| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 12/12/2001 | EP1161669A1 Deconvolving far-field images using scanned probe data |
| 12/11/2001 | US6329826 Method and apparatus for inspecting integrated circuit pattern |
| 12/11/2001 | US6329659 Correction device for correcting the lens defects in particle-optical apparatus |
| 12/06/2001 | WO2001091993A1 Method for applying a layer containing at least polymeric material |
| 12/06/2001 | US20010048076 Surface analyzing apparatus |
| 12/06/2001 | US20010048068 Probe opening forming apparatus and near-field optical microscope using the same |
| 12/05/2001 | EP1160611A2 Probe opening forming apparatus and near-field optical microscope using the same |
| 12/04/2001 | US6326798 Electric beam tester and image processing apparatus |
| 12/04/2001 | US6326635 Minimization of electron fogging in electron beam lithography |
| 11/29/2001 | WO2001090761A2 Methods of sampling specimens for microanalysis |
| 11/29/2001 | US20010045511 Method for sample separation and lift-out |
| 11/28/2001 | EP1158564A2 An electron spin analyzer |
| 11/27/2001 | US6323498 Charged particle beam irradiation apparatus and irradiation method using the apparatus |
| 11/27/2001 | US6322935 Method and apparatus for repairing an alternating phase shift mask |
| 11/22/2001 | WO2001088514A1 Apparatus for inspection of semiconductor wafers and masks using a low energy electron micoscope with two illuminating beams |
| 11/22/2001 | WO2001061725B1 Emission electron microscope |
| 11/22/2001 | US20010044156 Forming specimen from semiconductor wafer, analyzing raised regions via atom probe |
| 11/22/2001 | US20010043545 Method of recording/reproducing an information signal |
| 11/21/2001 | CN1075087C Aromatic polyamide resin moulding process for producing the same, and magnetic recording media produced therewith |
| 11/20/2001 | US6320609 System using a polar coordinate stage and continuous image rotation to compensate for stage rotation |
| 11/15/2001 | WO2001018846A3 High dynamic range mass spectrometer |
| 11/15/2001 | US20010041258 Standard for a nanotopography unit, and a method for producing the standard |
| 11/14/2001 | EP1153883A2 Standard for a nanotopography apparatus and method for the production thereof |
| 11/14/2001 | CN2459650Y Apparatus for direct viewing aqueous biological sample in environment scanning electric mirror |
| 11/14/2001 | CN1322004A Electronic spin analyzer |
| 11/08/2001 | WO2001084592A1 Multi beam charged particle device |
| 11/08/2001 | US20010038954 Analyzing defect; supplying, controlling actinic radiation |
| 11/08/2001 | US20010038072 Image deconvolution techniques for probe scanning apparatus |
| 11/07/2001 | EP1151464A1 Method and apparatus for a coaxial optical microscope with focused ion beam |
| 11/06/2001 | US6313461 Scanning-aperture electron microscope for magnetic imaging |
| 11/01/2001 | WO2001082327A2 Collection of secondary electrons through the objective lens of a scanning electron microscope |
| 11/01/2001 | WO2001081863A1 Electron beam length measuring instrument and length measuring method |
| 11/01/2001 | WO2001081857A2 Resonant probe driving arrangement and scanning probe microscope |
| 11/01/2001 | US20010035499 Organic field ionization source |
| 11/01/2001 | CA2406407A1 Resonant probe driving arrangement and scanning probe microscope |
| 10/31/2001 | EP1150327A1 Multi beam charged particle device |
| 10/30/2001 | US6310342 Optical microscope stage for scanning probe microscope |
| 10/30/2001 | US6308557 Device scanning in a raster mode, with compensation of disturbing effects of mechanical vibrations on the scanning process |
| 10/18/2001 | US20010030294 Method and an apparatus of an inspection system using an electron beam |
| 10/18/2001 | US20010030286 Scanning probe microscope |
| 10/17/2001 | EP1144989A1 Nanotomography |
| 10/16/2001 | US6303930 Coordinating optical type observing apparatus and laser marking method |
| 10/11/2001 | WO2001075929A1 Scanning electron microscope |
| 10/11/2001 | WO2001075393A1 Thickness measurement using afm for next generation lithography |
| 10/11/2001 | US20010029082 Charged-particle-beam microlithography apparatus including selectable systems for determining alignment-mark position, and device-fabrication methods utilizing same |
| 10/11/2001 | DE10113966A1 Sondenelektronenmikroskop Electron probe |
| 10/09/2001 | US6300636 Ion source head |
| 10/09/2001 | US6300630 Annular differential seal for electron beam apparatus using isolation valve and additional differential pumping |
| 10/04/2001 | WO2001073413A1 Methods for the automated testing of reticle feature geometries |
| 10/04/2001 | US20010025924 Ultraviolet laser-generating device and defect inspection apparatus and method therefor |
