| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 02/06/2003 | WO2002048678A3 High capacity and scanning speed system for sample handling and analysis |
| 02/06/2003 | US20030025498 Scanning probe microscope |
| 02/06/2003 | US20030025076 Electron-optical system with einzel lens and inspection method using the same |
| 02/06/2003 | US20030025075 Scanning confocal electron microscope |
| 02/05/2003 | EP1280654A1 Method for applying a layer containing at least polymeric material |
| 02/04/2003 | US6515489 Apparatus for sensing position of electrostatic XY-stage through time-division multiplexing |
| 02/04/2003 | US6515296 Pattern dimension measuring system and pattern dimension measuring method |
| 02/04/2003 | US6515282 Testing of interconnection circuitry using two modulated charged particle beams |
| 02/04/2003 | US6515277 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 01/30/2003 | WO2003009305A2 Measurement head for atomic force microscopy and other applications |
| 01/30/2003 | WO2003008941A2 Combined molecular blinding detection through force microscopy and mass spectrometry |
| 01/30/2003 | US20030021213 Recording medium, information reproducing apparatus, information recording apparatus, and information recording and reproducing apparatus |
| 01/30/2003 | US20030020010 Time-of- flight mass spectrometer array instrument |
| 01/28/2003 | US6512237 Charged beam exposure method and charged beam exposure apparatus |
| 01/23/2003 | WO2003007330A1 Sample electrification measurement method and charged particle beam apparatus |
| 01/23/2003 | WO2003007328A1 Device for reducing the impact of distortions in a microscope |
| 01/23/2003 | WO2003006952A2 Method and apparatus for manipulating a sample |
| 01/23/2003 | WO2001063555A3 Image deconvolution techniques for probe scanning apparatus |
| 01/23/2003 | US20030015653 Measurement head for atomic force microscopy and other applications |
| 01/21/2003 | US6510120 Method for writing and/or erasing high density data on a media |
| 01/21/2003 | US6509969 System for inspecting and/or processing a sample |
| 01/21/2003 | US6509750 Apparatus for detecting defects in patterned substrates |
| 01/16/2003 | US20030010928 Probe scanning device |
| 01/16/2003 | US20030010915 Emission electron microscope |
| 01/16/2003 | US20030010913 Detector for a scanning electron microscope with variable pressure and scanning electron microscope with such detector |
| 01/16/2003 | US20030010911 Instrument and method for combined surface topography and spectroscopic analysis |
| 01/15/2003 | EP1274966A2 Resonant probe driving arrangement and scanning probe microscope |
| 01/15/2003 | EP1144989B1 Nanotomography |
| 01/14/2003 | US6507552 AFM version of diode-and cathodoconductivity-and cathodoluminescence-based data storage media |
| 01/09/2003 | WO2003003402A1 Energy filter multiplexing |
| 01/09/2003 | WO2003003034A1 Apparatus and methods reliable and efficient detection of voltage contrast defects |
| 01/09/2003 | WO2003003032A1 Method for charging a structure comprising an insulating body |
| 01/09/2003 | US20030007242 Enhanced scanning probe microscope and nanolithographic methods using the same |
| 01/09/2003 | US20030006372 Automatic focusing system for scanning electron microscope equipped with laser defect detection function |
| 01/09/2003 | US20030005755 Enhanced scanning probe microscope |
| 01/07/2003 | US6504609 Inspection method, apparatus and system for circuit pattern |
| 01/07/2003 | US6504393 Methods and apparatus for testing semiconductor and integrated circuit structures |
| 01/07/2003 | US6504365 Magnetic force microscope |
| 01/03/2003 | WO2003001145A1 Scanning interferometry with reference signal |
| 01/03/2003 | WO2002018266A8 Single molecule array on silicon substrate for quantum computer |
| 01/03/2003 | WO2002001599A3 Time-of-flight mass spectrometer array instrument |
| 01/02/2003 | US20030004905 System and method for deconvoluting the effect of topography on scanning probe microscopy measurements |
| 01/02/2003 | US20030001598 Apparatus and methods for reliable and efficient detection of voltage contrast defects |
| 01/02/2003 | US20030001102 Method for detecting geometrical-optical abberations |
| 01/02/2003 | US20030001092 Positron lifetime spectrometer using a DC positron beam |
| 01/02/2003 | EP1271605A1 Electron beam apparatus and method for manufacturing semiconductor device comprising the apparatus |
| 01/02/2003 | EP1271603A1 Scanning electron microscope |
| 01/02/2003 | EP1271135A2 System and method for deconvoluting the effect of topography on scanning probe microscopy measurements |
| 01/02/2003 | EP1269112A1 Thickness measurement using afm for next generation lithography |
| 12/31/2002 | US6501725 Method of recording/reproducing an information signal |
| 12/27/2002 | WO2002103328A1 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
