| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
|---|
| 04/06/2005 | EP1274966B1 Resonant probe driving arrangement and scanning probe microscope |
| 04/06/2005 | CN1196197C Data storage medium based on diode, cathodic conductivity and cathodic luminescence |
| 04/05/2005 | US6875981 Scanning atom probe and analysis method utilizing scanning atom probe |
| 03/31/2005 | US20050068052 Alternating pulse dual-beam apparatus, methods and systems for voltage contrast behavior assessment of microcircuits |
| 03/31/2005 | US20050066713 Method to transiently detect samples in atomic force microscopes |
| 03/31/2005 | DE10339745A1 Impurity removal from the end of a scanning probe, e.g. of a scanning force microscope, whereby the probe end is heated directly or indirectly until the impurities are vaporized |
| 03/31/2005 | DE10226801B4 Oberflächenmessvorrichtung und Verfahren zur mechanischen sowie berührungslosen-optischen Untersuchung von Objektoberflächen Surface measuring apparatus and methods for mechanical and non-contact optical investigation of object surfaces |
| 03/30/2005 | EP1518837A1 Hydrophilic, anti-fogging, and anti-staining thin film and method for preparation thereof |
| 03/30/2005 | CN1602430A Spot grid array electron imaging system |
| 03/29/2005 | US6872958 Platform positioning system |
| 03/29/2005 | US6872944 Scanning electron microscope |
| 03/29/2005 | US6871527 Measurement head for atomic force microscopy and other applications |
| 03/24/2005 | WO2004064097A3 Charged particle beam device for inspecting or structuring a specimen |
| 03/24/2005 | WO2004005844A3 Scanning probe microscope |
| 03/24/2005 | US20050061975 Electron microscope observation system and observation method |
| 03/23/2005 | EP1352411B1 Adjustable conductance limiting aperture for ion implanters |
| 03/22/2005 | US6870169 Method and apparatus for analyzing composition of defects |
| 03/22/2005 | US6869807 Method and its apparatus for manufacturing semiconductor device |
| 03/16/2005 | EP1515193A2 Color toner |
| 03/16/2005 | EP1513957A2 Nucleic acid sequencing by signal stretching and data integration |
| 03/16/2005 | EP1513954A2 Device and method of use for detection and characterization of pathogens and biological materials |
| 03/16/2005 | CN1595302A Color toner |
| 03/15/2005 | US6867606 Multiple directional scans of test structures on semiconductor integrated circuits |
| 03/15/2005 | US6867407 Light probe microscope including picture signal processing means |
| 03/10/2005 | WO2005022124A1 Scanning type probe microscope and probe moving control method therefor |
| 03/10/2005 | WO2005020803A2 Raman imaging and sensing apparatus employing nanoantennas |
| 03/10/2005 | WO2004015455A3 Improved method and system for scanning apertureless fluorescence microscope |
| 03/08/2005 | US6864488 Charged particle beam exposure method and apparatus |
| 03/08/2005 | US6864483 Method for increasing the measurement information available from a transmission electron microscope and a transmission electron microscopy device |
| 03/08/2005 | US6864482 Electron beam apparatus |
| 03/08/2005 | US6864481 Probe for scanning probe microscope |
| 03/08/2005 | US6864479 High dynamic range mass spectrometer |
| 03/08/2005 | US6862924 Augmenting reality system for real-time nanomanipulation using atomic force microscopy |
| 03/08/2005 | US6862921 Method and apparatus for manipulating a sample |
| 03/03/2005 | US20050045832 Non-dispersive charged particle energy analyzer |
| 03/03/2005 | US20050045820 Absorption current image apparatus in electron microscope |
| 03/02/2005 | EP1511066A2 Absorption current image apparatus in electron microscope |
| 03/02/2005 | EP1510806A1 Three-dimensional structural body composed of silicon fine wire, its manufacturing method, and device using same |
| 03/02/2005 | CN1587978A Oxygen environment scan electronic microscopic method and system |
| 03/01/2005 | US6862142 Multi-detector microscopic inspection system |
| 03/01/2005 | US6861651 Electron-optical corrector for eliminating third-order aberations |
| 03/01/2005 | US6861648 Scanning probe microscopy inspection and modification system |
| 02/24/2005 | US20050043917 Image reconstruction method |
| 02/24/2005 | US20050040343 Electron beam writing equipment and electron beam writing method |
| 02/24/2005 | US20050039523 Optical microcantilever, manufacturing method thereof, and optical microcantilever holder |
| 02/24/2005 | DE10332451A1 Semiconductor substrate surface height profile measurement procedure uses scanning force microscope with high sample density and slower speed in channels and structures |
| 02/22/2005 | US6859760 Remote semiconductor microscopy |
| 02/22/2005 | US6858845 Scanning electron microscope |
| 02/22/2005 | US6858844 Method for detecting geometrical-optical aberrations |
| 02/22/2005 | US6858843 Immersion objective lens for e-beam inspection |
| 02/22/2005 | US6858436 Using spectrum analysis and chromatography to monitor, detect and resolve objects smaller than those visible to the eye |
