| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 09/02/2003 | US6614027 Method of controlling electrostatic lens and ion implantation apparatus |
| 09/02/2003 | US6614022 Pattern inspection method and apparatus using electron beam |
| 09/02/2003 | US6613593 Method of fabricating a semiconductor device |
| 09/02/2003 | US6612160 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 08/27/2003 | EP1339100A1 Inspection method and apparatus using electron beam, and device production method using it |
| 08/27/2003 | EP1339085A2 System and method for electron beam irradiation |
| 08/26/2003 | US6610980 Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams |
| 08/21/2003 | WO2003069271A1 Improved scanning probe microscope |
| 08/21/2003 | US20030157254 Providing a scanning probe microscope tip; coating the tip with a patterning compound; using coated tip to apply the compound to the substrate so as to produce a desired pattern |
| 08/21/2003 | US20030156985 Carbon nanotube connected instrument |
| 08/21/2003 | US20030155927 Multiple directional scans of test structures on srmiconductor integrated circuits |
| 08/21/2003 | US20030155497 Electrospray ionization mass analysis apparatus and system thereof |
| 08/21/2003 | US20030155481 Scanning probe microscope |
| 08/21/2003 | US20030154773 Scanning atom probe and analysis method utilizing scanning atom probe |
| 08/20/2003 | EP1336849A2 Analytical method and device for precise analysis with a simple sensor |
| 08/20/2003 | EP1335879A1 Dye loaded zeolite material |
| 08/14/2003 | WO2003067632A2 Multi-detector microscopic inspection system |
| 08/14/2003 | WO2003067234A2 Control of film growth using auger electron spectroscopy for measuring film thickness and chemical composition |
| 08/14/2003 | US20030152811 Tracking stability; friction resistance; forming lubricant layer |
| 08/14/2003 | US20030151004 Method of controlling electrostatic lens and ion implantation apparatus |
| 08/14/2003 | US20030150991 Scanning electron microscope and method of detecting electrons therein |
| 08/13/2003 | EP1335209A1 Probe driving method, and probe apparatus |
| 08/13/2003 | EP0839312B1 Tapping atomic force microscope with phase or frequency detection |
| 08/12/2003 | US6605810 Device for correcting third-order spherical aberration in a lens, especially the objective lens of an electronic microscope |
| 08/12/2003 | US6605344 Gas-barrier films |
| 08/07/2003 | WO2003065406A1 Electrospray ionization mass spectrometric device and system therefor |
| 08/07/2003 | US20030146380 Sensing mode atomic force microscope |
| 08/07/2003 | US20030146379 Auger-based thin film metrology |
| 08/06/2003 | EP1332509A1 Focused ion beam system |
| 08/05/2003 | US6603239 Micromanipulator with piezoelectric movement elements |
| 08/05/2003 | US6602671 Comprising organic surface linked with a support; can be tuned to a desired wavelength to produce a characteristic spectral emission; use to identify and track the location of large numbers of items |
| 07/31/2003 | WO2003062806A1 Inspection device using scanning electron microscope |
| 07/31/2003 | US20030141450 Scanning electron microscope |
| 07/30/2003 | EP1330742A1 Integrated verification and manufacturability tool |
| 07/30/2003 | EP1076803B1 Measuring intermolecular interactions by atomic force microscopy |
| 07/24/2003 | US20030139839 Method of sorting a group of integrated circuit devices for those devices requiring special testing |
| 07/24/2003 | US20030137216 Resonant probe driving arrangement and a scanning probe microscope including such an arrangement |
| 07/24/2003 | US20030136907 Charged particle beam apparatus |
| 07/24/2003 | US20030136906 Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods |
| 07/23/2003 | EP1329686A2 Integrated measuring instrument |
| 07/22/2003 | US6597639 Assembly suitable for writing high density data on a ferroelectric media |
| 07/22/2003 | US6596992 Method of operating scanning probe microscope |
| 07/17/2003 | WO2003057620A1 Sharp end, multi-layer carbon nano-tube radial aggregate and method of manufacturing the aggregate |
| 07/17/2003 | US20030134273 Combined molecular binding detection through force microscopy and mass spectrometry |
| 07/17/2003 | US20030132381 Method and apparatus for measuring thickness of thin film |
| 07/17/2003 | US20030132374 Semiconductor calibration wafer with no charge effect |
| 07/15/2003 | US6593152 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
| 07/15/2003 | US6593040 Analyzing defect; supplying, controlling actinic radiation |
| 07/10/2003 | US20030130823 Method for enhancement in screening throughput |
