Patents
Sitemap › G01 - Measuring; Testing › G01Q - Scanning-probe techniques or apparatus; Applications of scanning-probe techniques, e.g. scanning-probe microscopy [spm] › G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices
Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691)
11/2003
11/25/2003US6653631 Apparatus and method for defect detection using charged particle beam
11/25/2003US6653630 Tailoring domain engineered structures in ferroelectric materials
11/20/2003US20030214285 Property evaluating system and method for magnetic material
11/20/2003US20030213909 Method of inspecting pattern and inspecting instrument
11/20/2003US20030213893 Electron beam apparatus and device manufacturing method using same
11/13/2003WO2003094174A1 Continuous temporal evolution method and implementation thereof in order to optimise the frequency response of a force microscope
11/13/2003WO2003093807A1 Near-field transform spectroscopy
11/13/2003US20030211735 Si seasoning to reduce particles, extend clean frequency, block mobile ions and increase chamber throughput
11/11/2003US6646733 Method for inspecting electrode surface quality
11/11/2003US6646267 Method for eliminating first, second and third-order axial image deformations during correction of the third-order spherical aberration in electron optical systems
11/11/2003US6646263 Method of X-ray analysis in a particle-optical apparatus
11/11/2003US6646262 Scanning electron microscope
11/11/2003US6646261 SEM provided with a secondary electron detector having a central electrode
11/06/2003US20030208340 Remote semiconductor microscopy
11/06/2003US20030207475 Electron beam apparatus and method of manufacturing semiconductor device using the apparatus
11/06/2003US20030207184 Method and apparatus for repairing an alternating phase shift mask
11/06/2003US20030206027 Method of inspecting circuit pattern and inspecting instrument
11/06/2003US20030205669 Apparatus and method for secondary electron emission microscope
11/06/2003US20030205668 Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus
11/05/2003EP1359601A1 Beam alignment in a scanning electron microscope
11/04/2003US6642726 Apparatus and methods for reliable and efficient detection of voltage contrast defects
11/04/2003US6642529 Methods for the automated testing of reticle feature geometries
11/04/2003US6642520 Scanning electron microscope
11/04/2003US6642512 Focused ion beam apparatus
10/2003
10/30/2003WO2003090262A1 Apparatus and method for semiconductor wafer test yield enhancement
10/30/2003US20030203502 Near-field transform spectroscopy
10/30/2003US20030201392 Beam alignment in a lower column of a scanning electron microscope or the like
10/30/2003US20030201391 Method of inspecting a circuit pattern and inspecting instrument
10/28/2003US6639224 Specimen-carrier accessory device for the stereoscopic analysis by a scanning electron microscope
10/28/2003US6639218 Electron spin analyzer
10/23/2003US20030197873 Shape measurement method and apparatus
10/23/2003US20030197456 Devices containing a carbon nanotube
10/23/2003US20030197130 Convergent charged particle beam apparatus and inspection method using same
10/21/2003US6635873 Scanning electron microscope with voltage applied to the sample
10/21/2003US6635871 Positron lifetime spectrometer using a DC positron beam
10/21/2003US6635870 Method and apparatus for molecular analysis of buried layers
10/21/2003US6635869 Step function determination of Auger peak intensity
10/16/2003WO2003006952A3 Method and apparatus for manipulating a sample
10/16/2003US20030193666 Device for measuring surface defects
10/16/2003US20030193660 Measuring module
10/16/2003US20030193026 Electron microscope, method for operating the same, and computer-readable medium
10/16/2003US20030193025 Electron microscope, method for operating the same, and computer-readable medium
10/16/2003US20030193024 Electron microscope charge-up prevention method and electron microscope
10/16/2003US20030193023 Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods
10/15/2003EP1353356A2 Electron microscope charge-up prevention method and electron microscope
10/15/2003EP1353209A2 Scanning device, preferably for detecting fluorescent light
10/15/2003EP1352411A2 Adjustable conductance limiting aperture for ion implanters
10/15/2003EP1002216B1 Microscope for compliance measurement
10/15/2003CN1449359A Single molecule array on silicon substrate for quantum computer
10/14/2003US6633034 Method and apparatus for imaging a specimen using low profile electron detector for charged particle beam imaging apparatus including electrostatic mirrors
