Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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04/21/1992 | US5107113 Method and apparatus for correcting distortions in scanning tunneling microscope images |
04/21/1992 | US5107112 Scanning tunnel-current-detecting device and method for detecting tunnel current and scanning tunnelling microscope and recording/reproducing device using thereof |
04/21/1992 | US5106729 Replacing oxygen in polymer with sulfur, then complexing with metal; measuring difference in electroconductivity with tip of scanning probe microscope |
04/15/1992 | EP0480645A1 Cantilever type probe, scanning tunnel microscope and information processing apparatus using the same |
04/15/1992 | EP0480183A2 Method and apparatus for writing or etching narrow linewidth patterns on insulating materials |
04/14/1992 | US5105082 Laser ionization sputtered neutral mass spectrometer |
04/07/1992 | US5103095 Scanning probe microscope employing adjustable tilt and unitary head |
04/07/1992 | US5103094 Compact temperature-compensated tube-type scanning probe with large scan range |
04/01/1992 | EP0477524A2 Method of image restoration |
03/31/1992 | CA1298416C High stability bimorph scanning tunneling microscope |
03/24/1992 | US5099118 Dual sensor scanner for measuring weight of paper and related sheet products |
03/24/1992 | US5099117 Scanning tunnel microscope capable of detecting electrons emanating from a specimen |
03/17/1992 | US5097204 Method and apparatus for evaluating the capacitance of an integrated electronic device using an e beam |
03/17/1992 | US5097127 Multiple detector system for specimen inspection using high energy backscatter electrons |
03/17/1992 | US5097126 High resolution electron energy loss spectrometer |
03/11/1992 | EP0474433A1 Information processing method and apparatus |
03/03/1992 | US5093577 Contamination monitor for measuring a degree of contamination in an evacuatable charged particle beam system |
02/18/1992 | US5089708 Vacuum system comprising an evacuatable housing, an object holder and an object carrier which is detachably coupled thereto |
02/18/1992 | US5089699 Secondary charged particle analyzing apparatus and secondary charged particle extracting section |
02/18/1992 | US5088290 Transfer vessel apparatus and method of storing samples |
02/12/1992 | EP0470478A2 Multichannel charged-particle analyzer |
02/12/1992 | EP0470370A1 Information detection apparatus and method |
02/12/1992 | EP0470300A1 Electron beam apparatus with a monopole magnetic lens field |
02/06/1992 | DE4041029C1 Component cooler for vacuum chamber - has stamper-like heat sink inserted in sealed opening and directly contacting base of component |
02/05/1992 | EP0469314A2 Method and apparatus for neutralizing electric charges built up on a specimen in a vacuum chamber |
02/05/1992 | EP0469274A2 Ultrasonic inspection and imaging instrument |
02/04/1992 | US5086230 Apparatus for forming, correcting pattern |
01/29/1992 | EP0468456A2 Information recording and/or reproducing apparatus |
01/21/1992 | US5083022 Scanning tunneling microscope |
01/21/1992 | US5083020 Mass spectrometer |
01/14/1992 | US5081353 Combined scanning electron and scanning tunnelling microscope apparatus and method |
12/31/1991 | US5077473 Drift compensation for scanning probe microscopes using an enhanced probe positioning system |
12/27/1991 | EP0462554A2 Charged particle beam apparatus |
12/27/1991 | EP0177566B1 Method for precision sem measurements |
12/25/1991 | CN1057363A Installation for study or transformation of surface of samples placed in vacuum or in controlled atmosphere |
12/18/1991 | EP0461442A2 Particle beam apparatus |
12/18/1991 | EP0461393A1 Scanning tunnel microscope |
12/04/1991 | EP0459487A2 Ultrasonic inspection and imaging instrument |
12/04/1991 | EP0459392A2 Method and apparatus for processing a minute portion of a specimen |
11/27/1991 | EP0457979A1 Scanning micromechanical probe control system |
11/26/1991 | US5068535 Time-of-flight ion-scattering spectrometer for scattering and recoiling for electron density and structure |
11/19/1991 | US5066858 Scanning tunneling microscopes with correction for coupling effects |
11/14/1991 | WO1991017429A1 Installation for the study or transformation of sample surfaces in a vacuum or controlled atmosphere |
11/12/1991 | US5065103 Scanning capacitance - voltage microscopy |
