| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 09/30/2004 | WO2003101278A3 Device and method of use for detection and characterization of pathogens and biological materials |
| 09/30/2004 | US20040188635 Electron beam apparatus with aberration corrector |
| 09/30/2004 | US20040188612 Scanning electron microscope |
| 09/30/2004 | US20040188611 Scanning electron microscope and sample observing method using it |
| 09/30/2004 | US20040188602 Photothermal imaging scanning microscopy |
| 09/28/2004 | US6798513 Measuring module |
| 09/28/2004 | US6797965 Charged particle beam apparatus, pattern measuring method, and pattern drawing method |
| 09/28/2004 | US6797955 Filtered e-beam inspection and review |
| 09/28/2004 | US6797954 Patterned wafer inspection method and apparatus therefor |
| 09/28/2004 | US6797953 Electron beam system using multiple electron beams |
| 09/23/2004 | US20040185586 Preparation of sample chip, method of observing wall surface thereof and system therefor |
| 09/23/2004 | US20040183016 Scanning electron microscope and sample observation method using the same |
| 09/23/2004 | US20040183014 Scanning electron microscope |
| 09/23/2004 | US20040183011 Energy spectrum measuring apparatus, electron energy loss spectrometer, electron microscope provided therewith, and electron energy loss spectrum measuring method |
| 09/22/2004 | EP1460410A1 Delay time modulation femtosecond time-resolved scanning probe microscope apparatus |
| 09/22/2004 | CN1531648A Method for inspecting electrode surface quality |
| 09/21/2004 | US6794663 Method and apparatus for specimen fabrication |
| 09/16/2004 | WO2004040614A3 Electron beam exposure system |
| 09/16/2004 | US20040179096 Imaging system using theta-theta coordinate stage and continuous image rotation to compensate for stage rotation |
| 09/15/2004 | CN2641639Y Sample pool of growth of protein crystal by liquid-liquid diffusion method of atomic force microscope |
| 09/15/2004 | CN2641638Y Growth sample pool for protein crystal of atomic force microscope |
| 09/15/2004 | CN1167079C Electron beam illuminating device |
| 09/14/2004 | US6791097 Adjustable conductance limiting aperture for ion implanters |
| 09/10/2004 | WO2004077082A1 Electron-beam ic tester |
| 09/09/2004 | US20040175631 Nanometer-scale engineered structures, methods and apparatus for fabrication thereof, and applications to mask repair, enhancement, and fabrications |
| 09/09/2004 | US20040174521 Raman imaging and sensing apparatus employing nanoantennas |
| 09/09/2004 | US20040173745 Defect evaluation apparatus utilizing positrons |
| 09/09/2004 | US20040173378 Methods for assembly and sorting of nanostructure-containing materials and related articles |
| 09/08/2004 | EP1455379A2 Apparatus and method for examining specimen with a charged particle beam |
| 09/07/2004 | US6788993 Sorting a group of integrated circuit devices for those devices requiring special testing |
| 09/07/2004 | US6788086 Scanning probe system with spring probe |
| 09/07/2004 | US6787772 Scanning electron microscope |
| 09/07/2004 | US6787770 Method of inspecting holes using charged-particle beam |
| 09/02/2004 | WO2004074816A1 Scanning probe microscope and sample observing method using this and semiconductor device production method |
| 09/02/2004 | WO2004074766A1 Investigation and/or manipulation device |
| 09/02/2004 | US20040172152 Sorting a group of integrated circuit devices for those devices requiring special testing |
| 09/02/2004 | US20040170870 Precise surface design |
| 09/02/2004 | US20040169140 Charged particle beam device for inspecting or structuring a specimen |
| 09/01/2004 | EP1453077A2 Scanning electron microscope and sample observing method |
| 09/01/2004 | EP1451848A1 Device for reducing the impact of distortions in a microscope |
| 09/01/2004 | EP1451847A1 Optical particle corrector |
| 09/01/2004 | EP0650067B1 Electrooptic instrument |
| 08/31/2004 | US6785615 Method and structure for detection of electromechanical problems using variance statistics in an E-beam lithography device |
| 08/31/2004 | US6784426 Electron beam irradiation apparatus, electron beam exposure apparatus, and defect detection method |
| 08/31/2004 | US6784425 Energy filter multiplexing |
| 08/26/2004 | WO2004053920A8 Humidified imaging with an environmental scanning electron microscope |
| 08/26/2004 | WO2004044943A3 Retarding electron beams in multiple electron beam pattern generation |
| 08/26/2004 | US20040164244 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 08/26/2004 | US20040164243 Shape measurement method and apparatus |