10/09/2003WO2003019238A3 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes
10/09/2003US20030189351 Nanotweezers and nanomanipulator
10/09/2003US20030189350 Nanotweezers and nanomanipulator
10/09/2003US20030189172 Scanning electron microscope and sample observation method using the same
10/08/2003EP1351256A2 Scanning probe system with spring probe
10/08/2003EP1350259A1 Sem provided with a secondary electron detector having a central electrode
10/08/2003EP1350107A2 Method and device for characterising and/or for detecting a bonding complex
10/07/2003US6631227 Information recording and reproducing apparatus
10/07/2003US6630668 Remote control of a scanning electron microscope aperture and gun alignment
10/07/2003US6630667 Compact, high collection efficiency scintillator for secondary electron detection
10/07/2003US6630666 Positron trap beam source for positron microbeam production
10/02/2003US20030184332 Probe driving method, and probe apparatus
10/02/2003US20030183764 Method for charging a structure comprising an insulating body
10/02/2003US20030183763 Ribbon electron beam for inspection system
10/02/2003US20030183761 Scanning probe system with spring probe and actuation/sensing structure
10/02/2003US20030182993 Scanning probe system with spring probe
09/2003
09/30/2003US6628053 Carbon nanotube device, manufacturing method of carbon nanotube device, and electron emitting device
09/30/2003US6627889 Apparatus and method for observing sample using electron beam
09/30/2003US6627888 Scanning electron microscope
09/30/2003US6627887 System and method for constructing a profile of a structure in an integrated circuit
09/30/2003US6627886 Secondary electron spectroscopy method and system
09/30/2003US6627884 Simultaneous flooding and inspection for charge control in an electron beam inspection machine
09/25/2003US20030179007 Method of inspecting pattern and inspecting instrument
09/25/2003US20030178582 System and method for electron beam irradiation
09/24/2003EP1347490A2 Diaphragm accessory unit for scanning electron microscope
09/24/2003EP1345696A1 Method and device for manipulating small quantities of liquid
09/23/2003US6624913 Placing element in electromagnetic field adjacent sample capacitor, scanning through gap in capacitor with pulsed, focused beam of radiation, measuring photoelectron response, recording signals from radio frequency photoconductive device
09/23/2003US6624894 Scanning interferometry with reference signal
09/18/2003WO2003076954A2 High resolution scanning magnetic microscope operable at high temperature
09/18/2003WO2003041109A3 Spot grid array electron imagine system
09/18/2003WO2003016781A3 Surface plasmon enhanced illumination system
09/16/2003US6621575 Method and device for analyzing molecular reaction products in biological cells
09/16/2003US6621082 Automatic focusing system for scanning electron microscope equipped with laser defect detection function
09/11/2003US20030169060 Method and apparatus for inspecting integrated circuit pattern
09/11/2003US20030168606 Multi beam charged particle device
09/11/2003US20030168596 Microstructured pattern inspection method
09/11/2003US20030168595 Environmental scanning electron microscope
09/11/2003US20030168594 Integrated measuring instrument
09/10/2003EP1342049A1 Scanning probe with digitised pulsed-force mode operation and real-time evaluation
09/09/2003US6617761 Scanning unit and scanning microscope having the same
09/09/2003US6617597 Circuits and methods for electron-beam control
09/09/2003US6617595 Multi-lens type electrostatic lens, electron beam exposure apparatus and charged beam applied apparatus using the lens, and device manufacturing method using these apparatuses
09/09/2003US6617583 Each particle size distribution of semiconductor nanocrystal has a spectral emission distinguishable from the other particle size distributions of semiconductor nanocrystal bound to the support.
09/09/2003US6617579 Scanning electronic beam apparatus
09/09/2003US6617569 Probe opening forming apparatus and near-field optical microscope using the same
09/09/2003US6616784 Method for fabricating transmission electron microscope
09/04/2003US20030164460 Patterned wafer inspection method and apparatus therefor
09/03/2003EP1341183A1 Optically readable molecular memory obtained using carbon nanotubes, and method for storing information in said molecular memory
09/02/2003US6614227 Scanning microwave microscope capable of realizing high resolution and microwave resonator
09/02/2003US6614029 Electrostatic manipulating apparatus
1 ... 14 15 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 32 33 34 ... 47