11/12/1991 | US5065029 Cooled CCD camera for an electron microscope |
11/12/1991 | US5065020 Energy dispersive X-ray spectrometer |
11/06/1991 | CN1055998A Method and apparatus for background correction in analysis of specimen surface |
10/29/1991 | US5061856 Corpuscular beam device |
10/23/1991 | EP0453225A1 Method and apparatus for detecting trace contaminants |
10/23/1991 | EP0452851A1 Information recording/reproducing apparatus |
10/23/1991 | EP0452825A2 Method and apparatus for background correction in analysis of a specimen surface |
10/23/1991 | EP0452767A1 Laser ionization sputtered neutral mass spectrometer |
10/22/1991 | US5059793 Scanning tunneling microscope having proper servo control function |
10/22/1991 | US5059792 Thermal field emission electron gun |
10/17/1991 | WO1991015752A1 Scanning tunneling microscope |
10/16/1991 | CN1014359B Test method for lcd elements |
10/08/1991 | US5055680 Scanning tunneling microscope |
10/02/1991 | EP0448985A1 Scanning capacitance - voltage microscopy |
10/01/1991 | US5053699 Scanning electron microscope based parametric testing method and apparatus |
09/24/1991 | US5051599 Device for recognizing the impact site of a charge carrier beam on a target |
09/24/1991 | US5051585 Apparatus and method of pattern detection based on a scanning transmission electron microscope |
09/11/1991 | EP0445319A1 Process for fabricating silicon carbide films with a predetermined stress |
09/10/1991 | US5047649 Method and apparatus for writing or etching narrow linewidth patterns on insulating materials |
09/10/1991 | US5047637 Atomic probe type microscope apparatus |
09/03/1991 | US5045696 Photoelectron microscope |
08/27/1991 | US5042305 Ultrasonic flaw detecting system |
08/21/1991 | EP0442630A2 Combined scanning electron and scanning tunnelling microscope apparatus and method |
08/21/1991 | EP0442488A2 Improved process for rie etching silicon dioxide |
08/20/1991 | US5041783 Probe unit for an atomic probe microscope |
08/14/1991 | EP0441375A2 Method of and apparatus for measuring pattern profile |
08/14/1991 | EP0441311A2 Surface microscope apparatus |
08/06/1991 | US5038034 Scanning tunneling microscope |
07/30/1991 | US5036196 Surface microscope |
07/23/1991 | US5034605 Secondary ion mass spectrometer with independently variable extraction field |
07/16/1991 | US5032724 Multichannel charged-particle analyzer |
07/02/1991 | US5029249 Electron microscope |
06/26/1991 | EP0433604A2 Electrical probe incorporating scanning proximity microscope |
06/25/1991 | US5025658 Compact atomic force microscope |
06/12/1991 | EP0431623A2 Method for forming probe and apparatus therefor |
06/11/1991 | US5023457 Electron beam device |
06/11/1991 | US5023453 Apparatus for preparation and observation of a topographic section |
06/11/1991 | US5023452 Method and apparatus for detecting trace contaminents |
06/05/1991 | EP0429773A1 Atomic photo-absorption force microscope |
06/04/1991 | US5021121 Reactive ion etching by flowing an inert gas and trifluoromethane into an enclosure while controlling the power level of the plasma |
05/29/1991 | EP0429122A1 Contamination monitor for measuring a degree of contamination in an evacuatable charged particle beam system |
05/29/1991 | EP0428906A2 Particle beam apparatus |
05/28/1991 | CA1284537C Multipurpose gaseous detector device for electron microscope |
05/21/1991 | US5017266 Piezoelectric transducer |
05/21/1991 | CA1284375C Electronic mosaic imaging process |
05/14/1991 | US5016266 Process and apparatus for monitoring monocrystalline structures with images of Kikuchi pseudo-lines |
05/14/1991 | US5015862 Laser modulation of LMI sources |
05/14/1991 | US5015851 Slow positron beam generator for lifetime studies |
05/14/1991 | US5015849 Detecting reference locations |
05/14/1991 | CA1284237C Electron-beam exposure apparatus |
04/30/1991 | US5012109 Charged particle beam apparatus |
04/24/1991 | EP0423877A1 Vacuum system comprising an evacuatable housing, an object holder and an object carrier which is detachably coupled thereto |
04/23/1991 | US5010250 System for surface temperature measurement with picosecond time resolution |
04/17/1991 | EP0422548A2 Atomic force microscope |
04/17/1991 | EP0422449A2 A scanning tunneling potentiospectroscopic microscope and a data detecting method |
04/16/1991 | US5008537 Composite apparatus with secondary ion mass spectrometry instrument and scanning electron microscope |