| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 02/12/2004 | US20040026618 Submerged sample observation apparatus and method |
| 02/12/2004 | US20040026616 Atmospheric pressure, glow discharge, optical emission source for the direct sampling of liquid media |
| 02/12/2004 | US20040025579 Submerged sample observation apparatus and method |
| 02/12/2004 | US20040025578 Software synchronization of multiple scanning probes |
| 02/10/2004 | US6690010 Chemical analysis of defects using electron appearance spectroscopy |
| 02/05/2004 | US20040023519 Single molecule array on silicon substrate for quantum computer |
| 02/05/2004 | US20040021935 Thermal lens microscope device |
| 02/05/2004 | US20040021075 Method of measuring sizes in scan microscopes |
| 02/05/2004 | US20040020279 Method and apparatus for the actuation of the cantilever of a probe-based instrument |
| 02/05/2004 | DE10232689A1 Mit Strahlen geladener Teilchen arbeitende Anwendungen With charged particle beams working applications |
| 02/03/2004 | US6686590 Low-vacuum scanning electron microscope |
| 02/03/2004 | US6684676 Apparatus for forming optical aperture |
| 01/29/2004 | WO2004010475A2 Method of reducing internal stress in materials |
| 01/29/2004 | US20040016882 Scanning electron microscope |
| 01/29/2004 | DE10230929A1 Verfahren zum elektronenmikroskopischen Beobachten einer Halbleiteranordnung und Vorrichtung hierfür A method for electron microscopic observation of a semiconductor device and apparatus therefor |
| 01/28/2004 | EP1385192A2 Device working with beams of charged particles |
| 01/27/2004 | US6683308 Method and apparatus for measuring thickness of thin film |
| 01/27/2004 | US6683306 Array foreshortening measurement using a critical dimension scanning electron microscope |
| 01/22/2004 | WO2004007692A2 Methods and compositions for analyzing polymers using chimeric tags |
| 01/22/2004 | WO2003067234A3 Control of film growth using auger electron spectroscopy for measuring film thickness and chemical composition |
| 01/22/2004 | US20040011959 Scanning electron microscope |
| 01/21/2004 | EP1381851A2 High spatial resolution x-ray microanalysis |
| 01/20/2004 | US6680474 Semiconductor calibration wafer with no charge effect |
| 01/15/2004 | WO2004006302A2 Software synchronization of multiple scanning probes |
| 01/15/2004 | WO2004005844A2 Scanning probe microscope |
| 01/15/2004 | CA2491404A1 Scanning probe microscope |
| 01/14/2004 | EP1381074A2 Method and apparatus for observing a semiconductor device using an electron microscope |
| 01/14/2004 | CN1468372A 热透镜显微镜装置 Thermal lens microscope |
| 01/13/2004 | US6677595 Specimen holder and spacer used in the same |
| 01/13/2004 | US6677587 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 01/13/2004 | US6677586 Methods and apparatus for electron beam inspection of samples |
| 01/13/2004 | US6677581 High energy electron diffraction apparatus |
| 01/13/2004 | US6677567 Scanning probe microscope with improved scan accuracy, scan speed, and optical vision |
| 01/13/2004 | US6676814 Substrate coated with an MgO layer |
| 01/08/2004 | US20040004773 Reducing chromatic aberration in images formed by emmission electrons |
| 01/08/2004 | DE10226801A1 Oberflächenmessvorrichtung und Verfahren zur mechanischen sowie berührungslosen-optischen Untersuchung von Objektoberflächen Surface measuring apparatus and methods for mechanical and non-contact optical investigation of object surfaces |
| 01/07/2004 | EP1377794A1 Improved scanning probe microscope |
| 01/07/2004 | CN1466707A Pinhole defect repair by resist blow |
| 01/06/2004 | US6674890 Defect inspection method and apparatus therefor |
| 01/06/2004 | US6674076 Humidified imaging with an environmental scanning electron microscope |
| 01/06/2004 | US6674074 Enhanced scanning probe microscope |
| 01/06/2004 | US6674057 Optical near-field microscope |
| 01/02/2004 | EP1376650A1 Scanning atom probe and analysis method using scanning atom probe |
| 01/02/2004 | EP1376649A1 Magnetic field applying sample observing system |
| 01/02/2004 | EP1376109A2 Material defect evaluation apparatus and method measuring positron lifetimes |
| 01/01/2004 | US20040000646 Array for achromatic imaging of a pulsed particle ensemble |
| 01/01/2004 | US20040000642 Apparatus and methods for secondary electron emission microscope with dual beam |
| 01/01/2004 | US20040000638 Undercut measurement using sem |
