| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 11/05/2002 | US6476388 Scanning electron microscope having magnification switching control |
| 11/05/2002 | US6476387 Method and apparatus for observing or processing and analyzing using a charged beam |
| 10/31/2002 | WO2002086941A1 Detector optics for electron beam inspection system |
| 10/31/2002 | WO2002086476A2 High spatial resolution x-ray microanalysis |
| 10/31/2002 | WO2002010831A3 Differential interferometric scanning near-field confocal microscopy |
| 10/31/2002 | US20020160412 Inventory control |
| 10/31/2002 | US20020158480 Nanotweezers and nanomanipulator |
| 10/31/2002 | US20020158200 Electron microscope equipped with x-ray spectrometer |
| 10/30/2002 | EP1252646A1 Method for detecting geometrical-optical aberrations |
| 10/30/2002 | EP1252634A1 Instrument and method for combined surface topography and spectroscopic analysis |
| 10/30/2002 | EP1252542A1 Method and device for analysing molecular reaction products in biological cells |
| 10/29/2002 | US6472794 Microactuator |
| 10/24/2002 | WO2002084210A1 Scanning probe microscope provided with a liquid cell |
| 10/24/2002 | WO2002069363A3 Step function determination of auger peak intensity |
| 10/24/2002 | US20020156594 Three dimensional reconstruction metrology |
| 10/24/2002 | US20020154731 Method of X-ray analysis in a particle-optical apparatus |
| 10/24/2002 | US20020153483 Detector optics for electron beam inspection system |
| 10/24/2002 | US20020152795 Macroscopic model of scanning force microscope |
| 10/23/2002 | EP1251383A2 Near-field light-generating element, near-field optical recording device, and near-field optical microscope |
| 10/17/2002 | US20020149381 Voltage contrast method and apparatus for semiconductor inspection using low voltage particle beam |
| 10/17/2002 | US20020148975 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former |
| 10/17/2002 | US20020148954 Signal detector and probe microscope using the same |
| 10/16/2002 | EP1249860A2 Method to improve copper thin film adhesion to metal nitride substrates by the addition of water |
| 10/16/2002 | EP1249031A1 Electron-optical corrector for eliminating third-order aberrations |
| 10/15/2002 | US6466895 Defect reference system automatic pattern classification |
| 10/15/2002 | US6465795 Charge neutralization of electron beam systems |
| 10/10/2002 | WO2002080218A1 Magnetic field applying sample observing system |
| 10/10/2002 | US20020146512 Si seasoning to reduce particles, extend clean frequency, block mobile ions and increase chamber throughput |
| 10/10/2002 | US20020145111 Step function determination of auger peak intensity |
| 10/08/2002 | US6462346 Mask inspecting apparatus and mask inspecting method which can inspect mask by using electron beam exposure system without independently mounting another mask inspecting apparatus |
| 10/08/2002 | US6462339 Method for quantifying the texture homogeneity of a polycrystalline material |
| 10/08/2002 | US6460261 V-groove shape measuring method and apparatus by using rotary table |
| 10/03/2002 | US20020142498 Method of inspecting process for manufacturing semiconductor device and method of manufacturing semiconductor device |
| 10/03/2002 | US20020142496 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus |
| 10/03/2002 | US20020139178 Submerged sample observation apparatus and method |
| 10/01/2002 | US6459758 Method and apparatus for discrete tomography |
| 10/01/2002 | US6459283 Method and system for testing an electrical component |
| 10/01/2002 | US6458605 Method and apparatus for controlling photolithography overlay registration |
| 09/26/2002 | WO2002075772A2 Simultaneous flooding and inspection for charge control in an electron beam inspection machine |
| 09/26/2002 | US20020135755 Scanning probe microscope assembly |
| 09/25/2002 | EP1243915A1 Apparatus for evaluating electrical characteristics |
| 09/24/2002 | US6455860 Resolution enhancement device for an optically-coupled image sensor using high extra-mural absorbent fiber |
| 09/19/2002 | WO2002073155A1 Ultrasensitive non-isotopic water-soluble nanocrystals |
| 09/19/2002 | WO2002073126A1 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 09/19/2002 | WO2002073125A1 Apparatus and method for isolating and measuring movement in a metrology apparatus |
| 09/19/2002 | US20020130260 Simultaneous flooding and inspection for charge control in an electron beam inspection machine |
| 09/19/2002 | DE10200264A1 Lichtsondenmikroskop Light probe microscope |
| 09/17/2002 | US6453063 Automatic focused ion beam imaging system and method |
