroboscopic type potential measurement device
09/14/1988EP0281743A2 Detector objective for a scanning microscope
09/13/1988US4771235 Method and apparatus for detecting and imaging measuring points that have a defined signal progression
08/1988
08/30/1988US4768155 Supersonic flaw detecting system
08/24/1988EP0279240A2 Charged-particles detector
08/23/1988US4766313 Apparatus for quantitative secondary ion mass spectrometry
08/23/1988US4766311 Method and apparatus for precision SEM measurements
08/17/1988EP0278736A2 Secondary ion mass spectrometer
08/16/1988US4764673 Electric electron energy analyzer
08/09/1988US4762996 Coarse approach positioning device
07/1988
07/26/1988US4760567 Electron beam memory system with ultra-compact, high current density electron gun
07/20/1988EP0274622A1 Detector assembly with detector objective for corpuscular ray instruments
07/05/1988US4755749 Strobo electron beam apparatus
07/05/1988US4755047 Photometric stereoscopic shape measuring method
06/1988
06/15/1988EP0270589A1 Apparatus and method for the chemical analysis of solids by spectroscopy of x photoelectrons
05/1988
05/31/1988US4748407 Method and apparatus for measuring time dependent signals with a particle probe
05/31/1988US4748325 Method and device to discharge samples of insulating material during ion analysis
05/24/1988US4746571 Spheres, particles, calibration
05/17/1988US4745362 Method and apparatus for detecting and imaging a voltage signal of at least one specific frequency at a measuring location
05/17/1988US4745360 Electron-beam probe system utilizing test device having interdigitated conductive pattern and associated method of using the test device
05/11/1988EP0266535A1 Electron beam contactless testing system with grid bias switching
04/1988
04/26/1988US4740697 Secondary ion mass spectrometer
04/19/1988US4739399 TV system for transmission electron microscopes
04/06/1988EP0262855A2 Production of pulsed electron beams
03/1988
03/16/1988EP0259907A1 Electron detection with energy discrimination
03/01/1988US4728790 Low-abberation spectrometer objective with high secondary electron acceptance
02/1988
02/25/1988WO1988001424A1 Electron beam memory system with ultra-compact, high current density electron gun
02/24/1988EP0256337A1 Low pressure chemical vapor deposition method fpr forming tungsten silicide
02/23/1988US4727029 Placing speciman in inert gas atmosphere, ionization to activate surface
02/16/1988CA1232975A1 Noncontact full-line dynamic ac tester for integrated circuits
02/11/1988WO1988001099A1 Multipurpose gaseous detector device for electron microscopes
02/09/1988US4724318 Atomic force microscope and method for imaging surfaces with atomic resolution
01/1988
01/27/1988EP0254625A1 Procedure and device for discharging insulating samples in the course of an ionic analysis
01/20/1988EP0253336A2 Surface analyzer
01/20/1988EP0253098A1 Measuring arrangement for the evaluation of a sequence of signals generated by corpuscular radiation
01/07/1988EP0251381A2 Magnetic lens system
01/07/1988EP0113746B1 An elektrode system of a retarding-field spectrometer for a voltage measuring electron beam apparatus
12/1987
12/17/1987WO1987007762A1 Photo ion spectrometer
12/16/1987EP0249214A2 Electrophotographic image recording system
12/15/1987US4713687 Scan line type dynamic observation apparatus
12/03/1987WO1987007429A1 Apparatus and method for the chemical analysis of solids by spectroscopy of x photoelectrons
12/02/1987EP0247651A1 Electron-beam probe system utilizing test device having interdigitated conductive pattern and associated method of using the test device
11/1987
11/10/1987US4706019 Electron beam test probe system for analyzing integrated circuits
10/1987
10/28/1987EP0242993A1 Apparatus and method for collecting charged particles
10/28/1987EP0242602A2 Electrostatic and magnetic lens for corpuscular beam apparatus
10/27/1987US4703234 Charged-particle accelerator
10/14/1987EP0241060A1 Apparatus for energy-selective visualisation
10/13/1987US4700075 Detector for back-scattered electrons
10/13/1987US4700071 Method of recording and reproducing an electron microscope image
09/1987
09/22/1987US4695725 Method of detecting a focus defect of an electron microscope image
09/15/1987US4694170 Instrument for very high resolution ionic micro-analysis of a solid sample
09/09/1987EP0235696A2 Optical proximity imaging method and apparatus
08/1987
08/19/1987EP0232790A1 Process and arrangement for measuring time-dependent signals with a corpuscular beam probe
08/18/1987US4687930 Ion beam apparatus
08/04/1987US4684542 Low pressure chemical vapor deposition of tungsten silicide
07/1987
07/28/1987US4683376 Opposing field spectrometer for electron beam mensuration technology
07/21/1987US4681451 Optical proximity imaging method and apparatus
07/15/1987EP0228502A1 Electron beam test apparatus for electronic device and method for using the same
07/14/1987US4680467 Electron spectroscopy system for chemical analysis of electrically isolated specimens
07/01/1987EP0226913A2 Method and device for situating and/or displaying probe points carrying a characteristic time-dependent signal
06/1987
06/24/1987EP0226494A2 Electron beam test probe system for analyzing integrated circuits
06/16/1987US4673988 Electronic mosaic imaging process
06/02/1987US4670710 Noncontact full-line dynamic AC tester for integrated circuits
06/02/1987US4670651 Apparatus for performing the SNMS method
05/1987
05/26/1987US4668865 Scanning tunneling microscope
04/1987
04/28/1987US4661702 Primary ion beam raster gating technique for secondary ion mass spectrometer system
03/1987
03/17/1987US4651220 Method of recording and reproducing images produced by an electron microscope
03/12/1987WO1987001452A1 Mass spectroscope
03/11/1987EP0213871A1 Strobo electron beam apparatus
02/1987
02/25/1987EP0211212A2 Process and device for the determination and evaluation of machine parameters
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