| 12/31/2003 | WO2003076954A3 High resolution scanning magnetic microscope operable at high temperature |
| 12/30/2003 | US6670624 Ion implanter in-situ mass spectrometer |
| 12/30/2003 | US6670615 Electron detection device |
| 12/30/2003 | US6670612 Undercut measurement using SEM |
| 12/30/2003 | US6670611 Electron microscope |
| 12/30/2003 | US6670610 System and method for directing a miller |
| 12/30/2003 | US6670602 Scanning device and scanning method |
| 12/30/2003 | US6669256 Nanotweezers and nanomanipulator |
| 12/30/2003 | US6669121 Holder support device |
| 12/30/2003 | US6668628 Scanning probe system with spring probe |
| 12/25/2003 | US20030237064 Characterization and verification for integrated circuit designs |
| 12/25/2003 | US20030234367 Electron beam control device |
| 12/25/2003 | US20030234359 Apparatus for scanning a crystalline sample and associated methods |
| 12/25/2003 | US20030234237 Method of, and apparatus for, producing near field optical head |
| 12/25/2003 | US20030233870 Multidimensional sensing system for atomic force microscopy |
| 12/24/2003 | WO2003106918A2 Device for measuring surfaces and method for the mechanical and contactless-optical analysis of object surfaces |
| 12/24/2003 | WO2003106620A2 Nucleic acid sequencing by signal stretching and data integration |
| 12/23/2003 | US6667483 Apparatus using charged particle beam |
| 12/23/2003 | US6667477 Emission electron microscope |
| 12/23/2003 | US6667476 Scanning electron microscope |
| 12/23/2003 | US6667475 Method and apparatus for cleaning an analytical instrument while operating the analytical instrument |
| 12/23/2003 | US6667099 Hollow fibers are used in separation technology, catalysis, micro-electronics, medical technology, material technology or in the clothing industry. |
| 12/23/2003 | US6666075 System and method of multi-dimensional force sensing for scanning probe microscopy |
| 12/18/2003 | US20030232346 Measuring the distance between labeled nucleotides, such as nucleotides labeled with bulky groups |
| 12/18/2003 | US20030230713 Raster electron microscope |
| 12/18/2003 | US20030230112 Glass substrate for magnetic disk and method for manufacturing |
| 12/16/2003 | US6664552 Method and apparatus for specimen fabrication |
| 12/11/2003 | WO2003102549A1 Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same |
| 12/11/2003 | WO2003101904A1 Hydrophilic, anti-fogging, and anti-staining thin film and method for preparation thereof |
| 12/11/2003 | WO2003101278A2 Device and method of use for detection and characterization of pathogens and biological materials |
| 12/11/2003 | US20030229881 Adjustment of masks for integrated circuit fabrication |
| 12/11/2003 | US20030229880 Test masks for lithographic and etch processes |
| 12/11/2003 | US20030229868 Electronic design for integrated circuits based process related variations |
| 12/11/2003 | US20030229412 Electronic design for integrated circuits based on process related variations |
| 12/11/2003 | US20030229410 Integrated circuit metrology |
| 12/11/2003 | CA2487792A1 Device and method of use for detection and characterization of pathogens and biological materials |
| 12/09/2003 | US6661009 Apparatus for tilting a beam system |
| 12/09/2003 | US6661008 Electron-optical system and inspection method using the same |
| 12/09/2003 | US6661006 Scanning probe instrument |
| 12/09/2003 | US6661004 Image deconvolution techniques for probe scanning apparatus |
| 12/09/2003 | US6658922 Optical equipment assemblies and techniques indexed to a common spindle |
| 12/04/2003 | US20030222221 Apparatus for tilting a beam system |
| 12/03/2003 | EP1367629A2 Apparatus for tilting a beam system |
| 12/03/2003 | EP1366347A1 Ultrasensitive non-isotopic water-soluble nanocrystals |
| 12/02/2003 | US6657221 Image classification method, observation method, and apparatus thereof with different stage moving velocities |
| 12/02/2003 | US6657192 Method of determining degree of charge-up induced by plasma used for manufacturing semiconductor device and apparatus therefor |
| 11/27/2003 | US20030218135 Electron beam apparatus |
| 11/27/2003 | US20030218132 Scanning probe microscope |
| 11/25/2003 | US6654703 Method for estimating repair accuracy of a mask shop |
| 11/25/2003 | US6654114 Integrated circuit defect review and classification process |
| 11/25/2003 | US6653633 Charged particle beam apparatus |
| 11/25/2003 | US6653632 Scanning-type instrument utilizing charged-particle beam and method of controlling same |