| 09/17/2002 | US6452677 Method and apparatus for detecting defects in the manufacture of an electronic device |
| 09/17/2002 | US6452178 Method and an apparatus of an inspection system using an electron beam |
| 09/17/2002 | US6452177 Atmospheric electron x-ray spectrometer |
| 09/17/2002 | US6452172 Composite charged particle beam apparatus |
| 09/17/2002 | US6452161 Scanning probe microscope having optical fiber spaced from point of hp |
| 09/12/2002 | WO2002071412A1 Enhanced scanning probe microscope |
| 09/12/2002 | WO2002071031A1 Total release method for sample extraction from a charged particle instrument |
| 09/12/2002 | US20020127491 Chemical functionalization nanolithography |
| 09/12/2002 | US20020127050 Platform positioning system |
| 09/12/2002 | US20020125428 SEM provided with a secondary electron detector having a central electrode |
| 09/12/2002 | US20020125427 Method and apparatus for manipulating a sample |
| 09/12/2002 | US20020125415 Apparatus and method for isolating and measuring movement in a metrology apparatus |
| 09/12/2002 | US20020124636 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 09/10/2002 | US6448555 Electron microscope and similar instruments |
| 09/10/2002 | US6448096 Atomic force microscopy and signal acquisition via buried insulator |
| 09/06/2002 | WO2002069363A2 Step function determination of auger peak intensity |
| 09/06/2002 | WO2002068053A1 Electron beam system using multiple electron beams |
| 09/05/2002 | US20020123161 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device |
| 09/05/2002 | US20020122373 Ultra-high density storage device with resonant scanning micromover |
| 09/05/2002 | US20020121614 Total release method for sample extraction from a charged-particle instrument |
| 09/05/2002 | US20020121613 Adjustable conductance limiting aperture for ion implanters |
| 09/05/2002 | US20020121131 System and method of multi-dimensional force sensing for scanning probe microscopy |
| 09/04/2002 | EP1236220A1 Detector for a scanning electron microscope with variable pressure and a scanning electron microscope comprising a detector of this type |
| 09/04/2002 | CN1367534A Data storage medium based on diode, cathodic conductivity and cathodic luminescence |
| 09/03/2002 | US6445197 Electron beam tester, recording medium therefor and signal data detecting method |
| 09/03/2002 | US6444991 Scanning charged-particle beam instrument |
| 09/03/2002 | US6444982 Dissolution stage for an environmental scanning electron microscope |
| 08/29/2002 | US20020120427 Method and apparatus for determining the molecular weight of polymers |
| 08/29/2002 | US20020118005 Single-molecule detector |
| 08/29/2002 | US20020117967 Electron beam system using multiple electron beams |
| 08/29/2002 | US20020117636 Electron beam irradiation system and electron beam irradiation method |
| 08/29/2002 | US20020117635 Patterned wafer inspection method and apparatus therefor |
| 08/29/2002 | US20020117611 Object inspection and/or modification system and method |
| 08/28/2002 | EP1235251A1 Electron beam apparatus |
| 08/28/2002 | CN1366334A Method of chemical gaseous phase sedimenting tungsten on semiconductor substrate |
| 08/27/2002 | US6441897 Integrated circuit defect review and classification process |
| 08/22/2002 | WO2002025375A3 Pinhole defect repair by resist flow |
| 08/22/2002 | US20020113967 Inspection method, apparatus and system for circuit pattern |
| 08/22/2002 | US20020112534 Optical equipment assemblies and techniques indexed to a common spindle |
| 08/20/2002 | US6437343 Scanner system and piezoelectric micro-inching mechansim used in scanning probe microscope |
| 08/20/2002 | US6437328 Hyperbaric hydrothermal atomic force microscope |
| 08/15/2002 | US20020111775 Remote semiconductor microscopy |
| 08/15/2002 | US20020110177 Heat emitting probe and heat emitting probe apparatus |
| 08/15/2002 | US20020109494 Multiple mechanical resonator parametric device |
| 08/15/2002 | US20020109088 Inspection method, apparatus and system for circuit pattern |
| 08/15/2002 | US20020109082 Light receiving and emitting probe and light receiving and emitting probe apparatus |
| 08/14/2002 | CN1364141A Nanotweezers and nanomanipulator |
| 08/08/2002 | WO2002037526A9 Electron beam apparatus and method for manufacturing semiconductor device comprising the apparatus |
| 08/08/2002 | US20020105648 Inspection method, apparatus and system for circuit pattern |
| 08/08/2002 | US20020104964 Apparatus and method for secondary electron emission microscope |
| 08/08/2002 | US20020104612 Method for fabricating transmission electron microscope |
| 08/07/2002 | EP1228360A1 Method for inspecting electrode surface quality |