| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 04/25/2002 | WO2002033727A1 Focused ion beam system |
| 04/23/2002 | US6376136 Scanning a mask formed on sample with charged beams; pattern exposure; applying calibration voltage |
| 04/18/2002 | WO2001063266A3 System for imaging a cross-section of a substrate |
| 04/18/2002 | US20020043628 Apparatus for detecting defects in semiconductor devices and methods of using the same |
| 04/17/2002 | EP1197986A2 Autoadjusting charged-particle probe-forming apparatus |
| 04/16/2002 | US6373566 Integrated circuit defect review and classification process |
| 04/16/2002 | US6373070 Method apparatus for a coaxial optical microscope with focused ion beam |
| 04/16/2002 | US6373054 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 04/11/2002 | WO2001081857A3 Resonant probe driving arrangement and scanning probe microscope |
| 04/09/2002 | US6370487 Remote semiconductor microscopy |
| 04/09/2002 | US6369397 SPM base focal plane positioning |
| 04/09/2002 | US6369385 Integrated microcolumn and scanning probe microscope arrays |
| 04/09/2002 | US6369379 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 04/09/2002 | US6369253 Formation of amine and oxygen silane bonds to form metallocenes |
| 04/04/2002 | DE10057656C1 Production of an integrated stylus used in scanning electron microscopes comprises radiating a silicon substrate with ions, removing the areas radiated with the ions, and radiating the substrate with ions of different energy and/or dosage |
| 04/03/2002 | EP1193216A1 Nanotweezers and nanomanipulator |
| 04/02/2002 | US6366688 Apparatus and method for contact failure inspection in semiconductor devices |
| 04/02/2002 | US6366340 Electron exposure apparatus |
| 04/02/2002 | US6365905 Focused ion beam processing apparatus |
| 03/28/2002 | WO2002025375A2 Pinhole defect repair by resist flow |
| 03/28/2002 | WO2002025271A2 A method for quantifying the texture homogeneity of a polycrystalline material |
| 03/28/2002 | CA2423406A1 A method for quantifying the texture homogeneity of a polycrystalline material |
| 03/26/2002 | US6362923 Lens for microscopic inspection |
| 03/26/2002 | US6362474 Semiconductor sample for transmission electron microscope and method of manufacturing the same |
| 03/21/2002 | US20020035461 Visual analysis and verification system using advanced tools |
| 03/21/2002 | US20020034827 Separation of preferential particles from sample; provide probes, incubate with sample, separate probes from sample, classify extraction probes |
| 03/21/2002 | US20020033953 Differential interferometric scanning near-field confocal microscopy |
| 03/14/2002 | US20020031248 Defect inspection method and apparatus therefor |
| 03/14/2002 | US20020030166 Pattern inspection method and apparatus using electron beam |
| 03/14/2002 | US20020030160 Positron trap beam source for positron microbeam production |
| 03/12/2002 | US6356524 Method of recording/reproducing an information signal |
| 03/12/2002 | US6356088 Highly compact laser scanning microscope with integrated short-pulse laser |
| 03/12/2002 | US6355994 Precision stage |
| 03/12/2002 | US6355495 Method and apparatus for analyzing minute foreign substance, and process for semiconductor elements or liquid crystal elements by use thereof |
| 03/07/2002 | WO2002018266A1 Single molecule array on silicon substrate for quantum computer |
| 03/07/2002 | US20020027440 Method and apparatus for inspecting integrated circuit pattern |
| 03/07/2002 | US20020027191 Apparatus for sensing position of electrostatic XY-stage through time-division multiplexing |
| 03/06/2002 | CN1080456C High speed ashing method |
| 03/05/2002 | US6353219 Object inspection and/or modification system and method |
| 02/28/2002 | US20020024661 Integrated circuit defect review and classification process |
| 02/28/2002 | US20020024023 Method and apparatus for testing a substrate |
| 02/28/2002 | US20020024022 Charged particle beam irradiation apparatus and irradiation method using the apparatus |
| 02/28/2002 | US20020024013 Collection of secondary electrons through the objective lens of a scanning electron microscope |
| 02/28/2002 | DE10039337A1 Kombination von abtastenden und abbildenden Methoden bei der Überprüfung von Photomasken Combination of scanning and imaging methods in the review of photomasks |
| 02/27/2002 | EP1181611A1 Scanning device, especially for detecting fluorescent light |
| 02/26/2002 | USRE37560 Scan control for scanning probe microscopes |
| 02/21/2002 | WO2002015224A1 Environmental scanning electron microscope |
| 02/21/2002 | WO2002014862A2 Method and device for characterising and/or for detecting a bonding complex |
| 02/21/2002 | US20020020814 Electron spectroscopy employing controlled surface charging |
