| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 03/02/1982 | US4317995 Trace vapor detector |
| 02/23/1982 | CA1118913A1 Method and apparatus for the elemental analysis of solids |
| 02/03/1982 | EP0044926A1 Resolution standard for scanning electron microscope and method of producing such a standard |
| 01/26/1982 | US4313056 Scanning electron microscope with a chamber which can be broken down, particularly for observing pieces of relatively large dimensions |
| 01/12/1982 | US4310764 Electron beam irradiation apparatus |
| 01/12/1982 | US4310759 System for removal of material from the surface of a sample |
| 12/29/1981 | US4308457 Device for the detection of back-scattered electrons from a sample in an electron microscope |
| 11/17/1981 | US4301371 Holding device for electron-microscope specimens |
| 11/10/1981 | US4300045 Beam guidance for electron beam tests, and electron impact spectrometer having such beam guidance |
| 10/20/1981 | US4296323 Secondary emission mass spectrometer mechanism to be used with other instrumentation |
| 06/23/1981 | US4275301 Corona discharge device |
| 06/23/1981 | CA1103813A1 Apparatus for electron beam lithography |
| 05/12/1981 | CA1101129A1 Point scattering detector |
| 04/29/1981 | EP0027517A1 Scanning apparatus for surface analysis using vacuum-tunnel effect at cryogenic temperatures |
| 04/28/1981 | US4264822 Electron beam testing method and apparatus of mask |
| 04/28/1981 | CA1100093A1 Properties of crystals |
| 04/21/1981 | CA1099824A1 Scanning electron microscope with eddy-current compensation |
| 03/10/1981 | US4255656 Apparatus for charged particle spectroscopy |
| 02/10/1981 | CA1095637A1 Multiple crystal holder assembly for wavelength dispersive x-ray spectrometers |
| 01/20/1981 | US4246479 Electrostatic energy analysis |
| 01/07/1981 | EP0021655A1 Electron beam irradiation apparatus |
| 01/07/1981 | EP0021518A1 Trace vapour detector |
| 12/09/1980 | US4238686 Method of analyzing localized nonuniformities in luminescing materials |
| 12/09/1980 | CA1091363A1 Radiation heated acceleration |
| 11/25/1980 | US4236178 Electron microscope with brightness/contrast indicator |
| 10/14/1980 | US4228358 Wafer loading apparatus for beam treatment |
| 10/07/1980 | US4227090 Electron beam microfabrication apparatus and method |
| 09/23/1980 | US4224518 Multistage cylindrical mirror analyzer incorporating a coaxial electron gun |
| 08/26/1980 | US4219732 Magnetic electron lens |
| 08/26/1980 | US4219730 Charge-particle energy analyzer |
| 07/09/1980 | EP0013003A1 Electron beam investigation process and electron impact spectrometer therefor |
| 06/24/1980 | CA1080369A1 Scanning electron microscope micrometer scale and method of fabricating same |
| 06/17/1980 | US4208581 Radioactive ray gauge |
| 05/27/1980 | US4205232 Arrangement for preventing the alteration of the primary beam by unwanted particles, such as sputter products, charged ions and electrons and their secondary processes |
| 05/27/1980 | US4205226 Auger electron spectroscopy |
| 04/22/1980 | US4199688 Apparatus for electron beam lithography |
| 03/18/1980 | US4194115 Method and means for helium/hydrogen ratio measurement by alpha scattering |
| 01/15/1980 | US4184079 Radiation toughening of diamonds |
| 01/08/1980 | US4182959 Methods for use in fire investigation |
| 12/25/1979 | US4180738 Astigmatism in electron beam probe instruments |
| 12/18/1979 | US4179609 Point scattering detector |
| 12/18/1979 | US4179604 Electron collector for forming low-loss electron images |
| 10/23/1979 | US4172228 Method for analyzing radiation sensitivity of integrated circuits |
| 10/09/1979 | US4170737 Top-entry transmission electron microscope |
| 09/05/1979 | EP0003842A1 Mass spectrometer and method for the elemental analysis of solids |