| 10/04/2001 | US20010025921 Digital measuring scanner |
| 10/04/2001 | EP1139168A2 Method of electronic processing of exposed photographic material |
| 10/02/2001 | US6297502 Method and apparatus for force control of a scanning probe |
| 09/27/2001 | WO2001033232A3 Precision stage |
| 09/26/2001 | EP1029340A4 Apparatus and method for secondary electron emission microscope |
| 09/26/2001 | EP0754289B1 Measurement of AFM cantilever deflection with high frequency radiation and dopant profiler |
| 09/25/2001 | US6294774 Scanning probe microscope having graphical information |
| 09/20/2001 | WO2001069298A1 Improved lens for microscopic inspection |
| 09/20/2001 | US20010022345 Method of inspecting holes using charged-particle beam |
| 09/13/2001 | WO2001067483A1 Scanning electron microscope |
| 09/13/2001 | WO2001066460A1 Nanotweezers and nanomanipulator |
| 09/13/2001 | US20010021166 Memory medium |
| 09/13/2001 | US20010021159 Method of and apparatus for recording/reproducing an information signal, recording/reproducing head device, memory medium, and head element |
| 09/13/2001 | US20010021020 Inspection method, apparatus and system for circuit pattern |
| 09/13/2001 | US20010021019 Inspection method, apparatus and system for circuit pattern |
| 09/11/2001 | US6288393 Automated method of circuit analysis |
| 09/11/2001 | US6288391 Method for locking probe of scanning probe microscope |
| 09/11/2001 | US6287880 Method and apparatus for high resolution profiling in semiconductor structures |
| 09/06/2001 | US20010019532 Method of and apparatus for recording/reproducing an information signal, recording/reproducing head device, memory medium, and head element |
| 09/06/2001 | US20010019411 Inspection method, apparatus and system for circuit pattern |
| 09/06/2001 | US20010019109 Scanning electron microscope |
| 09/06/2001 | US20010019108 Analysis of semiconductor surfaces by secondary ion mass spectrometry |
| 09/04/2001 | US6284552 Method and apparatus for evaluating surface roughness of an epitaxial growth layer, method and apparatus for measuring reflectance of an epitaxial growth layer, and manufacturing method of semiconductor device |
| 08/30/2001 | WO2001063555A2 Image deconvolution techniques for probe scanning apparatus |
| 08/30/2001 | WO2001063266A2 System for imaging a cross-section of a substrate |
| 08/30/2001 | WO2001063204A1 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device |
| 08/30/2001 | US20010017878 Method of inspecting pattern and inspecting instrument |
| 08/28/2001 | US6281496 Observing/forming method with focused ion beam and apparatus therefor |
| 08/28/2001 | US6281491 Scanning probe microscope assembly and method for making confocal, spectrophotometric, near-field, and scanning probe measurements and associated images |
| 08/23/2001 | WO2001061725A1 Emission electron microscope |
| 08/23/2001 | WO2001060456A1 Multi-beam multi-column electron beam inspection system |
| 08/23/2001 | US20010015805 Inspection method, apparatus and system for circuit pattern |
| 08/23/2001 | US20010015803 Integrated circuit defect review and classification process |
| 08/23/2001 | US20010015097 Scanning system having a deflectable probe tip |
| 08/16/2001 | EP0826145B1 Data acquisition and control apparatus for scanning probe systems |
| 08/15/2001 | CN2443365Y Sample table capable of rising temp for scanning probe microscope |
| 08/15/2001 | CN2443364Y Heat sink type low temp biosample table for scanning probe microscope |
| 08/14/2001 | US6274220 Resistant to scraping and uniform surface protrusions |
| 08/09/2001 | WO2001057878A1 Instrument and method for combined surface topography and spectroscopic analysis |
| 08/09/2001 | US20010011895 Method of determining the doping concentration across a surface of a semiconductor material |
| 08/09/2001 | US20010011706 Inspection method, apparatus and system for circuit pattern |
| 08/08/2001 | EP0866944B1 Device for testing flat materials |
| 08/07/2001 | US6272083 Method of and apparatus for recording/reproducing information signal, recording/reproducing head device. Memory medium, and head element and manufacture thereof |
| 08/07/2001 | US6271519 Analysis of semiconductor surfaces by secondary ion mass spectrometry |
| 08/02/2001 | WO2001056057A1 Method for detecting geometrical-optical aberrations |
| 08/02/2001 | US20010010676 Memory medium |
| 08/02/2001 | US20010010668 Nanometer scale data storage device and associated positioning system |
| 08/02/2001 | US20010010357 Scanning electron microscope |
| 08/02/2001 | US20010010356 Through-the-substrate investigation of flip-chip IC's |
| 08/02/2001 | DE10003693A1 Abtastsystem mit auslenkbarer Tastspitze Scanning probe tip deflectable |