| 02/21/2002 | CA2418861A1 Method and device for characterising and/or for detecting a bonding complex |
| 02/20/2002 | EP0948671B1 Method for preparation of metal intercalated fullerene-like metal chalcogenides |
| 02/20/2002 | EP0818052A4 Combined scanning probe and scanning energy microscope |
| 02/19/2002 | US6348690 Method and an apparatus of an inspection system using an electron beam |
| 02/14/2002 | US20020019729 Visual inspection and verification system |
| 02/14/2002 | US20020017621 Device and method for combining scanning and imaging methods in checking photomasks |
| 02/14/2002 | US20020017615 Scanning unit and scanning microscope having the same |
| 02/13/2002 | EP1179833A2 Particle detector |
| 02/13/2002 | EP1179748A2 Combination of imaging and scanning methods for checking reticles |
| 02/13/2002 | EP1179217A1 Secondary electron spectroscopy method and system |
| 02/12/2002 | US6346710 Stage apparatus including displacement amplifying mechanism |
| 02/07/2002 | WO2002011150A1 Method and device for checking and examining the inside surface of nuclear and thermonuclear assemblies |
| 02/07/2002 | WO2002010831A2 Differential interferometric scanning near-field confocal microscopy |
| 02/07/2002 | WO2002009836A2 Methods for solid phase nanoextraction and desorption |
| 02/07/2002 | US20020015143 Multi-beam multi-column electron beam inspection system |
| 02/07/2002 | US20020014090 Low-reflection glass article |
| 02/06/2002 | EP1177153A1 Bulk synthesis of long nanotubes of transition metal chalcogenides |
| 02/05/2002 | US6344750 Voltage contrast method for semiconductor inspection using low voltage particle beam |
| 01/31/2002 | WO2002009142A1 Electronic microscope observation system and observation method |
| 01/31/2002 | WO2002009135A2 Immersion lens with magnetic shield for charged particle beam system |
| 01/31/2002 | WO2002008774A1 Probe driving method, and probe apparatus |
| 01/24/2002 | US20020009262 Information recording and reproducing apparatus |
| 01/23/2002 | EP1174871A1 Apparatus for electrostatically sensing the position of an xy-stage through time-division multiplexing |
| 01/22/2002 | US6339955 Thickness measurement using AFM for next generation lithography |
| 01/17/2002 | US20020005492 Sample holder, sample mount and sample mount jig for use in electron microscope |
| 01/17/2002 | US20020005484 Apparatus and method for defect detection using charged particle beam |
| 01/17/2002 | US20020005483 Laser scanning microscope and shutter for an optical system |
| 01/17/2002 | US20020005482 Scanning probe instrument |
| 01/17/2002 | US20020005481 Scanning tunneling charge transfer microscope |
| 01/16/2002 | EP1171791A2 Optical microscopy and its use in the study of cells |
| 01/15/2002 | US6339217 Scanning probe microscope assembly and method for making spectrophotometric, near-field, and scanning probe measurements |
| 01/10/2002 | US20020003213 Electron spin analyzer |
| 01/10/2002 | DE10029444A1 Optical arrangement, especially laser scanning microscope, has interruption device for light beam from light source with arrangement for monitoring operation of interruption device |
| 01/09/2002 | EP1170778A2 Scanning and high resolution electron spectroscopy and imaging |
| 01/08/2002 | US6337479 Object inspection and/or modification system and method |
| 01/08/2002 | US6337477 Probe having micro-projection and manufacturing method thereof |
| 01/03/2002 | WO2002001599A2 Time-of-flight mass spectrometer array instrument |
| 01/02/2002 | EP1167313A1 Low-reflection glass article |
| 01/02/2002 | CN1329338A Method for controlling electrostatic lens and ion implantation device |
| 01/01/2002 | US6335532 Convergent charged particle beam apparatus and inspection method using same |
| 01/01/2002 | US6335530 Objective lens for scanning electron microscope |
| 12/27/2001 | US20010055151 Scanning probe microscope and method of processing signals in the same |
| 12/27/2001 | US20010054692 Scanning electron microscope |
| 12/27/2001 | US20010054691 Optical system for scanning microscope |
| 12/25/2001 | US6333510 Electron beam exposure or system inspection of measurement apparatus and its method and height detection apparatus |
| 12/20/2001 | WO2001097096A1 Integrated verification and manufacturability tool |
| 12/20/2001 | US20010053444 Management technique of friction coefficient based on surface roughness, substrate for information recording medium, information recording medium and manufacture method thereof |
| 12/20/2001 | US20010052781 Method of inspecting pattern and inspecting instrument |
| 12/20/2001 | US20010052257 Nanotomography |
| 12/18/2001 | US6330824 Photothermal modulation for oscillating mode atomic force microscopy in solution |
| 12/13/2001 | US20010050343 Apparatus using charged particle beam |