| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 05/04/2004 | US6730906 Method and apparatus for testing a substrate |
| 04/29/2004 | WO2004036591A1 Model-based fusion of scanning probe microscopic images for detection and identification of molecular structures |
| 04/29/2004 | US20040079896 Method and structure for detection of electromechanical problems using variance statistics in an E-beam lithography device |
| 04/29/2004 | US20040079884 Converting scanning electron microscopes |
| 04/29/2004 | US20040079883 Electron beam irradiation apparatus, electron beam exposure apparatus, and defect detection method |
| 04/29/2004 | US20040079673 Electroconductive container of a nanotube product |
| 04/29/2004 | DE10296461T5 Vorrichtung und Verfahren zum Isolieren und Messen einer Bewegung in einer messtechnischen Vorrichtung Apparatus and method for isolating and measuring a movement in a metrological device |
| 04/27/2004 | US6727911 Method and apparatus for observing specimen image on scanning charged-particle beam instrument |
| 04/27/2004 | US6727500 System for imaging a cross-section of a substrate |
| 04/22/2004 | US20040075052 Material defect evaluation apparatus using positron and its evaluation method |
| 04/21/2004 | EP1411527A1 Carrier device and sample holder system for use under ultra high vacuum |
| 04/21/2004 | EP1411341A1 Cantilever array, method of manufacturing the array, and scanning probe microscope, sliding device of guide and rotating mechanism, sensor, homodyne laser interferometer, and laser doppler interferometer with specimen light excitation function, using the array, and cantilever |
| 04/20/2004 | US6724712 Nanometer scale data storage device and associated positioning system |
| 04/20/2004 | US6723997 Aberration corrector for instrument utilizing charged-particle beam |
| 04/20/2004 | US6723987 Method of inspecting holes using charged-particle beam |
| 04/15/2004 | US20040072366 Apparatus for accurate monitoring and dispensing micro-quantities of fluids; microfluidics |
| 04/15/2004 | US20040069956 Charged particle beam apparatus |
| 04/13/2004 | US6720728 Devices containing a carbon nanotube |
| 04/13/2004 | US6720564 Method and apparatus for fingerprint detection and analysis |
| 04/13/2004 | US6720556 Electron spectroscopy employing controlled surface charging |
| 04/08/2004 | WO2004007692A3 Methods and compositions for analyzing polymers using chimeric tags |
| 04/08/2004 | WO2003106620A3 Nucleic acid sequencing by signal stretching and data integration |
| 04/08/2004 | US20040065844 Electron diffraction system for use in production environment and for high pressure deposition techniques |
| 04/08/2004 | US20040065827 Method for the electron-microscopic observation of a semiconductor arrangement and apparatus therefor |
| 04/08/2004 | US20040065826 System for imaging a cross-section of a substrate |
| 04/08/2004 | US20040065825 Pattern width measuring apparatus, pattern width measuring method, and electron beam exposure apparatus |
| 04/08/2004 | US20040065819 Scanning unit and scanning microscope having the same |
| 04/07/2004 | EP1404902A1 High surface quality gan wafer and method of fabricating same |
| 04/06/2004 | US6717144 Scanning electron microscope system |
| 04/06/2004 | US6717143 Beam alignment in a lower column of a scanning electron microscope or the like |
| 04/06/2004 | US6717142 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 04/06/2004 | US6715346 Atomic force microscopy scanning methods |
| 04/06/2004 | US6715345 Coaxial probe with cantilever and scanning micro-wave microscope including the same |
| 04/01/2004 | WO2004027809A2 Charged particle beam system |
| 04/01/2004 | WO2004027808A2 Particle-optical device and detection means |
| 04/01/2004 | US20040061066 Magnetic field applying sample observing system |
| 04/01/2004 | US20040061052 Method of determining degree of charge-up induced by plasma used for manufacturing semiconductor device and apparatus therefor |
| 03/30/2004 | US6714892 Three dimensional reconstruction metrology |
| 03/30/2004 | US6713761 Scanning electron microscope |
| 03/30/2004 | US6713760 Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods |
| 03/30/2004 | US6713759 Apparatus and method for secondary electron emission microscope |
| 03/25/2004 | WO2003067632A3 Multi-detector microscopic inspection system |
| 03/25/2004 | WO2003046926A3 Tailoring domain engineered structures in ferroelectric materials |
| 03/25/2004 | WO2003009305A3 Measurement head for atomic force microscopy and other applications |
| 03/25/2004 | WO2002014862A8 Method and device for characterising and/or for detecting a bonding complex |
| 03/25/2004 | US20040056194 Method for manipulating microscopic particles and analyzing |
| 03/25/2004 | US20040056193 Applications operating with beams of charged particles |
| 03/24/2004 | EP1401007A1 An electron diffraction system for use in production environment and for high pressure deposition techniques |
| 03/24/2004 | EP1399747A1 Method for charging a structure comprising an insulating body |
