| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 07/20/2004 | US6765203 Pallet assembly for substrate inspection device and substrate inspection device |
| 07/20/2004 | US6765201 Ultraviolet laser-generating device and defect inspection apparatus and method therefor |
| 07/15/2004 | US20040137663 Method of reducing internal stress in materials |
| 07/15/2004 | US20040135183 Ferroelectric capacitor, process for production thereof and semiconductor device using the same |
| 07/15/2004 | US20040134265 Multi-dimensional force sensing for scanning probe microscopy using carbon nanotube tips and carbon nanotube oscillators |
| 07/15/2004 | US20040134264 Apparatus and method for isolating and measuring movement in a metrology apparatus |
| 07/13/2004 | US6763322 Method for enhancement in screening throughput |
| 07/13/2004 | US6762415 Vacuum chamber with recessed viewing tube and imaging device situated therein |
| 07/13/2004 | US6762402 Apparatus for recording and reading data and method of recording and reading data using contact resistance measurement thereof |
| 07/13/2004 | CA2332319C Dissolution stage for an environmental scanning electron microscope |
| 07/08/2004 | WO2004057303A2 Fully digital controller for cantilever-based instruments |
| 07/08/2004 | WO2004027808A3 Particle-optical device and detection means |
| 07/08/2004 | US20040129898 Electron beam writing equipment and electron beam writing method |
| 07/08/2004 | US20040129877 High contrast inspection and review of magnetic media and heads |
| 07/08/2004 | US20040129063 Method for performing nanoscale dynamics imaging by atomic force microscopy |
| 07/08/2004 | CA2510968A1 Fully digital controller for cantilever-based instruments |
| 07/07/2004 | EP1435640A2 Electron beam writing equipment and method |
| 07/07/2004 | CN1510696A Method for controlling electrostatic lens and ion implantation device |
| 07/06/2004 | US6759655 Inspection method, apparatus and system for circuit pattern |
| 07/06/2004 | US6759654 High contrast inspection and review of magnetic media and heads |
| 07/01/2004 | US20040126909 Method and apparatus for analyzing composition of defects |
| 07/01/2004 | US20040124356 Particle-optical device and detection means |
| 07/01/2004 | US20040123651 Scanning probe system with spring probe |
| 06/30/2004 | EP1433184A1 Device for fixing a measuring probe for a raster scanning probe microscope |
| 06/29/2004 | US6757645 Visual inspection and verification system |
| 06/29/2004 | US6756590 Shape measurement method and apparatus |
| 06/24/2004 | WO2004053928A2 Methods of measuring integrated circuit structure and preparation thereof |
| 06/24/2004 | WO2004053920A2 Humidified imaging with an environmental scanning electron microscope |
| 06/24/2004 | WO2004052489A2 Methods for assembly and sorting of nanostructure-containing materials and related articles |
| 06/24/2004 | US20040120862 in particular for preparing a microtome or ultramicrotome, a specimen that is to examined in an AFM. |
| 06/24/2004 | US20040119022 Charged particle beam apparatus and charged particle beam irradiation method |
| 06/24/2004 | US20040118192 Fluid delivery for scanning probe microscopy |
| 06/24/2004 | DE10258104A1 Preparation holder for a microtome or ultra-microtome, especially for use in atomic force microscopy, has an insert with a holding ring with which the preparation is inserted and removed from a base body |
| 06/24/2004 | CA2507056A1 Humidified imaging with an environmental scanning electron microscope |
| 06/23/2004 | EP1432006A2 Energy filter and electron microscope |
| 06/22/2004 | US6753533 Electron beam apparatus and method of controlling same |
| 06/22/2004 | US6753525 Materials analysis using backscatter electron emissions |
| 06/22/2004 | US6753524 Inspection system and inspection process for wafer with circuit using charged-particle beam |
| 06/22/2004 | US6753518 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus |
| 06/22/2004 | US6753194 Surface contamination analyzer for semiconductor wafers, method used therein and process for fabricating semiconductor device |
| 06/17/2004 | US20040116034 Method of manufacturing an electronic device containing a carbon nanotube |
| 06/17/2004 | US20040113074 Scanning electron microscope |
| 06/16/2004 | EP1427983A2 Multiple plate tip or sample scanning reconfigurable scanned probe microscope with transparent interfacing of far-field optical microscopes |
| 06/15/2004 | US6748794 Method for replacing a probe sensor assembly on a scanning probe microscope |
| 06/10/2004 | US20040108864 Method of measuring electrical capacitance |
| 06/10/2004 | US20040108459 Electron microscope, method for operating the same, and computer-readable medium |
| 06/10/2004 | US20040108457 Electron microscopy system |