| 09/04/1979 | US4166952 Method and apparatus for the elemental analysis of solids |
| 07/31/1979 | US4163156 Method of modifying the performance characteristics of a Josephson junction |
| 07/24/1979 | US4162403 Method and means for compensating for charge carrier beam astigmatism |
| 07/17/1979 | CA1058772A1 Ion scattering spectrometer with two analyzers preferably in tandem |
| 07/11/1979 | EP0002688A1 Apparatus for irradiation of a target with ions |
| 06/12/1979 | US4158140 Electron beam exposure apparatus |
| 05/22/1979 | CA1055104A1 Apparatus for measuring the beam current of charged particle beam |
| 04/24/1979 | US4151418 Multiple crystal holder assembly for wavelength dispersive X-ray spectrometers |
| 04/24/1979 | US4151417 Electron beam exposure apparatus |
| 03/27/1979 | US4146810 Radiation heated acceleration |
| 02/20/1979 | US4139933 Method for fabricating a scanning electron microscope micrometer scale |
| 02/13/1979 | US4139774 Apparatus for irradiating a specimen by an electron beam |
| 02/13/1979 | US4139668 Film-grid composite substrate for electron microscopy |
| 01/30/1979 | CA1047464A1 Vacuum pumps |
| 01/02/1979 | US4132892 Raster scanning ion microscope with quadrupole mass filter |
| 11/21/1978 | US4126782 Electrostatic charged-particle analyzer |
| 11/14/1978 | US4125772 Scanning electron microscope with eddy-current compensation |
| 09/26/1978 | US4117322 Ion scattering spectrometer including cylindrical mirror analyzer and ion gun axially positioned therewithin |
| 08/29/1978 | US4109996 Method for producing a synthetic hologram |
| 08/15/1978 | US4107527 Ion-emission microanalyzer microscope |
| 08/15/1978 | US4107526 Ion scattering spectrometer with modified bias |
| 06/20/1978 | US4096386 Light reflecting electrostatic electron lens |
| 05/23/1978 | US4091374 Method for pictorially displaying output information generated by an object imaging apparatus |
| 05/16/1978 | US4090106 Field emision electron gun with controlled power supply |
| 04/25/1978 | US4086491 Direct measurement of the electron beam of a scanning electron microscope |
| 01/31/1978 | US4071765 Electron microscope |
| 01/17/1978 | US4068381 Scanning electron microscope micrometer scale and method for fabricating same |
| 12/20/1977 | US4064438 Nondestructive detection and measurement of hydrogen embrittlement |
| 11/15/1977 | US4058724 Ion Scattering spectrometer with two analyzers preferably in tandem |
| 08/09/1977 | US4041316 Field emission electron gun with an evaporation source |
| 04/26/1977 | US4020387 Field emission electron gun |
| 03/08/1977 | US4011449 Apparatus for measuring the beam current of charged particle beam |
| 01/04/1977 | US4001582 Local surface analysis |
| 12/14/1976 | US3997807 Mechanically adjustable electron gun apparatus |
| 09/07/1976 | US3979590 Electron microscope comprising an energy analyzer |
| 08/31/1976 | US3978338 Illumination system in a scanning electron microscope |
| 07/13/1976 | US3969039 Vacuum pump |
| 06/15/1976 | US3963923 Ion microprobes |
| 06/15/1976 | US3963922 X-ray fluorescence device |
| 05/18/1976 | US3958124 Method and apparatus for sem specimen coating and transfer |
| 04/20/1976 | US3952203 Object adjustment device for a charged particle beam apparatus |
| 04/13/1976 | US3950646 Portable apparatus for measurement of nuclear radiation |
| 03/23/1976 | US3946268 Field emission gun improvement |
| 03/16/1976 | US3944830 Method of and an apparatus for examining a sample or a material by measuring the absorption of γ- or x-ray radiation |
| 02/17/1976 | US3939344 Prefilter-ionizer apparatus for use with quadrupole type secondary-ion mass spectrometers |
| 02/03/1976 | US3936756 Field emission electron gun having automatic current control |