| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 08/02/2001 | DE10003127A1 Verfahren zur Ermittlung geometrisch optischer Abbildungsfehler Method for determining geometric optical aberrations |
| 07/31/2001 | US6269067 Method of and apparatus for recording/reproducing information signal recording/reproducing head device memory and head element and manufacture thereof |
| 07/26/2001 | WO2001053870A1 Method and device for analysing molecular reaction products in biological cells |
| 07/26/2001 | DE10001239A1 Device for measuring structures on substrate has non-optical measurement device on bearer element, whereby normal air pressure conditions exist between measurement device and substrate |
| 07/25/2001 | EP1076803A4 Apparatus and method for measuring intermolecular interactions by atomic force microscopy |
| 07/25/2001 | CN1305225A Device inspection apparatus and inspection method |
| 07/24/2001 | US6265722 Organic field ionization source |
| 07/24/2001 | US6265718 Scanning probe microscope with scan correction |
| 07/24/2001 | US6265711 Scanning probe microscope assembly and method for making spectrophotometric near-field optical and scanning measurements |
| 07/19/2001 | WO2001052301A1 Electron-optical corrector for eliminating third-order aberrations |
| 07/19/2001 | US20010008272 Measuring instrument and method for measuring features on a substrate |
| 07/19/2001 | DE19961906A1 Digital scanning measurement unit, e.g. scanning tunnel microscope; has differential element, analogue to digital converter and computer to form absolute image signal values from difference signals |
| 07/19/2001 | DE10001277A1 Elektronenoptischer Korrektor zur Beseitigung der Bildfehler dritter Ordnung Electron optical corrector to eliminate the aberrations of the third order |
| 07/18/2001 | EP1116932A2 Measuring apparatus and method for measuring structures on a substrat |
| 07/17/2001 | US6262962 Method of and apparatus for recording/reproducing information signal, recording/reproducing head device, memory medium, and head element and manufacture thereof |
| 07/17/2001 | US6260997 Method and apparatus for high spatial resolution spectroscopic microscopy |
| 07/10/2001 | US6259960 Part-inspecting system |
| 07/10/2001 | US6259520 Integrated circuit defect review and classification process |
| 07/10/2001 | US6259096 Guanine Cytosine (GC)-rich DNA/PNA microbolometer |
| 07/10/2001 | US6259093 Surface analyzing apparatus |
| 07/05/2001 | US20010006213 "Specimen-carrier accessory device for the stereoscopic analysis by scanning electron microscope" |
| 07/04/2001 | EP1113482A1 High energy electron diffraction apparatus |
| 07/03/2001 | US6255127 Analyzing method and apparatus for minute foreign substances, and manufacturing methods for manufacturing semiconductor device and liquid crystal display device using the same |
| 06/28/2001 | WO2001046674A1 Apparatus for evaluating electrical characteristics |
| 06/27/2001 | EP1111650A2 A specimen-carrier accessory device for the stereoscopic analysis by scanning electron microscope |
| 06/27/2001 | EP1110232A1 Automated set up of an energy filtering transmission electron microscope |
| 06/26/2001 | US6252412 Method of detecting defects in patterned substrates |
| 06/19/2001 | US6249747 Investigation and/or manipulation device |
| 06/19/2001 | US6249503 Method of and apparatus for recording/reproducing an information signal, recording/reproducing head device, memory medium, and head element |
| 06/14/2001 | WO2001042156A1 Low-reflection film and solar cell panel |
| 06/14/2001 | WO2001042155A1 Low-reflection glass article |
| 06/13/2001 | EP1105914A1 Particle-optical apparatus including a particle source that can be switched between high brightness and large beam current |
| 06/13/2001 | EP1105913A1 Electron microscope |
| 06/13/2001 | EP0925599B1 Energy filter, transmission electron microscope and associated method for filtering energy |
| 06/12/2001 | US6245311 Method for heat treatment of silicon wafer and silicon wafer |
| 06/12/2001 | US6245204 Vibrating tip conducting probe microscope |
| 06/12/2001 | US6244103 Interpolated height determination in an atomic force microscope |
| 06/07/2001 | WO2001041180A1 Detector for a scanning electron microscope with variable pressure and a scanning electron microscope comprising a detector of this type |
| 06/07/2001 | US20010002697 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 06/06/2001 | CN1298203A Mask detecting apparatus and method |
| 06/05/2001 | US6242737 Microscopic system equipt with an electron microscope and a scanning probe microscope |
| 06/05/2001 | US6242736 Scanning probe microscope |
| 06/05/2001 | US6242734 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/31/2001 | DE10059016A1 Method for testing for holes in semiconductor component using charged particle beam |
| 05/30/2001 | EP1103781A1 CMM spiral V-groove shape measuring ( thread, screw hole, worm gear ) with rotary table and two flank contact |
