| Patents for G01Q 30 - Auxiliary means serving to assist or improve the scanning probe techniques or apparatus, e.g. display or data processing devices (4,691) |
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| 07/26/2005 | US6921578 Low-reflection glass article |
| 07/20/2005 | EP1555676A2 Method of operating a probe microscope |
| 07/19/2005 | US6920088 Assembly for writing and/or erasing high density data on a media |
| 07/19/2005 | US6919577 Electron beam exposure or system inspection or measurement apparatus and its method and height detection apparatus |
| 07/19/2005 | US6919564 Inspection method, apparatus and system for circuit pattern |
| 07/19/2005 | US6919563 Defect evaluation apparatus utilizing positrons |
| 07/14/2005 | WO2004095500A3 Vacuum chamber with recessed viewing tube and imaging device situated therein |
| 07/14/2005 | US20050151077 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope |
| 07/13/2005 | EP1552531A1 Model-based fusion of scanning probe microscopic images for detection and identification of molecular structures |
| 07/12/2005 | US6917043 Individually addressable cathodes with integrated focusing stack or detectors |
| 07/07/2005 | WO2005020803A3 Raman imaging and sensing apparatus employing nanoantennas |
| 07/07/2005 | US20050146046 Method for making probes for atomic force microscopy |
| 07/07/2005 | US20050145788 High dynamic range mass spectrometer |
| 07/07/2005 | US20050145021 Method and apparatus for manipulating a sample |
| 07/05/2005 | US6914441 Detection of defects in patterned substrates |
| 06/30/2005 | WO2005003911A3 Optical metrology of structures formed on semiconductor wafers using machine learning systems |
| 06/30/2005 | WO2004102601A3 Nanopost welder and method |
| 06/30/2005 | WO2002009836A3 Methods for solid phase nanoextraction and desorption |
| 06/30/2005 | US20050139781 Defective product inspection apparatus, probe positioning method and probe moving method |
| 06/30/2005 | US20050139773 Scanning electron microscope |
| 06/30/2005 | US20050139767 Multiple directional scans of test structures on semiconductor integrated circuits |
| 06/30/2005 | DE10053034B4 SQUID-Mikroskop SQUID microscope |
| 06/29/2005 | EP1548748A1 A method for making probes for atomic force microscopy |
| 06/28/2005 | US6911832 Focused ion beam endpoint detection using charge pulse detection electronics |
| 06/28/2005 | US6910368 Removable probe sensor assembly and scanning probe microscope |
| 06/23/2005 | US20050133719 Scanning electron microscope |
| 06/23/2005 | US20050133717 Method for manufacturing a split probe |
| 06/22/2005 | EP1543155A2 Methods and compositions for analyzing polymers using chimeric tags |
| 06/22/2005 | EP1086981B1 Gas-barrier films |
| 06/21/2005 | US6909092 Electron beam apparatus and device manufacturing method using same |
| 06/16/2005 | WO2005055245A1 High sensitivity scanning probe system |
| 06/16/2005 | US20050127926 Method using conductive atomic force microscopy to measure contact leakage current |
| 06/16/2005 | DE10332451B4 Verfahren und Vorrichtung zum Bestimmen eines Höhenprofils auf einer Substratoberfläche Method and apparatus for determining a height profile of a substrate surface |
| 06/15/2005 | EP1540693A2 Charged particle beam system |
| 06/15/2005 | EP1540692A2 Particle-optical device and detection means |
| 06/15/2005 | EP1540661A1 Sensor with cantilever and optical resonator |
| 06/15/2005 | EP1540270A2 Scanning probe microscope |
| 06/15/2005 | EP1539637A2 Fluid delivery for scanning probe microscopy |
| 06/15/2005 | CN1628246A Auger-based thin film metrology |
| 06/15/2005 | CN1206261C Gas-barrier films |
| 06/14/2005 | US6906538 Alternating pulse dual-beam apparatus, methods and systems for voltage contrast behavior assessment of microcircuits |
| 06/14/2005 | US6906450 Resonant probe driving arrangement and a scanning probe microscope including such an arrangement |
| 06/14/2005 | US6904791 Scanning probe microscope |
| 06/09/2005 | US20050121611 Apparatus for inspection with electron beam, method for operating same, and method for manufacturing semiconductor device using former |
| 06/09/2005 | US20050121597 XY platform device with nanoscale precision |
| 06/08/2005 | CN1205113C Single molecular array on silicon substrate for quantum computer, its preparation method and quantum computer using the substrate |
| 06/07/2005 | US6903821 Inspection method, apparatus and system for circuit pattern |
| 06/07/2005 | US6903348 Wafer holding apparatus for ion implanting system |
| 06/07/2005 | US6903338 Automated electron-beam inspection systems for semiconductor manufacturing |
| 06/02/2005 | US20050117163 High sensitivity scanning probe system |
