Patents
Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691)
04/1992
04/21/1992US5107113 Method and apparatus for correcting distortions in scanning tunneling microscope images
04/21/1992US5107112 Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof
04/21/1992US5106729 Replacing oxygen in polymer with sulfur, then complexing with metal; measuring difference in electroconductivity with tip of scanning probe microscope
04/15/1992EP0480645A1 Cantilever type probe, scanning tunnel microscope and information processing apparatus using the same
04/15/1992EP0480183A2 Method and apparatus for writing or etching narrow linewidth patterns on insulating materials
04/14/1992US5105082 Laser ionization sputtered neutral mass spectrometer
04/07/1992US5103095 Scanning probe microscope employing adjustable tilt and unitary head
04/07/1992US5103094 Compact temperature-compensated tube-type scanning probe with large scan range
04/01/1992EP0477524A2 Method of image restoration
03/1992
03/31/1992CA1298416C High stability bimorph scanning tunneling microscope
03/24/1992US5099118 Dual sensor scanner for measuring weight of paper and related sheet products
03/24/1992US5099117 Scanning tunnel microscope capable of detecting electrons emanating from a specimen
03/17/1992US5097204 Method and apparatus for evaluating the capacitance of an integrated electronic device using an e beam
03/17/1992US5097127 Multiple detector system for specimen inspection using high energy backscatter electrons
03/17/1992US5097126 High resolution electron energy loss spectrometer
03/11/1992EP0474433A1 Information processing method and apparatus
03/03/1992US5093577 Contamination monitor for measuring a degree of contamination in an evacuatable charged particle beam system
02/1992
02/18/1992US5089708 Vacuum system comprising an evacuatable housing, an object holder and an object carrier which is detachably coupled thereto
02/18/1992US5089699 Secondary charged particle analyzing apparatus and secondary charged particle extracting section
02/18/1992US5088290 Transfer vessel apparatus and method of storing samples
02/12/1992EP0470478A2 Multichannel charged-particle analyzer
02/12/1992EP0470370A1 Information detection apparatus and method
02/12/1992EP0470300A1 Electron beam apparatus with a monopole magnetic lens field
02/06/1992DE4041029C1 Component cooler for vacuum chamber - has stamper-like heat sink inserted in sealed opening and directly contacting base of component
02/05/1992EP0469314A2 Method and apparatus for neutralizing electric charges built up on a specimen in a vacuum chamber
02/05/1992EP0469274A2 Ultrasonic inspection and imaging instrument
02/04/1992US5086230 Apparatus for forming, correcting pattern
01/1992
01/29/1992EP0468456A2 Information recording and/or reproducing apparatus
01/21/1992US5083022 Scanning tunneling microscope
01/21/1992US5083020 Mass spectrometer
01/14/1992US5081353 Combined scanning electron and scanning tunnelling microscope apparatus and method
12/1991
12/31/1991US5077473 Drift compensation for scanning probe microscopes using an enhanced probe positioning system
12/27/1991EP0462554A2 Charged particle beam apparatus
12/27/1991EP0177566B1 Method for precision sem measurements
12/25/1991CN1057363A Installation for study or transformation of surface of samples placed in vacuum or in controlled atmosphere
12/18/1991EP0461442A2 Particle beam apparatus
12/18/1991EP0461393A1 Scanning tunnel microscope
12/04/1991EP0459487A2 Ultrasonic inspection and imaging instrument
12/04/1991EP0459392A2 Method and apparatus for processing a minute portion of a specimen
11/1991
11/27/1991EP0457979A1 Scanning micromechanical probe control system
11/26/1991US5068535 Time-of-flight ion-scattering spectrometer for scattering and recoiling for electron density and structure
11/19/1991US5066858 Scanning tunneling microscopes with correction for coupling effects
11/14/1991WO1991017429A1 Installation for the study or transformation of sample surfaces in a vacuum or controlled atmosphere
11/12/1991US5065103 Scanning capacitance - voltage microscopy
11/12/1991US5065029 Cooled CCD camera for an electron microscope
