| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 02/13/2001 | US6185992 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 02/08/2001 | WO2001009965A1 Micromanipulator with piezoelectric movement elements |
| 02/08/2001 | WO2001009921A1 Minimization of electron fogging in electron beam lithography |
| 02/08/2001 | WO2001009414A1 Mesotubes and nanotubes |
| 02/08/2001 | WO2000072077A8 Scanning device, especially for detecting fluorescent light |
| 02/06/2001 | US6184533 Scanning probe microscope with the stage unit |
| 02/06/2001 | US6184524 Automated set up of an energy filtering transmission electron microscope |
| 02/06/2001 | US6184519 Surface analyzing apparatus with anti-vibration table |
| 02/01/2001 | WO2000063736A3 Optical microscopy and its use in the study of cells |
| 02/01/2001 | DE10023456A1 Meso- und Nanoröhren Meso- and nanotubes |
| 01/31/2001 | CN1282078A Electron beam illuminating device |
| 01/30/2001 | US6181097 High precision three-dimensional alignment system for lithography, fabrication and inspection |
| 01/30/2001 | US6178813 Vibration distortion removal for scanning probe microscopes |
| 01/25/2001 | WO2001006205A1 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 01/25/2001 | WO2000060632A3 Electrostatically focused addressable field emission arraychips (afea's) for high-speed maskless digital e-beam direct write lithography and scanning electron microscopy |
| 01/24/2001 | EP1071112A2 Scanning charged-particle beam instrument |
| 01/24/2001 | EP1025416A4 Method and apparatus for obtaining improved vertical metrology measurements |
| 01/23/2001 | US6178218 Nondestructive examination using neutron activated positron annihilation |
| 01/17/2001 | EP1069609A2 Method for automatically identifying and classifying defects, in particular on a semiconductor wafer |
| 01/17/2001 | EP1069593A2 Electron microscope |
| 01/17/2001 | EP1068630A1 Scanning electron microscope |
| 01/16/2001 | US6175417 Method and apparatus for detecting defects in the manufacture of an electronic device |
| 01/16/2001 | US6173604 Scanning evanescent electro-magnetic microscope |
| 01/10/2001 | EP1067576A2 Energy filter and electron microscope using the same |
| 01/09/2001 | US6172365 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 01/09/2001 | US6172363 Method and apparatus for inspecting integrated circuit pattern |
| 01/04/2001 | WO2001001439A1 Charged particle device |
| 01/03/2001 | EP1064536A2 Method for enhancing the contrast for a transmission electron microscope |
| 01/03/2001 | EP0746857A4 Scanning probe microscope |
| 01/02/2001 | US6169282 Defect inspection method and apparatus therefor |
| 01/02/2001 | US6169281 Apparatus and method for determining side wall profiles using a scanning probe microscope having a probe dithered in lateral directions |
| 12/28/2000 | WO2000079565A1 Particle-optical apparatus including a particle source that can be switched between high brightness and large beam current |
| 12/27/2000 | EP1063677A1 Charged particle beam device |
| 12/27/2000 | EP1063641A1 Information recording apparatus |
| 12/20/2000 | EP1061551A2 Scanning charged-particle beam instrument and method of observing specimen image therewith |
| 12/19/2000 | US6163519 Scanning near-field optical microscope using the probe and recording and/or reproducing apparatus using the probe |
| 12/13/2000 | CN1276625A Charging measuring device |
| 12/06/2000 | EP1057204A1 Device for correcting third-order spherical aberration in a lens, especially the objective lens of an electronic microscope |
| 12/05/2000 | US6157610 Recording medium, information reproducing apparatus, information recording device, and information recording and reproducing apparatus |
| 12/05/2000 | US6157451 Sample CD measurement system |
| 12/05/2000 | US6156216 Etching top working surface of silicon wafer to make silicon stylus of a specific area with a base and an apex, depositing nitride film, spin coating a resist, etching specific area of nitride covered silcone stylus to expose apex of stylus |
| 11/30/2000 | WO2000072077A1 Scanning device, especially for detecting fluorescent light |
| 11/23/2000 | WO2000070646A1 Secondary electron spectroscopy method and system |
| 11/23/2000 | DE19923822A1 Optical scanning configuration for detecting fluorescent light and for suppressing stray light arising from an illuminated test detected through a lens creates a shaded area for stray light in a focal plane. |
| 11/22/2000 | EP1053562A1 Focused particle beam systems and methods using a tilt column |
| 11/21/2000 | US6150657 Energy filter and electron microscope equipped with the energy filter |
| 11/21/2000 | US6149593 Method and apparatus for detecting beta radiation |
| 11/14/2000 | US6147958 Information recording/reproducing apparatus and method using probe |
| 11/14/2000 | US6147507 System and method of mapping leakage current and a defect profile of a semiconductor dielectric layer |