| 02/17/2005 | US20050037150 Leading a graphite rod into plasma flame so some carbon is evaporated, and influenced by a flow of carrier gas to be deposited or stacked on the surface of the graphite rod; useful as field emission electron sources such as atomic force microscope (AFM) |
| 02/17/2005 | US20050035288 Delay time modulation femtosecond time-resolved scanning probe microscope apparatus |
| 02/15/2005 | US6855974 Ferroelectric capacitor, process for production thereof and semiconductor device using the same |
| 02/15/2005 | US6855931 Scanning electron microscope and sample observation method using the same |
| 02/15/2005 | US6855929 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former |
| 02/15/2005 | US6855928 Analysis of semiconductor surfaces by secondary ion mass spectrometry and methods |
| 02/15/2005 | US6855926 Instrument and method for combined surface topography and spectroscopic analysis |
| 02/10/2005 | US20050030054 Electrical scanning probe microscope apparatus |
| 02/10/2005 | US20050029450 Sensing mode atomic force microscope |
| 02/10/2005 | DE10217507B4 Anordnung zur Abbildung des von einer Probe gepulst emittierten Teilchenensembles auf einem Detektor Arrangement for imaging the pulsed light emitted from a sample Teilchenensembles on a detector |
| 02/09/2005 | EP1505448A1 Toner |
| 02/08/2005 | US6852969 Atmospheric pressure, glow discharge, optical emission source for the direct sampling of liquid media |
| 02/08/2005 | US6852968 Surface-type optical apparatus |
| 02/03/2005 | WO2005010502A1 Probe replacing method for scanning probe microscope |
| 02/03/2005 | US20050026065 Mixture of toner, binder and magnetic material |
| 02/03/2005 | US20050023462 Tailoring domain engineered structures in ferroelectric materials |
| 01/27/2005 | US20050017172 Micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate |
| 01/27/2005 | US20050017150 Device for fixing a measuring probe for a raster scanning probe microscope |
| 01/25/2005 | US6847907 Defect detection and repair of micro-electro-mechanical systems (MEMS) devices |
| 01/25/2005 | US6847038 Scanning electron microscope |
| 01/25/2005 | US6846742 Si seasoning to reduce particles, extend clean frequency, block mobile ions and increase chamber throughput |
| 01/20/2005 | US20050012936 Scanning probe microscope and measurement method using the same |
| 01/20/2005 | US20050012512 Focused ion beam endpoint detection using charge pulse detection electronics |
| 01/18/2005 | US6844551 Method of determining lattice constant, method of evaluating material by using the same and electronic microscope suitable for using the same |
| 01/18/2005 | US6844550 Multi-beam multi-column electron beam inspection system |
| 01/18/2005 | US6844549 Electron beam length-measurement apparatus and measurement method |
| 01/13/2005 | WO2005003911A2 Optical metrology of structures formed on semiconductor wafers using machine learning systems |
| 01/13/2005 | US20050006604 Charged particle beam control element, method of fabricating charged particle beam control element, and charged particle beam apparatus |
| 01/13/2005 | US20050006600 Method and apparatus for specimen fabrication |
| 01/13/2005 | US20050006583 Method of inspecting pattern and inspecting instrument |
| 01/13/2005 | US20050006582 Electron microscopy system, electron microscopy method and focusing system for charged particles |
| 01/11/2005 | US6841777 Electron diffraction system for use in production environment and for high pressure deposition techniques |
| 01/11/2005 | US6841776 Method and apparatus for high-speed inspection and review |
| 01/11/2005 | US6841775 Electron microscope |
| 01/11/2005 | US6841142 Heating a transition metal material in the presence of water vapor in a vacuum apparatus or electron beam evaporating to obtain nanoparticles of the transition metal oxide as long as 0.3 microns |
| 01/06/2005 | WO2005001459A2 Micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate |
| 01/06/2005 | US20050001178 Multi-column charged particle optics assembly |
| 01/06/2005 | US20050001165 Detector optics for charged particle beam inspection system |
| 01/06/2005 | US20050001164 Method and apparatus for processing a micro sample |
| 01/04/2005 | US6838675 Specimen observation system for applying external magnetic field |
| 01/04/2005 | US6838668 System for imaging a cross-section of a substrate |
| 01/04/2005 | US6838667 Method and apparatus for charged particle beam microscopy |
| 12/30/2004 | US20040267397 Optical metrology of structures formed on semiconductor wafer using machine learning systems |
| 12/29/2004 | WO2004113833A1 3-d shape measuring unit, processing unit, and production method for semiconductor device |
| 12/29/2004 | WO2004097890A3 Objective lens arrangement for use in a charged particle beam column |
| 12/29/2004 | CN1558424A Gold thin film substrate making method for scanning probe microscope |
| 12/28/2004 | US6836373 Spherical aberration corrector for electron microscope |
| 12/28/2004 | US6835925 Signal detector and probe microscope using the same |
| 12/28/2004 | US6835534 Chemical functionalization nanolithography |