| 12/26/2002 | US20020197750 Method and apparatus for inspecting a semiconductor device |
| 12/26/2002 | US20020196450 Scanning interferometry with reference signal |
| 12/26/2002 | US20020195574 Method and apparatus for inspecting a semiconductor device |
| 12/24/2002 | US6498349 Electrostatically focused addressable field emission array chips (AFEA's) for high-speed massively parallel maskless digital E-beam direct write lithography and scanning electron microscopy |
| 12/24/2002 | US6498345 Particle beam device |
| 12/24/2002 | US6497194 Focused particle beam systems and methods using a tilt column |
| 12/19/2002 | WO2002101121A1 High surface quality gan wafer and method of fabricating same |
| 12/19/2002 | US20020191181 Integrated circuit defect review and classification process |
| 12/19/2002 | US20020190604 Microactuator |
| 12/19/2002 | US20020190219 Resolution enhancement device for an optically-coupled image sensor using high extra-mural absorbent fiber |
| 12/18/2002 | EP1266392A2 System for imaging a cross-section of a substrate |
| 12/12/2002 | US20020185599 Scanning electron microscope |
| 12/12/2002 | US20020185598 Array foreshortening measurement using a critical dimension scanning electron microscope |
| 12/12/2002 | US20020185597 Scanning electron microscope with appropriate brightness control function |
| 12/12/2002 | US20020185054 High surface quality gan wafer and method of fabricating same |
| 12/10/2002 | US6493082 Inspection method, apparatus and system for circuit pattern |
| 12/10/2002 | US6490913 Humidity chamber for scanning stylus atomic force microscope with cantilever tracking |
| 12/05/2002 | WO2002073125B1 Apparatus and method for isolating and measuring movement in a metrology apparatus |
| 12/05/2002 | US20020183963 Method of characterizing a semiconductor surface |
| 12/05/2002 | US20020182109 Gene sequence-reading instrument |
| 12/05/2002 | US20020180983 Shape measuring apparatus, shape measuring method, and aligning method |
| 12/05/2002 | US20020179833 SPM physical characteristic measuring method, measurement program, and SPM device |
| 12/05/2002 | US20020178802 Scanning probe microscope and method of processing signals in the same |
| 12/05/2002 | US20020178800 Apparatus for evaluating electrical characteristics |
| 12/04/2002 | EP1261890A1 Improved lens for microscopic inspection |
| 12/04/2002 | EP1261878A2 Precision stage |
| 12/03/2002 | US6489792 Charge-up measuring apparatus |
| 12/03/2002 | US6488767 High surface quality GaN wafer and method of fabricating same |
| 11/28/2002 | WO2002095378A1 Method for sample separation and lift-out |
| 11/28/2002 | WO2002095325A1 Scanning probing microscope combined with inverted optical microscope |
| 11/28/2002 | US20020176938 Introducing a wafer into a chemical vapor deposition chamber, humidifying helium gas with water, depositing a copper seed layer at a flow rate of 5-20 sccm during temperature rise to 150-230 defrees C |
| 11/28/2002 | US20020174716 Method for replacing a probe sensor assembly on a scanning probe microscope |
| 11/27/2002 | CN1095094C Automated non-visual method of locating periodically arranged sub-micron objects |
| 11/21/2002 | WO2002093615A1 Scanning atom probe and analysis method using scanning atom probe |
| 11/21/2002 | US20020172943 Device and method of use for detection and characterization of pathogens and biological materials |
| 11/21/2002 | US20020171051 Image classification method, obervation method, and apparatus thereof |
| 11/20/2002 | EP1257780A1 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device |
| 11/19/2002 | US6483796 Recording medium, information reproducing apparatus, information recording apparatus, and information recording and reproducing apparatus |
| 11/14/2002 | WO2002073126B1 Apparatus and method for isolating and measuring movement in metrology apparatus |
| 11/14/2002 | US20020167889 Recovering recorded information from an optical disk |
| 11/14/2002 | US20020166966 Low-vacuum scanning electron microscope |
| 11/14/2002 | US20020166964 Detection of defects in patterned substrates |
| 11/14/2002 | US20020166957 Near-field light-generating element, near-field optical recording device, and near-field optical microscope |
| 11/12/2002 | US6480279 Inspection method, apparatus and system for circuit pattern |
| 11/12/2002 | US6479820 Electrostatic charge reduction of photoresist pattern on development track |
| 11/07/2002 | US20020163637 Method for using an in situ particle sensor for monitoring particle performance in plasma deposition processes |
| 11/07/2002 | US20020162960 Hyperbaric hydrothermal atomic force microscope |
| 11/05/2002 | US6476913 Inspection method, apparatus and system for circuit pattern |
| 11/05/2002 | US6476390 Method and apparatus for inspecting integrated circuit pattern using a plurality of charged particle beams |