| 11/14/2000 | US6146913 Method for making enhanced performance field effect devices |
| 11/14/2000 | US6145374 Scanning force microscope with high-frequency cantilever |
| 11/09/2000 | WO2000067290A2 Integrated microcolumn and scanning probe microscope arrays |
| 11/09/2000 | WO2000066485A1 Bulk synthesis of long nanotubes of transition metal chalcogenides |
| 11/09/2000 | CA2336670A1 Integrated microcolumn and scanning probe microscope arrays |
| 11/07/2000 | US6144028 Scanning probe microscope assembly and method for making confocal, spectrophotometric, Near-Field, and Scanning probe measurements and associated images |
| 10/31/2000 | US6140643 Method for identification of unknown substances |
| 10/31/2000 | US6138503 Scanning probe microscope system including removable probe sensor assembly |
| 10/26/2000 | WO2000063736A2 Optical microscopy and its use in the study of cells |
| 10/25/2000 | CN2403016Y High precision five-D trimming sample holder |
| 10/24/2000 | US6137115 Film inspecting apparatus |
| 10/24/2000 | US6134955 Magnetic modulation of force sensor for AC detection in an atomic force microscope |
| 10/18/2000 | EP1045380A2 Near field optical recording/reproducing device |
| 10/17/2000 | US6131435 Method of estimating remaining life of a power transmission belt |
| 10/12/2000 | WO2000060632A2 Electrostatically focused addressable field emission arraychips (afea's) for high-speed maskless digital e-beam direct write lithography and scanning electron microscopy |
| 10/10/2000 | US6130434 Dissolution stage for an environmental scanning electron microscope |
| 10/10/2000 | US6130428 Laser fault correction of semiconductor devices |
| 10/10/2000 | US6130427 Scanning probe microscope with multimode head |
| 10/05/2000 | WO2000058323A1 Metallocene compounds with siloxazol ligands |
| 10/03/2000 | US6127681 Scanning tunnel microscope |
| 09/27/2000 | EP1039522A1 Process for producing insulating film |
| 09/26/2000 | US6124142 Method for analyzing minute foreign substance elements |
| 09/21/2000 | WO2000055597A1 Optical micro cantilever, method of manufacture thereof, and micro cantilever holder |
| 09/19/2000 | US6122563 Method of sorting a group of integrated circuit devices for those devices requiring special testing |
| 09/19/2000 | US6122562 Method and apparatus for selectively marking a semiconductor wafer |
| 09/19/2000 | US6121060 Method of measuring a concentration profile |
| 09/14/2000 | WO2000054035A1 Method for identification of unknown substances |
| 09/13/2000 | EP1034557A1 Radiofrequency gaseous detection device (rf-gdd) |
| 09/13/2000 | EP1034449A1 Temperature control for microscopy |
| 09/13/2000 | EP1034377A1 Differential pumping via core of annular supersonic jet |
| 09/12/2000 | US6118123 Electron probe microanalyzer |
| 09/05/2000 | US6114695 Scanning electron microscope and method for dimension measuring by using the same |
| 08/31/2000 | DE10000362A1 Detecting structured substrates defects involves scanning charged particle beam over substrate with optical column stationary w.r.t. surface, comparing detected images with reference |
| 08/23/2000 | EP1029340A1 Apparatus and method for secondary electron emission microscope |
| 08/22/2000 | US6107637 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus |
| 08/22/2000 | US6106471 Procedure for an examination of objects by the means of ultrasound waves |
| 08/17/2000 | WO2000047978A1 Deconvolving far-field images using scanned probe data |
| 08/09/2000 | EP1025416A1 Method and apparatus for obtaining improved vertical metrology measurements |
| 08/08/2000 | US6101164 High density recording by a conductive probe contact with phase change recording layer |
| 08/08/2000 | US6100705 Method and structure for viewing static signal levels on integrated circuits using electron beam deflection device |
| 08/08/2000 | US6100534 Microscopic area scanning apparatus |
| 08/03/2000 | WO2000044938A1 Method for measuring intramolecular forces by atomic force microscopy |
| 08/01/2000 | US6097197 Scanning probe microscope |
| 08/01/2000 | US6094972 Sampling scanning probe microscope and sampling method thereof |
| 07/27/2000 | DE19958789A1 Electron beam tester for semiconductor, produces image of semiconductor from secondary electron emitted from semiconductor |
| 07/26/2000 | EP0813675B1 Magnetic modulation of force sensor for ac detection in an atomic force microscope |
| 07/13/2000 | DE10000365A1 Methods for semiconductor testing using low voltage particle beam by locking up second surface locks and first surface and comparing registered image with reference in order to identify faults in checked substrate |
| 07/11/2000 | US6087659 Apparatus and method for secondary electron emission microscope |
| 07/11/2000 | US6085580 Differential force microscope |
| 07/06/2000 | WO2000039569A1 Nanotomography |
| 07/06/2000 | DE19860010A1 Surface cleaning method for low temperature microscopy and spectroscopy uses glow discharge of argon gas |