| 06/01/2005 | EP1535300A2 Improved method and system for scanning apertureless fluorescence microscope |
| 05/31/2005 | US6900575 Multiple mechanical resonator parametric device |
| 05/31/2005 | US6900443 Charged particle beam device for inspecting or structuring a specimen |
| 05/31/2005 | US6900435 Deconvolving far-field images using scanned probe data |
| 05/31/2005 | US6899943 Glass substrate for magnetic disk and method for manufacturing |
| 05/26/2005 | US20050112505 Direct write nano lithography; atomic force microscope discharges precursor fluid onto target surface in preferred orientation |
| 05/26/2005 | US20050109937 Scanning electron microscope |
| 05/24/2005 | US6897458 Electron beam exposure system |
| 05/24/2005 | US6897445 Scanning electron microscope |
| 05/24/2005 | US6897444 Multi-pixel electron emission die-to-die inspection |
| 05/24/2005 | US6897443 Portable scanning electron microscope |
| 05/24/2005 | US6897442 Objective lens arrangement for use in a charged particle beam column |
| 05/24/2005 | US6897441 Reducing chromatic aberration in images formed by emmission electrons |
| 05/24/2005 | US6897015 Detecting target parasite in sample; provide substrate with a surface, deposit gold layer on surface, incubate with sample, image surface under microscope |
| 05/19/2005 | WO2004053928A3 Methods of measuring integrated circuit structure and preparation thereof |
| 05/17/2005 | US6894790 Micropattern shape measuring system and method |
| 05/17/2005 | US6894277 Scanning electron microscope |
| 05/17/2005 | US6893986 Method of reducing internal stress in materials |
| 05/12/2005 | WO2005043215A1 Specimen observation method and microscope, and, for use therein, solid immersion lens and optical contact liquid |
| 05/12/2005 | WO2004099712A3 Nanomanipulation on a sample surface using atomic force microscopy |
| 05/12/2005 | US20050097944 Software synchronization of multiple scanning probes |
| 05/10/2005 | US6891159 Converting scanning electron microscopes |
| 05/06/2005 | WO2004038762A3 Nanomotion sensing system and method |
| 05/05/2005 | US20050092907 Oscillating scanning probe microscope |
| 05/03/2005 | US6888145 Optical particle corrector |
| 05/03/2005 | US6888138 Absorption current image apparatus in electron microscope |
| 05/03/2005 | US6888137 Instrument and method for observing selected stored images acquired from a scanning charged-particle beam |
| 04/28/2005 | US20050087749 Electroluminescent multilayer optical information storage medium with integrated readout and composition of matter for use therein |
| 04/27/2005 | CN1609720A 调色剂 Toner |
| 04/26/2005 | US6885012 Convergent charged particle beam apparatus and inspection method using same |
| 04/26/2005 | US6885001 Scanning electron microscope |
| 04/26/2005 | US6885000 Method and apparatus to correct for stage motion in E-beam inspection |
| 04/26/2005 | CA2148703C Industrial material processing electron linear accelerator |
| 04/21/2005 | US20050084620 Method for applying a layer containing at least polymeric material |
| 04/21/2005 | US20050082476 Electron beam inspection method and apparatus and semiconductor manufacturing method and its manufacturing line utilizing the same |
| 04/21/2005 | US20050082475 Methods for preparing samples for atom probe analysis |
| 04/21/2005 | US20050081608 System and method for the analysis of atomic force microscopy data |
| 04/20/2005 | EP1523652A1 Method for locally highly resolved, mass-spectroscopic characterisation of surfaces using scanning probe technology |
| 04/20/2005 | CN1608030A Sharp end, multi-layer carbon nano-tube radial aggregate and method of manufacturing the aggregate |
| 04/19/2005 | US6880389 Software synchronization of multiple scanning probes |
| 04/14/2005 | US20050079429 Color toner |
| 04/14/2005 | US20050077460 High capacity and scanning speed system for sample handling and analysis |
| 04/12/2005 | US6879152 Evaluation system and method of measuring a quantitative magnetic field of a magnetic material |
| 04/12/2005 | US6878937 Prism array for electron beam inspection and defect review |
| 04/12/2005 | US6878936 Applications operating with beams of charged particles |
| 04/12/2005 | US6878935 Method of measuring sizes in scan microscopes |
| 04/12/2005 | US6877365 Scanning probe microscope and specimen observation method and semiconductor device manufacturing method using said scanning probe microscope |
| 04/07/2005 | WO2005001459A3 Micromachined probe apparatus and methods for making and using same to characterize liquid in a fluidic channel and map embedded charge in a sample on a substrate |
| 04/07/2005 | US20050074973 Method of fabricating a surface-type optical apparatus |
| 04/06/2005 | EP1520292A2 Software synchronization of multiple scanning probes |