| 05/30/2001 | CN1297464A Gas-barrier films |
| 05/29/2001 | US6239430 Particle beam apparatus with energy filter |
| 05/29/2001 | US6239426 Scanning probe and scanning probe microscope |
| 05/29/2001 | US6238830 Active control of temperature in scanning probe lithography and maskless lithograpy |
| 05/29/2001 | US6238522 Method and apparatus for measuring sheet thickness in a paper-making machine |
| 05/23/2001 | EP1102304A2 Particle-optical apparatus including a low-temperature specimen holder |
| 05/23/2001 | EP1102031A2 A pattern dimension measuring method and apparatus |
| 05/22/2001 | US6236053 Charged particle detector |
| 05/17/2001 | WO2001035083A1 Method for inspecting electrode surface quality |
| 05/15/2001 | US6232600 Analysis of semiconductor surfaces by secondary ion mass spectrometry |
| 05/15/2001 | US6232597 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/10/2001 | WO2001033603A1 Electron beam apparatus |
| 05/10/2001 | WO2001033232A2 Precision stage |
| 05/09/2001 | EP1097464A2 Integrated microcolumn and scanning probe microscope arrays |
| 05/08/2001 | US6229138 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 05/03/2001 | WO2001031287A1 Method and apparatus for molecular analysis of buried layers |
| 05/01/2001 | US6225626 Through-the-substrate investigation of flip chip IC's |
| 04/19/2001 | WO2001027967A1 Method and apparatus for a coaxial optical microscope with focused ion beam |
| 04/19/2001 | WO2001027588A1 Scanning tunneling microscope light emitting/condensing device |
| 04/19/2001 | US20010000279 Method and system for increasing the accuracy of a probe-based instrument measuring a heated sample |
| 04/17/2001 | US6217843 Heating metal compound with water in vacuum |
| 04/10/2001 | US6215137 Micromechanical sensor for scanning thermal imaging microscope and method of making the same |
| 04/10/2001 | US6215127 Method of using critical dimension mapping to qualify a new integrated circuit fabrication tool set |
| 04/10/2001 | US6215121 Three-dimensional scanning probe microscope |
| 04/05/2001 | WO2001024218A1 Electron image detector coupled by optical fibers with absorbing outer cladding to reduce blurring |
| 04/04/2001 | EP1089066A1 Optical micro cantilever, method of manufacture thereof, and micro cantilever holder |
| 04/03/2001 | US6212292 Creating an image of an object with an optical microscope |
| 04/03/2001 | US6211686 Evaluation apparatus and fabrication system for semiconductor |
| 04/03/2001 | US6211532 Microprobe chip for detecting evanescent waves probe provided with the microprobe chip and evanescent wave detector, nearfield scanning optical microscope, and information regenerator provided with the microprobe chip |
| 04/03/2001 | US6211517 Electron beam fault detection of semiconductor devices |
| 04/03/2001 | US6210982 Method for improving spatial resolution and accuracy in scanning probe microscopy |
| 04/03/2001 | US6210593 Etching method and etching apparatus |
| 03/28/2001 | EP1086981A1 Gas-barrier films |
| 03/27/2001 | US6208154 Method of determining the doping concentration across a surface of a semiconductor material |
| 03/27/2001 | US6207575 Local interconnect etch characterization using AFM |
| 03/21/2001 | EP1085294A1 System for inspecting and/or processing a sample |
| 03/20/2001 | US6204507 Device for testing flat materials |
| 03/15/2001 | WO2001018846A2 High dynamic range mass spectrometer |
| 03/15/2001 | WO2001018843A1 Scanning electron beam microscope having an electrode for controlling charge build up during scanning of a sample |
| 03/13/2001 | US6201227 Scanning probe microscope |
| 03/08/2001 | WO2000067290A3 Integrated microcolumn and scanning probe microscope arrays |
| 03/07/2001 | EP1081742A2 Charged particle beam evaluation method |
| 03/07/2001 | EP1081508A2 Method and apparatus for recording and reading out images |
| 03/07/2001 | EP1080481A1 Dissolution stage for an environmental scanning electron microscope |
| 03/06/2001 | US6198097 Photocharge microscope |
| 03/06/2001 | US6197455 Lithographic mask repair using a scanning tunneling microscope |
| 03/01/2001 | DE19935570A1 Mikromanipulator Micromanipulator |
| 02/28/2001 | EP1079235A1 Method and system for testing an electrical component |
| 02/27/2001 | US6194729 Particle beam apparatus |
| 02/27/2001 | US6194711 Scanning near-field optical microscope |
| 02/27/2001 | US6194148 Method for detecting a hybridized nucleic acid molecule |
| 02/21/2001 | EP1076803A1 Apparatus and method for measuring intermolecular interactions by atomic force microscopy |
| 02/20/2001 | US6191423 Correction device for correcting the spherical aberration in particle-optical apparatus |
| 02/15/2001 | WO2001011656A1 Calibration of a scanning electron microscope |
| 02/13/2001 | US6188068 Methods of examining a specimen and of preparing a specimen for transmission microscopic examination |