| 07/10/2003 | US20030129753 High-throughput assay; Raman spectometry; micrographs; drug screening |
| 07/10/2003 | US20030127604 Scanning electron microscope |
| 07/10/2003 | US20030127041 Lapping, mechanical polishing, and reducing internal stress of a gallium, aluminum and indium nitride wafer by thermal annealing or chemical etching; crystallographic plane surfaces |
| 07/09/2003 | EP1325315A2 A method for quantifying the texture homogeneity of a polycrystalline material |
| 07/08/2003 | US6590703 Optical system for scanning microscope |
| 07/08/2003 | US6590210 Scanning electron microscope |
| 07/08/2003 | US6589868 Si seasoning to reduce particles, extend clean frequency, block mobile ions and increase chamber throughput |
| 07/03/2003 | WO2003053845A2 Chemical functionalization nanolithography |
| 07/03/2003 | US20030126581 User interface for a network-based mask defect printability analysis system |
| 07/03/2003 | US20030124450 Patterned recording media and appratus and method of manufacture the same |
| 07/03/2003 | US20030122074 Scanning electron microscope |
| 07/03/2003 | US20030122072 Probe for scanning probe microscope |
| 07/02/2003 | EP1324024A1 Thermal lens microscope device |
| 07/02/2003 | CN2558984Y Tissue cell ultrathin section dryer |
| 07/01/2003 | US6586952 Method of inspecting pattern and inspecting instrument |
| 07/01/2003 | US6586754 Servo control, and its application in a lithographic projection apparatus |
| 07/01/2003 | US6586736 Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample |
| 07/01/2003 | US6586734 Hyperbaric hydrothermal atomic force microscope |
| 07/01/2003 | US6586733 Apparatus and methods for secondary electron emission microscope with dual beam |
| 06/26/2003 | US20030121022 Method and its apparatus for manufacturing simiconductor device |
| 06/26/2003 | US20030116710 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device |
| 06/26/2003 | US20030116709 Scanning-type instrument utilizing charged-particle beam and method of controlling same |
| 06/24/2003 | US6583634 Method of inspecting circuit pattern and inspecting instrument |
| 06/24/2003 | US6583619 Squid microscope |
| 06/24/2003 | US6583414 Method of inspecting pattern and inspecting instrument |
| 06/24/2003 | US6583413 Method of inspecting a circuit pattern and inspecting instrument |
| 06/24/2003 | US6583412 Scanning tunneling charge transfer microscope |
| 06/18/2003 | EP1319199A2 Pinhole defect repair by resist flow |
| 06/17/2003 | US6580070 Time-of-flight mass spectrometer array instrument |
| 06/12/2003 | WO2003049140A1 Optical particle corrector |
| 06/12/2003 | US20030108235 Method and system for quantifying the step profile characteristics semiconductor features using surface analysis data |
| 06/12/2003 | US20030107006 Charged particle beam exposure method and apparatus |
| 06/10/2003 | US6578188 Method and apparatus for a network-based mask defect printability analysis system |
| 06/10/2003 | US6576910 Sample holder, sample mount and sample mount jig for use in electron microscope |
| 06/10/2003 | US6576900 Methods of sampling specimens for microanalysis |
| 06/10/2003 | US6576293 Method to improve copper thin film adhesion to metal nitride substrates by the addition of water |
| 06/05/2003 | WO2003046926A2 Tailoring domain engineered structures in ferroelectric materials |
| 06/05/2003 | WO2003046519A1 Delay time modulation femtosecond time-resolved scanning probe microscope apparatus |
| 06/05/2003 | US20030104639 Method of inspecting holes using charged-particle beam |
| 06/05/2003 | US20030102442 Circuits and methods for electron-beam control |
| 06/05/2003 | US20030102441 Tailoring domain engineered structures in ferroelectric materials |
| 06/05/2003 | US20030102430 Scanning electron microscope system |
| 06/04/2003 | EP1315667A1 Single molecule array on silicon substrate for quantum computer |
| 06/04/2003 | EP0882759B1 Aromatic polyamide resin molding, process for preparing the same, and magnetic recording media prepared using the same |
| 06/03/2003 | US6573525 Method and apparatus for recording and reading out images |
| 06/03/2003 | US6573511 Electron beam irradiation system and electron beam irradiation method |
| 06/03/2003 | US6573499 Microstructured pattern inspection method |
| 06/03/2003 | US6573498 Electric measurement of reference sample in a CD-SEM and method for calibration |
| 06/03/2003 | US6573497 Calibration of CD-SEM by e-beam induced current measurement |
| 05/30/2003 | WO2003008941A3 Combined molecular blinding detection through force microscopy and mass spectrometry |
| 05/30/2003 | WO2002014862A3 Method and device for characterising and/or for detecting a bonding complex |