11/12/1991US5065020 Energy dispersive X-ray spectrometer
11/06/1991CN1055998A Method and apparatus for background correction in analysis of specimen surface
10/1991
10/29/1991US5061856 Corpuscular beam device
10/23/1991EP0453225A1 Method and apparatus for detecting trace contaminants
10/23/1991EP0452851A1 Information recording/reproducing apparatus
10/23/1991EP0452825A2 Method and apparatus for background correction in analysis of a specimen surface
10/23/1991EP0452767A1 Laser ionization sputtered neutral mass spectrometer
10/22/1991US5059793 Scanning tunneling microscope having proper servo control function
10/22/1991US5059792 Thermal field emission electron gun
10/17/1991WO1991015752A1 Scanning tunneling microscope
10/16/1991CN1014359B Test method for lcd elements
10/08/1991US5055680 Scanning tunneling microscope
10/02/1991EP0448985A1 Scanning capacitance - voltage microscopy
10/01/1991US5053699 Scanning electron microscope based parametric testing method and apparatus
09/1991
09/24/1991US5051599 Device for recognizing the impact site of a charge carrier beam on a target
09/24/1991US5051585 Apparatus and method of pattern detection based on a scanning transmission electron microscope
09/11/1991EP0445319A1 Process for fabricating silicon carbide films with a predetermined stress
09/10/1991US5047649 Method and apparatus for writing or etching narrow linewidth patterns on insulating materials
09/10/1991US5047637 Atomic probe type microscope apparatus
09/03/1991US5045696 Photoelectron microscope
08/1991
08/27/1991US5042305 Ultrasonic flaw detecting system
08/21/1991EP0442630A2 Combined scanning electron and scanning tunnelling microscope apparatus and method
08/21/1991EP0442488A2 Improved process for rie etching silicon dioxide
08/20/1991US5041783 Probe unit for an atomic probe microscope
08/14/1991EP0441375A2 Method of and apparatus for measuring pattern profile
08/14/1991EP0441311A2 Surface microscope apparatus
08/06/1991US5038034 Scanning tunneling microscope
07/1991
07/30/1991US5036196 Surface microscope
07/23/1991US5034605 Secondary ion mass spectrometer with independently variable extraction field
07/16/1991US5032724 Multichannel charged-particle analyzer
07/02/1991US5029249 Electron microscope
06/1991
06/26/1991EP0433604A2 Electrical probe incorporating scanning proximity microscope
06/25/1991US5025658 Compact atomic force microscope
06/12/1991EP0431623A2 Method for forming probe and apparatus therefor
06/11/1991US5023457 Electron beam device
06/11/1991US5023453 Apparatus for preparation and observation of a topographic section
06/11/1991US5023452 Method and apparatus for detecting trace contaminents
06/05/1991EP0429773A1 Atomic photo-absorption force microscope
06/04/1991US5021121 Reactive ion etching by flowing an inert gas and trifluoromethane into an enclosure while controlling the power level of the plasma
05/1991
05/29/1991EP0429122A1 Contamination monitor for measuring a degree of contamination in an evacuatable charged particle beam system
05/29/1991EP0428906A2 Particle beam apparatus
05/28/1991CA1284537C Multipurpose gaseous detector device for electron microscope
05/21/1991US5017266 Piezoelectric transducer
05/21/1991CA1284375C Electronic mosaic imaging process
05/14/1991US5016266 Process and apparatus for monitoring monocrystalline structures with images of Kikuchi pseudo-lines
05/14/1991US5015862 Laser modulation of LMI sources
05/14/1991US5015851 Slow positron beam generator for lifetime studies
05/14/1991US5015849 Detecting reference locations
05/14/1991CA1284237C Electron-beam exposure apparatus
04/1991
04/30/1991US5012109 Charged particle beam apparatus
04/24/1991EP0423877A1 Vacuum system comprising an evacuatable housing, an object holder and an object carrier which is detachably coupled thereto
04/23/1991US5010250 System for surface temperature measurement with picosecond time resolution
04/17/1991EP0422548A2 Atomic force microscope
04/17/1991EP0422449A2 A scanning tunneling potentiospectroscopic microscope and a data detecting method
04/16/1991US5008537 Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope
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