| 06/09/2004 | EP1269112B1 Thickness measurement using an atomic force microscope |
| 06/08/2004 | US6746566 Transverse magnetic field voltage isolator |
| 06/08/2004 | US6746144 Scanning tunneling microscope light emitting/condensing device |
| 06/03/2004 | US20040106862 Electron beam apparatus, and inspection instrument and inspection process thereof |
| 06/03/2004 | US20040105973 Ultrasensitive non-isotopic water-soluble nanocrystals |
| 06/01/2004 | US6744057 Convergent charged particle beam apparatus and inspection method using same |
| 06/01/2004 | US6743645 Method of inspecting process for manufacturing semiconductor device and method of manufacturing semiconductor device |
| 05/27/2004 | WO2004044943A2 Retarding electron beams in multiple electron beam pattern generation |
| 05/27/2004 | WO2004015455A9 Improved method and system for scanning apertureless fluorescence microscope |
| 05/27/2004 | WO2003067632B1 Multi-detector microscopic inspection system |
| 05/27/2004 | WO2003028065A3 Electrostatic manipulating apparatus |
| 05/27/2004 | US20040101469 Apparatus, materials, and methods for fabrication and catalysis |
| 05/27/2004 | US20040099805 Electron microscope including apparatus for x-ray analysis and method of analyzing specimens using same |
| 05/26/2004 | EP1421025A1 Substituted donor atoms in silicon crystal for quantum computer |
| 05/25/2004 | US6740889 Charged particle beam microscope with minicolumn |
| 05/25/2004 | US6740888 Electron beam apparatus |
| 05/25/2004 | US6740877 Scanning electron microscope and sample observation method using the same |
| 05/25/2004 | US6740876 Scanning probe microscope |
| 05/20/2004 | US20040094714 Method of determining lattice constant, method of evaluating material by using the same and electronic microscope suitable for using the same |
| 05/20/2004 | US20040094713 Scanning electron microscope |
| 05/19/2004 | CN2616899Y Microsize probe head |
| 05/18/2004 | US6738338 Near-field optical head, method of fabricating same, and optical drive using same |
| 05/18/2004 | US6737647 Array for achromatic imaging of a pulsed particle beam |
| 05/18/2004 | US6737646 Enhanced scanning probe microscope and nanolithographic methods using the same |
| 05/13/2004 | WO2004040614A2 Electron beam exposure system |
| 05/13/2004 | WO2004006302A3 Software synchronization of multiple scanning probes |
| 05/13/2004 | US20040091611 Apparatus for patterning recording media |
| 05/13/2004 | US20040090194 Retarding electron beams in multiple electron beam pattern generation |
| 05/13/2004 | US20040089821 Method and apparatus for specimen fabrication |
| 05/13/2004 | US20040089816 Method and system for scanning apertureless fluorescence microscope |
| 05/13/2004 | US20040089805 Scanning electron microscope |
| 05/13/2004 | US20040089410 Bulk synthesis of long nanotubes of transition metal chalcogenides |
| 05/13/2004 | US20040089059 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope |
| 05/13/2004 | DE202004003161U1 Scanning probe microscope used e.g. as scanning tunnel microscope comprises a tip which moves using piezo elements, and a ceramic or glass ceramic holder for the elements |
| 05/12/2004 | EP1417448A1 Scanning interferometry with reference signal |
| 05/11/2004 | US6735163 Ultra-high density storage device with resonant scanning micromover |
| 05/11/2004 | US6734598 Microactuator |
| 05/11/2004 | US6734438 Scanning probe microscope and solenoid driven cantilever assembly |
| 05/11/2004 | US6734437 System and method for electron beam irradiation |
| 05/11/2004 | US6734429 Electron microscope charge-up prevention method and electron microscope |
| 05/11/2004 | US6734428 Multi-beam multi-column electron beam inspection system |
| 05/11/2004 | US6734426 Probe scanning device |
| 05/11/2004 | US6734425 Scanning probe system with spring probe and actuation/sensing structure |
| 05/06/2004 | WO2004038762A2 Nanomotion sensing system and method |
| 05/06/2004 | WO2004038504A2 Nanometer-scale engineered structures, methods and apparatus for fabrication thereof, and applications to mask repair, enhancement, and fabrication |
| 05/06/2004 | WO2003053845A3 Chemical functionalization nanolithography |
| 05/06/2004 | US20040086883 Method and device for characterising and/or for detecting a bonding complex |
| 05/06/2004 | US20040084737 SPM cantilever and fabricating method thereof |
| 05/06/2004 | US20040084628 Electron beam apparatus and method of controlling same |
| 05/06/2004 | US20040084618 Scanning probe with digitised pulsed-force mode operation and real-time evaluation |
| 05/06/2004 | US20040083799 Environmental scanning probe microscope |
| 05/04/2004 | US6730908 Method for charging a structure comprising an insulating body |
| 05/04/2004 | US6730907 Charged particle device |