| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 08/06/2002 | US6429439 Organic field ionization source |
| 08/01/2002 | US20020101795 Method for writing and/or erasing high density data on a media |
| 08/01/2002 | US20020101673 Assembly for writing and / or erasing high density data on a media |
| 08/01/2002 | US20020101573 Electron exposure apparatus |
| 08/01/2002 | US20020100872 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 08/01/2002 | US20020100871 Focused ion beam apparatus |
| 08/01/2002 | DE10102623A1 Verfahren und Vorrichtung zur Bestimmung des Molekulargewichts von Polymeren Method and apparatus for determining the molecular weight of polymers |
| 07/31/2002 | EP1034449B1 Temperature control for microscopy |
| 07/30/2002 | US6426501 Defect-review SEM, reference sample for adjustment thereof, method for adjustment thereof, and method of inspecting contact holes |
| 07/30/2002 | US6426499 Multi-probe test head and process using same |
| 07/25/2002 | WO2002058102A2 Adjustable conductance limiting aperture for ion implanters |
| 07/25/2002 | WO2002057014A1 Method and device for manipulating small quantities of liquid |
| 07/25/2002 | US20020100005 Integrated verification and manufacturability tool |
| 07/25/2002 | US20020097046 Magnetic force microscope |
| 07/25/2002 | US20020096632 Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method |
| 07/24/2002 | EP1225440A1 Method and apparatus for determining the molecular weight of polymers |
| 07/24/2002 | EP1224686A2 High dynamic range mass spectrometer |
| 07/18/2002 | US20020092986 Method and an apparatus of an inspection system using an electron beam |
| 07/17/2002 | EP1222439A1 Method and apparatus for molecular analysis of buried layers |
| 07/16/2002 | US6421122 Inspection method, apparatus and system for circuit pattern |
| 07/16/2002 | US6420722 Method for sample separation and lift-out with one cut |
| 07/16/2002 | US6419985 Method for producing insulator film |
| 07/11/2002 | US20020088941 Scanning electronic beam apparatus |
| 07/11/2002 | US20020088939 Particle detectors |
| 07/11/2002 | US20020088937 Scanning probe microscope |
| 07/11/2002 | US20020088919 Light probe microscope |
| 07/10/2002 | EP1221606A1 Scanning tunneling microscope light emitting/condensing device |
| 07/09/2002 | US6417673 Scanning depletion microscopy for carrier profiling |
| 07/09/2002 | US6417515 In-situ ion implant activation and measurement apparatus |
| 07/09/2002 | US6415654 Scanning probe microscope system including removable probe sensor assembly |
| 07/04/2002 | WO2002052610A1 Sem provided with a secondary electron detector having a central electrode |
| 07/04/2002 | WO2000070646A9 Secondary electron spectroscopy method and system |
| 07/04/2002 | US20020086110 Method for tungsten chemical vapor deposition on a semiconductor substrate |
| 07/04/2002 | US20020084426 Focused ion beam system |
| 07/03/2002 | EP1220280A2 Scanning and high resolution x-ray photoelectron spectroscopy and imaging |
| 07/03/2002 | EP1219725A1 Method for tungsten chemical vapor deposition on a semiconductor substrate |
| 07/03/2002 | EP1218919A1 Electron image detector coupled by optical fibers with absorbing outer cladding to reduce blurring |
| 07/03/2002 | EP1218918A2 Immersion lens with magnetic shield for charged particle beam system |
| 07/02/2002 | US6414323 Charged particle beam apparatus and method of controlling charged particle beam |
| 06/27/2002 | US20020079463 Method and apparatus for specimen fabrication |
| 06/27/2002 | US20020079446 Scanning probe microscope |
| 06/27/2002 | DE10062049A1 Verfahren zur Abbildung einer Probenoberfläche mit Hilfe einer Rastersonde sowie Rastersondenmikroskop Method for imaging a sample surface using a scanning probe and scanning probe microscope |
| 06/25/2002 | US6411111 Electron-electro-optical debug system E2ODS |
| 06/25/2002 | US6410929 Electron beam irradiation apparatus |
| 06/25/2002 | US6410923 Magnetic lens apparatus for use in high-resolution scanning electron microscopes and lithographic processes |
| 06/20/2002 | WO2002048678A2 High capacity and scanning speed system for sample handling and analysis |
| 06/20/2002 | WO2002048644A1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
| 06/20/2002 | US20020074517 High capacity and scanning speed system for sample handling and analysis |
| 06/18/2002 | US6407559 Laser fault correction of semiconductor devices |
| 06/18/2002 | US6407558 Method of determining the doping concentration across a surface of a semiconductor material |
| 06/18/2002 | US6407385 Methods and apparatus for removing particulate foreign matter from the surface of a sample |
| 06/18/2002 | US6407384 Energy filter and electron microscope using same |
| 06/13/2002 | US20020072012 Charged beam exposure method and charged beam exposure apparatus |