| 03/24/2004 | CN1143376C Charging measuring device |
| 03/23/2004 | US6710341 Electron microscope equipped with X-ray spectrometer |
| 03/23/2004 | US6710340 Scanning electron microscope and method of detecting electrons therein |
| 03/23/2004 | US6710339 Scanning probe microscope |
| 03/23/2004 | US6710338 Focused ion beam system |
| 03/23/2004 | US6710337 Laser scanning microscope and shutter for an optical system |
| 03/18/2004 | WO2004023490A2 Fluid delivery for scanning probe microscopy |
| 03/18/2004 | WO2003106918A3 Device for measuring surfaces and method for the mechanical and contactless-optical analysis of object surfaces |
| 03/18/2004 | US20040053399 Optical evaluation of conjugated nucleotide sequence probes; diagnostic beacons for genetic analysis |
| 03/18/2004 | US20040053308 Probe immobilized substrate and method for manufacturing the same, and analytical method |
| 03/18/2004 | US20040051542 Scanning probe microscope |
| 03/18/2004 | US20040051041 Scanning electron microscope |
| 03/17/2004 | EP1398818A2 Charged particle beam apparatus and irradiation method |
| 03/17/2004 | EP1002228B1 Method for applying or removing material |
| 03/16/2004 | US6707041 Detector for a scanning electron microscope with variable pressure and scanning electron microscope with such detector |
| 03/16/2004 | US6706427 Management technique of friction coefficient based on surface roughness, substrate for information recording medium, information recording medium and manufacture method thereof |
| 03/11/2004 | US20040046125 Swinging objective retarding immersion lens electron optics focusing, deflection and signal collection system and method |
| 03/09/2004 | US6703850 Method of inspecting circuit pattern and inspecting instrument |
| 03/09/2004 | US6703623 Electron beam proximity exposure apparatus |
| 03/09/2004 | US6703615 Light receiving and emitting probe and light receiving and emitting probe apparatus |
| 03/09/2004 | US6703613 Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method |
| 03/09/2004 | US6702186 Assembly comprising a plurality of media probes for writing/reading high density magnetic data |
| 03/04/2004 | US20040041095 Methods and apparatus for electron beam inspection of samples |
| 03/04/2004 | US20040040930 Method for determining etching process conditions and controlling etching process |
| 03/04/2004 | DE10337255A1 Abtastverfahren für die Atomkraftmikroskopie Scanning for atomic force microscopy |
| 03/04/2004 | DE10296462T5 Vorrichtung und Verfahren zum Isolieren und Messen einer Bewegung in einer Messtechnischen Vorrichtung Apparatus and method for isolating and measuring a movement in a measuring device of Technology |
| 03/03/2004 | EP0966752B1 Correction device for correcting the lens defects in particle-optical apparatus |
| 03/02/2004 | US6700121 Methods of sampling specimens for microanalysis |
| 02/26/2004 | WO2004017355A1 Multi-column multi-beam inspection system |
| 02/26/2004 | WO2004017329A1 Sensor with cantilever and optical resonator |
| 02/26/2004 | WO2004017019A1 Method for locally highly resolved, mass-spectroscopic characterisation of surfaces using scanning probe technology |
| 02/26/2004 | US20040038310 Inventory control |
| 02/26/2004 | US20040036021 Scanning electron microscope |
| 02/26/2004 | DE10235456A1 Elektronenmikroskopiesystem Electron system |
| 02/26/2004 | CA2493212A1 Method for locally highly resolved, mass-spectroscopic characterization of surfaces using scanning probe technology |
| 02/24/2004 | US6697317 Recording medium, information reproducing apparatus, information recording apparatus, and information recording and reproducing apparatus |
| 02/24/2004 | US6696362 Method for using an in situ particle sensor for monitoring particle performance in plasma deposition processes |
| 02/24/2004 | US6694817 Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument |
| 02/19/2004 | WO2004015455A2 Improved method and system for scanning apertureless fluorescence microscope |
| 02/19/2004 | US20040031936 Fine stencil structure correction device |
| 02/19/2004 | US20040031921 Electron microscope |
| 02/19/2004 | US20040031315 Atomic force microscopy scanning methods |
| 02/18/2004 | EP1389793A2 Electron microscopy system |
| 02/18/2004 | CN1476533A Method for quantifying texture homogeneity of polycrystalline material |
| 02/17/2004 | US6693288 Charged particle beam irradiation apparatus and irradiation method using the apparatus |
| 02/17/2004 | US6693282 Particle-optical apparatus including a particle source that can be switched between high brightness and large beam current |
| 02/12/2004 | US20040028272 Pattern inspection method and apparatus using electron beam |
| 02/12/2004 | US20040028168 Method and device for checking and examining the inside surface of nuclear and thermonuclear assemblies |
| 02/12/2004 | US20040027889 Optically readable molecular memory obtained using carbon nanotubes, and method for storing information in said molecular memory |
| 02/12/2004 | US20040027688 Multi-detector microscopic inspection system |
| 02/12/2004 | US20040026662 Dye loaded zeolite material |