| 08/25/2004 | EP1350259B1 Sem provided with a secondary electron detector having a central electrode |
| 08/24/2004 | US6781126 Auger-based thin film metrology |
| 08/24/2004 | US6781125 Method and apparatus for processing a micro sample |
| 08/24/2004 | US6781124 Particle detectors |
| 08/24/2004 | US6781123 Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus |
| 08/24/2004 | US6780513 Tracking stability; friction resistance; forming lubricant layer |
| 08/24/2004 | US6779387 Method and apparatus for the ultrasonic actuation of the cantilever of a probe-based instrument |
| 08/19/2004 | WO2003038147A3 High resolution patterning method |
| 08/18/2004 | EP1446676A2 Spot grid array electron beam imaging system |
| 08/17/2004 | US6777678 Sample-stage for scanning electron microscope |
| 08/17/2004 | US6777677 Method of inspecting pattern and inspecting instrument |
| 08/17/2004 | US6777676 X-ray scanning |
| 08/17/2004 | US6777675 Detector optics for electron beam inspection system |
| 08/17/2004 | US6777674 Method for manipulating microscopic particles and analyzing |
| 08/17/2004 | US6777656 Near-field spectrometer having background spectral information |
| 08/17/2004 | US6776031 Submerged sample observation apparatus and method |
| 08/12/2004 | WO2004067162A2 Apparatus for microfluidic processing and reading of biochip arrays |
| 08/12/2004 | US20040155200 Optical particle corrector |
| 08/12/2004 | US20040155185 Method of preventing charging, and apparatus for charged particle beam using the same |
| 08/12/2004 | US20040154744 Method and system for surface or cross-sectional processing and observation |
| 08/12/2004 | US20040154367 Apparatus for forming optical aperture |
| 08/10/2004 | US6775009 Differential interferometric scanning near-field confocal microscopy |
| 08/10/2004 | US6774364 Electron microscope, method for operating the same, and computer-readable medium |
| 08/10/2004 | US6774363 Method of preventing charging, and apparatus for charged particle beam using the same |
| 08/10/2004 | US6774361 Bar codes; calibration particle size distribution to specta emission |
| 08/10/2004 | US6773764 Selectively thermally couples a recording medium and a heat source to alter a chemical composition of the recording medium. an apparatus for patterning a recording medium has a heat source for generating and directing an incident thermal |
| 08/05/2004 | US20040149906 Method and apparatus for reducing substrate edge effects in electron lenses |
| 08/04/2004 | EP1443337A2 Electro-optic measuring instrument |
| 08/04/2004 | CN1518049A Electronic microscope |
| 08/03/2004 | US6770889 Method of controlling electrostatic lens and ion implantation apparatus |
| 08/03/2004 | US6770879 Motion picture output from electron microscope |
| 07/29/2004 | WO2004064097A2 Charged particle beam device for inspecting or structuring a specimen |
| 07/29/2004 | WO2004063723A1 Scanning type probe microscope, and method of observing changes in molecular structure |
| 07/29/2004 | WO2004062824A1 Method and apparatus for cleaning an analytical instrument while operating the analytical instrument |
| 07/29/2004 | WO2004027809A3 Charged particle beam system |
| 07/29/2004 | US20040145824 Flying height measurement method and system |
| 07/29/2004 | US20040144928 Inspection device using scanning electron microscope |
| 07/29/2004 | US20040144922 Electron microscope |
| 07/29/2004 | US20040144920 Energy filter and electron microscope |
| 07/28/2004 | CN1159749C Method for controlling electrostatic lens and ion implantation device |
| 07/27/2004 | US6768117 Immersion lens with magnetic shield for charged particle beam system |
| 07/27/2004 | US6768114 Electron microscope, method for operating the same, and computer-readable medium |
| 07/27/2004 | CA2206437C Method of determining remaining life of a power transmission belt |
| 07/22/2004 | US20040142409 Motion sensor for monitoring migration, vibrational movement, oscillations and fluctuation in semen, ear cilia, bacteria and kinesins |
| 07/22/2004 | US20040141169 Electron beam exposure system |
| 07/22/2004 | US20040140426 Scanning probe microscope with improved probe head mount |
| 07/22/2004 | US20040140424 Scanning probe microscope with improved probe tip mount |
| 07/22/2004 | DE10029444B4 Optische Anordnung Optical arrangement |
| 07/21/2004 | EP1439564A1 Charged particle beam device for inspecting or structuring a specimen |
| 07/20/2004 | US6765205 Electron microscope including apparatus for X-ray analysis and method of analyzing specimens using same |
| 07/20/2004 | US6765204 Microstructured pattern inspection method |