| 06/13/2002 | US20020070340 Apparatus for inspection of semiconductor wafers and masks using a low energy electron microscope with two illuminating beams |
| 06/12/2002 | EP1213716A2 Apparatus for recording and reading data and method of recording and reading data using contact resistance measurement thereof |
| 06/12/2002 | EP0737299B1 Scanning force microscope with detector probe |
| 06/11/2002 | US6405137 Method and apparatus for performing chemical analysis using imaging by scanning thermal microscopy |
| 06/06/2002 | WO2002045153A1 Inspection method and apparatus using electron beam, and device production method using it |
| 06/06/2002 | WO2001082327A3 Collection of secondary electrons through the objective lens of a scanning electron microscope |
| 06/06/2002 | US20020067634 AFM version of diode- and cathodoconductivity - and cathodoluminescence-based data storage media |
| 06/06/2002 | US20020067170 Scanning microwave microscope capable of realizing high resolution and microwave resonator |
| 06/06/2002 | US20020066855 Apparatus for recording and reading data and method of recording and reading data using contact resistance measurement thereof |
| 06/06/2002 | US20020066307 Apparatus for forming optical aperture |
| 06/05/2002 | EP1211694A2 Apparatus for forming optical aperture |
| 06/05/2002 | EP1211680A2 Data storage device |
| 06/04/2002 | US6399026 Top loading cryostat insert based on cage assembly system which is mounted onto vacuum flange; adaptable; reconfig-urable; near-field scanning microscopy; confocal microscopy |
| 05/30/2002 | WO2001090761A3 Methods of sampling specimens for microanalysis |
| 05/29/2002 | EP1209737A2 Method and apparatus for specimen fabrication |
| 05/29/2002 | EP1209720A2 Energy spectrum measurement |
| 05/29/2002 | EP1209689A2 Method of manufacturing integrated scanning probes |
| 05/29/2002 | DE10062246C1 Device for manipulating small amounts of liquid on solid body surface used in microanalysis comprises solid body substrate having surface with contacting regions, and unit for producing external force |
| 05/29/2002 | CN1351756A Electrostatically focused addressable field emission arraychips (AFEA' s) for high-speed maskless digital e-beam direct write lithography and scanning electron microscopy |
| 05/28/2002 | US6396064 Differential pumping via core of annular supersonic jet |
| 05/28/2002 | US6396063 Radiofrequency gaseous detection device (RF-GDD) |
| 05/28/2002 | US6396054 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/28/2002 | US6395347 Vapor spraying |
| 05/21/2002 | US6392228 Energy filter, transmission electron microscope and associated method for filtering energy |
| 05/21/2002 | US6389886 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 05/16/2002 | US20020058343 Evaluation method of ferroelectric capacitor and wafer mounted with evaluation element |
| 05/16/2002 | US20020057085 Squid Microscope |
| 05/16/2002 | US20020056816 Surface plasmon enhanced illumination system |
| 05/16/2002 | US20020056808 Method and apparatus for charged particle beam microscopy |
| 05/16/2002 | DE10053034A1 SQUID microscope, has SQUID, SQUID holder, specimen holder and container that is open at top for accommodating SQUID holder, SQUID and specimen holder |
| 05/14/2002 | US6388747 Inspection method, apparatus and system for circuit pattern |
| 05/14/2002 | US6388262 Double tilt and rotate specimen holder for a transmission electron microscope |
| 05/14/2002 | US6388249 Surface analyzing apparatus |
| 05/10/2002 | WO2002037526A1 Electron beam apparatus and method for manufacturing semiconductor device comprising the apparatus |
| 05/10/2002 | WO2002036490A1 Dye loaded zeolite material |
| 05/09/2002 | US20020053643 Convergent charged particle beam apparatus and inspection method using same |
| 05/09/2002 | US20020053638 Apparatus and method for examing specimen with a charged particle beam |
| 05/09/2002 | US20020053634 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus |
| 05/08/2002 | EP1204133A2 Method and apparatus for processing a micro sample |
| 05/08/2002 | EP1203223A1 Methods for the automated testing of reticle feature geometries |
| 05/08/2002 | DE10147995A1 Kompakter Szintillator mit hoher Sammlungseffizienz zum Nachweis von Sekundärelektronen Compact scintillator with high collection efficiency for the detection of secondary electrons |
| 05/07/2002 | US6384408 Calibration of a scanning electron microscope |
| 05/02/2002 | US20020050565 Method and apparatus for processing a micro sample |
| 05/02/2002 | EP1202320A2 Method and apparatus for charged particle beam microscopy |
| 05/02/2002 | EP1202052A2 SQUID microscope |
| 05/02/2002 | EP1200979A1 Minimization of electron fogging in electron beam lithography |
| 05/02/2002 | EP1200653A1 Mesotubes and nanotubes |